{ "schema": "semiagora.ecd-gapfill-public-manifest.v1", "version": "2026-08-29-packet-v1", "packetVersion": "2026-08-29-ecd-gapfill-v1", "experimentId": "SA-PROC-DEP-ECD-GAPFILL-023", "generatedAt": "2026-08-29T00:00:00+09:00", "status": "packet-only-not-deployed", "counts": { "rows": 6912, "physicalRows": 3456, "evidencePairs": 3456, "evidencePairComparisons": 656640, "columns": 192, "sources": 20, "claimNodes": 16, "normalizedProxyEquations": 20, "exactIntegerLedgerEquations": 16, "exactIntegerLedgers": 3, "prohibitedZeroFields": 112 }, "axes": [ { "id": "ecd_fill_family", "count": 6, "values": [ "damascene-trench-like", "damascene-via-like", "dual-damascene-connected-like", "microvia-bottom-up-like", "tsv-bottom-up-like", "large-via-active-zone-like" ], "meaning": "Six bounded feature and fill-behavior vocabularies; not transferable geometries, materials, or recipes." }, { "id": "deposition_drive_mode", "count": 2, "values": [ "steady-drive-like", "waveform-managed-like" ], "meaning": "Two categorical electrical-drive modes; no current, potential, waveform, timing, or equipment setting." }, { "id": "seed_interface_state", "count": 3, "values": [ "interrupted-like", "transitional-like", "continuous-like" ], "meaning": "Categorical incoming seed and interface state; not measured continuity, resistance, activation, or coverage." }, { "id": "additive_balance_state", "count": 3, "values": [ "suppression-dominant-like", "competitive-like", "activation-supported-like" ], "meaning": "Categorical suppressor, accelerator, and leveler balance state; not identity, concentration, adsorption, or bath chemistry." }, { "id": "feature_transport_state", "count": 2, "values": [ "constrained-like", "supported-like" ], "meaning": "Categorical feature-transport posture; not diffusivity, boundary-layer thickness, flow, or depletion measurement." }, { "id": "feature_position_state", "count": 2, "values": [ "field-like", "edge-loaded-like" ], "meaning": "Categorical field or edge-loaded view; not wafer coordinate, pattern density, or electrical contact geometry." }, { "id": "ordered_state", "count": 8, "values": [ "fill-state-a", "fill-state-b", "fill-state-c", "fill-state-d", "fill-state-e", "fill-state-f", "fill-state-g", "fill-state-h" ], "meaning": "Ordered non-time teaching states; not charge, cycle count, deposition duration, waveform step, or recipe." }, { "id": "evidence_posture", "count": 2, "values": [ "teaching_assumption", "replacement_slot" ], "meaning": "Paired evidence metadata only; physical values are identical across each adjacent pair." } ], "ranges": { "ordered_state_norm": { "min": 0, "max": 1 }, "seed_continuity_readiness_proxy": { "min": 0.4052, "max": 0.850914286 }, "electrochemical_interface_readiness_proxy": { "min": 0.450744, "max": 0.822801143 }, "additive_balance_readiness_proxy": { "min": 0.4698, "max": 0.810657143 }, "bottom_up_activation_proxy": { "min": 0.46648272, "max": 0.8380824 }, "current_distribution_control_proxy": { "min": 0.4964, "max": 0.83 }, "feature_transport_readiness_proxy": { "min": 0.46, "max": 0.834 }, "fill_front_progress_proxy": { "min": 0.480141453, "max": 0.853322854 }, "sidewall_growth_burden_proxy": { "min": 0.22204415, "max": 0.643720419 }, "pinch_off_burden_proxy": { "min": 0.211078614, "max": 0.565304611 }, "void_seam_burden_proxy": { "min": 0.27996245, "max": 0.61733404 }, "overburden_control_proxy": { "min": 0.498838366, "max": 0.815436468 }, "within_pattern_fill_uniformity_proxy": { "min": 0.571852633, "max": 0.829924321 }, "wafer_fill_uniformity_proxy": { "min": 0.52900604, "max": 0.835843762 }, "defect_escape_burden_proxy": { "min": 0.308642509, "max": 0.674655484 }, "process_drift_burden_proxy": { "min": 0.247942857, "max": 0.6484 }, "model_limit_burden_proxy": { "min": 0.3152, "max": 0.6956 }, "metrology_readiness_proxy": { "min": 0.559270699, "max": 0.81338036 }, "cmp_handoff_readiness_proxy": { "min": 0.55049102, "max": 0.794878287 }, "ecd_gapfill_handoff_readiness_proxy": { "min": 0.561575205, "max": 0.823031397 } }, "distributions": { "ecdGapfillRegime": { "interface-readiness-limited": 1152, "seed-continuity-limited": 1152, "additive-balance-limited": 512, "bounded-ecd-gapfill-review": 3300, "cmp-metrology-readiness-limited": 176, "fill-closure-limited": 80, "feature-transport-limited": 440, "current-distribution-limited": 100 }, "labels": { "plating_operator_gate": { "review-interface-readiness": 1152, "review-seed-continuity": 1152, "review-additive-balance": 512, "review-process-drift": 728, "proceed-to-evidence-review": 2572, "review-cmp-metrology": 176, "review-fill-closure": 80, "review-feature-transport": 440, "review-current-distribution": 100 }, "electrochemical_engineer_gate": { "review-electrochemical-interface": 1152, "review-seed-interface": 1152, "review-additive-competition": 512, "bounded-comparison-ready": 3124, "review-model-limit": 176, "review-cmp-handoff": 176, "review-fill-front": 80, "review-feature-transport": 440, "review-current-distribution": 100 }, "integration_gate": { "ecd-gapfill-handoff-blocked": 6912 }, "yield_gate": { "review-fill-continuity": 1076, "review-void-seam": 664, "bounded-teaching-review": 4870, "review-cmp-handoff": 88, "review-fill-uniformity": 198, "review-metrology": 16 }, "measurement_traceability_gate": { "measurement-plan-required": 2160, "owned-measurement-replacement-required": 4752 }, "upstream_pvd_seed_continuity_band": { "limited-like": 2304, "transitional-like": 2064, "bounded-like": 2544 }, "upstream_pvd_feature_coverage_band": { "limited-like": 2304, "transitional-like": 2264, "bounded-like": 2344 }, "upstream_pvd_evidence_gate": { "replacement-evidence-required": 6912 }, "upstream_ald_barrier_readiness_band": { "limited-like": 2304, "transitional-like": 2064, "bounded-like": 2544 }, "upstream_ald_interface_band": { "limited-like": 2304, "transitional-like": 2608, "bounded-like": 2000 }, "upstream_ald_evidence_gate": { "replacement-evidence-required": 6912 }, "upstream_wet_surface_readiness_band": { "limited-like": 2304, "transitional-like": 2264, "bounded-like": 2344 }, "upstream_wet_residue_risk_band": { "higher-like": 1026, "intermediate-like": 4952, "lower-like": 934 }, "upstream_wet_evidence_gate": { "replacement-evidence-required": 6912 }, "downstream_cmp_overburden_band": { "bounded-like": 2682, "transitional-like": 4066, "limited-like": 164 }, "downstream_cmp_entry_uniformity_band": { "transitional-like": 2604, "bounded-like": 4290, "limited-like": 18 }, "downstream_cmp_evidence_gate": { "replacement-evidence-required": 6912 }, "downstream_fill_continuity_band": { "incomplete-like": 346, "transitional-like": 3476, "bounded-like": 3090 }, "downstream_void_seam_priority_band": { "review-like": 3850, "high-priority": 142, "lower-priority": 2920 }, "downstream_current_uniformity_band": { "bounded-like": 3368, "transitional-like": 3328, "limited-like": 216 }, "downstream_metrology_priority_band": { "interface": 1128, "seed-continuity": 1034, "void-seam": 142, "additive-balance": 912, "drift-series": 380, "cmp-handoff": 2, "completion-state": 1788, "fill-front": 114, "model-limit": 62, "uniformity": 100, "feature-transport": 692, "current-distribution": 368, "overburden": 190 }, "downstream_inspection_evidence_gate": { "replacement-evidence-required": 6912 }, "teaching_ecd_gapfill_handoff_gate": { "blocked-pending-owned-evidence": 6912 } } }, "representativeStates": [ { "physical_key": "damascene-trench-like|steady-drive-like|interrupted-like|suppression-dominant-like|constrained-like|field-like|fill-state-f", "ecd_fill_family": "damascene-trench-like", "deposition_drive_mode": "steady-drive-like", "seed_interface_state": "interrupted-like", "additive_balance_state": "suppression-dominant-like", "feature_transport_state": "constrained-like", "feature_position_state": "field-like", "ordered_state": "fill-state-f", "ecd_gapfill_regime": "seed-continuity-limited", "ordered_state_norm": 