{
  "schema": "semiagora.apc-fdc-feedforward-decision.v1",
  "version": "2026-08-22-v89",
  "experiment_id": "SA-PROC-APC-FDC-002",
  "slug": "apc-fdc-feedforward-decision-replay",
  "route": "/simulations/apc-fdc-feedforward-decision-replay",
  "lesson_route": "/learn/apc-fdc-feedforward-decision-literacy",
  "lab_route": "/labs/apc-fdc-feedforward-decision-literacy",
  "title": "APC, FDC, and feedforward decision replay",
  "execution_mode": "precomputed_browser_csv_replay_only",
  "counts": {
    "rows": 6144,
    "module_contexts": 6,
    "signal_packs": 4,
    "fdc_states": 4,
    "control_handoffs": 4,
    "sampling_plans": 4,
    "role_views": 4,
    "liveServerRuns": 0
  },
  "source_summary": "SEMI, NIST, IRDS, and existing feedforward source links were used for vocabulary and source anchoring only. SemiAgora generated original synthetic teaching rows and did not copy standards text, article bodies, tool data, recipes, APC implementations, model code, or factory procedures.",
  "sources": [
    {
      "label": "SEMI Smart Manufacturing Standards",
      "url": "https://www.semi.org/en/industry-groups/smart-manufacturing/standards",
      "note": "Official public SEMI standards index for E116, E126, E133, E157, and EDA-family context. SemiAgora uses it as a link-only anchor."
    },
    {
      "label": "SEMI E133 automated process-control systems interface",
      "url": "https://store-us.semi.org/products/e13300-semi-e133-specification-for-automated-process-control-systems-interface",
      "note": "Official listing for process-control-system interface vocabulary including run-to-run control, fault detection, fault classification, and SPC. The standard body is not copied."
    },
    {
      "label": "Next-generation SEMI EDA standards",
      "url": "https://www.semi.org/en/next-gen-semi-eda-standards",
      "note": "Official SEMI article anchoring equipment data acquisition and high-volume data publication vocabulary. No implementation guide or equipment workflow is copied."
    },
    {
      "label": "NIST semiconductor virtual metrology dynamic sampling",
      "url": "https://www.nist.gov/publications/comparative-study-semiconductor-virtual-metrology-methods-and-novel-algorithmic",
      "note": "Public NIST publication page for VM uncertainty, drift, dynamic sampling, and process-control needs."
    },
    {
      "label": "IRDS / NIST virtual metrology white paper",
      "url": "https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924090",
      "note": "Public VM white-paper anchor for confidence, data quality, R2R, smart sampling, model maintenance, and yield interaction vocabulary."
    },
    {
      "label": "Semiconductor Engineering feedforward control signal",
      "url": "https://semiengineering.com/dont-scrap-it-save-it-feedforward-control-for-modern-semiconductor-manufacturing/",
      "note": "Link-only source signal used in the existing v78 feedforward replay. No article body, examples, diagrams, or product claims are copied."
