{ "schema": "semiagora.ale-cycle-public-manifest.v1", "version": "2026-08-29-packet-v1", "packetVersion": "2026-08-29-ale-v1", "experimentId": "SA-PROC-ETCH-ALE-015", "generatedAt": "2026-08-29T00:00:00+09:00", "status": "packet-only-not-deployed", "counts": { "rows": 6912, "physicalRows": 3456, "evidencePairs": 3456, "columns": 192, "normalizedProxyEquations": 20, "exactIntegerLedgers": 3, "prohibitedZeroFields": 112, "sources": 20, "claimNodes": 16 }, "axes": [ { "id": "application_family", "count": 4, "values": [ "logic_recess_like", "dielectric_trim_like", "three_dimensional_memory_like", "interconnect_selective_like" ], "meaning": "Teaching application archetype without customer, node, named material stack, feature dimension, tool, recipe, or qualified process." }, { "id": "ale_mode", "count": 3, "values": [ "directional_plasma_ale_like", "isotropic_thermal_ale_like", "hybrid_ale_like" ], "meaning": "Ordinal modification and removal context without chemistry, temperature, pressure, plasma setting, cycle timing, geometry, or equipment command." }, { "id": "modification_state", "count": 3, "values": [ "under_modified_like", "nominal_modification_like", "extended_modification_like" ], "meaning": "Normalized surface-modification opportunity without reactant identity, dose, pulse, flux, duration, calibration, or physical saturation." }, { "id": "removal_state", "count": 3, "values": [ "under_removal_like", "nominal_removal_like", "extended_removal_like" ], "meaning": "Normalized modified-layer removal opportunity without reactant identity, ion energy, dose, temperature, time, calibration, or physical threshold." }, { "id": "separation_state", "count": 2, "values": [ "weak_separation_like", "strong_separation_like" ], "meaning": "Normalized temporal or spatial separation context without purge time, flow, pressure, zone geometry, residual concentration, or command." }, { "id": "feature_access_state", "count": 2, "values": [ "open_access_like", "constrained_access_like" ], "meaning": "Ordinal feature-entry context without geometry, aspect ratio, pitch, profile, transport coefficient, surface coefficient, or solver output." }, { "id": "ordered_state", "count": 8, "values": [ "E00", "E01", "E02", "E03", "E04", "E05", "E06", "E07" ], "meaning": "Ordered ALE-cycle teaching replay state; not time, duration, pulse, purge, equipment sequence, etch per cycle, endpoint, or physical process state." }, { "id": "evidence_posture", "count": 2, "values": [ "teaching_assumption", "replacement_slot" ], "meaning": "Evidence metadata only; it cannot change physical keys, coefficients, tokens, proxies, regimes, gates, labels, or serialization." } ], "ranges": { "ordered_state_norm": { "min": 0, "max": 1 }, "modification_delivery_stability_proxy": { "min": 0.2633232, "max": 0.826804 }, "surface_modification_opportunity_proxy": { "min": 0.454170808, "max": 0.866914 }, "modification_completeness_proxy": { "min": 0.446620978, "max": 0.88771293 }, "modification_excess_burden_proxy": { "min": 0.051405163, "max": 0.593342033 }, "first_separation_clearance_proxy": { "min": 0.208511165, "max": 0.866680606 }, "modification_carryover_risk_proxy": { "min": 0.048249058, "max": 0.593821767 }, "removal_activation_proxy": { "min": 0.179231264, "max": 0.779004533 }, "modified_layer_removal_completeness_proxy": { "min": 0.310945649, "max": 0.890059665 }, "unmodified_material_loss_burden_proxy": { "min": 0.002962893, "max": 0.474910329 }, "byproduct_clearance_proxy": { "min": 0.168922391, "max": 0.851835565 }, "second_separation_carryover_risk_proxy": { "min": 0.062382788, "max": 0.724503208 }, "synergy_proxy": { "min": 0.279019665, "max": 0.85020845 }, "self_limitation_proxy": { "min": 0.3921608, "max": 0.818259504 }, "selectivity_readiness_proxy": { "min": 0.179785234, "max": 0.82319262 }, "feature_entry_proxy": { "min": 0.13668318, "max": 0.723616006 }, "profile_fidelity_proxy": { "min": 0.293698845, "max": 0.758792179 }, "roughness_control_proxy": { "min": 0.139026095, "max": 0.718864952 }, "cycle_drift_burden_proxy": { "min": 0.157056015, "max": 0.563544447 }, "throughput_readiness_proxy": { "min": 0.068458578, "max": 0.363488847 } }, "distributions": { "aleRegime": { "separation-limited": 2412, "modification-starved": 2016, "removal-incomplete": 336, "bounded-ale": 1308, "cycle-integrity-limited": 734, "synergy-limited": 14, "modification-nonsaturating": 72, "selectivity-limited": 20 }, "operatorGate": { "review-modification-delivery": 2304, "review-separation": 2304, "review-removal": 568, "bounded-cycle-trace-ready": 1716, "review-cycle-stability": 18, "review-plasma-exposure": 2 }, "processEngineerGate": { "review-separation": 2376, "review-modification": 2160, "review-removal": 734, "review-throughput": 840, "review-feature-integrity": 580, "bounded-comparison-ready": 176, "review-synergy": 10, "review-selectivity": 36 }, "integrationGate": { "ale-handoff-blocked": 6414, "teaching-ale-handoff-ready": 498 }, "yieldGate": { "review-selectivity": 3522, "review-throughput": 1610, "review-roughness": 1196, "review-profile": 250, "bounded-etch-monitor": 240, "review-damage": 86, "review-cycle-drift": 8 }, "vacDelivery": { "depleted-like": 2304, "transitional-like": 2304, "stable-like": 2304 }, "plasmaActivation": { "assisted-like": 4122, "plasma-dominant-like": 1580, "thermal-like": 1210 }, "rieProfileControl": { "transitional-like": 3562, "limited-like": 1712, "bounded-like": 1638 }, "metrologyPriority": { "separation-residual": 3096, "modification-response": 720, "removal-response": 974, "surface-topography": 982, "synergy-series": 78, "thickness-composition": 792, "selectivity-stack": 84, "cross-section": 180, "cycle-series": 6 }, "allCategorical": { "operator_gate": { "review-modification-delivery": 2304, "review-separation": 2304, "review-removal": 568, "bounded-cycle-trace-ready": 1716, "review-cycle-stability": 18, "review-plasma-exposure": 2 }, "process_engineer_gate": { "review-separation": 2376, "review-modification": 2160, "review-removal": 734, "review-throughput": 840, "review-feature-integrity": 580, "bounded-comparison-ready": 176, "review-synergy": 10, "review-selectivity": 36 }, "integration_gate": { "ale-handoff-blocked": 6414, "teaching-ale-handoff-ready": 498 }, "yield_gate": { "review-selectivity": 3522, "review-throughput": 1610, "review-roughness": 1196, "review-profile": 250, "bounded-etch-monitor": 240, "review-damage": 86, "review-cycle-drift": 8 }, "upstream_vac_delivery_band": { "depleted-like": 2304, "transitional-like": 2304, "stable-like": 2304 }, "upstream_vac_separation_band": { "limited-like": 3456, "clear-like": 2150, "transitional-like": 1306 }, "upstream_plasma_activation_band": { "assisted-like": 4122, "plasma-dominant-like": 1580, "thermal-like": 1210 }, "upstream_plasma_damage_band": { "lower-like": 5624, "intermediate-like": 1274, "higher-like": 14 }, "upstream_rie_surface_modification_band": { "transitional-like": 2424, "complete-like": 4164, "limited-like": 324 }, "upstream_rie_profile_control_band": { "transitional-like": 3562, "limited-like": 1712, "bounded-like": 1638 }, "upstream_ald_surface_readiness_band": { "transitional-like": 2640, "limited-like": 288, "ready-like": 3984 }, "upstream_ald_cycle_compatibility_band": { "nonsaturating-like": 860, "self-limited-like": 2944, "transitional-like": 3108 }, "downstream_removal_uniformity_band": { "transitional-like": 3238, "nonuniform-like": 2096, "bounded-like": 1578 }, "downstream_selectivity_band": { "limited-like": 3522, "bounded-like": 1552, "transitional-like": 1838 }, "downstream_roughness_priority_band": { "high-priority": 3820, "review-like": 