{ "schema": "semiagora.inspection-metrology-public-manifest.v1", "version": "2026-08-30-inspection-metrology-packet-v1", "packetVersion": "2026-08-30-inspection-metrology-v1", "experimentId": "SA-MET-INSPECTION-030", "generatedAt": "2026-08-30T00:00:00+09:00", "status": "packet-only-not-deployed", "counts": { "rows": 8064, "physicalRows": 4032, "evidencePairs": 4032, "evidencePairComparisons": 766080, "columns": 192, "sources": 20, "claimNodes": 16, "normalizedProxyEquations": 20, "exactIntegerLedgerEquations": 16, "exactIntegerLedgers": 3, "prohibitedZeroFields": 112 }, "axes": [ { "id": "metrology_family", "count": 7, "values": [ "optical-defect-inspection-like", "electron-beam-inspection-like", "critical-dimension-metrology-like", "overlay-metrology-like", "film-property-metrology-like", "stress-curvature-metrology-like", "surface-topography-metrology-like" ], "meaning": "Seven bounded inspection and metrology method vocabularies; not transferable tools, recipes, wavelengths, beam conditions, targets, calibrations, specifications, or acceptance limits." }, { "id": "wafer_context_mode", "count": 2, "values": [ "patterned-wafer-context-like", "blanket-film-context-like" ], "meaning": "Two categorical sample contexts separating patterned structures from blanket or unpatterned film and surface interpretation; not a product route, material stack, lot, or process recipe." }, { "id": "sensitivity_nuisance_state", "count": 3, "values": [ "sensitivity-constrained-like", "nuisance-exposed-like", "sensitivity-discrimination-supported-like" ], "meaning": "Categorical sensitivity, contrast, and nuisance-separation posture; not detection limit, signal-to-noise ratio, defect size, beam or optical condition, false-call rate, or threshold." }, { "id": "sampling_uncertainty_state", "count": 3, "values": [ "sampling-coverage-constrained-like", "uncertainty-budget-constrained-like", "sampling-uncertainty-supported-like" ], "meaning": "Categorical spatial-sampling and measurement-uncertainty posture; not sample count, wafer map, uncertainty value, coverage factor, calibration result, or production sampling plan." }, { "id": "grr_traceability_state", "count": 2, "values": [ "grr-traceability-constrained-like", "grr-traceability-supported-like" ], "meaning": "Categorical measurement-system and traceability posture; not Gauge R&R result, bias, linearity, stability, resolution, acceptance criterion, or qualification." }, { "id": "decision_handoff_state", "count": 2, "values": [ "yield-evidence-supported-like", "yield-evidence-constrained-like" ], "meaning": "Categorical yield-evidence and downstream handoff posture; not specification, control limit, defect disposition, lot release, chamber command, or production decision." }, { "id": "ordered_state", "count": 8, "values": [ "inspection-metrology-state-a", "inspection-metrology-state-b", "inspection-metrology-state-c", "inspection-metrology-state-d", "inspection-metrology-state-e", "inspection-metrology-state-f", "inspection-metrology-state-g", "inspection-metrology-state-h" ], "meaning": "Eight ordered non-time teaching states; not wafer route, measurement sequence, acquisition time, queue time, calibration interval, or process step." }, { "id": "evidence_posture", "count": 2, "values": [ "teaching_assumption", "replacement_slot" ], "meaning": "Paired evidence metadata only; physical values are identical across each adjacent pair." } ], "ranges": { "ordered_state_norm": { "min": 0, "max": 1 }, "measurement_selection_readiness_proxy": { "min": 0.4252, "max": 0.895714286 }, "sensitivity_readiness_proxy": { "min": 0.454344, "max": 0.877857143 }, "sampling_coverage_readiness_proxy": { "min": 0.5082, "max": 0.865457143 }, "measurement_uncertainty_readiness_proxy": { "min": 0.48611728, "max": 0.8592552 }, "nuisance_separation_readiness_proxy": { "min": 0.5528, "max": 0.8628 }, "grr_readiness_proxy": { "min": 0.522, "max": 0.8692 }, "traceability_readiness_proxy": { "min": 0.510602547, "max": 0.876853248 }, "nuisance_burden_proxy": { "min": 0.208945834, "max": 0.70106248 }, "method_disagreement_burden_proxy": { "min": 0.195897771, "max": 0.570434734 }, "uncertainty_burden_proxy": { "min": 0.229446308, "max": 0.636110033 }, "method_correlation_readiness_proxy": { "min": 0.579134421, "max": 0.843812333 }, "defect_discrimination_readiness_proxy": { "min": 0.607050564, "max": 0.850753396 }, "spatial_reconstruction_readiness_proxy": { "min": 0.575997371, "max": 0.858054045 }, "sampling_burden_proxy": { "min": 0.262182952, "max": 0.70615614 }, "grr_burden_proxy": { "min": 0.199142857, "max": 0.6736 }, "model_limit_burden_proxy": { "min": 0.28, "max": 0.6996 }, "inspection_review_readiness_proxy": { "min": 0.593071033, "max": 0.839367782 }, "yield_evidence_readiness_proxy": { "min": 0.594289157, "max": 0.82502266 }, "metrology_handoff_readiness_proxy": { "min": 0.595831927, "max": 0.849340103 } }, "distributions": { "inspectionMetrologyRegime": { "sensitivity-limited": 1312, "method-selection-limited": 696, "bounded-inspection-metrology-review": 5062, "grr-traceability-limited": 454, "yield-evidence-readiness-limited": 292, "measurement-uncertainty-limited": 38, "nuisance-separation-limited": 146, "sampling-coverage-limited": 64 }, "labels": { "inspection_engineer_gate": { "review-sensitivity": 1312, "review-method-selection": 696, "review-measurement-system": 1588, "proceed-to-evidence-review": 3474, "review-grr-traceability": 454, "review-yield-evidence": 292, "review-uncertainty-budget": 38, "review-nuisance-separation": 146, "review-sampling-coverage": 64 }, "process_engineer_gate": { "review-sensitivity-model": 1312, "review-method-context-model": 696, "bounded-comparison-ready": 4862, "review-grr-model": 454, "review-model-limit": 200, "review-yield-evidence-model": 292, "review-uncertainty-model": 38, "review-nuisance-model": 146, "review-sampling-model": 64 }, "metrology_engineer_gate": { "inspection-metrology-handoff-blocked": 8064 }, "yield_gate": { "review-traceability": 908, "review-uncertainty": 1066, "bounded-teaching-review": 5622, "review-inspection-metrology": 314, "review-defect-spatial-evidence": 124, "review-yield-evidence": 30 }, "measurement_traceability_gate": { "owned-measurement-replacement-required": 6784, "measurement-plan-required": 1280 }, "upstream_endpoint_sensor_readiness_band": { "limited-like": 742, "transitional-like": 3858, "bounded-like": 3464 }, "upstream_endpoint_uncertainty_priority_band": { "intermediate-like": 5026, "higher-like": 432, "lower-like": 2606 }, "upstream_endpoint_sensor_evidence_gate": { "replacement-evidence-required": 8064 }, "upstream_lithography_cd_overlay_readiness_band": { "bounded-like": 5788, "transitional-like": 2208, "limited-like": 68 }, "upstream_lithography_sampling_priority_band": { "high-priority": 1714, "review-like": 4796, "lower-priority": 1554 }, "upstream_lithography_evidence_gate": { "replacement-evidence-required": 8064 }, "upstream_deposition_film_readiness_band": { "transitional-like": 2112, "limited-like": 132, "bounded-like": 5820 }, "upstream_deposition_stress_priority_band": { "lower-like": 5348, "intermediate-like": 2660, "higher-like": 56 }, "upstream_deposition_evidence_gate": { "replacement-evidence-required": 8064 }, "upstream_cmp_topography_readiness_band": { "bounded-like": 5920, "transitional-like": 1992, "limited-like": 152 }, "downstream_fdc_measurement_readiness_band": { "bounded-like": 6056, "transitional-like": 1462, "limited-like": 546 }, "downstream_measurement_traceability_band": { "transitional-like": 1486, "bounded-like": 6566, "limited-like": 12 }, "downstream_sampling_priority_band": { "high-priority": 1714, "review-like": 4796, "lower-priority": 1554 }, "downstream_nuisance_priority_band": { "lower-priority": 1926, "review-like": 4622, "high-priority": 1516 }, "downstream_uncertainty_priority_band": { "sensitivity": 1350, "method-selection": 530, "uncertainty-burden": 432, "measurement-uncertainty": 214, "grr-series": 