{ "schema": "semiagora.facility-abatement-public-manifest.v1", "version": "2026-08-30-facility-abatement-packet-v1", "packetVersion": "2026-08-30-facility-abatement-v1", "experimentId": "SA-EQP-FACILITY-ABATEMENT-034", "generatedAt": "2026-08-30T00:00:00+09:00", "status": "packet-only-not-deployed", "counts": { "rows": 6912, "physicalRows": 3456, "evidencePairs": 3456, "evidencePairComparisons": 656640, "columns": 192, "sources": 20, "claimNodes": 16, "normalizedProxyEquations": 20, "exactIntegerLedgerEquations": 16, "exactIntegerLedgers": 3, "prohibitedZeroFields": 112 }, "axes": [ { "id": "facility_system_family", "count": 3, "values": [ "gas-delivery-system-like", "vacuum-foreline-system-like", "exhaust-abatement-system-like" ], "meaning": "Categorical gas-delivery, vacuum-foreline, and exhaust-abatement facility-system family only; not equipment identity, hardware topology, process chemistry, capacity, or qualification." }, { "id": "material_flow_path_state", "count": 4, "values": [ "point-of-use-supply-constrained-like", "process-to-foreline-exposed-like", "segregated-exhaust-supported-like", "abatement-transition-exposed-like" ], "meaning": "Categorical point-of-use supply, process-to-foreline, segregated-exhaust, and abatement-transition evidence posture only; not a piping design, routing approval, pressure value, or operating instruction." }, { "id": "pressure_integrity_state", "count": 3, "values": [ "pressure-integrity-constrained-like", "exhaust-balance-constrained-like", "pressure-integrity-supported-like" ], "meaning": "Categorical pressure-integrity, pressure-loss, and exhaust-balance evidence posture only; not a leak test, acceptance limit, flow result, facility design, or safety conclusion." }, { "id": "load_energy_state", "count": 3, "values": [ "transient-load-exposed-like", "utility-demand-ambiguity-exposed-like", "load-energy-supported-like" ], "meaning": "Categorical transient-load, utility-demand ambiguity, and load-energy evidence posture only; not power, flow, capacity, efficiency, operating window, or production state." }, { "id": "containment_state", "count": 2, "values": [ "containment-signature-constrained-like", "containment-signature-supported-like" ], "meaning": "Categorical containment-signature evidence posture only; not a species identity, concentration, leak rate, release path, exposure assessment, or root cause." }, { "id": "monitoring_interlock_state", "count": 2, "values": [ "monitoring-interlock-supported-like", "monitoring-interlock-constrained-like" ], "meaning": "Categorical monitoring, alarm, interlock, and proof-test evidence posture only; not a live detector state, setpoint, permissive, shutdown command, or safety approval." }, { "id": "ordered_state", "count": 8, "values": [ "facility-state-a", "facility-state-b", "facility-state-c", "facility-state-d", "facility-state-e", "facility-state-f", "facility-state-g", "facility-state-h" ], "meaning": "Deterministic teaching sweep index only; it is not time, process order, load duration, maintenance age, utility demand, alarm history, or facility state." }, { "id": "evidence_posture", "count": 2, "values": [ "teaching_assumption", "replacement_slot" ], "meaning": "Paired evidence posture; replacement_slot changes evidence ownership only and must preserve all categorical, proxy, ledger, role, and bridge identity." } ], "ranges": { "ordered_state_norm": { "min": 0, "max": 1 }, "material_flow_readiness_proxy": { "min": 0.4056, "max": 0.774114286 }, "pressure_integrity_readiness_proxy": { "min": 0.433072, "max": 0.774705143 }, "exhaust_load_balance_readiness_proxy": { "min": 0.4426, "max": 0.753457143 }, "abatement_load_readiness_proxy": { "min": 0.43721744, "max": 0.75780752 }, "transient_load_readiness_proxy": { "min": 0.4608, "max": 0.7624 }, "containment_traceability_readiness_proxy": { "min": 0.476, "max": 0.7568 }, "monitoring_interlock_readiness_proxy": { "min": 0.458895386, "max": 0.791587405 }, "pressure_loss_burden_proxy": { "min": 0.279743978, "max": 0.676096349 }, "exhaust_imbalance_burden_proxy": { "min": 0.251588684, "max": 0.569046066 }, "abatement_load_burden_proxy": { "min": 0.310498482, "max": 0.635916994 }, "material_path_localization_readiness_proxy": { "min": 0.476314685, "max": 0.748902896 }, "utility_state_traceability_readiness_proxy": { "min": 