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      "id": "brooks-marathon-express-platform",
      "label": "Vacuum Automation: Marathon Vacuum Systems",
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      "url": "https://www.brooks.com/solutions/vacuum-automation/",
      "sourceType": "official-technical-page-record",
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      "numericUse": "none",
      "use": "Vacuum robot, atmospheric/vacuum transfer, load-port, process-module integration, and modular cluster-platform vocabulary categories.",
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    {
      "id": "pan-chamber-matching-2012",
      "label": "Chamber Matching of Semiconductor Manufacturing Process Using Statistical Analysis",
      "publisher": "IEEE",
      "url": "https://doi.org/10.1109/TSMCC.2011.2161669",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
      "numericUse": "none",
      "use": "Parallel-chamber discrepancy, sensor-variable, product-quality, statistical comparison, and evidence-boundary vocabulary categories.",
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      "id": "cristalli-unsupervised-chamber-matching-2017",
      "label": "Unsupervised Semiconductor Chamber Matching Based on Shape Comparison",
      "publisher": "IFAC / Elsevier",
      "url": "https://doi.org/10.1016/j.ifacol.2017.08.363",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
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      "use": "Unsupervised chamber comparison, sensor time-series shape, discrepancy localization, and maintenance-evidence vocabulary categories.",
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      "label": "Chamber-to-Chamber Discrepancy Detection in Semiconductor Manufacturing",
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      "url": "https://doi.org/10.1109/TSM.2020.2965288",
      "sourceType": "peer-reviewed-article-record",
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      "numericUse": "none",
      "use": "Parallel-chamber matching, FDC summaries, product metrology, discrepancy detection, and root-cause-review vocabulary categories.",
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      "id": "ko-wafer-delay-workload-2021",
      "label": "Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types",
      "publisher": "IEEE",
      "url": "https://doi.org/10.1109/TASE.2021.3061140",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
      "numericUse": "none",
      "use": "Parallel-chamber workload, wafer delay, multi-type flow, dual-arm scheduling, and cycle-plan vocabulary categories.",
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    {
      "id": "yu-single-arm-cleaning-2018",
      "label": "Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations",
      "publisher": "IEEE",
      "url": "https://doi.org/10.1109/TASE.2017.2682271",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
      "numericUse": "none",
      "use": "Single-arm routing, parallel chambers, cleaning/purge, partial loading, cycle-time, and throughput vocabulary categories.",
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      "id": "yu-dual-arm-cleaning-2019",
      "label": "Scheduling Dual-Armed Cluster Tools With Chamber Cleaning Operations",
      "publisher": "IEEE",
      "url": "https://doi.org/10.1109/TASE.2017.2764105",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
      "numericUse": "none",
      "use": "Dual-arm routing, cleaning operations, hybrid task sequences, chamber use, and productivity vocabulary categories.",
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    {
      "id": "yu-wafer-delay-cleaning-2020",
      "label": "Wafer Delay Analysis and Control of Dual-Armed Cluster Tools With Chamber Cleaning Operations",
      "publisher": "Taylor & Francis",
      "url": "https://doi.org/10.1080/00207543.2019.1593547",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
      "numericUse": "none",
      "use": "Wafer delay, chamber cleaning, dual-arm task sequence, delay regulation, and bounded-control vocabulary categories.",
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      "id": "yuan-time-constrained-purge-2023",
      "label": "Scheduling of Time-Constrained Single-Arm Cluster Tools With Purge Operations in Wafer Fabrications",
      "publisher": "Elsevier",
      "url": "https://doi.org/10.1016/j.sysarc.2022.102788",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
      "numericUse": "none",
      "use": "Residency constraints, purge, start-up transient, steady-state, robot wait, and schedulability vocabulary categories.",
      "artifactUse": "Bibliographic metadata only; no body text, abstract wording, equation, coefficient, material, condition, geometry, method detail, result, figure, table, value, code, model output, proprietary output, or production decision copied."
    },
    {
      "id": "wang-multiple-types-residency-2020",
      "label": "Scheduling Dual-Arm Cluster Tools With Multiple Wafer Types and Residency Time Constraints",
      "publisher": "IEEE / CAA",
      "url": "https://doi.org/10.1109/JAS.2020.1003150",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
      "numericUse": "none",
      "use": "Multiple wafer types, residency constraints, workload balance, virtual modules, and cyclic routing vocabulary categories.",
      "artifactUse": "Bibliographic metadata only; no body text, abstract wording, equation, coefficient, material, condition, geometry, method detail, result, figure, table, value, code, model output, proprietary output, or production decision copied."