1314, "completion-state": 2804, "model-limit": 636, "defect-discrimination": 442, "method-disagreement": 28, "sampling-coverage": 304, "yield-evidence": 10 }, "downstream_fdc_evidence_gate": { "replacement-evidence-required": 8064 }, "downstream_yield_evidence_gate": { "replacement-evidence-required": 8064 }, "teaching_metrology_handoff_gate": { "blocked-pending-owned-evidence": 8064 } } }, "representativeStates": [ { "physical_key": "optical-defect-inspection-like|patterned-wafer-context-like|sensitivity-constrained-like|sampling-coverage-constrained-like|grr-traceability-constrained-like|yield-evidence-supported-like|inspection-metrology-state-g", "metrology_family": "optical-defect-inspection-like", "wafer_context_mode": "patterned-wafer-context-like", "sensitivity_nuisance_state": "sensitivity-constrained-like", "sampling_uncertainty_state": "sampling-coverage-constrained-like", "grr_traceability_state": "grr-traceability-constrained-like", "decision_handoff_state": "yield-evidence-supported-like", "ordered_state": "inspection-metrology-state-g", "inspection_metrology_regime": "method-selection-limited", "ordered_state_norm": 0.857142857, "measurement_selection_readiness_proxy": 0.467542857, "sensitivity_readiness_proxy": 0.475659429, "sampling_coverage_readiness_proxy": 0.572085714, "measurement_uncertainty_readiness_proxy": 0.620874263, "nuisance_separation_readiness_proxy": 0.692742857, "grr_readiness_proxy": 0.597142857, "traceability_readiness_proxy": 0.660501709, "nuisance_burden_proxy": 0.47351349, "method_disagreement_burden_proxy": 0.412849459, "uncertainty_burden_proxy": 0.573540337, "method_correlation_readiness_proxy": 0.720948635, "defect_discrimination_readiness_proxy": 0.668850784, "spatial_reconstruction_readiness_proxy": 0.724052648, "sampling_burden_proxy": 0.642946915, "grr_burden_proxy": 0.518114286, "model_limit_burden_proxy": 0.609942857, "inspection_review_readiness_proxy": 0.705108491, "yield_evidence_readiness_proxy": 0.683510651, "metrology_handoff_readiness_proxy": 0.676011827, "inspection_engineer_gate": "review-method-selection", "process_engineer_gate": "review-method-context-model", "metrology_engineer_gate": "inspection-metrology-handoff-blocked", "yield_gate": "review-uncertainty", "downstream_uncertainty_priority_band": "method-selection" }, { "physical_key": "optical-defect-inspection-like|patterned-wafer-context-like|sensitivity-constrained-like|sampling-coverage-constrained-like|grr-traceability-constrained-like|yield-evidence-supported-like|inspection-metrology-state-a", "metrology_family": "optical-defect-inspection-like", "wafer_context_mode": "patterned-wafer-context-like", "sensitivity_nuisance_state": "sensitivity-constrained-like", "sampling_uncertainty_state": "sampling-coverage-constrained-like", "grr_traceability_state": "grr-traceability-constrained-like", "decision_handoff_state": "yield-evidence-supported-like", "ordered_state": "inspection-metrology-state-a", "inspection_metrology_regime": "sensitivity-limited", "ordered_state_norm": 0, "measurement_selection_readiness_proxy": 0.5176, "sensitivity_readiness_proxy": 0.486672, "sampling_coverage_readiness_proxy": 0.5678, "measurement_uncertainty_readiness_proxy": 0.51971728, "nuisance_separation_readiness_proxy": 0.7596, "grr_readiness_proxy": 0.664, "traceability_readiness_proxy": 0.537146547, "nuisance_burden_proxy": 0.36369889, "method_disagreement_burden_proxy": 0.345030041, "uncertainty_burden_proxy": 0.557074431, "method_correlation_readiness_proxy": 0.797208089, "defect_discrimination_readiness_proxy": 0.656382121, "spatial_reconstruction_readiness_proxy": 0.776169707, "sampling_burden_proxy": 0.625690125, "grr_burden_proxy": 0.5764, "model_limit_burden_proxy": 0.4728, "inspection_review_readiness_proxy": 0.663965158, "yield_evidence_readiness_proxy": 0.706768401, "metrology_handoff_readiness_proxy": 