    }
  ],
  "axes": {
    "module_contexts": [
      {
        "id": "lithography_overlay_cd",
        "label": "Lithography overlay and CD"
      },
      {
        "id": "dry_etch_pattern_transfer",
        "label": "Dry etch pattern transfer"
      },
      {
        "id": "cmp_planarization",
        "label": "CMP planarization"
      },
      {
        "id": "deposition_thickness_uniformity",
        "label": "Deposition thickness uniformity"
      },
      {
        "id": "implant_anneal_parametric",
        "label": "Implant and anneal parametric"
      },
      {
        "id": "wet_clean_surface_condition",
        "label": "Wet clean surface condition"
      }
    ],
    "signal_packs": [
      {
        "id": "equipment_trace_summary",
        "label": "Equipment trace summary"
      },
      {
        "id": "inline_metrology_delta",
        "label": "Inline metrology delta"
      },
      {
        "id": "virtual_metrology_prediction",
        "label": "Virtual metrology prediction"
      },
      {
        "id": "maintenance_context_marker",
        "label": "Maintenance context marker"
      }
    ],
    "fdc_states": [
      {
        "id": "baseline_signature",
        "label": "Baseline signature"
      },
      {
        "id": "soft_drift_watch",
        "label": "Soft drift watch"
      },
      {
        "id": "excursion_candidate",
        "label": "Excursion candidate"
      },
      {
        "id": "sensor_integrity_watch",
        "label": "Sensor integrity watch"
      }
    ],
    "control_handoffs": [
      {
        "id": "monitor_only_review",
        "label": "Monitor-only review"
      },
      {
        "id": "feedback_evidence_review",
        "label": "Feedback evidence review"
      },
      {
        "id": "feedforward_evidence_review",
        "label": "Feedforward evidence review"
      },
      {
        "id": "dual_loop_decision_review",
        "label": "Dual-loop decision review"
      }
    ],
    "sampling_plans": [
      {
        "id": "static_sparse_plan",
        "label": "Static sparse plan"
      },
      {
        "id": "dynamic_sampling_plan",
        "label": "Dynamic sampling plan"
      },
      {
        "id": "chamber_matched_split",
        "label": "Chamber-matched split"
      },
      {
        "id": "physical_metrology_check",
        "label": "Physical metrology check"
      }
    ],
    "role_views": [
      {
        "id": "operator_review",
        "label": "Operator review"
      },
      {
        "id": "engineer_review",
        "label": "Engineer review"
      },
      {
        "id": "integration_review",
        "label": "Integration review"
      },
      {
        "id": "yield_review",
        "label": "Yield review"
      }
    ]
  },
  "decision_gate_counts": {
    "sampling_plan_review": 2112,
    "bounded_teaching_candidate": 1907,
    "feedforward_handoff_review": 588,
    "data_quality_review": 1536,
    "reference_bounded_case": 1
  },
  "average_decision_readiness_by_module": [
    {
      "module_context": "lithography_overlay_cd",
      "label": "Lithography overlay and CD",
      "decision_readiness_score": "0.387"
    },
    {
      "module_context": "dry_etch_pattern_transfer",
      "label": "Dry etch pattern transfer",
      "decision_readiness_score": "0.359"
    },
    {
      "module_context": "cmp_planarization",
      "label": "CMP planarization",
      "decision_readiness_score": "0.338"
    },
    {
      "module_context": "deposition_thickness_uniformity",
      "label": "Deposition thickness uniformity",
      "decision_readiness_score": "0.364"
    },
    {
      "module_context": "implant_anneal_parametric",
      "label": "Implant and anneal parametric",
      "decision_readiness_score": "0.340"
    },
    {
      "module_context": "wet_clean_surface_condition",
      "label": "Wet clean surface condition",
      "decision_readiness_score": "0.313"
    }
  ],
  "average_wafer_at_risk_by_module": [
    {
      "module_context": "lithography_overlay_cd",
      "label": "Lithography overlay and CD",
      "wafer_at_risk_proxy": "0.516"
    },
    {