0.714285714, "seed_continuity_readiness_proxy": 0.471885714, "electrochemical_interface_readiness_proxy": 0.465414857, "additive_balance_readiness_proxy": 0.520771429, "bottom_up_activation_proxy": 0.611583566, "current_distribution_control_proxy": 0.646685714, "feature_transport_readiness_proxy": 0.612685714, "fill_front_progress_proxy": 0.641615027, "sidewall_growth_burden_proxy": 0.412712672, "pinch_off_burden_proxy": 0.387604627, "void_seam_burden_proxy": 0.554765972, "overburden_control_proxy": 0.653330415, "within_pattern_fill_uniformity_proxy": 0.667421332, "wafer_fill_uniformity_proxy": 0.704337069, "defect_escape_burden_proxy": 0.615608584, "process_drift_burden_proxy": 0.504228571, "model_limit_burden_proxy": 0.561485714, "metrology_readiness_proxy": 0.673478616, "cmp_handoff_readiness_proxy": 0.661898605, "ecd_gapfill_handoff_readiness_proxy": 0.661403627, "plating_operator_gate": "review-seed-continuity", "electrochemical_engineer_gate": "review-seed-interface", "integration_gate": "ecd-gapfill-handoff-blocked", "yield_gate": "review-void-seam", "downstream_metrology_priority_band": "seed-continuity" }, { "physical_key": "damascene-trench-like|steady-drive-like|interrupted-like|suppression-dominant-like|constrained-like|field-like|fill-state-a", "ecd_fill_family": "damascene-trench-like", "deposition_drive_mode": "steady-drive-like", "seed_interface_state": "interrupted-like", "additive_balance_state": "suppression-dominant-like", "feature_transport_state": "constrained-like", "feature_position_state": "field-like", "ordered_state": "fill-state-a", "ecd_gapfill_regime": "interface-readiness-limited", "ordered_state_norm": 0, "seed_continuity_readiness_proxy": 0.5048, "electrochemical_interface_readiness_proxy": 0.472656, "additive_balance_readiness_proxy": 0.5022, "bottom_up_activation_proxy": 0.52352144, "current_distribution_control_proxy": 0.7024, "feature_transport_readiness_proxy": 0.6684, "fill_front_progress_proxy": 0.537528346, "sidewall_growth_burden_proxy": 0.321878141, "pinch_off_burden_proxy": 0.33860388, "void_seam_burden_proxy": 0.545809927, "overburden_control_proxy": 0.716825749, "within_pattern_fill_uniformity_proxy": 0.659013039, "wafer_fill_uniformity_proxy": 0.747702899, "defect_escape_burden_proxy": 0.60396245, "process_drift_burden_proxy": 0.5728, "model_limit_burden_proxy": 0.4472, "metrology_readiness_proxy": 0.638768827, "cmp_handoff_readiness_proxy": 0.681186731, "ecd_gapfill_handoff_readiness_proxy": 0.643706008, "plating_operator_gate": "review-interface-readiness", "electrochemical_engineer_gate": "review-electrochemical-interface", "integration_gate": "ecd-gapfill-handoff-blocked", "yield_gate": "review-fill-continuity", "downstream_metrology_priority_band": "interface" }, { "physical_key": "damascene-trench-like|steady-drive-like|transitional-like|suppression-dominant-like|constrained-like|field-like|fill-state-a", "ecd_fill_family": "damascene-trench-like", "deposition_drive_mode": "steady-drive-like", "seed_interface_state": "transitional-like", "additive_balance_state": "suppression-dominant-like", "feature_transport_state": "constrained-like", "feature_position_state": "field-like", "ordered_state": "fill-state-a", "ecd_gapfill_regime": "additive-balance-limited", "ordered_state_norm": 0, "seed_continuity_readiness_proxy": 0.6704, "electrochemical_interface_readiness_proxy": 0.637088, "additive_balance_readiness_proxy": 0.5022, "bottom_up_activation_proxy": 0.56298512, "current_distribution_control_proxy": 0.7024, "feature_transport_readiness_proxy": 0.6684, "fill_front_progress_proxy": 0.579886029, "sidewall_growth_burden_proxy": 0.282774678, "pinch_off_burden_proxy": 