0.543475897, "max": 0.766259936 }, "maintenance_isolation_readiness_proxy": { "min": 0.507444476, "max": 0.760907476 }, "containment_release_burden_proxy": { "min": 0.327423989, "max": 0.689595254 }, "false_association_burden_proxy": { "min": 0.238342857, "max": 0.6692 }, "model_limit_burden_proxy": { "min": 0.298, "max": 0.7284 }, "facility_review_readiness_proxy": { "min": 0.520813907, "max": 0.763415853 }, "ehs_evidence_readiness_proxy": { "min": 0.536465268, "max": 0.740927031 }, "downstream_handoff_readiness_proxy": { "min": 0.537398221, "max": 0.766325263 } }, "distributions": { "facilityAbatementRegime": { "pressure-integrity-limited": 2416, "material-flow-path-limited": 960, "abatement-load-limited": 168, "monitoring-interlock-evidence-limited": 132, "bounded-facility-abatement-review": 1258, "containment-evidence-limited": 382, "transient-load-limited": 220, "exhaust-load-balancing-limited": 1376 }, "labels": { "facilities_engineer_gate": { "review-pressure-integrity": 2416, "review-material-flow-path": 960, "review-abatement-load": 168, "review-monitoring-interlock-evidence": 132, "proceed-to-evidence-review": 1106, "review-containment-evidence": 382, "review-transient-load": 220, "review-exhaust-load-balance": 1376, "review-false-association": 152 }, "ehs_engineer_gate": { "review-pressure-integrity-model": 2416, "review-material-flow-path-model": 960, "review-abatement-load-model": 168, "review-monitoring-interlock-evidence-model": 132, "review-model-limit": 492, "review-containment-evidence-model": 382, "review-transient-load-model": 220, "bounded-comparison-ready": 766, "review-exhaust-load-balance-model": 1376 }, "process_equipment_engineer_gate": { "facility-review-blocked": 6912 }, "process_integration_engineer_gate": { "review-monitoring-interlock-evidence": 3010, "review-abatement-load": 1142, "review-exhaust-foreline-evidence": 426, "review-gas-delivery-evidence": 908, "bounded-teaching-review": 1216, "review-facility-ehs-evidence": 210 }, "evidence_traceability_gate": { "traceability-plan-required": 5318, "owned-traceability-replacement-required": 1594 }, "upstream_cluster_tool_routing_readiness_band": { "limited-like": 2264, "transitional-like": 3678, "bounded-like": 970 }, "upstream_cluster_tool_routing_evidence_gate": { "replacement-evidence-required": 6912 }, "upstream_chamber_state_fdc_readiness_band": { "transitional-like": 2938, "limited-like": 3372, "bounded-like": 602 }, "upstream_chamber_state_fdc_evidence_gate": { "replacement-evidence-required": 6912 }, "upstream_endpoint_sensor_readiness_band": { "limited-like": 4600, "transitional-like": 864, "bounded-like": 1448 }, "upstream_endpoint_sensor_evidence_gate": { "replacement-evidence-required": 6912 }, "upstream_clean_surface_readiness_band": { "limited-like": 4608, "transitional-like": 792, "bounded-like": 1512 }, "upstream_clean_surface_evidence_gate": { "replacement-evidence-required": 6912 }, "upstream_thermal_history_readiness_band": { "limited-like": 4056, "bounded-like": 1680, "transitional-like": 1176 }, "upstream_thermal_history_evidence_gate": { "replacement-evidence-required": 6912 }, "downstream_mask_reticle_readiness_band": { "limited-like": 3746, "transitional-like": 2044, "bounded-like": 1122 }, "downstream_gas_delivery_priority_band": { "lower-priority": 3216, "review-like": 3648, "high-priority": 48 }, "downstream_vacuum_foreline_priority_band": { "high-priority": 2104, "review-like": 4404, "lower-priority": 404 }, "downstream_exhaust_abatement_priority_band": { "review-like": 5122, "high-priority": 1492, "lower-priority": 298 }, "downstream_model_limit_priority_band": { "review-like": 4896, "high-priority": 1890, "lower-priority": 126 }, "downstream_mask_reticle_evidence_gate": { "replacement-evidence-required": 6912 }, "downstream_factory_evidence_gate": { "replacement-evidence-required": 6912 }, "teaching_facility_abatement_handoff_gate": { "blocked-pending-owned-evidence": 6912 } } }, "representativeStates": [ { "physical_key": "gas-delivery-system-like|point-of-use-supply-constrained-like|pressure-integrity-constrained-like|transient-load-exposed-like|containment-signature-constrained-like|monitoring-interlock-supported-like|facility-state-e", "facility_system_family": "gas-delivery-system-like", "material_flow_path_state": "point-of-use-supply-constrained-like", "pressure_integrity_state": "pressure-integrity-constrained-like", "load_energy_state": "transient-load-exposed-like", "containment_state": "containment-signature-constrained-like", "monitoring_interlock_state": "monitoring-interlock-supported-like", "ordered_state": "facility-state-e", "facility_abatement_regime": "material-flow-path-limited", "ordered_state_norm": 0.571428571, "material_flow_readiness_proxy": 0.471428571, "pressure_integrity_readiness_proxy": 0.477314286, "exhaust_load_balance_readiness_proxy": 0.491057143, "abatement_load_readiness_proxy": 0.558359429, "transient_load_readiness_proxy": 0.575885714, "containment_traceability_readiness_proxy": 0.562285714, "monitoring_interlock_readiness_proxy": 0.58306912, "pressure_loss_burden_proxy": 0.526389017, "exhaust_imbalance_burden_proxy": 0.422513943, "abatement_load_burden_proxy": 0.581252448, "material_path_localization_readiness_proxy": 0.595015736, "utility_state_traceability_readiness_proxy": 0.603696229, "maintenance_isolation_readiness_proxy": 0.633116026, "containment_release_burden_proxy": 0.6405089, "false_association_burden_proxy": 0.471142857, "model_limit_burden_proxy": 0.592628571, "facility_review_readiness_proxy": 0.602686268, "ehs_evidence_readiness_proxy": 0.603189369, "downstream_handoff_readiness_proxy": 0.606647516, "facilities_engineer_gate": "review-material-flow-path", "ehs_engineer_gate": "review-material-flow-path-model", "process_equipment_engineer_gate": "facility-review-blocked", "process_integration_engineer_gate": "review-monitoring-interlock-evidence", "evidence_traceability_gate": "traceability-plan-required", "downstream_mask_reticle_readiness_band": "limited-like", "downstream_gas_delivery_priority_band": "review-like", "downstream_vacuum_foreline_priority_band": "high-priority", "downstream_exhaust_abatement_priority_band": "high-priority", "downstream_model_limit_priority_band": "high-priority" }, { "physical_key": "gas-delivery-system-like|point-of-use-supply-constrained-like|pressure-integrity-constrained-like|transient-load-exposed-like|containment-signature-constrained-like|monitoring-interlock-supported-like|facility-state-a", "facility_system_family": "gas-delivery-system-like", "material_flow_path_state": "point-of-use-supply-constrained-like", "pressure_integrity_state": "pressure-integrity-constrained-like", "load_energy_state": "transient-load-exposed-like", "containment_state": "containment-signature-constrained-like", "monitoring_interlock_state": "monitoring-interlock-supported-like", "ordered_state": "facility-state-a", "facility_abatement_regime": "pressure-integrity-limited", "ordered_state_norm": 0, "material_flow_readiness_proxy": 0.4872, "pressure_integrity_readiness_proxy": 0.480784, "exhaust_load_balance_readiness_proxy": 0.4582, "abatement_load_readiness_proxy": 0.48339216, "transient_load_readiness_proxy": 0.6136, "containment_traceability_readiness_proxy": 0.6, "monitoring_interlock_readiness_proxy": 0.496330918, "pressure_loss_burden_proxy": 0.455357411, "exhaust_imbalance_burden_proxy": 0.374607067, "abatement_load_burden_proxy": 0.575197815, "material_path_localization_readiness_proxy": 0.644035407, "utility_state_traceability_readiness_proxy": 0.590140622, "maintenance_isolation_readiness_proxy": 0.664442489, "containment_release_burden_proxy": 0.630466696, "false_association_burden_proxy": 0.598, "model_limit_burden_proxy": 0.5012, "facility_review_readiness_proxy": 0.571901417, "ehs_evidence_readiness_proxy": 0.616126404, "downstream_handoff_readiness_proxy": 0.588555068, "facilities_engineer_gate": "review-pressure-integrity", "ehs_engineer_gate": "review-pressure-integrity-model", "process_equipment_engineer_gate": "facility-review-blocked", "process_integration_engineer_gate": "review-monitoring-interlock-evidence", "evidence_traceability_gate": "traceability-plan-required", "downstream_mask_reticle_readiness_band": "limited-like", "downstream_gas_delivery_priority_band": "lower-priority", "downstream_vacuum_foreline_priority_band": "high-priority", "downstream_exhaust_abatement_priority_band": "review-like", "downstream_model_limit_priority_band": "review-like" }, { "physical_key": "gas-delivery-system-like|point-of-use-supply-constrained-like|pressure-integrity-supported-like|transient-load-exposed-like|containment-signature-constrained-like|monitoring-interlock-supported-like|facility-state-a", "facility_system_family": "gas-delivery-system-like", "material_flow_path_state": "point-of-use-supply-constrained-like", "pressure_integrity_state": "pressure-integrity-supported-like", "load_energy_state": "transient-load-exposed-like", "containment_state": "containment-signature-constrained-like", "monitoring_interlock_state": "monitoring-interlock-supported-like", "ordered_state": "facility-state-a", "facility_abatement_regime": "exhaust-load-balancing-limited", "ordered_state_norm": 