      "module_context": "dry_etch_pattern_transfer",
      "label": "Dry etch pattern transfer",
      "wafer_at_risk_proxy": "0.550"
    },
    {
      "module_context": "cmp_planarization",
      "label": "CMP planarization",
      "wafer_at_risk_proxy": "0.530"
    },
    {
      "module_context": "deposition_thickness_uniformity",
      "label": "Deposition thickness uniformity",
      "wafer_at_risk_proxy": "0.497"
    },
    {
      "module_context": "implant_anneal_parametric",
      "label": "Implant and anneal parametric",
      "wafer_at_risk_proxy": "0.515"
    },
    {
      "module_context": "wet_clean_surface_condition",
      "label": "Wet clean surface condition",
      "wafer_at_risk_proxy": "0.492"
    }
  ],
  "shortlist_examples": [
    {
      "case_id": "APC_FDC_0005",
      "module_context": "lithography_overlay_cd",
      "module_label": "Lithography overlay and CD",
      "signal_pack": "equipment_trace_summary",
      "signal_label": "Equipment trace summary",
      "fdc_state": "baseline_signature",
      "fdc_state_label": "Baseline signature",
      "control_handoff": "monitor_only_review",
      "control_handoff_label": "Monitor-only review",
      "sampling_plan": "dynamic_sampling_plan",
      "sampling_plan_label": "Dynamic sampling plan",
      "role_view": "operator_review",
      "role_view_label": "Operator review",
      "data_quality_score": "0.907",
      "drift_pressure": "0.302",
      "fault_likelihood_proxy": "0.054",
      "classification_confidence": "0.971",
      "metrology_coverage_score": "0.537",
      "vm_uncertainty_proxy": "0.108",
      "feedforward_value_score": "0.548",
      "feedback_review_risk": "0.163",
      "false_alarm_risk_proxy": "0.061",
      "wafer_at_risk_proxy": "0.381",
      "decision_readiness_score": "0.534",
      "decision_gate": "bounded_teaching_candidate",
      "evidence_state": "synthetic_decision_proxy",
      "next_safe_check": "Keep signal pack, FDC state, sampling coverage, role view, and uncertainty together before narrowing.",
      "role_readout": "tool-state, timestamp, lot context, and data-integrity handoff"
    },
    {
      "case_id": "APC_FDC_0006",
      "module_context": "lithography_overlay_cd",
      "module_label": "Lithography overlay and CD",
      "signal_pack": "equipment_trace_summary",
      "signal_label": "Equipment trace summary",
      "fdc_state": "baseline_signature",
      "fdc_state_label": "Baseline signature",
      "control_handoff": "monitor_only_review",
      "control_handoff_label": "Monitor-only review",
      "sampling_plan": "dynamic_sampling_plan",
      "sampling_plan_label": "Dynamic sampling plan",
      "role_view": "engineer_review",
      "role_view_label": "Engineer review",
      "data_quality_score": "0.900",
      "drift_pressure": "0.302",
      "fault_likelihood_proxy": "0.055",
      "classification_confidence": "0.965",
      "metrology_coverage_score": "0.537",
      "vm_uncertainty_proxy": "0.108",
      "feedforward_value_score": "0.548",
      "feedback_review_risk": "0.163",
      "false_alarm_risk_proxy": "0.062",
      "wafer_at_risk_proxy": "0.381",
      "decision_readiness_score": "0.523",
      "decision_gate": "bounded_teaching_candidate",
      "evidence_state": "synthetic_decision_proxy",
      "next_safe_check": "Keep signal pack, FDC state, sampling coverage, role view, and uncertainty together before narrowing.",
      "role_readout": "drift direction, model boundary, and split evidence"
    },
    {
      "case_id": "APC_FDC_0007",
      "module_context": "lithography_overlay_cd",
      "module_label": "Lithography overlay and CD",
      "signal_pack": "equipment_trace_summary",
      "signal_label": "Equipment trace summary",
      "fdc_state": "baseline_signature",
      "fdc_state_label": "Baseline signature",
      "control_handoff": "monitor_only_review",
      "control_handoff_label": "Monitor-only review",
      "sampling_plan": "dynamic_sampling_plan",
      "sampling_plan_label": "Dynamic sampling plan",
      "role_view": "integration_review",
      "role_view_label": "Integration review",