0.292853376, "void_seam_burden_proxy": 0.462360121, "overburden_control_proxy": 0.719954026, "within_pattern_fill_uniformity_proxy": 0.678551535, "wafer_fill_uniformity_proxy": 0.751456831, "defect_escape_burden_proxy": 0.516623558, "process_drift_burden_proxy": 0.5472, "model_limit_burden_proxy": 0.4472, "metrology_readiness_proxy": 0.656676314, "cmp_handoff_readiness_proxy": 0.700160861, "ecd_gapfill_handoff_readiness_proxy": 0.668841576, "plating_operator_gate": "review-additive-balance", "electrochemical_engineer_gate": "review-additive-competition", "integration_gate": "ecd-gapfill-handoff-blocked", "yield_gate": "review-fill-continuity", "downstream_metrology_priority_band": "additive-balance" }, { "physical_key": "damascene-via-like|steady-drive-like|transitional-like|competitive-like|constrained-like|edge-loaded-like|fill-state-h", "ecd_fill_family": "damascene-via-like", "deposition_drive_mode": "steady-drive-like", "seed_interface_state": "transitional-like", "additive_balance_state": "competitive-like", "feature_transport_state": "constrained-like", "feature_position_state": "edge-loaded-like", "ordered_state": "fill-state-h", "ecd_gapfill_regime": "current-distribution-limited", "ordered_state_norm": 1, "seed_continuity_readiness_proxy": 0.596, "electrochemical_interface_readiness_proxy": 0.64952, "additive_balance_readiness_proxy": 0.6422, "bottom_up_activation_proxy": 0.6915688, "current_distribution_control_proxy": 0.5356, "feature_transport_readiness_proxy": 0.516, "fill_front_progress_proxy": 0.711520512, "sidewall_growth_burden_proxy": 0.554045616, "pinch_off_burden_proxy": 0.483749582, "void_seam_burden_proxy": 0.484121659, "overburden_control_proxy": 0.540620351, "within_pattern_fill_uniformity_proxy": 0.641321809, "wafer_fill_uniformity_proxy": 0.573624421, "defect_escape_burden_proxy": 0.537054233, "process_drift_burden_proxy": 0.5868, "model_limit_burden_proxy": 0.6396, "metrology_readiness_proxy": 0.652917217, "cmp_handoff_readiness_proxy": 0.612003416, "ecd_gapfill_handoff_readiness_proxy": 0.651291229, "plating_operator_gate": "review-current-distribution", "electrochemical_engineer_gate": "review-current-distribution", "integration_gate": "ecd-gapfill-handoff-blocked", "yield_gate": "review-fill-uniformity", "downstream_metrology_priority_band": "current-distribution" }, { "physical_key": "damascene-via-like|steady-drive-like|transitional-like|suppression-dominant-like|constrained-like|edge-loaded-like|fill-state-f", "ecd_fill_family": "damascene-via-like", "deposition_drive_mode": "steady-drive-like", "seed_interface_state": "transitional-like", "additive_balance_state": "suppression-dominant-like", "feature_transport_state": "constrained-like", "feature_position_state": "edge-loaded-like", "ordered_state": "fill-state-f", "ecd_gapfill_regime": "feature-transport-limited", "ordered_state_norm": 0.714285714, "seed_continuity_readiness_proxy": 0.630285714, "electrochemical_interface_readiness_proxy": 0.628262857, "additive_balance_readiness_proxy": 0.523971429, "bottom_up_activation_proxy": 0.626171086, "current_distribution_control_proxy": 0.557885714, "feature_transport_readiness_proxy": 0.538285714, "fill_front_progress_proxy": 0.657813632, "sidewall_growth_burden_proxy": 0.475142919, "pinch_off_burden_proxy": 0.44485484, "void_seam_burden_proxy": 0.503448135, "overburden_control_proxy": 0.569423995, "within_pattern_fill_uniformity_proxy": 0.632584848, "wafer_fill_uniformity_proxy": 0.595057365, "defect_escape_burden_proxy": 0.563946924, "process_drift_burden_proxy": 0.554228571, "model_limit_burden_proxy": 0.617885714, "metrology_readiness_proxy": 0.635531252, "cmp_handoff_readiness_proxy": 0.61555058, "ecd_gapfill_handoff_readiness_proxy": 