{
  "schema": "semiagora.knowledge-sim-result.v1",
  "experimentId": "KNOWLEDGE_SIM_SPRINT_2026-08-14",
  "generatedAtKst": "2026-08-14",
  "sections": [
    "Explore",
    "Run Card",
    "Export",
    "Methods",
    "Limits",
    "Evidence"
  ],
  "boundary": [
    "precomputed educational data only",
    "no live solver or server-side execution",
    "no proprietary PDK, foundry model deck, measured company data, or process recipe",
    "no equipment operation instructions or production qualification claims",
    "external literature and repositories are cited as source spines, not copied"
  ],
  "simulationId": "SA-PROC-CMP-001",
  "slug": "cmp-pattern-density-dishing-erosion",
  "title": "CMP pattern-density dishing and erosion replay",
  "track": "Virtual Fab / CMP and Metrology",
  "lessonRoute": "/learn/virtual-fab",
  "simulationRoute": "/simulations/cmp-pattern-density-dishing-erosion",
  "promotionPriority": "P0",
  "modelType": "toy pattern-density planarization replay",
  "sourceLinks": [
    "https://www.mdpi.com/2079-9292/9/7/1158",
    "https://link.springer.com/article/10.1007/s40684-025-00819-9"
  ],
  "knobs": [
    {
      "name": "pattern_density",
      "unit": "fraction",
      "values": [
        0.2,
        0.5,
        0.8
      ]
    },
    {
      "name": "feature_width_um",
      "unit": "um",
      "values": [
        0.2,
        1,
        10
      ]
    },
    {
      "name": "overpolish_pct",
      "unit": "%",
      "values": [
        5,
        15,
        30
      ]
    },
    {
      "name": "pad_age",
      "unit": "category",
      "values": [
        "fresh",
        "seasoned"
      ]
    }
  ],
  "metrics": [
    "dishing_nm_proxy",
    "erosion_nm_proxy",
    "removal_nonuniformity_pct_proxy",
    "planarization_score"
  ],
  "limitations": [
    "No slurry chemistry, pad conditioning recipe, or tool setting is disclosed.",
    "Pattern density is normalized and not tied to a product layout.",
    "Use as layout/process literacy, not CMP process development."
  ],
  "counts": {
    "rows": 54,
    "knobs": 4,
    "metrics": 4
  },
  "representativeFindings": [
    "CMP is a perfect SemiAgora track because it turns layout density into a physical manufacturing consequence.",
    "The first public card should emphasize dishing, erosion, dummy fill, and metrology evidence rather than polishing recipes.",
    "This is a strong bridge between process, layout, and yield/data roles."
  ],
  "rows": [
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
      "feature_width_um": 0.2,
      "overpolish_pct": 5,
      "pad_age": "fresh",
      "dishing_nm_proxy": 6.612,
      "erosion_nm_proxy": 9.473,
      "residual_topography_nm_proxy": 11.553,
      "removal_nonuniformity_pct_proxy": 6.378,
      "planarization_score": 57.28,
      "band": "dummy-fill-watch"
    },
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
      "feature_width_um": 0.2,
      "overpolish_pct": 5,
      "pad_age": "seasoned",
      "dishing_nm_proxy": 8.449,
      "erosion_nm_proxy": 12.105,
      "residual_topography_nm_proxy": 14.762,
      "removal_nonuniformity_pct_proxy": 8.478,
      "planarization_score": 44.165,
      "band": "layout-process-risk"
    },
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
      "feature_width_um": 0.2,
      "overpolish_pct": 15,
      "pad_age": "fresh",
      "dishing_nm_proxy": 12.142,
      "erosion_nm_proxy": 11.667,
      "residual_topography_nm_proxy": 16.839,
      "removal_nonuniformity_pct_proxy": 6.933,
      "planarization_score": 46.711,
      "band": "dummy-fill-watch"
    },
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
      "feature_width_um": 0.2,
      "overpolish_pct": 15,
      "pad_age": "seasoned",
      "dishing_nm_proxy": 15.515,
      "erosion_nm_proxy": 14.908,
      "residual_topography_nm_proxy": 21.517,
      "removal_nonuniformity_pct_proxy": 9.033,
      "planarization_score": 31.247,
      "band": "layout-process-risk"
    },
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
      "feature_width_um": 0.2,
      "overpolish_pct": 30,
      "pad_age": "fresh",
      "dishing_nm_proxy": 20.436,
      "erosion_nm_proxy": 14.958,
      "residual_topography_nm_proxy": 25.326,
      "removal_nonuniformity_pct_proxy": 7.767,
      "planarization_score": 29.966,
      "band": "layout-process-risk"
    },
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
      "feature_width_um": 0.2,
      "overpolish_pct": 30,
      "pad_age": "seasoned",
      "dishing_nm_proxy": 26.113,
      "erosion_nm_proxy": 19.113,
      "residual_topography_nm_proxy": 32.361,
      "removal_nonuniformity_pct_proxy": 9.867,
      "planarization_score": 10.73,
      "band": "layout-process-risk"
    },