      "data_quality_score": "0.892",
      "drift_pressure": "0.302",
      "fault_likelihood_proxy": "0.056",
      "classification_confidence": "0.960",
      "metrology_coverage_score": "0.537",
      "vm_uncertainty_proxy": "0.108",
      "feedforward_value_score": "0.548",
      "feedback_review_risk": "0.163",
      "false_alarm_risk_proxy": "0.063",
      "wafer_at_risk_proxy": "0.381",
      "decision_readiness_score": "0.523",
      "decision_gate": "bounded_teaching_candidate",
      "evidence_state": "synthetic_decision_proxy",
      "next_safe_check": "Keep signal pack, FDC state, sampling coverage, role view, and uncertainty together before narrowing.",
      "role_readout": "upstream/downstream coupling and module handoff risk"
    },
    {
      "case_id": "APC_FDC_0008",
      "module_context": "lithography_overlay_cd",
      "module_label": "Lithography overlay and CD",
      "signal_pack": "equipment_trace_summary",
      "signal_label": "Equipment trace summary",
      "fdc_state": "baseline_signature",
      "fdc_state_label": "Baseline signature",
      "control_handoff": "monitor_only_review",
      "control_handoff_label": "Monitor-only review",
      "sampling_plan": "dynamic_sampling_plan",
      "sampling_plan_label": "Dynamic sampling plan",
      "role_view": "yield_review",
      "role_view_label": "Yield review",
      "data_quality_score": "0.896",
      "drift_pressure": "0.302",
      "fault_likelihood_proxy": "0.056",
      "classification_confidence": "0.963",
      "metrology_coverage_score": "0.537",
      "vm_uncertainty_proxy": "0.108",
      "feedforward_value_score": "0.548",
      "feedback_review_risk": "0.163",
      "false_alarm_risk_proxy": "0.063",
      "wafer_at_risk_proxy": "0.381",
      "decision_readiness_score": "0.531",
      "decision_gate": "bounded_teaching_candidate",
      "evidence_state": "synthetic_decision_proxy",
      "next_safe_check": "Keep signal pack, FDC state, sampling coverage, role view, and uncertainty together before narrowing.",
      "role_readout": "wafer-at-risk, false alarm, escape risk, and sample coverage"
    },
    {
      "case_id": "APC_FDC_0013",
      "module_context": "lithography_overlay_cd",
      "module_label": "Lithography overlay and CD",
      "signal_pack": "equipment_trace_summary",
      "signal_label": "Equipment trace summary",
      "fdc_state": "baseline_signature",
      "fdc_state_label": "Baseline signature",
      "control_handoff": "monitor_only_review",
      "control_handoff_label": "Monitor-only review",
      "sampling_plan": "physical_metrology_check",
      "sampling_plan_label": "Physical metrology check",
      "role_view": "operator_review",
      "role_view_label": "Operator review",
      "data_quality_score": "0.928",
      "drift_pressure": "0.294",
      "fault_likelihood_proxy": "0.051",
      "classification_confidence": "0.996",
      "metrology_coverage_score": "0.669",
      "vm_uncertainty_proxy": "0.000",
      "feedforward_value_score": "0.585",
      "feedback_review_risk": "0.159",
      "false_alarm_risk_proxy": "0.029",
      "wafer_at_risk_proxy": "0.354",
      "decision_readiness_score": "0.596",
      "decision_gate": "bounded_teaching_candidate",
      "evidence_state": "synthetic_decision_proxy",
      "next_safe_check": "Keep signal pack, FDC state, sampling coverage, role view, and uncertainty together before narrowing.",
      "role_readout": "tool-state, timestamp, lot context, and data-integrity handoff"
    },
    {
      "case_id": "APC_FDC_0014",
      "module_context": "lithography_overlay_cd",
      "module_label": "Lithography overlay and CD",
      "signal_pack": "equipment_trace_summary",
      "signal_label": "Equipment trace summary",
      "fdc_state": "baseline_signature",
      "fdc_state_label": "Baseline signature",
      "control_handoff": "monitor_only_review",
      "control_handoff_label": "Monitor-only review",
      "sampling_plan": "physical_metrology_check",
      "sampling_plan_label": "Physical metrology check",
      "role_view": "engineer_review",
      "role_view_label": "Engineer review",