0.63432422, "plating_operator_gate": "review-feature-transport", "electrochemical_engineer_gate": "review-feature-transport", "integration_gate": "ecd-gapfill-handoff-blocked", "yield_gate": "review-cmp-handoff", "downstream_metrology_priority_band": "additive-balance" }, { "physical_key": "damascene-trench-like|steady-drive-like|transitional-like|competitive-like|constrained-like|edge-loaded-like|fill-state-a", "ecd_fill_family": "damascene-trench-like", "deposition_drive_mode": "steady-drive-like", "seed_interface_state": "transitional-like", "additive_balance_state": "competitive-like", "feature_transport_state": "constrained-like", "feature_position_state": "edge-loaded-like", "ordered_state": "fill-state-a", "ecd_gapfill_regime": "fill-closure-limited", "ordered_state_norm": 0, "seed_continuity_readiness_proxy": 0.6704, "electrochemical_interface_readiness_proxy": 0.665888, "additive_balance_readiness_proxy": 0.649, "bottom_up_activation_proxy": 0.56979312, "current_distribution_control_proxy": 0.6304, "feature_transport_readiness_proxy": 0.618, "fill_front_progress_proxy": 0.571007949, "sidewall_growth_burden_proxy": 0.424589238, "pinch_off_burden_proxy": 0.386637957, "void_seam_burden_proxy": 0.456606992, "overburden_control_proxy": 0.640928861, "within_pattern_fill_uniformity_proxy": 0.64165764, "wafer_fill_uniformity_proxy": 0.647554633, "defect_escape_burden_proxy": 0.509343925, "process_drift_burden_proxy": 0.5868, "model_limit_burden_proxy": 0.4772, "metrology_readiness_proxy": 0.614628038, "cmp_handoff_readiness_proxy": 0.652168306, "ecd_gapfill_handoff_readiness_proxy": 0.635609711, "plating_operator_gate": "review-fill-closure", "electrochemical_engineer_gate": "review-fill-front", "integration_gate": "ecd-gapfill-handoff-blocked", "yield_gate": "review-fill-continuity", "downstream_metrology_priority_band": "fill-front" }, { "physical_key": "damascene-trench-like|steady-drive-like|transitional-like|suppression-dominant-like|constrained-like|edge-loaded-like|fill-state-f", "ecd_fill_family": "damascene-trench-like", "deposition_drive_mode": "steady-drive-like", "seed_interface_state": "transitional-like", "additive_balance_state": "suppression-dominant-like", "feature_transport_state": "constrained-like", "feature_position_state": "edge-loaded-like", "ordered_state": "fill-state-f", "ecd_gapfill_regime": "cmp-metrology-readiness-limited", "ordered_state_norm": 0.714285714, "seed_continuity_readiness_proxy": 0.637485714, "electrochemical_interface_readiness_proxy": 0.629846857, "additive_balance_readiness_proxy": 0.520771429, "bottom_up_activation_proxy": 0.618647246, "current_distribution_control_proxy": 0.574685714, "feature_transport_readiness_proxy": 0.562285714, "fill_front_progress_proxy": 0.65992471, "sidewall_growth_burden_proxy": 0.47448121, "pinch_off_burden_proxy": 0.440425307, "void_seam_burden_proxy": 0.501480674, "overburden_control_proxy": 0.580708932, "within_pattern_fill_uniformity_proxy": 0.640749628, "wafer_fill_uniformity_proxy": 0.608119289, "defect_escape_burden_proxy": 0.561654301, "process_drift_burden_proxy": 0.554228571, "model_limit_burden_proxy": 0.615485714, "metrology_readiness_proxy": 0.643001505, "cmp_handoff_readiness_proxy": 0.626383304, "ecd_gapfill_handoff_readiness_proxy": 0.639974656, "plating_operator_gate": "review-cmp-metrology", "electrochemical_engineer_gate": "review-cmp-handoff", "integration_gate": "ecd-gapfill-handoff-blocked", "yield_gate": "bounded-teaching-review", "downstream_metrology_priority_band": "additive-balance" }, { "physical_key": "damascene-trench-like|steady-drive-like|transitional-like|suppression-dominant-like|constrained-like|field-like|fill-state-c", "ecd_fill_family": "damascene-trench-like", "deposition_drive_mode": "steady-drive-like", "seed_interface_state": "transitional-like", "additive_balance_state": "suppression-dominant-like", "feature_transport_state": "constrained-like", "feature_position_state": "field-like", "ordered_state": "fill-state-c", "ecd_gapfill_regime": "bounded-ecd-gapfill-review", "ordered_state_norm": 