{ "schema": "semiagora.chamber-state-fdc-public-manifest.v1", "version": "2026-08-30-chamber-state-fdc-packet-v1", "packetVersion": "2026-08-30-chamber-state-fdc-v1", "experimentId": "SA-EQP-CHAMBER-STATE-FDC-031", "generatedAt": "2026-08-30T00:00:00+09:00", "status": "packet-only-not-deployed", "counts": { "rows": 6912, "physicalRows": 3456, "evidencePairs": 3456, "evidencePairComparisons": 656640, "columns": 192, "sources": 20, "claimNodes": 16, "normalizedProxyEquations": 20, "exactIntegerLedgerEquations": 16, "exactIntegerLedgers": 3, "prohibitedZeroFields": 112 }, "axes": [ { "id": "process_family", "count": 3, "values": [ "etch-chamber-like", "deposition-chamber-like", "clean-chamber-like" ], "meaning": "Categorical teaching family only; not a chemistry, material, recipe, tool, or chamber identity." }, { "id": "chamber_lifecycle_mode", "count": 4, "values": [ "post-maintenance-recovery-like", "seasoning-transition-like", "stable-production-like", "extended-run-drift-exposed-like" 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"maintenance-state-performance-and-requalification-boundary", "yield-decision-model-limit-and-owned-action-boundary" ], "upstreamBridges": [ { "sourceExperimentId": "SA-MET-INSPECTION-030", "allowedFields": [ "downstream_fdc_measurement_readiness_band", "downstream_measurement_traceability_band", "downstream_sampling_priority_band", "downstream_nuisance_priority_band", "downstream_uncertainty_priority_band", "downstream_fdc_evidence_gate", "downstream_yield_evidence_gate", "teaching_metrology_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-EQP-ENDPOINT-SENSOR-029", "allowedFields": [ "downstream_inspection_sensor_readiness_band", "downstream_measurement_traceability_band", "downstream_sampling_priority_band", "downstream_endpoint_disagreement_priority_band", "downstream_uncertainty_priority_band", "downstream_inspection_evidence_gate", "downstream_metrology_evidence_gate", "teaching_endpoint_sensor_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-ETCH-RIE-010", "allowedFields": [ "feature_particle_mix_band", "feature_directionality_band", "feature_passivation_band", "feature_profile_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-DEP-CVD-PECVD-013", "allowedFields": [ "downstream_thickness_uniformity_band", "downstream_conformality_band", "downstream_stress_damage_priority_band", "downstream_metrology_priority_band", "downstream_film_evidence_gate", "teaching_cvd_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-CLEAN-SURFACE-027", "allowedFields": [ "downstream_cmp_surface_readiness_band", "downstream_cmp_particle_residue_risk_band", "downstream_cmp_oxide_wetting_band", "downstream_cmp_adhesion_readiness_band", "downstream_cmp_collapse_priority_band", "downstream_metrology_priority_band", "downstream_cmp_evidence_gate", "downstream_metrology_evidence_gate", "teaching_clean_surface_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false } ], "downstreamBridge": { "targetExperimentId": "SA-EQP-EDGE-BEVEL-032", "allowedFields": [ "downstream_edge_bevel_equipment_readiness_band", "downstream_maintenance_priority_band", "downstream_drift_priority_band", "downstream_fault_signature_priority_band", "downstream_model_limit_priority_band", "downstream_edge_bevel_evidence_gate", "downstream_yield_evidence_gate", "teaching_chamber_state_handoff_gate" ], "physicalUnitsAllowed": false, "automaticRecipeHandoffAllowed": false, "automaticMaintenanceActionAllowed": false, "automaticEquipmentActionAllowed": false, "automaticDispositionAllowed": false }, "replacementEvidenceRequirements": [ "accountable run, lot, wafer, process, equipment, chamber, maintenance, FDC, metrology, yield, qualification, specification, and disposition ownership", "revisioned etch, deposition, clean, chamber, sensor, acquisition, synchronization, feature, model, alarm, matching, and maintenance configuration", "owned chamber-open, chamber-close, wet-clean, dry-clean, seasoning, process-run, idle, queue, interruption, and recovery histories", "owned chamber wall coating, deposition, erosion, residue, passivation, surface state, temperature, material, cleaning, and seasoning evidence", "owned edge ring, electrode, showerhead, liner, shield, seal, ESC, gas-delivery, RF, match-network, vacuum, and other consumable/part evidence", "owned chamber, module, tool, fleet, reference, golden-state, transfer, matching, offset, and comparability definitions", "owned pressure, flow, RF, impedance, optical, residual-gas, temperature, endpoint, particle, metrology, calibration, and time-alignment evidence", "owned FDC variable, preprocessing, phase segmentation, feature, baseline, model, label, threshold, alarm, suppression, and version histories", "owned drift, shift, change-point, sensor-change, recipe-change, product-mix, maintenance-transition, chamber-history, and confounder evidence", "owned inspection, metrology, virtual-metrology, sampling, uncertainty, method-correlation, traceability, and wafer-result evidence", "owned preventive, predictive, corrective, unscheduled, parts-replacement, service, repair, chamber-open, clean, seasoning, and requalification records", "owned fault definition, anomaly definition, subsystem scope, root-cause taxonomy, false-alarm, missed-alarm, confidence, review, and escalation evidence", "owned clock, unit, sensor identity, calibration, data-quality, missingness, censoring, latency, host, module-state, and lineage evidence", "owned SEMI or local equipment-state mapping, observation boundary, availability, maintainability, utilization, and module aggregation evidence", "owned process result, defect, yield, specification, qualification, release, hold, disposition, and accountable approval evidence", "approved EHS, interlock, chamber-entry, hazardous-material, vacuum, RF, gas, maintenance, lockout/tagout, and emergency procedure evidence" ], "requiredSections": [ "Explore", "Run Card", "Export", "Methods", "Limits", "Evidence" ], "limitation": "Original dimensionless chamber-state/FDC teaching replay only. No physical chamber state, wall condition, consumable age or life, process or sensor value, chamber offset, drift value, fault identity, alarm limit, maintenance trigger, reliability result, yield value, equipment action, recipe, qualification, disposition, or production fitness is computed or implied." }