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      "label": "Efficient Approach to Cyclic Scheduling of Single-Arm Cluster Tools With Chamber Cleaning Operations and Wafer Residency Time Constraint",
      "publisher": "IEEE",
      "url": "https://doi.org/10.1109/TSM.2018.2811125",
      "sourceType": "peer-reviewed-article-record",
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      "numericUse": "none",
      "use": "Single-arm cyclic scheduling, chamber cleaning, residency-time constraint, feasibility, and delay vocabulary categories.",
      "artifactUse": "Bibliographic metadata only; no body text, abstract wording, equation, coefficient, material, condition, geometry, method detail, result, figure, table, value, code, model output, proprietary output, or production decision copied."
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      "label": "Cycle Time Analysis of Dual-Arm Cluster Tools for Wafer Fabrication Processes With Multiple Wafer Revisiting Times",
      "publisher": "Elsevier",
      "url": "https://doi.org/10.1016/j.cor.2014.03.024",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
      "numericUse": "none",
      "use": "Reentrant route, repeated module visits, dual-arm robot, steady-state limit, and cycle-time vocabulary categories.",
      "artifactUse": "Bibliographic metadata only; no body text, abstract wording, equation, coefficient, material, condition, geometry, method detail, result, figure, table, value, code, model output, proprietary output, or production decision copied."
    },
    {
      "id": "meuris-vacuum-cluster-interface-1994",
      "label": "Interface Engineering in Silicon Semiconductor Processing Using a Vacuum Cluster Tool",
      "publisher": "Elsevier",
      "url": "https://doi.org/10.1016/0167-9317(94)90015-9",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
      "numericUse": "none",
      "use": "Vacuum-integrated processing, interface exposure, background impurity, particle, and metallic-contamination vocabulary categories.",
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    },
    {
      "id": "carazzetti-cross-contamination-pvd-2024",
      "label": "Study of Cross-Contamination in Multi-Chamber PVD Systems Used for High-Throughput Seed Layer Deposition",
      "publisher": "IEEE",
      "url": "https://doi.org/10.1109/ESTC60143.2024.10712093",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
      "numericUse": "none",
      "use": "Multi-chamber PVD, wafer outgassing, chamber cross-talk, transfer timing, and contamination-carryover vocabulary categories.",
      "artifactUse": "Bibliographic metadata only; no body text, abstract wording, equation, coefficient, material, condition, geometry, method detail, result, figure, table, value, code, model output, proprietary output, or production decision copied."
    },
    {
      "id": "romauch-capacity-planning-2017",
      "label": "Capacity Planning for Cluster Tools in the Semiconductor Industry",
      "publisher": "Elsevier",
      "url": "https://doi.org/10.1016/j.ijpe.2017.01.005",
      "sourceType": "peer-reviewed-article-record",
      "rightsStatus": "link-only; publisher notices, access controls, and terms apply",
      "numericUse": "none",
      "use": "Load-lock limits, chamber allocation, parallel processing, cycle-time variation, capacity, and lot-combination vocabulary categories.",
      "artifactUse": "Bibliographic metadata only; no body text, abstract wording, equation, coefficient, material, condition, geometry, method detail, result, figure, table, value, code, model output, proprietary output, or production decision copied."