      "data_quality_score": "0.921",
      "drift_pressure": "0.294",
      "fault_likelihood_proxy": "0.052",
      "classification_confidence": "0.990",
      "metrology_coverage_score": "0.669",
      "vm_uncertainty_proxy": "0.000",
      "feedforward_value_score": "0.585",
      "feedback_review_risk": "0.159",
      "false_alarm_risk_proxy": "0.030",
      "wafer_at_risk_proxy": "0.354",
      "decision_readiness_score": "0.586",
      "decision_gate": "bounded_teaching_candidate",
      "evidence_state": "synthetic_decision_proxy",
      "next_safe_check": "Keep signal pack, FDC state, sampling coverage, role view, and uncertainty together before narrowing.",
      "role_readout": "drift direction, model boundary, and split evidence"
    },
    {
      "case_id": "APC_FDC_0015",
      "module_context": "lithography_overlay_cd",
      "module_label": "Lithography overlay and CD",
      "signal_pack": "equipment_trace_summary",
      "signal_label": "Equipment trace summary",
      "fdc_state": "baseline_signature",
      "fdc_state_label": "Baseline signature",
      "control_handoff": "monitor_only_review",
      "control_handoff_label": "Monitor-only review",
      "sampling_plan": "physical_metrology_check",
      "sampling_plan_label": "Physical metrology check",
      "role_view": "integration_review",
      "role_view_label": "Integration review",
      "data_quality_score": "0.914",
      "drift_pressure": "0.294",
      "fault_likelihood_proxy": "0.053",
      "classification_confidence": "0.984",
      "metrology_coverage_score": "0.669",
      "vm_uncertainty_proxy": "0.000",
      "feedforward_value_score": "0.585",
      "feedback_review_risk": "0.160",
      "false_alarm_risk_proxy": "0.031",
      "wafer_at_risk_proxy": "0.355",
      "decision_readiness_score": "0.585",
      "decision_gate": "bounded_teaching_candidate",
      "evidence_state": "synthetic_decision_proxy",
      "next_safe_check": "Keep signal pack, FDC state, sampling coverage, role view, and uncertainty together before narrowing.",
      "role_readout": "upstream/downstream coupling and module handoff risk"
    },
    {
      "case_id": "APC_FDC_0016",
      "module_context": "lithography_overlay_cd",
      "module_label": "Lithography overlay and CD",
      "signal_pack": "equipment_trace_summary",
      "signal_label": "Equipment trace summary",
      "fdc_state": "baseline_signature",
      "fdc_state_label": "Baseline signature",
      "control_handoff": "monitor_only_review",
      "control_handoff_label": "Monitor-only review",
      "sampling_plan": "physical_metrology_check",
      "sampling_plan_label": "Physical metrology check",
      "role_view": "yield_review",
      "role_view_label": "Yield review",
      "data_quality_score": "0.918",
      "drift_pressure": "0.294",
      "fault_likelihood_proxy": "0.052",
      "classification_confidence": "0.987",
      "metrology_coverage_score": "0.669",
      "vm_uncertainty_proxy": "0.000",
      "feedforward_value_score": "0.585",
      "feedback_review_risk": "0.159",
      "false_alarm_risk_proxy": "0.030",
      "wafer_at_risk_proxy": "0.355",
      "decision_readiness_score": "0.594",
      "decision_gate": "bounded_teaching_candidate",
      "evidence_state": "synthetic_decision_proxy",
      "next_safe_check": "Keep signal pack, FDC state, sampling coverage, role view, and uncertainty together before narrowing.",
      "role_readout": "wafer-at-risk, false alarm, escape risk, and sample coverage"
    },
    {
      "case_id": "APC_FDC_0021",
      "module_context": "lithography_overlay_cd",
      "module_label": "Lithography overlay and CD",
      "signal_pack": "equipment_trace_summary",
      "signal_label": "Equipment trace summary",
      "fdc_state": "baseline_signature",
      "fdc_state_label": "Baseline signature",
      "control_handoff": "feedback_evidence_review",
      "control_handoff_label": "Feedback evidence review",
      "sampling_plan": "dynamic_sampling_plan",
      "sampling_plan_label": "Dynamic sampling plan",
      "role_view": "operator_review",
      "role_view_label": "Operator review",