0.285714286, "seed_continuity_readiness_proxy": 0.688914286, "electrochemical_interface_readiness_proxy": 0.641161143, "additive_balance_readiness_proxy": 0.530771429, "bottom_up_activation_proxy": 0.604534103, "current_distribution_control_proxy": 0.680114286, "feature_transport_readiness_proxy": 0.646114286, "fill_front_progress_proxy": 0.624432413, "sidewall_growth_burden_proxy": 0.317970147, "pinch_off_burden_proxy": 0.307251223, "void_seam_burden_proxy": 0.455480395, "overburden_control_proxy": 0.69464696, "within_pattern_fill_uniformity_proxy": 0.683920702, "wafer_fill_uniformity_proxy": 0.73421978, "defect_escape_burden_proxy": 0.516902293, "process_drift_burden_proxy": 0.478628571, "model_limit_burden_proxy": 0.492914286, "metrology_readiness_proxy": 0.67262546, "cmp_handoff_readiness_proxy": 0.693668239, "ecd_gapfill_handoff_readiness_proxy": 0.678179369, "plating_operator_gate": "review-process-drift", "electrochemical_engineer_gate": "bounded-comparison-ready", "integration_gate": "ecd-gapfill-handoff-blocked", "yield_gate": "bounded-teaching-review", "downstream_metrology_priority_band": "additive-balance" } ], "sourceSummary": { "sources": 20, "claimNodes": 16, "linkStatus": "pass", "reachable": 17, "accessGated": 3, "hardFailures": 0, "networkErrors": 0, "sourceBodiesStored": false, "sourceNumericUse": "none" }, "currentPublicBaseline": { "version": "v109", "versionId": "appgprj_6a6f4d3affc0819189d99a8f29062540~appgver_005d791cd0f881919fe28dce4fc90e8f", "deploymentId": "appgdep_6a91677cd40081919caf523a472130f6", "sourceCommit": "c3888cc26eb434d9ca88e76889f781194044db4a", "changedByThisPacket": false, "publicVersionReserved": "none", "releaseDecision": "hold" }, "publicDelivery": { "mode": "metadata-manifest-plus-csv-rows", "rowsEmbedded": false, "rowArtifact": "ecd-gapfill-state-v1.csv", "rowArtifactSha256": "AE9A30682737E46750AD1A6DC1D544D4AEBA9BBB58B2EB34BCFD29C598AF872C", "canonicalRowBearingArtifact": "ecd-gapfill-state-web-v1.json", "canonicalRowBearingArtifactSha256": "766E45FAF4E264E428579767EC3408526AB9B36E7303427325550AD8F885081A", "independentValidationArtifact": "validation-report-v1.json", "independentValidationArtifactSha256": "ECA8251E67340803FB81382952ED67B3787CC05CC5D1B6C3BB2718057CA4BA69", "sourceSpineArtifact": "ecd-gapfill-source-spine-v1.json", "sourceSpineArtifactSha256": "02809DB82839E2E4D67BF56BBBA59EE33B406879330C5598A2E02DDCFD09A6C7", "publicHoldArtifact": "public-hold-verification-v1.json", "publicHoldArtifactSha256": "3FC68E12500626B64223F056155EAA4FACB507160E65E261D3F52DE589DE93A1" }, "contracts": { "state": { "file": "ecd-gapfill-state-contract-v1.json", "sha256": "1BFF7CAC16CBB9E2751752DAB7B021E3D247DCD43CD8CBF6BC9817523ADF4BF1" }, "metrics": { "file": "ecd-gapfill-metric-contract-v1.json", "sha256": "19028C98D0ECED3FA8EB1E68A12346319156E70E40D7B5975974C5ED0FBA6C34" }, "verifier": { "file": "independent-verifier-contract-v1.json", "sha256": "AE649B3E871F0E71C29EC7A1D0220EFAD9E635C63DED0AB3AD1CB674B911028C" }, "sourceCatalog": { "file": "source_catalog_v1.json", "sha256": "510CF69F33BD109FBF1A08866B187891CBF9437E24F8CBD6CFD1FA350BE84D9D" }, "claimMap": { "file": "source_claim_map_v1.json", "sha256": "599F5679FCA46BF9EA4E584CE96B874A8CE8096F3410424B6D5815520BE859F0" } }, "ecdGapfillRegimes": [ "seed-continuity-limited", "interface-readiness-limited", "additive-balance-limited", "current-distribution-limited", "feature-transport-limited", "fill-closure-limited", "cmp-metrology-readiness-limited", "bounded-ecd-gapfill-review" ], "requiredPhenomena": [ "ecd-fill-family-and-drive-mode-separation", "seed-continuity-and-interface-readiness", "additive-balance-and-bottom-up-activation", "current-distribution-and-feature-transport", "fill-front-sidewall-and-pinch-off", "void-seam-overburden-and-uniformity", "cmp-entry-and-inspection-priority", "metrology-traceability-model-limit-and-handoff" ], "upstreamBridges": [ { "sourceExperimentId": "SA-PROC-DEP-PVD-012", "allowedFields": [ "upstream_pvd_seed_continuity_band", "upstream_pvd_feature_coverage_band", "upstream_pvd_evidence_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-DEP-ALD-PEALD-014", "allowedFields": [ "upstream_ald_barrier_readiness_band", "upstream_ald_interface_band", "upstream_ald_evidence_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-ETCH-WET-019", "allowedFields": [ "upstream_wet_surface_readiness_band", "upstream_wet_residue_risk_band", "upstream_wet_evidence_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false } ], "downstreamBridge": { "targetExperimentId": "SA-PROC-CMP-024", "allowedFields": [ "downstream_cmp_overburden_band", "downstream_cmp_entry_uniformity_band", "downstream_cmp_evidence_gate", "downstream_fill_continuity_band", "downstream_void_seam_priority_band", "downstream_current_uniformity_band", "downstream_metrology_priority_band", "downstream_inspection_evidence_gate", "teaching_ecd_gapfill_handoff_gate" ], "physicalUnitsAllowed": false, "automaticRecipeHandoffAllowed": false, "automaticFilmHandoffAllowed": false, "automaticEquipmentActionAllowed": false, "automaticDispositionAllowed": false }, "replacementEvidenceRequirements": [ "accountable run, lot, wafer, process, equipment, electrolyte, material, metrology, integration, yield, and disposition ownership", "revisioned cell, electrical control, circulation, filtration, agitation, temperature, monitoring, and wafer-motion configuration", "owned barrier, liner, seed, incoming surface, contamination, damage, continuity, resistance, and prior-process histories", "owned metal-ion, electrolyte, suppressor, accelerator, leveler, halide, carrier, impurity, and replenishment identities and purity evidence", "owned concentration, conductivity, acidity, temperature, flow, agitation, filtration, and boundary-layer evidence", "owned current, potential, waveform, charge, duty, timing, contact, and electrical-distribution evidence", "owned feature geometry, pitch, density, loading, aspect, opening, sidewall, bottom, edge, and wafer-position evidence", "owned adsorption, desorption, competition, activation, suppression, charge-transfer, transport, and depletion evidence", "owned seed continuity, nucleation, bottom-up growth, sidewall growth, fill-front, closure, pinch-off, void, and seam evidence", "owned overburden, thickness, roughness, impurity, stress, grain, texture, resistivity, and interface evidence", "owned within-feature, within-pattern, within-wafer, wafer-to-wafer, run-to-run, and tool-to-tool uniformity evidence", "owned in-situ and ex-situ metrology methods, calibration state, uncertainty, threshold, sampling, raw-data lineage, and defect-review evidence", "explicit separation of damascene, microvia, TSV, and large-via claims with no cross-geometry numeric transfer", "explicit validation of every electrochemical, adsorption, transport, current-distribution, fill-front, microstructure, or defect model before use", "independent review of model boundary, proxy ownership, replacement completeness, and non-predictive teaching use", "downstream CMP and inspection approval plus accountable integration, yield, reliability, qualification, and disposition review" ], "requiredSections": [ "Explore", "Run Card", "Export", "Methods", "Limits", "Evidence" ], "limitation": "Original dimensionless ECD gap-fill teaching replay only. No current, potential, charge, waveform, electrolyte or additive composition, adsorption, kinetics, transport, feature geometry, fill rate, thickness, void or seam size, overburden, microstructure, resistivity, CMP target, metrology result, equipment action, recipe, qualification, disposition, reliability, or production fitness is computed or implied." }