{
  "schema": "semiagora.github-seed-simulation.v1",
  "execution_mode": "precomputed-only",
  "experiment_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
  "slug": "anneal-activation-diffusion",
  "title": "Anneal activation versus dopant diffusion",
  "model_boundary": "normalized Arrhenius-style teaching model, no dopant calibration",
  "public_boundary": [
    "No live server solver execution.",
    "No PDK or compact-model ingestion.",
    "No process recipe, equipment operation, qualification signoff, upload, account, payment, comment, newsletter signup, or submission workflow.",
    "Third-party GitHub tools remain source links unless separately reviewed."
  ],
  "headline_metric": {
    "name": "best_tradeoff_score",
    "value": -1.1309,
    "case": {
      "temperature_c": 850,
      "time_s": 1
    }
  },
  "rows": [
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 850,
      "time_s": 1,
      "activation_fraction": 0.91732,
      "diffusion_length_nm": 113.7898,
      "junction_tradeoff_score": -1.1309,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 850,
      "time_s": 5,
      "activation_fraction": 1,
      "diffusion_length_nm": 254.4416,
      "junction_tradeoff_score": -3.57995,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 850,
      "time_s": 10,
      "activation_fraction": 1,
      "diffusion_length_nm": 359.8348,
      "junction_tradeoff_score": -5.47703,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 850,
      "time_s": 30,
      "activation_fraction": 1,
      "diffusion_length_nm": 623.2521,
      "junction_tradeoff_score": -10.21854,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 850,
      "time_s": 60,
      "activation_fraction": 1,
      "diffusion_length_nm": 881.4116,
      "junction_tradeoff_score": -14.86541,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 900,
      "time_s": 1,
      "activation_fraction": 0.99109,
      "diffusion_length_nm": 141.4214,
      "junction_tradeoff_score": -1.5545,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 900,
      "time_s": 5,
      "activation_fraction": 1,
      "diffusion_length_nm": 316.2278,
      "junction_tradeoff_score": -4.6921,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 900,
      "time_s": 10,
      "activation_fraction": 1,
      "diffusion_length_nm": 447.2136,
      "junction_tradeoff_score": -7.04984,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 900,
      "time_s": 30,
      "activation_fraction": 1,
      "diffusion_length_nm": 774.5967,
      "junction_tradeoff_score": -12.94274,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 900,
      "time_s": 60,
      "activation_fraction": 1,
      "diffusion_length_nm": 1095.4451,
      "junction_tradeoff_score": -18.71801,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 950,
      "time_s": 1,
      "activation_fraction": 0.99979,
      "diffusion_length_nm": 175.7628,
      "junction_tradeoff_score": -2.16394,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 950,
      "time_s": 5,
      "activation_fraction": 1,
      "diffusion_length_nm": 393.0175,
      "junction_tradeoff_score": -6.07431,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 950,
      "time_s": 10,
      "activation_fraction": 1,
      "diffusion_length_nm": 555.8106,
      "junction_tradeoff_score": -9.00459,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 950,
      "time_s": 30,
      "activation_fraction": 1,
      "diffusion_length_nm": 962.6922,
      "junction_tradeoff_score": -16.32846,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 950,
      "time_s": 60,
      "activation_fraction": 1,
      "diffusion_length_nm": 1361.4524,
      "junction_tradeoff_score": -23.50614,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 1000,
      "time_s": 1,
      "activation_fraction": 1,
      "diffusion_length_nm": 218.4433,
      "junction_tradeoff_score": -2.93198,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 1000,
      "time_s": 5,
      "activation_fraction": 1,
      "diffusion_length_nm": 488.454,
      "junction_tradeoff_score": -7.79217,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 1000,
      "time_s": 10,
      "activation_fraction": 1,
      "diffusion_length_nm": 690.7783,
      "junction_tradeoff_score": -11.43401,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 1000,
      "time_s": 30,
      "activation_fraction": 1,
      "diffusion_length_nm": 1196.4631,
      "junction_tradeoff_score": -20.53634,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 1000,
      "time_s": 60,
      "activation_fraction": 1,
      "diffusion_length_nm": 1692.0544,
      "junction_tradeoff_score": -29.45698,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 1050,
      "time_s": 1,
      "activation_fraction": 1,
      "diffusion_length_nm": 271.4879,
      "junction_tradeoff_score": -3.88678,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 1050,
      "time_s": 5,
      "activation_fraction": 1,
      "diffusion_length_nm": 607.0655,
      "junction_tradeoff_score": -9.92718,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 1050,
      "time_s": 10,
      "activation_fraction": 1,
      "diffusion_length_nm": 858.5202,
      "junction_tradeoff_score": -14.45336,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 1050,
      "time_s": 30,
      "activation_fraction": 1,
      "diffusion_length_nm": 1487.0006,
      "junction_tradeoff_score": -25.76601,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    },
    {
      "simulation_id": "SA-SEED-PROC-ANNEAL-ACTIVATION-001",
      "domain": "process",
      "temperature_c": 1050,
      "time_s": 60,
      "activation_fraction": 1,
      "diffusion_length_nm": 2102.9365,
      "junction_tradeoff_score": -36.85286,
      "teaching_point": "Annealing improves activation while also broadening dopant profiles."
    }
  ],
  "methods": [
    "Activation uses an Arrhenius-style rate proxy and a one-minus-exponential time response.",
    "Diffusion length uses a square-root time law with a temperature-scaled diffusivity proxy.",
    "Tradeoff score subtracts a diffusion penalty from activation fraction."
  ],
  "limitations": [
    "No dopant species, implant dose, point-defect clustering, SIMS, Hall, leakage, or sheet-resistance calibration.",
    "No furnace, spike, millisecond anneal, equipment recipe, or facility setting is represented.",
    "Metrology and process ownership are required before any process integration claim."
  ],
  "evidence": [
    "Seed sweep JSON records temperature, time, activation, diffusion, and score rows.",
    "CSV export preserves the anneal tradeoff table.",
    "Existing thermal-processing pages provide the richer RTA and contact-window source spine."
  ],
  "sources": [
    {
      "label": "SemiAgora GitHub seed sweep",
      "url": "https://github.com/CMU-SAFARI/ramulator2",
      "note": "Public-source expedition anchor; process cards remain original normalized teaching models with no recipe settings."
    },
    {
      "label": "DEVSIM",
      "url": "https://github.com/devsim/devsim",
      "note": "Open device/TCAD reference used as a future solver-back upgrade candidate, not executed by this process card."
    }
  ],
  "source_seed_run": "07_assets/factory_lab/experiments/GITHUB_OPEN_SOURCE_SEED_SWEEP_2026-08-14/"
}