0, "material_flow_readiness_proxy": 0.708, "pressure_integrity_readiness_proxy": 0.65536, "exhaust_load_balance_readiness_proxy": 0.4582, "abatement_load_readiness_proxy": 0.5252904, "transient_load_readiness_proxy": 0.6136, "containment_traceability_readiness_proxy": 0.6, "monitoring_interlock_readiness_proxy": 0.541301696, "pressure_loss_burden_proxy": 0.399815728, "exhaust_imbalance_burden_proxy": 0.310114784, "abatement_load_burden_proxy": 0.472564388, "material_path_localization_readiness_proxy": 0.648478742, "utility_state_traceability_readiness_proxy": 0.615276637, "maintenance_isolation_readiness_proxy": 0.66977449, "containment_release_burden_proxy": 0.507464609, "false_association_burden_proxy": 0.5596, "model_limit_burden_proxy": 0.5012, "facility_review_readiness_proxy": 0.594322435, "ehs_evidence_readiness_proxy": 0.642157214, "downstream_handoff_readiness_proxy": 0.618725636, "facilities_engineer_gate": "review-exhaust-load-balance", "ehs_engineer_gate": "review-exhaust-load-balance-model", "process_equipment_engineer_gate": "facility-review-blocked", "process_integration_engineer_gate": "review-monitoring-interlock-evidence", "evidence_traceability_gate": "traceability-plan-required", "downstream_mask_reticle_readiness_band": "limited-like", "downstream_gas_delivery_priority_band": "lower-priority", "downstream_vacuum_foreline_priority_band": "review-like", "downstream_exhaust_abatement_priority_band": "review-like", "downstream_model_limit_priority_band": "review-like" }, { "physical_key": "gas-delivery-system-like|point-of-use-supply-constrained-like|pressure-integrity-constrained-like|load-energy-supported-like|containment-signature-constrained-like|monitoring-interlock-supported-like|facility-state-a", "facility_system_family": "gas-delivery-system-like", "material_flow_path_state": "point-of-use-supply-constrained-like", "pressure_integrity_state": "pressure-integrity-constrained-like", "load_energy_state": "load-energy-supported-like", "containment_state": "containment-signature-constrained-like", "monitoring_interlock_state": "monitoring-interlock-supported-like", "ordered_state": "facility-state-a", "facility_abatement_regime": "abatement-load-limited", "ordered_state_norm": 0, "material_flow_readiness_proxy": 0.4872, "pressure_integrity_readiness_proxy": 0.531184, "exhaust_load_balance_readiness_proxy": 0.6546, "abatement_load_readiness_proxy": 0.53869616, "transient_load_readiness_proxy": 0.6136, "containment_traceability_readiness_proxy": 0.6, "monitoring_interlock_readiness_proxy": 0.519683878, "pressure_loss_burden_proxy": 0.363802691, "exhaust_imbalance_burden_proxy": 0.357576588, "abatement_load_burden_proxy": 0.49635533, "material_path_localization_readiness_proxy": 0.651359785, "utility_state_traceability_readiness_proxy": 0.610234754, "maintenance_isolation_readiness_proxy": 0.673231742, "containment_release_burden_proxy": 0.534198441, "false_association_burden_proxy": 0.5116, "model_limit_burden_proxy": 0.4436, "facility_review_readiness_proxy": 0.590564852, "ehs_evidence_readiness_proxy": 0.63845646, "downstream_handoff_readiness_proxy": 