# SemiAgora Equipment and Facilities Model Card

Version: 2026-08-12-v57

## Scope

This model card covers the public SA-EQP-001 equipment and facilities teaching
pack. The pack contains four precomputed educational replays:

- Cleanroom particle budget replay
- Vacuum pumpdown envelope
- Tool availability and queue state
- Facility utilities load budget

## Execution Mode

All files are `precomputed-only`. The website does not run facility models,
tool commands, endpoint control, live scheduling, maintenance workflows, or
process recipes.

## Source Spine

The public source spine anchors vocabulary only:

- ISO 14644-1 for cleanroom air-cleanliness classification vocabulary
- ISO 14644-4 for cleanroom design, construction, start-up, verification, and
  life-cycle vocabulary
- SEMI E10 / E79 pages for equipment reliability, availability,
  maintainability, utilization, OEE, and throughput vocabulary
- NIST CHIPS pages for semiconductor metrology, precision-equipment
  calibration, and manufacturing-equipment facilities context
- ASML EUV product information for high-vacuum and precision-wafer-handler
  vocabulary
- SEMI smart-manufacturing sustainability material for efficiency vocabulary

## Non-Claims

This pack is not:

- A cleanroom certification, monitoring plan, or recovery procedure
- A vacuum pump selection guide, leak-check procedure, or tool operation guide
- A maintenance procedure, PM plan, dispatch policy, or production commitment
- A facility utility design, electrical plan, UPW plan, exhaust plan, or
  abatement plan
- A gas, chemical, EHS, emergency, interlock, lockout, or alarm response guide
- A process recipe, process window, tool recipe, product release, or signoff
  artifact

## Data Contract

Each JSON file records:

- `schema`: `semiagora.eqp-simulation.v1`
- `execution_mode`: `precomputed-only`
- `model_boundary`
- `limitations`
- `sources`
- precomputed cases
- derived teaching metrics
- verification flags

## Use

Use these cards to teach vocabulary, compare evidence lanes, and plan what data
would be needed before a real engineering claim. Replace every number with
qualified facility, EHS, equipment, process, or product-owner evidence before
making an engineering decision.