2592, "lower-priority": 500 }, "downstream_metrology_priority_band": { "separation-residual": 3096, "modification-response": 720, "removal-response": 974, "surface-topography": 982, "synergy-series": 78, "thickness-composition": 792, "selectivity-stack": 84, "cross-section": 180, "cycle-series": 6 }, "teaching_ale_handoff_gate": { "ale-handoff-blocked": 6414, "teaching-ale-handoff-ready": 498 } } }, "representativeStates": [ { "physical_key": "logic_recess_like|directional_plasma_ale_like|under_modified_like|under_removal_like|weak_separation_like|open_access_like|E01", "application_family": "logic_recess_like", "ale_mode": "directional_plasma_ale_like", "modification_state": "under_modified_like", "removal_state": "under_removal_like", "separation_state": "weak_separation_like", "feature_access_state": "open_access_like", "ordered_state": "E01", "ale_regime": "modification-starved", "modification_delivery_stability_proxy": 0.296056457, "surface_modification_opportunity_proxy": 0.578098723, "modification_completeness_proxy": 0.568289148, "first_separation_clearance_proxy": 0.298702987, "modification_carryover_risk_proxy": 0.403114078, "removal_activation_proxy": 0.18651411, "modified_layer_removal_completeness_proxy": 0.348834072, "unmodified_material_loss_burden_proxy": 0.030332081, "byproduct_clearance_proxy": 0.212113138, "second_separation_carryover_risk_proxy": 0.503793263, "synergy_proxy": 0.354458552, "self_limitation_proxy": 0.473249441, "selectivity_readiness_proxy": 0.382860959, "feature_entry_proxy": 0.3913292, "profile_fidelity_proxy": 0.538017633, "roughness_control_proxy": 0.389654088, "cycle_drift_burden_proxy": 0.383989725, "throughput_readiness_proxy": 0.193242926, "operator_gate": "review-modification-delivery", "process_engineer_gate": "review-modification", "integration_gate": "ale-handoff-blocked", "yield_gate": "review-selectivity", "downstream_metrology_priority_band": "separation-residual" }, { "physical_key": "three_dimensional_memory_like|directional_plasma_ale_like|under_modified_like|under_removal_like|weak_separation_like|constrained_access_like|E00", "application_family": "three_dimensional_memory_like", "ale_mode": "directional_plasma_ale_like", "modification_state": "under_modified_like", "removal_state": "under_removal_like", "separation_state": "weak_separation_like", "feature_access_state": "constrained_access_like", "ordered_state": "E00", "ale_regime": "modification-nonsaturating", "modification_delivery_stability_proxy": 0.301036, "surface_modification_opportunity_proxy": 0.523318, "modification_completeness_proxy": 0.479995006, "first_separation_clearance_proxy": 0.304202224, "modification_carryover_risk_proxy": 0.402055224, "removal_activation_proxy": 0.181310564, "modified_layer_removal_completeness_proxy": 0.322137994, "unmodified_material_loss_burden_proxy": 0.025898208, "byproduct_clearance_proxy": 0.214413599, "second_separation_carryover_risk_proxy": 0.475334629, "synergy_proxy": 0.329088018, "self_limitation_proxy": 0.442878911, "selectivity_readiness_proxy": 0.308712919, "feature_entry_proxy": 0.142131278, "profile_fidelity_proxy": 0.373396058, "roughness_control_proxy": 0.340442771, "cycle_drift_burden_proxy": 0.471013268, "throughput_readiness_proxy": 0.117586031, "operator_gate": "review-modification-delivery", "process_engineer_gate": "review-modification", "integration_gate": "ale-handoff-blocked", "yield_gate": "review-selectivity", "downstream_metrology_priority_band": "modification-response" }, { "physical_key": "logic_recess_like|directional_plasma_ale_like|under_modified_like|under_removal_like|weak_separation_like|open_access_like|E00", "application_family": "logic_recess_like", "ale_mode": "directional_plasma_ale_like", "modification_state": "under_modified_like", "removal_state": "under_removal_like", "separation_state": "weak_separation_like", "feature_access_state": "open_access_like", "ordered_state": "E00", "ale_regime": "separation-limited", "modification_delivery_stability_proxy": 