0.614446913, "facilities_engineer_gate": "review-abatement-load", "ehs_engineer_gate": "review-abatement-load-model", "process_equipment_engineer_gate": "facility-review-blocked", "process_integration_engineer_gate": "review-monitoring-interlock-evidence", "evidence_traceability_gate": "traceability-plan-required", "downstream_mask_reticle_readiness_band": "limited-like", "downstream_gas_delivery_priority_band": "lower-priority", "downstream_vacuum_foreline_priority_band": "review-like", "downstream_exhaust_abatement_priority_band": "review-like", "downstream_model_limit_priority_band": "review-like" }, { "physical_key": "gas-delivery-system-like|point-of-use-supply-constrained-like|pressure-integrity-constrained-like|load-energy-supported-like|containment-signature-constrained-like|monitoring-interlock-constrained-like|facility-state-c", "facility_system_family": "gas-delivery-system-like", "material_flow_path_state": "point-of-use-supply-constrained-like", "pressure_integrity_state": "pressure-integrity-constrained-like", "load_energy_state": "load-energy-supported-like", "containment_state": "containment-signature-constrained-like", "monitoring_interlock_state": "monitoring-interlock-constrained-like", "ordered_state": "facility-state-c", "facility_abatement_regime": "transient-load-limited", "ordered_state_norm": 0.285714286, "material_flow_readiness_proxy": 0.505714286, "pressure_integrity_readiness_proxy": 0.535257143, "exhaust_load_balance_readiness_proxy": 0.683171429, "abatement_load_readiness_proxy": 0.551445143, "transient_load_readiness_proxy": 0.510742857, "containment_traceability_readiness_proxy": 0.533542857, "monitoring_interlock_readiness_proxy": 0.541310263, "pressure_loss_burden_proxy": 0.490650731, "exhaust_imbalance_burden_proxy": 0.461739616, "abatement_load_burden_proxy": 0.516846551, "material_path_localization_readiness_proxy": 0.55178337, "utility_state_traceability_readiness_proxy": 0.577062347, "maintenance_isolation_readiness_proxy": 0.558920615, "containment_release_burden_proxy": 0.564495654, "false_association_burden_proxy": 0.510228571, "model_limit_burden_proxy": 0.537314286, "facility_review_readiness_proxy": 0.55959903, "ehs_evidence_readiness_proxy": 0.580378198, "downstream_handoff_readiness_proxy": 0.578660825, "facilities_engineer_gate": "review-transient-load", "ehs_engineer_gate": "review-transient-load-model", "process_equipment_engineer_gate": "facility-review-blocked", "process_integration_engineer_gate": "review-monitoring-interlock-evidence", "evidence_traceability_gate": "traceability-plan-required", "downstream_mask_reticle_readiness_band": "limited-like", "downstream_gas_delivery_priority_band": "review-like", "downstream_vacuum_foreline_priority_band": "review-like", "downstream_exhaust_abatement_priority_band": "high-priority", "downstream_model_limit_priority_band": "review-like" }, { "physical_key": "gas-delivery-system-like|point-of-use-supply-constrained-like|pressure-integrity-constrained-like|load-energy-supported-like|containment-signature-constrained-like|monitoring-interlock-supported-like|facility-state-d", "facility_system_family": "gas-delivery-system-like", "material_flow_path_state": "point-of-use-supply-constrained-like", "pressure_integrity_state": "pressure-integrity-constrained-like", "load_energy_state": "load-energy-supported-like", "containment_state": "containment-signature-constrained-like", "monitoring_interlock_state": "monitoring-interlock-supported-like", "ordered_state": "facility-state-d", "facility_abatement_regime": "containment-evidence-limited", "ordered_state_norm": 0.428571429, "material_flow_readiness_proxy": 0.488571429, "pressure_integrity_readiness_proxy": 0.531485714, "exhaust_load_balance_readiness_proxy": 0.697457143, "abatement_load_readiness_proxy": 0.599625714, "transient_load_readiness_proxy": 0.585314286, "containment_traceability_readiness_proxy": 0.571714286, "monitoring_interlock_readiness_proxy": 0.586447314, "pressure_loss_burden_proxy": 0.416229657, "exhaust_imbalance_burden_proxy": 0.385260638, "abatement_load_burden_proxy": 0.494667023, "material_path_localization_readiness_proxy": 0.61466277, "utility_state_traceability_readiness_proxy": 0.621972788, "maintenance_isolation_readiness_proxy": 0.649818182, "containment_release_burden_proxy": 0.538054956, "false_association_burden_proxy": 0.408742857, "model_limit_burden_proxy": 0.512171429, "facility_review_readiness_proxy": 0.614955504, "ehs_evidence_readiness_proxy": 0.629712404, "downstream_handoff_readiness_proxy": 