      "data_quality_score": "0.907",
      "drift_pressure": "0.324",
      "fault_likelihood_proxy": "0.054",
      "classification_confidence": "0.971",
      "metrology_coverage_score": "0.537",
      "vm_uncertainty_proxy": "0.108",
      "feedforward_value_score": "0.588",
      "feedback_review_risk": "0.237",
      "false_alarm_risk_proxy": "0.068",
      "wafer_at_risk_proxy": "0.386",
      "decision_readiness_score": "0.525",
      "decision_gate": "bounded_teaching_candidate",
      "evidence_state": "synthetic_decision_proxy",
      "next_safe_check": "Keep signal pack, FDC state, sampling coverage, role view, and uncertainty together before narrowing.",
      "role_readout": "tool-state, timestamp, lot context, and data-integrity handoff"
    },
    {
      "case_id": "APC_FDC_0022",
      "module_context": "lithography_overlay_cd",
      "module_label": "Lithography overlay and CD",
      "signal_pack": "equipment_trace_summary",
      "signal_label": "Equipment trace summary",
      "fdc_state": "baseline_signature",
      "fdc_state_label": "Baseline signature",
      "control_handoff": "feedback_evidence_review",
      "control_handoff_label": "Feedback evidence review",
      "sampling_plan": "dynamic_sampling_plan",
      "sampling_plan_label": "Dynamic sampling plan",
      "role_view": "engineer_review",
      "role_view_label": "Engineer review",
      "data_quality_score": "0.900",
      "drift_pressure": "0.324",
      "fault_likelihood_proxy": "0.055",
      "classification_confidence": "0.965",
      "metrology_coverage_score": "0.537",
      "vm_uncertainty_proxy": "0.108",
      "feedforward_value_score": "0.588",
      "feedback_review_risk": "0.237",
      "false_alarm_risk_proxy": "0.069",
      "wafer_at_risk_proxy": "0.387",
      "decision_readiness_score": "0.515",
      "decision_gate": "bounded_teaching_candidate",
      "evidence_state": "synthetic_decision_proxy",
      "next_safe_check": "Keep signal pack, FDC state, sampling coverage, role view, and uncertainty together before narrowing.",
      "role_readout": "drift direction, model boundary, and split evidence"
    }
  ],
  "fdc_review_examples": [],
  "vm_uncertainty_examples": [],
  "role_views": [
    {
      "role": "operator",
      "reads": [
        "signal_pack",
        "fdc_state",
        "data_quality_score",
        "next_safe_check"
      ],
      "question": "Is the data identity and tool-state context strong enough to trust the handoff record?"
    },
    {
      "role": "engineer",
      "reads": [
        "drift_pressure",
        "fault_likelihood_proxy",
        "classification_confidence",
        "decision_gate"
      ],
      "question": "Is the signal a drift hypothesis, an FDC review case, or only a bounded teaching row?"
    },
    {
      "role": "integration",
      "reads": [
        "module_context",
        "control_handoff",
        "feedforward_value_score",
        "feedback_review_risk"
      ],
      "question": "Does upstream evidence justify a downstream handoff hypothesis without changing settings from the page?"
    },
    {
      "role": "yield",
      "reads": [
        "metrology_coverage_score",
        "vm_uncertainty_proxy",
        "wafer_at_risk_proxy",
        "false_alarm_risk_proxy"
      ],
      "question": "Is sampling coverage and false-alarm risk explicit before any quality language appears?"
    }
  ],
  "public_boundary": [
    "No SEMI standard body, article body, figure, tool log, equipment trace, metrology table, model code, or factory procedure is copied.",
    "No process recipe, equipment-control instruction, APC programming, FDC deployment rule, interlock procedure, live server model, or quality disposition is active.",
    "No uploaded wafer data, proprietary tool data, production setting, foundry claim, product claim, qualification claim, public service intake, account, payment, comment, or job workflow is enabled.",
    "Rows are synthetic teaching proxies and require owned tool traces, physical metrology, uncertainty budgets, change-control records, and owner review before engineering reuse."
  ]
}