{ "schema": "semiagora.cluster-tool-routing-public-manifest.v1", "version": "2026-08-30-cluster-tool-routing-packet-v1", "packetVersion": "2026-08-30-cluster-tool-routing-v1", "experimentId": "SA-EQP-CLUSTER-TOOL-033", "generatedAt": "2026-08-30T00:00:00+09:00", "status": "packet-only-not-deployed", "counts": { "rows": 6912, "physicalRows": 3456, "evidencePairs": 3456, "evidencePairComparisons": 656640, "columns": 192, "sources": 20, "claimNodes": 16, "normalizedProxyEquations": 20, "exactIntegerLedgerEquations": 16, "exactIntegerLedgers": 3, "prohibitedZeroFields": 112 }, "axes": [ { "id": "platform_family", "count": 3, "values": [ "single-arm-like", "dual-arm-like", "multi-cluster-like" ], "meaning": "Categorical platform teaching family only; not a robot configuration, chamber count, recipe, tool identity, or production route." }, { "id": "route_topology_state", "count": 4, "values": [ "serial-route-constrained-like", "parallel-route-exposed-like", "revisit-route-supported-like", 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"carryover-signature-supported-like" ], "meaning": "Categorical carryover-signature evidence posture only; not a contaminant identity, amount, transport path, probability, or root cause." }, { "id": "tracking_job_state", "count": 2, "values": [ "tracking-job-supported-like", "tracking-job-constrained-like" ], "meaning": "Categorical substrate, module-process, and job-context evidence posture only; not a live equipment state, host command, job record, or dispatch decision." }, { "id": "ordered_state", "count": 8, "values": [ "cluster-state-a", "cluster-state-b", "cluster-state-c", "cluster-state-d", "cluster-state-e", "cluster-state-f", "cluster-state-g", "cluster-state-h" ], "meaning": "Deterministic teaching sweep index only; it is not time, wafer order, queue duration, process duration, cycle count, chamber age, or equipment state." }, { "id": "evidence_posture", "count": 2, "values": [ "teaching_assumption", "replacement_slot" ], "meaning": "Paired evidence posture; replacement_slot 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"publicHoldArtifactSha256": "AE7DBF1E0525A51D0FA4B7FACEF2E903A2F1A0F58AD2224AD978D7CB972DD340" }, "contracts": { "state": { "file": "cluster-tool-routing-state-contract-v1.json", "sha256": "134F07019195651A313DBE35DEC19854F2561141B8505F71A332E3EF60052302" }, "metrics": { "file": "cluster-tool-routing-metric-contract-v1.json", "sha256": "2468D30D223CCA554E8BE332FBC66B99992D1404954095D0A991D9C39056BE18" }, "verifier": { "file": "independent-verifier-contract-v1.json", "sha256": "EB2C8DC329515AE9901B5C35690A6B2BE6423B9983F231F9804EC6BB92F7CD43" }, "sourceCatalog": { "file": "source_catalog_v1.json", "sha256": "EC7FED169F7F55CD827FFA1BCDBEE2D54B8BAB858152DC0822BAD044D0D897D9" }, "claimMap": { "file": "source_claim_map_v1.json", "sha256": "02E5A27653121F1E0195F84674F3EEEB7334286DFD3C29AB0E59BE165607C235" } }, "clusterToolRoutingRegimes": [ "route-topology-limited", "chamber-matching-limited", "workload-balancing-limited", "queue-time-limited", "residency-constraint-limited", "contamination-carryover-limited", "tracking-job-evidence-limited", "bounded-cluster-tool-routing-review" ], "requiredPhenomena": [ "single-arm-dual-arm-and-multi-cluster-family-separation", "serial-parallel-revisit-and-loadlock-route-topology-separation", "chamber-matching-and-workload-balancing-evidence-separation", "queue-time-transfer-delay-and-residency-constraint-separation", "steady-transient-cleaning-and-routing-review-boundary", "contamination-carryover-observation-and-root-cause-separation", "substrate-module-process-and-control-job-traceability-handoff", "throughput-factory-routing-model-limit-and-owned-action-boundary" ], "upstreamBridges": [ { "sourceExperimentId": "SA-EQP-EDGE-BEVEL-032", "allowedFields": [ "downstream_cluster_tool_readiness_band", "downstream_routing_priority_band", "downstream_contamination_priority_band", "downstream_edge_defect_priority_band", "downstream_model_limit_priority_band", "downstream_cluster_tool_evidence_gate", "downstream_yield_evidence_gate", "teaching_edge_bevel_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-EQP-CHAMBER-STATE-FDC-031", "allowedFields": [ "downstream_edge_bevel_equipment_readiness_band", "downstream_maintenance_priority_band", "downstream_drift_priority_band", "downstream_fault_signature_priority_band", "downstream_model_limit_priority_band", "downstream_edge_bevel_evidence_gate", "downstream_yield_evidence_gate", "teaching_chamber_state_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-EQP-ENDPOINT-SENSOR-029", "allowedFields": [ "downstream_chamber_matching_readiness_band", "downstream_sensor_traceability_band", "downstream_endpoint_ambiguity_priority_band", "downstream_model_limit_priority_band", "downstream_equipment_evidence_gate", "teaching_endpoint_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-CLEAN-SURFACE-027", "allowedFields": [ "downstream_particle_residue_risk_band", "downstream_surface_readiness_band", "downstream_contamination_priority_band", "downstream_metrology_priority_band", "downstream_process_evidence_gate", "teaching_clean_surface_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-THERMAL-RTP-LASER-026", "allowedFields": [ "downstream_thermal_history_readiness_band", "downstream_queue_time_priority_band", "downstream_interface_priority_band", "downstream_model_limit_priority_band", "downstream_process_evidence_gate", "teaching_thermal_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false } ], "downstreamBridge": { "targetExperimentId": "SA-EQP-FACILITY-ABATEMENT-034", "allowedFields": [ "downstream_facility_abatement_readiness_band", "downstream_vacuum_routing_priority_band", "downstream_exhaust_contamination_priority_band", "downstream_foreline_priority_band", "downstream_model_limit_priority_band", "downstream_facility_abatement_evidence_gate", "downstream_factory_evidence_gate", "teaching_cluster_tool_handoff_gate" ], "physicalUnitsAllowed": false, "automaticRecipeHandoffAllowed": false, "automaticRoutingActionAllowed": false, "automaticMaintenanceActionAllowed": false, "automaticEquipmentActionAllowed": false, "automaticDispositionAllowed": false }, "replacementEvidenceRequirements": [ "accountable lot, wafer, carrier, recipe, route, process-job, control-job, equipment, module, chamber, and disposition ownership", "revisioned cluster-platform, load-lock, transfer chamber, robot, process-module, aligner, cooler, sensor, and host-interface configuration", "owned substrate location, carrier slot, chamber assignment, route step, revisit, parallel-module, and transfer-event records", "owned queue-time, residency-time, process-time, robot-task-time, pumpdown, vent, wait, delay, and cycle-time definitions and timestamps", "owned process-job, control-job, substrate-tracking, module-process-tracking, recipe-step, and event-context records", "owned chamber matching baseline, comparison population, sensor variables, metrology variables, uncertainty, acceptance criteria, and approval", "owned workload, chamber availability, maintenance, cleaning, purge, qualification, and parallel-module state evidence", "owned contamination species, outgassing, residue, particle, cross-talk, carryover path, sampling, and analytical-method evidence", "owned start-up, steady-state, close-down, lot-switch, failure, recovery, and exceptional-event evidence", "owned throughput, utilization, bottleneck, capacity, cycle-time, and completion-prediction metric contracts", "owned route-feasibility, deadlock, blocking, buffer, robot-conflict, and residency-constraint verification evidence", "owned chamber-state/FDC, endpoint, edge/bevel/backside, clean-surface, thermal-history, and downstream-facility bridge evidence", "owned calibration, reference, sensitivity, specificity, missingness, censoring, traceability, and model-drift evidence", "owned qualification, specification, control plan, review, release, hold, disposition, accountable approval, and model-version evidence", "approved vacuum, gas, RF, thermal, robot, load-lock, contamination, EHS, interlock, lockout/tagout, and emergency procedure evidence", "revisioned software, scheduler, dispatcher, host communication, alarm, override, rollback, cybersecurity, and change-control evidence" ], "requiredSections": [ "Explore", "Run Card", "Export", "Methods", "Limits", "Evidence" ], "limitation": "Original dimensionless cluster-tool routing teaching replay only. No physical route, queue duration, residency limit, chamber assignment, match result, contamination value, throughput prediction, equipment action, recipe, qualification, disposition, or production fitness is computed or implied." }