0.629659539, "facilities_engineer_gate": "review-containment-evidence", "ehs_engineer_gate": "review-containment-evidence-model", "process_equipment_engineer_gate": "facility-review-blocked", "process_integration_engineer_gate": "review-monitoring-interlock-evidence", "evidence_traceability_gate": "traceability-plan-required", "downstream_mask_reticle_readiness_band": "limited-like", "downstream_gas_delivery_priority_band": "lower-priority", "downstream_vacuum_foreline_priority_band": "review-like", "downstream_exhaust_abatement_priority_band": "review-like", "downstream_model_limit_priority_band": "review-like" }, { "physical_key": "gas-delivery-system-like|point-of-use-supply-constrained-like|pressure-integrity-constrained-like|load-energy-supported-like|containment-signature-constrained-like|monitoring-interlock-supported-like|facility-state-b", "facility_system_family": "gas-delivery-system-like", "material_flow_path_state": "point-of-use-supply-constrained-like", "pressure_integrity_state": "pressure-integrity-constrained-like", "load_energy_state": "load-energy-supported-like", "containment_state": "containment-signature-constrained-like", "monitoring_interlock_state": "monitoring-interlock-supported-like", "ordered_state": "facility-state-b", "facility_abatement_regime": "monitoring-interlock-evidence-limited", "ordered_state_norm": 0.142857143, "material_flow_readiness_proxy": 0.504342857, "pressure_integrity_readiness_proxy": 0.534955429, "exhaust_load_balance_readiness_proxy": 0.668885714, "abatement_load_readiness_proxy": 0.559887017, "transient_load_readiness_proxy": 0.604171429, "containment_traceability_readiness_proxy": 0.590571429, "monitoring_interlock_readiness_proxy": 0.54288397, "pressure_loss_burden_proxy": 0.381119765, "exhaust_imbalance_burden_proxy": 0.365766483, "abatement_load_burden_proxy": 0.491067697, "material_path_localization_readiness_proxy": 0.639140133, "utility_state_traceability_readiness_proxy": 0.61487647, "maintenance_isolation_readiness_proxy": 0.665442446, "containment_release_burden_proxy": 0.533785959, "false_association_burden_proxy": 0.477314286, "model_limit_burden_proxy": 0.466457143, "facility_review_readiness_proxy": 0.599586486, "ehs_evidence_readiness_proxy": 0.636005697, "downstream_handoff_readiness_proxy": 0.620098104, "facilities_engineer_gate": "review-monitoring-interlock-evidence", "ehs_engineer_gate": "review-monitoring-interlock-evidence-model", "process_equipment_engineer_gate": "facility-review-blocked", "process_integration_engineer_gate": "review-monitoring-interlock-evidence", "evidence_traceability_gate": "traceability-plan-required", "downstream_mask_reticle_readiness_band": "limited-like", "downstream_gas_delivery_priority_band": "lower-priority", "downstream_vacuum_foreline_priority_band": "review-like", "downstream_exhaust_abatement_priority_band": "review-like", "downstream_model_limit_priority_band": "review-like" }, { "physical_key": "gas-delivery-system-like|point-of-use-supply-constrained-like|pressure-integrity-constrained-like|load-energy-supported-like|containment-signature-constrained-like|monitoring-interlock-supported-like|facility-state-c", "facility_system_family": "gas-delivery-system-like", "material_flow_path_state": "point-of-use-supply-constrained-like", "pressure_integrity_state": "pressure-integrity-constrained-like", "load_energy_state": "load-energy-supported-like", "containment_state": "containment-signature-constrained-like", "monitoring_interlock_state": "monitoring-interlock-supported-like", "ordered_state": "facility-state-c", "facility_abatement_regime": "bounded-facility-abatement-review", "ordered_state_norm": 0.285714286, "material_flow_readiness_proxy": 0.505714286, "pressure_integrity_readiness_proxy": 0.535257143, "exhaust_load_balance_readiness_proxy": 0.683171429, "abatement_load_readiness_proxy": 0.580245143, "transient_load_readiness_proxy": 0.594742857, "containment_traceability_readiness_proxy": 0.581142857, "monitoring_interlock_readiness_proxy": 0.565190263, "pressure_loss_burden_proxy": 0.398586731, "exhaust_imbalance_burden_proxy": 0.374978816, "abatement_load_burden_proxy": 0.490256743, "material_path_localization_readiness_proxy": 0.62690849, "utility_state_traceability_readiness_proxy": 0.618828239, "maintenance_isolation_readiness_proxy": 0.657638759, "containment_release_burden_proxy": 0.534989962, "false_association_burden_proxy": 0.443028571, "model_limit_burden_proxy": 0.489314286, "facility_review_readiness_proxy": 0.60776368, "ehs_evidence_readiness_proxy": 0.633114476, "downstream_handoff_readiness_proxy": 