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
      "feature_width_um": 1,
      "overpolish_pct": 5,
      "pad_age": "fresh",
      "dishing_nm_proxy": 8.179,
      "erosion_nm_proxy": 9.473,
      "residual_topography_nm_proxy": 12.516,
      "removal_nonuniformity_pct_proxy": 6.378,
      "planarization_score": 55.739,
      "band": "dummy-fill-watch"
    },
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
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      "pad_age": "seasoned",
      "dishing_nm_proxy": 10.451,
      "erosion_nm_proxy": 12.105,
      "residual_topography_nm_proxy": 15.992,
      "removal_nonuniformity_pct_proxy": 8.478,
      "planarization_score": 42.197,
      "band": "layout-process-risk"
    },
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
      "feature_width_um": 1,
      "overpolish_pct": 15,
      "pad_age": "fresh",
      "dishing_nm_proxy": 13.709,
      "erosion_nm_proxy": 11.667,
      "residual_topography_nm_proxy": 18.002,
      "removal_nonuniformity_pct_proxy": 6.933,
      "planarization_score": 44.851,
      "band": "layout-process-risk"
    },
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      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
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      "pad_age": "seasoned",
      "dishing_nm_proxy": 17.517,
      "erosion_nm_proxy": 14.908,
      "residual_topography_nm_proxy": 23.002,
      "removal_nonuniformity_pct_proxy": 9.033,
      "planarization_score": 28.87,
      "band": "layout-process-risk"
    },
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
      "feature_width_um": 1,
      "overpolish_pct": 30,
      "pad_age": "fresh",
      "dishing_nm_proxy": 22.003,
      "erosion_nm_proxy": 14.958,
      "residual_topography_nm_proxy": 26.606,
      "removal_nonuniformity_pct_proxy": 7.767,
      "planarization_score": 27.917,
      "band": "layout-process-risk"
    },
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
      "feature_width_um": 1,
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      "pad_age": "seasoned",
      "dishing_nm_proxy": 28.115,
      "erosion_nm_proxy": 19.113,
      "residual_topography_nm_proxy": 33.997,
      "removal_nonuniformity_pct_proxy": 9.867,
      "planarization_score": 8.112,
      "band": "layout-process-risk"
    },
    {
      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.2,
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      "pad_age": "fresh",
      "dishing_nm_proxy": 25.805,
      "erosion_nm_proxy": 9.473,
      "residual_topography_nm_proxy": 27.489,
      "removal_nonuniformity_pct_proxy": 6.378,
      "planarization_score": 31.782,
      "band": "layout-process-risk"
    },
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      "dishing_nm_proxy": 31.334,
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      "slug": "cmp-pattern-density-dishing-erosion",
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    },
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      "slug": "cmp-pattern-density-dishing-erosion",
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    },
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      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
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      "slug": "cmp-pattern-density-dishing-erosion",
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      "slug": "cmp-pattern-density-dishing-erosion",
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    },
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      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
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      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
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      "slug": "cmp-pattern-density-dishing-erosion",
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      "simulationId": "SA-PROC-CMP-001",
      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.8,
      "feature_width_um": 0.2,
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      "pad_age": "fresh",
      "dishing_nm_proxy": 5.528,
      "erosion_nm_proxy": 22.636,
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      "band": "layout-process-risk"
    },
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      "slug": "cmp-pattern-density-dishing-erosion",
      "pattern_density": 0.8,
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      "dishing_nm_proxy": 7.063,
      "erosion_nm_proxy": 28.924,
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      "removal_nonuniformity_pct_proxy": 8.478,
      "planarization_score": 20.146,
      "band": "layout-process-risk"
    },
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