0.301036, "surface_modification_opportunity_proxy": 0.588118, "modification_completeness_proxy": 0.573061466, "first_separation_clearance_proxy": 0.304505993, "modification_carryover_risk_proxy": 0.401042216, "removal_activation_proxy": 0.18687249, "modified_layer_removal_completeness_proxy": 0.350735213, "unmodified_material_loss_burden_proxy": 0.027840559, "byproduct_clearance_proxy": 0.21794937, "second_separation_carryover_risk_proxy": 0.481169681, "synergy_proxy": 0.361584422, "self_limitation_proxy": 0.477741068, "selectivity_readiness_proxy": 0.388174715, "feature_entry_proxy": 0.393490072, "profile_fidelity_proxy": 0.541698004, "roughness_control_proxy": 0.40492174, "cycle_drift_burden_proxy": 0.372840764, "throughput_readiness_proxy": 0.195173485, "operator_gate": "review-modification-delivery", "process_engineer_gate": "review-separation", "integration_gate": "ale-handoff-blocked", "yield_gate": "review-selectivity", "downstream_metrology_priority_band": "separation-residual" }, { "physical_key": "logic_recess_like|directional_plasma_ale_like|under_modified_like|under_removal_like|strong_separation_like|open_access_like|E00", "application_family": "logic_recess_like", "ale_mode": "directional_plasma_ale_like", "modification_state": "under_modified_like", "removal_state": "under_removal_like", "separation_state": "strong_separation_like", "feature_access_state": "open_access_like", "ordered_state": "E00", "ale_regime": "removal-incomplete", "modification_delivery_stability_proxy": 0.301036, "surface_modification_opportunity_proxy": 0.588118, "modification_completeness_proxy": 0.573061466, "first_separation_clearance_proxy": 0.856423104, "modification_carryover_risk_proxy": 0.049841322, "removal_activation_proxy": 0.199604979, "modified_layer_removal_completeness_proxy": 0.426323037, "unmodified_material_loss_burden_proxy": 0.028091969, "byproduct_clearance_proxy": 0.695728184, "second_separation_carryover_risk_proxy": 0.063091279, "synergy_proxy": 0.639007716, "self_limitation_proxy": 0.643022862, "selectivity_readiness_proxy": 0.679013666, "feature_entry_proxy": 0.535128344, "profile_fidelity_proxy": 0.695358641, "roughness_control_proxy": 0.542201519, "cycle_drift_burden_proxy": 0.283521104, "throughput_readiness_proxy": 0.255719475, "operator_gate": "review-modification-delivery", "process_engineer_gate": "review-removal", "integration_gate": "ale-handoff-blocked", "yield_gate": "review-throughput", "downstream_metrology_priority_band": "removal-response" }, { "physical_key": "logic_recess_like|directional_plasma_ale_like|nominal_modification_like|extended_removal_like|strong_separation_like|constrained_access_like|E07", "application_family": "logic_recess_like", "ale_mode": "directional_plasma_ale_like", "modification_state": "nominal_modification_like", "removal_state": "extended_removal_like", "separation_state": "strong_separation_like", "feature_access_state": "constrained_access_like", "ordered_state": "E07", "ale_regime": "synergy-limited", "modification_delivery_stability_proxy": 0.5636736, "surface_modification_opportunity_proxy": 0.595719488, "modification_completeness_proxy": 0.646622655, "first_separation_clearance_proxy": 0.707731509, "modification_carryover_risk_proxy": 0.062016788, "removal_activation_proxy": 0.598718106, "modified_layer_removal_completeness_proxy": 0.75611259, "unmodified_material_loss_burden_proxy": 0.433880909, "byproduct_clearance_proxy": 0.698543786, "second_separation_carryover_risk_proxy": 0.101100775, "synergy_proxy": 0.637392274, "self_limitation_proxy": 0.64348447, "selectivity_readiness_proxy": 