0.625199654, "facilities_engineer_gate": "proceed-to-evidence-review", "ehs_engineer_gate": "review-model-limit", "process_equipment_engineer_gate": "facility-review-blocked", "process_integration_engineer_gate": "review-monitoring-interlock-evidence", "evidence_traceability_gate": "traceability-plan-required", "downstream_mask_reticle_readiness_band": "limited-like", "downstream_gas_delivery_priority_band": "lower-priority", "downstream_vacuum_foreline_priority_band": "review-like", "downstream_exhaust_abatement_priority_band": "review-like", "downstream_model_limit_priority_band": "review-like" } ], "sourceSummary": { "sources": 20, "claimNodes": 16, "linkStatus": "pass", "reachable": 13, "accessGated": 7, "hardFailures": 0, "networkErrors": 0, "sourceBodiesStored": false, "sourceNumericUse": "none" }, "currentPublicBaseline": { "version": "v109", "versionId": "appgprj_6a6f4d3affc0819189d99a8f29062540~appgver_005d791cd0f881919fe28dce4fc90e8f", "deploymentId": "appgdep_6a91677cd40081919caf523a472130f6", "sourceCommit": "c3888cc26eb434d9ca88e76889f781194044db4a", "changedByThisPacket": false, "publicVersionReserved": "none", "releaseDecision": "hold" }, "publicDelivery": { "mode": "metadata-manifest-plus-csv-rows", "rowsEmbedded": false, "rowArtifact": "facility-abatement-state-v1.csv", "rowArtifactSha256": "679A9D24386AFC420AAB89624432D0DB351161C1D3A2BD41E1BCBD5736B8D0FD", "canonicalRowBearingArtifact": "facility-abatement-state-web-v1.json", "canonicalRowBearingArtifactSha256": "182EBE5BB59FFB4FFF507E2FC23A4EF8E81988986A73A6D788A7DA3BC9B38F72", "independentValidationArtifact": "validation-report-v1.json", "independentValidationArtifactSha256": "4329245437EEA127A30217C886A8D8A327EEB90EA62466514A87FA1BE2C7C073", "sourceSpineArtifact": "facility-abatement-source-spine-v1.json", "sourceSpineArtifactSha256": "487868BFB20C47CB553930E87446F20BD46603EB6D76E83D165AC7F3B7DE002E", "publicHoldArtifact": "public-hold-verification-v1.json", "publicHoldArtifactSha256": "7CF95F031037B7EF8D6BA18B150514B5A02D76A7215F4DC7BD7EC808849D3B07" }, "contracts": { "state": { "file": "facility-abatement-state-contract-v1.json", "sha256": "70D2CCEAD5C6AF9059CF94D9065EACF119526A1A9324DBA5AFC92C32A776B866" }, "metrics": { "file": "facility-abatement-metric-contract-v1.json", "sha256": "21ED18205B45B9B6008776212040A62917F86773E16C0CC8E76E52DA3F938B31" }, "verifier": { "file": "independent-verifier-contract-v1.json", "sha256": "1072C13FC1922964B7FD0434BF267655C819B6230A8C2C65878CC953255F8887" }, "sourceCatalog": { "file": "source_catalog_v1.json", "sha256": "EAB0EAA60D581710D9D546AE3842A1A4A4D73D898137AA1C809B0F6954216CA7" }, "claimMap": { "file": "source_claim_map_v1.json", "sha256": "44168FB8DE627D823E05207F49F1FD1CB58D763FC46AD8A89E9BF4BCA7A4E3CB" } }, "facilityAbatementRegimes": [ "material-flow-path-limited", "pressure-integrity-limited", "exhaust-load-balancing-limited", "abatement-load-limited", "transient-load-limited", "containment-evidence-limited", "monitoring-interlock-evidence-limited", "bounded-facility-abatement-review" ], "requiredPhenomena": [ "gas-delivery-mfc-vacuum-foreline-exhaust-abatement-and-utility-family-separation", "point-of-use-supply-process-to-foreline-segregated-exhaust-and-abatement-transition-separation", "pressure-integrity-pressure-loss-containment-and-exhaust-balance-evidence-separation", "process-idle-startup-shutdown-transient-load-and-energy-evidence-separation", "pump-foreline-byproduct-deposition-and-process-contamination-observation-separation", "monitoring-alarm-interlock-proof-test-and-hazard-conclusion-separation", "abatement-inlet-emissions-byproduct-measurement-and-effectiveness-evidence-separation", "facility-energy-ehs-model-limit-and-owned-operational-action-boundary" ], "upstreamBridges": [ { "sourceExperimentId": "SA-EQP-CLUSTER-TOOL-033", "allowedFields": [ "downstream_facility_abatement_readiness_band", "downstream_vacuum_routing_priority_band", "downstream_exhaust_contamination_priority_band", "downstream_foreline_priority_band", "downstream_model_limit_priority_band", "downstream_facility_abatement_evidence_gate", "downstream_factory_evidence_gate", "teaching_cluster_tool_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-EQP-CHAMBER-STATE-FDC-031", "allowedFields": [ "downstream_edge_bevel_equipment_readiness_band", "downstream_maintenance_priority_band", "downstream_drift_priority_band", "downstream_fault_signature_priority_band", "downstream_model_limit_priority_band", "downstream_edge_bevel_evidence_gate", "downstream_yield_evidence_gate", "teaching_chamber_state_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-EQP-ENDPOINT-SENSOR-029", "allowedFields": [ "downstream_chamber_matching_readiness_band", "downstream_sensor_traceability_band", "downstream_endpoint_ambiguity_priority_band", "downstream_model_limit_priority_band", "downstream_equipment_evidence_gate", "teaching_endpoint_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-CLEAN-SURFACE-027", "allowedFields": [ "downstream_particle_residue_risk_band", "downstream_surface_readiness_band", "downstream_contamination_priority_band", "downstream_metrology_priority_band", "downstream_process_evidence_gate", "teaching_clean_surface_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-THERMAL-RTP-LASER-026", "allowedFields": [ "downstream_thermal_history_readiness_band", "downstream_queue_time_priority_band", "downstream_interface_priority_band", "downstream_model_limit_priority_band", "downstream_process_evidence_gate", "teaching_thermal_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false } ], "downstreamBridge": { "targetExperimentId": "SA-PROC-MASK-RETICLE-035", "allowedFields": [ "downstream_mask_reticle_readiness_band", "downstream_gas_delivery_priority_band", "downstream_vacuum_foreline_priority_band", "downstream_exhaust_abatement_priority_band", "downstream_model_limit_priority_band", "downstream_mask_reticle_evidence_gate", "downstream_factory_evidence_gate", "teaching_facility_abatement_handoff_gate" ], "physicalUnitsAllowed": false, "automaticRecipeHandoffAllowed": false, "automaticRoutingActionAllowed": false, "automaticMaintenanceActionAllowed": false, "automaticEquipmentActionAllowed": false, "automaticDispositionAllowed": false }, "replacementEvidenceRequirements": [ "accountable facility, tool, lot, wafer, recipe, material-line, exhaust-branch, abatement-unit, and disposition ownership", "revisioned gas cabinet, valve manifold, MFC, piping, pump, foreline, exhaust, abatement, detector, and utility configuration", "owned material identity, purity, compatibility, safety-data, hazard classification, and change-control evidence", "owned flow, pressure, timestamp, calibration, traceability, uncertainty, acceptance criteria, and approval evidence", "owned leak-integrity, containment, segregation, ventilation, purge, isolation, and proof-test evidence", "owned vacuum-pump, foreline, purge, backstreaming, byproduct-deposition, clogging, and maintenance evidence", "owned exhaust branch, header, pressure-loss, flow, balance, capacity, compatibility, and connection evidence", "owned process, idle, rest, startup, shutdown, transient, upset, bypass, and recovery load-state evidence", "owned abatement technology, inlet composition, operating window, destruction-removal, byproduct, and maintenance evidence", "owned emissions sampling, analytical method, detection limit, QA/QC, uncertainty, reporting, and regulatory-applicability evidence", "owned gas detection, alarm, interlock, permissive, shutdown, fail-safe, proof-test, and escalation evidence", "owned utility energy, material use, meter boundary, allocation rule, baseline, demand, and efficiency evidence", "owned cluster-tool, chamber-state/FDC, endpoint, clean-surface, thermal-history, and downstream mask/reticle bridge evidence", "owned failure, leak, release, fire, exposure, exhaust-loss, abatement-loss, power-loss, and emergency-response evidence", "approved facility engineering, equipment engineering, process integration, EHS, management-of-change, and local regulatory review", "accountable evidence owner, revision, timestamp, retention, qualification, release, hold, escalation, and disposition boundary" ], "requiredSections": [ "Explore", "Run Card", "Export", "Methods", "Limits", "Evidence" ], "limitation": "Original dimensionless facility and abatement evidence teaching replay only. No physical material identity, gas flow, pressure, leak rate, vacuum or exhaust capacity, emission, abatement efficiency, utility demand, safety threshold, alarm or interlock setting, equipment action, qualification, disposition, or production fitness is computed or implied." }