    }
  ],
  "claims": [
    {
      "node_id": "CTR-C01",
      "claim": "Cluster-tool review separates platform family, route topology, chamber matching, queue/residency evidence, carryover evidence, tracking/job context, and downstream handoff.",
      "source_ids": [
        "semi-e30-gem",
        "semi-e40-processing-management",
        "semi-e90-substrate-tracking",
        "semi-e94-control-job-management",
        "semi-e157-module-process-tracking",
        "brooks-marathon-express-platform"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C02",
      "claim": "Single-arm, dual-arm, and multi-cluster configurations remain distinct teaching families even when they share load-lock, module, route, and cleaning vocabulary.",
      "source_ids": [
        "brooks-marathon-express-platform",
        "yu-single-arm-cleaning-2018",
        "yu-dual-arm-cleaning-2019",
        "wang-multiple-types-residency-2020"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C03",
      "claim": "Serial, parallel, revisit, and load-lock-transition routes are represented as categorical topology postures, not as imported production schedules.",
      "source_ids": [
        "semi-e40-processing-management",
        "wu-revisiting-cycle-time-2015",
        "wang-multiple-types-residency-2020"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C04",
      "claim": "Substrate location, module-process context, and recipe-step traceability are separated from physical process values and live host state.",
      "source_ids": [
        "semi-e90-substrate-tracking",
        "semi-e157-module-process-tracking",
        "semi-e30-gem"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C05",
      "claim": "Process jobs and control jobs provide distinct context categories for material processing and host coordination without authorizing dispatch or disposition.",
      "source_ids": [
        "semi-e40-processing-management",
        "semi-e94-control-job-management",
        "semi-e30-gem"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C06",
      "claim": "Queue delay and wafer residency constraints are separated from cycle-time and throughput review and require owned timestamp definitions before physical use.",
      "source_ids": [
        "ko-wafer-delay-workload-2021",
        "yuan-time-constrained-purge-2023",
        "yang-single-arm-residency-cleaning-2018",
        "wang-multiple-types-residency-2020"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C07",
      "claim": "Chamber matching requires owned comparison populations, sensor context, metrology context, uncertainty, and acceptance evidence rather than a proxy label.",
      "source_ids": [
        "pan-chamber-matching-2012",
        "cristalli-unsupervised-chamber-matching-2017",
        "chouichi-chamber-discrepancy-2020"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C08",
      "claim": "Parallel-chamber workload balance is distinct from process-response matching and from production qualification.",
      "source_ids": [
        "ko-wafer-delay-workload-2021",
        "romauch-capacity-planning-2017",
        "wang-multiple-types-residency-2020"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C09",
      "claim": "Cleaning and purge operations alter route and delay review categories but do not establish wafer quality, chamber readiness, or safe operation.",
      "source_ids": [
        "yu-single-arm-cleaning-2018",
        "yu-dual-arm-cleaning-2019",
        "yu-wafer-delay-cleaning-2020",
        "yuan-time-constrained-purge-2023",
        "yang-single-arm-residency-cleaning-2018"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C10",
      "claim": "Start-up, steady-state, close-down, revisit, lot-switch, and exceptional states remain distinct from chronological prediction and live scheduling.",
      "source_ids": [
        "yuan-time-constrained-purge-2023",
        "wu-revisiting-cycle-time-2015",
        "yu-wafer-delay-cleaning-2020"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C11",
      "claim": "Contamination carryover, chamber cross-talk, wafer outgassing, and interface exposure are evidence categories distinct from contaminant identity and root-cause attribution.",
      "source_ids": [
        "meuris-vacuum-cluster-interface-1994",
        "carazzetti-cross-contamination-pvd-2024",
        "brooks-marathon-express-platform"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C12",
      "claim": "Load locks, vacuum transfer, robots, and process modules define a platform topology vocabulary without importing hardware geometry or timing.",
      "source_ids": [
        "brooks-marathon-express-platform",
        "meuris-vacuum-cluster-interface-1994",
        "romauch-capacity-planning-2017"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C13",
      "claim": "Parallel-chamber discrepancies may combine equipment, FDC, metrology, and product context while preserving evidence ownership and confounders.",
      "source_ids": [
        "pan-chamber-matching-2012",
        "cristalli-unsupervised-chamber-matching-2017",
        "chouichi-chamber-discrepancy-2020",
        "ko-wafer-delay-workload-2021"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C14",
      "claim": "Throughput, utilization, capacity, and cycle time are bounded review categories, not predicted factory KPIs or optimization guarantees.",
      "source_ids": [
        "romauch-capacity-planning-2017",
        "yu-single-arm-cleaning-2018",
        "yu-dual-arm-cleaning-2019"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C15",
      "claim": "Cluster-tool outputs remain evidence handoffs to facility, vacuum, exhaust, abatement, process, and factory review, never automatic commands or route actions.",
      "source_ids": [
        "semi-e30-gem",
        "semi-e94-control-job-management",
        "carazzetti-cross-contamination-pvd-2024"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    },
    {
      "node_id": "CTR-C16",
      "claim": "Every teaching label must be replaced by accountable route, timestamp, chamber, sensor, metrology, contamination, software, safety, and approval evidence before operational use.",
      "source_ids": [
        "semi-e40-processing-management",
        "semi-e90-substrate-tracking",
        "semi-e157-module-process-tracking",
        "chouichi-chamber-discrepancy-2020",
        "yu-wafer-delay-cleaning-2020"
      ],
      "boundary": "Category-level provenance only; no source wording, abstract, numeric value, material, condition, geometry, method, result, equation, code, threshold, timing limit, chamber-match result, contamination result, equipment output, route decision, or production action is imported."
    }
  ],
  "hardBoundary": "No source body, abstract wording, numeric value, equation, coefficient, geometry, material, recipe, process condition, method detail, result, figure, table, code, model output, named-tool output, proprietary output, qualification result, routing action, disposition, or live run enters generation."
}