0.539630047, "feature_entry_proxy": 0.257874525, "profile_fidelity_proxy": 0.493732552, "roughness_control_proxy": 0.317976141, "cycle_drift_burden_proxy": 0.282523028, "throughput_readiness_proxy": 0.28732202, "operator_gate": "bounded-cycle-trace-ready", "process_engineer_gate": "review-synergy", "integration_gate": "ale-handoff-blocked", "yield_gate": "review-roughness", "downstream_metrology_priority_band": "synergy-series" }, { "physical_key": "three_dimensional_memory_like|directional_plasma_ale_like|nominal_modification_like|extended_removal_like|strong_separation_like|open_access_like|E07", "application_family": "three_dimensional_memory_like", "ale_mode": "directional_plasma_ale_like", "modification_state": "nominal_modification_like", "removal_state": "extended_removal_like", "separation_state": "strong_separation_like", "feature_access_state": "open_access_like", "ordered_state": "E07", "ale_regime": "selectivity-limited", "modification_delivery_stability_proxy": 0.5636736, "surface_modification_opportunity_proxy": 0.654687488, "modification_completeness_proxy": 0.704625466, "first_separation_clearance_proxy": 0.709222413, "modification_carryover_risk_proxy": 0.061692566, "removal_activation_proxy": 0.609536878, "modified_layer_removal_completeness_proxy": 0.776962106, "unmodified_material_loss_burden_proxy": 0.377728113, "byproduct_clearance_proxy": 0.705726845, "second_separation_carryover_risk_proxy": 0.101616387, "synergy_proxy": 0.671277829, "self_limitation_proxy": 0.67675586, "selectivity_readiness_proxy": 0.467930911, "feature_entry_proxy": 0.549345223, "profile_fidelity_proxy": 0.602307216, "roughness_control_proxy": 0.320921935, "cycle_drift_burden_proxy": 0.326481228, "throughput_readiness_proxy": 0.180197453, "operator_gate": "bounded-cycle-trace-ready", "process_engineer_gate": "review-selectivity", "integration_gate": "ale-handoff-blocked", "yield_gate": "review-selectivity", "downstream_metrology_priority_band": "selectivity-stack" }, { "physical_key": "logic_recess_like|directional_plasma_ale_like|under_modified_like|extended_removal_like|strong_separation_like|open_access_like|E00", "application_family": "logic_recess_like", "ale_mode": "directional_plasma_ale_like", "modification_state": "under_modified_like", "removal_state": "extended_removal_like", "separation_state": "strong_separation_like", "feature_access_state": "open_access_like", "ordered_state": "E00", "ale_regime": "cycle-integrity-limited", "modification_delivery_stability_proxy": 0.301036, "surface_modification_opportunity_proxy": 0.588118, "modification_completeness_proxy": 0.573061466, "first_separation_clearance_proxy": 0.856423104, "modification_carryover_risk_proxy": 0.049841322, "removal_activation_proxy": 0.586339626, "modified_layer_removal_completeness_proxy": 0.732751589, "unmodified_material_loss_burden_proxy": 0.300117527, "byproduct_clearance_proxy": 0.800526749, "second_separation_carryover_risk_proxy": 0.070701739, "synergy_proxy": 0.683192829, "self_limitation_proxy": 0.699970567, "selectivity_readiness_proxy": 0.639487697, "feature_entry_proxy": 0.59877311, "profile_fidelity_proxy": 0.674227232, "roughness_control_proxy": 0.486392468, "cycle_drift_burden_proxy": 0.238403908, "throughput_readiness_proxy": 0.290800892, "operator_gate": "review-modification-delivery", "process_engineer_gate": "review-feature-integrity", "integration_gate": "teaching-ale-handoff-ready", "yield_gate": "review-roughness", "downstream_metrology_priority_band": "surface-topography" }, { "physical_key": "logic_recess_like|directional_plasma_ale_like|under_modified_like|nominal_removal_like|strong_separation_like|open_access_like|E00", "application_family": "logic_recess_like", "ale_mode": "directional_plasma_ale_like", "modification_state": "under_modified_like", "removal_state": "nominal_removal_like", "separation_state": "strong_separation_like", "feature_access_state": "open_access_like", "ordered_state": "E00", "ale_regime": "bounded-ale", "modification_delivery_stability_proxy": 0.301036, "surface_modification_opportunity_proxy": 0.588118, "modification_completeness_proxy": 0.573061466, "first_separation_clearance_proxy": 0.856423104, "modification_carryover_risk_proxy": 0.049841322, "removal_activation_proxy": 0.449111203, "modified_layer_removal_completeness_proxy": 0.622315651, "unmodified_material_loss_burden_proxy": 0.099055858, "byproduct_clearance_proxy": 0.762757658, "second_separation_carryover_risk_proxy": 0.067958952, "synergy_proxy": 0.687873539, "self_limitation_proxy": 0.695930698, "selectivity_readiness_proxy": 0.691147929, "feature_entry_proxy": 0.576189483, "profile_fidelity_proxy": 0.710919566, "roughness_control_proxy": 0.546779642, "cycle_drift_burden_proxy": 0.254664011, "throughput_readiness_proxy": 0.27978519, "operator_gate": "review-modification-delivery", "process_engineer_gate": "review-throughput", "integration_gate": "teaching-ale-handoff-ready", "yield_gate": "review-throughput", "downstream_metrology_priority_band": "surface-topography" } ], "sourceSummary": { "sources": 20, "claimNodes": 16, "linkStatus": "pass", "reachable": 8, "accessGated": 12, "hardFailures": 0, "networkErrors": 0, "sourceBodiesStored": false, "sourceNumericUse": "none" }, "currentPublicBaseline": { "version": "v109", "versionId": "appgprj_6a6f4d3affc0819189d99a8f29062540~appgver_005d791cd0f881919fe28dce4fc90e8f", "deploymentId": "appgdep_6a91677cd40081919caf523a472130f6", "sourceCommit": "c3888cc26eb434d9ca88e76889f781194044db4a", "changedByThisPacket": false, "publicVersionReserved": "none", "releaseDecision": "hold" }, "publicDelivery": { "mode": "metadata-manifest-plus-csv-rows", "rowsEmbedded": false, "rowArtifact": "ale-cycle-state-v1.csv", "rowArtifactSha256": "284213285C199B8FEAB1404777BACB73E8E434789D1436C7FB5C4605FA3A9D0D", "canonicalRowBearingArtifact": "ale-cycle-state-web-v1.json", "canonicalRowBearingArtifactSha256": "80157B69D2A6AC97432F8F8E993C933E6B73C767339468FDFB58C09BB017B3B3", "independentValidationArtifact": "validation-report-v1.json", "independentValidationArtifactSha256": "B9589E394A0E69BD90B7D0454328E4B43FF8AC88C463DE07D65F1F8CCCBB653B", "sourceSpineArtifact": "ale-source-spine-v1.json", "sourceSpineArtifactSha256": "D557F0D58422DBF1307B520EA78A8BDD6F23406C1C52808954623AD76FE3076E" }, "contracts": { "state": { "file": "ale-state-contract-v1.json", "sha256": "20A318E0AA8F669D52A0AADA3B7DAA51301405E2E1C07E00DEBFA0F6522B6650" }, "metrics": { "file": "ale-metric-contract-v1.json", "sha256": "38D498286A7517400897D79B5C33D96D2E9A52A6B8A39003E632F7A57F033682" }, "verifier": { "file": "independent-verifier-contract-v1.json", "sha256": "1273DDE173BCA5B32A4AC560BEE7FF0A86CAD515CD83A843AE0D8C0A38949624" }, "sourceCatalog": { "file": "source_catalog_v1.json", "sha256": "5511696454A0B12B6C23DDE3CE015FAA36576E8B7382247C0CFEE0E1602570A3" }, "claimMap": { "file": "source_claim_map_v1.json", "sha256": "3E497D188D77E67E4A6112207657332A00B782F7161250724D79429DC692E91F" } }, "aleRegimes": [ "modification-starved", "modification-nonsaturating", "separation-limited", "removal-incomplete", "synergy-limited", "selectivity-limited", "cycle-integrity-limited", "bounded-ale" ], "requiredPhenomena": [ "surface-modification", "self-limitation", "temporal-separation", "modified-layer-removal", "synergy-selectivity", "feature-profile-roughness", "cycle-drift", "throughput" ], "upstreamBridges": [ { "sourceExperimentId": "SA-EQP-VAC-GAS-009", "allowedFields": [ "upstream_vac_delivery_band", "upstream_vac_separation_band", "upstream_vac_evidence_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-EQP-PLASMA-CCP-ICP-008", "allowedFields": [ "upstream_plasma_activation_band", "upstream_plasma_damage_band", "upstream_plasma_evidence_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-ETCH-RIE-010", "allowedFields": [ "upstream_rie_surface_modification_band", "upstream_rie_profile_control_band", "upstream_rie_evidence_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-DEP-ALD-PEALD-014", "allowedFields": [ "upstream_ald_surface_readiness_band", "upstream_ald_cycle_compatibility_band", "upstream_ald_evidence_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false } ], "downstreamBridge": { "targetExperimentId": "SA-MET-INSPECTION-030", "allowedFields": [ "downstream_removal_uniformity_band", "downstream_selectivity_band", "downstream_roughness_priority_band", "downstream_metrology_priority_band", "downstream_etch_evidence_gate", "teaching_ale_handoff_gate" ], "physicalUnitsAllowed": false, "automaticRecipeHandoffAllowed": false, "automaticGeometryHandoffAllowed": false, "automaticEquipmentActionAllowed": false, "automaticDispositionAllowed": false }, "replacementEvidenceRequirements": [ "accountable run identifier, wafer ownership, review owner, and disposition owner", "revisioned chamber, source delivery, plasma source if present, substrate assembly, exhaust, and sequencing configuration", "owned modification and removal reactant identities, source containers, delivery lines, conditioning states, use histories, and change histories", "owned modified-layer, inhibitor, passivation, byproduct, residue, contamination, and surface-termination evidence appropriate to each claim", "modification dose, exposure, saturation, purge, separation, overlap, residual, and carryover evidence with calibration and uncertainty", "removal activation, energy or thermal drive, duration, threshold, saturation, purge, separation, and carryover evidence with calibration and uncertainty", "pressure, pumping, throttle, conductance, chamber volume, residence, exhaust, and chamber-history evidence with uncertainty", "wafer temperature, spatial temperature map, substrate contact, thermal history, and calibration evidence", "plasma power, coupling, match, radical, ion, ultraviolet, charging, and exposure evidence with uncertainty where applicable", "revisioned temporal sequence or spatial zone, injector, exhaust, substrate-motion, and source-to-wafer geometry", "revisioned feature, aspect-ratio, pattern-density, topography, pitch, profile, and sampling geometry", "independent modification-only, removal-only, and complete-cycle evidence required to calculate synergy", "self-limiting modification and removal response, dose-response, cycle-order, and repeatability evidence", "modified-layer removal, unmodified-material loss, selectivity, residue, and byproduct-clearance evidence", "top, middle, bottom, sidewall, interface, profile, recess, and removal-uniformity measurements with uncertainty", "roughness, morphology, smoothing or roughening, damage, composition, bonding, and contamination evidence appropriate to the claim", "etch per cycle, cycle drift, wafer map, wafer-to-wafer, chamber-to-chamber, and time-order evidence", "throughput, availability, cycle duration, queueing, utilization, and ownership evidence", "measurement-system analysis, calibration records, uncertainty budget, sampling plan, detection limits, and gauge capability", "model version, assumptions, parameters, applicability limits, independent review, rights review, safety review, and accountable approval" ], "requiredSections": [ "Explore", "Run Card", "Export", "Methods", "Limits", "Evidence" ], "limitation": "Original dimensionless ALE cycle completeness and synergy teaching replay only; no physical value, chemistry, recipe, equipment action, performance claim, calibration, qualification, reliability, or production claim." }