0.655693536, "inspection_engineer_gate": "review-sensitivity", "process_engineer_gate": "review-sensitivity-model", "metrology_engineer_gate": "inspection-metrology-handoff-blocked", "yield_gate": "review-traceability", "downstream_uncertainty_priority_band": "sensitivity" }, { "physical_key": "electron-beam-inspection-like|patterned-wafer-context-like|nuisance-exposed-like|sampling-coverage-constrained-like|grr-traceability-constrained-like|yield-evidence-supported-like|inspection-metrology-state-h", "metrology_family": "electron-beam-inspection-like", "wafer_context_mode": "patterned-wafer-context-like", "sensitivity_nuisance_state": "nuisance-exposed-like", "sampling_uncertainty_state": "sampling-coverage-constrained-like", "grr_traceability_state": "grr-traceability-constrained-like", "decision_handoff_state": "yield-evidence-supported-like", "ordered_state": "inspection-metrology-state-h", "inspection_metrology_regime": "sampling-coverage-limited", "ordered_state_norm": 1, "measurement_selection_readiness_proxy": 0.6432, "sensitivity_readiness_proxy": 0.600304, "sampling_coverage_readiness_proxy": 0.5194, "measurement_uncertainty_readiness_proxy": 0.67434096, "nuisance_separation_readiness_proxy": 0.676, "grr_readiness_proxy": 0.578, "traceability_readiness_proxy": 0.71914263, "nuisance_burden_proxy": 0.465898627, "method_disagreement_burden_proxy": 0.393061062, "uncertainty_burden_proxy": 0.499829422, "method_correlation_readiness_proxy": 0.70176811, "defect_discrimination_readiness_proxy": 0.688361698, "spatial_reconstruction_readiness_proxy": 0.710961732, "sampling_burden_proxy": 0.582924869, "grr_burden_proxy": 0.5364, "model_limit_burden_proxy": 0.6352, "inspection_review_readiness_proxy": 0.725053811, "yield_evidence_readiness_proxy": 0.687382336, "metrology_handoff_readiness_proxy": 0.698359765, "inspection_engineer_gate": "review-sampling-coverage", "process_engineer_gate": "review-sampling-model", "metrology_engineer_gate": "inspection-metrology-handoff-blocked", "yield_gate": "bounded-teaching-review", "downstream_uncertainty_priority_band": "sampling-coverage" }, { "physical_key": "optical-defect-inspection-like|patterned-wafer-context-like|nuisance-exposed-like|sampling-coverage-constrained-like|grr-traceability-constrained-like|yield-evidence-constrained-like|inspection-metrology-state-a", "metrology_family": "optical-defect-inspection-like", "wafer_context_mode": "patterned-wafer-context-like", "sensitivity_nuisance_state": "nuisance-exposed-like", "sampling_uncertainty_state": "sampling-coverage-constrained-like", "grr_traceability_state": "grr-traceability-constrained-like", "decision_handoff_state": "yield-evidence-constrained-like", "ordered_state": "inspection-metrology-state-a", "inspection_metrology_regime": "measurement-uncertainty-limited", "ordered_state_norm": 0, "measurement_selection_readiness_proxy": 0.6924, "sensitivity_readiness_proxy": 0.611128, "sampling_coverage_readiness_proxy": 0.5678, "measurement_uncertainty_readiness_proxy": 0.51598672, "nuisance_separation_readiness_proxy": 0.6756, "grr_readiness_proxy": 0.608, "traceability_readiness_proxy": 0.542662413, "nuisance_burden_proxy": 0.44405039, "method_disagreement_burden_proxy": 0.41093432, "uncertainty_burden_proxy": 0.513873742, "method_correlation_readiness_proxy": 0.714619969, "defect_discrimination_readiness_proxy": 0.628804419, "spatial_reconstruction_readiness_proxy": 0.666983963, "sampling_burden_proxy": 0.596668545, "grr_burden_proxy": 0.6388, "model_limit_burden_proxy": 0.5288, "inspection_review_readiness_proxy": 0.626801226, "yield_evidence_readiness_proxy": 0.662144508, "metrology_handoff_readiness_proxy": 0.624095456, "inspection_engineer_gate": "review-uncertainty-budget", "process_engineer_gate": "review-uncertainty-model", "metrology_engineer_gate": "inspection-metrology-handoff-blocked", "yield_gate": "review-traceability", "downstream_uncertainty_priority_band": "measurement-uncertainty" }, { "physical_key": "optical-defect-inspection-like|blanket-film-context-like|sensitivity-constrained-like|sampling-uncertainty-supported-like|grr-traceability-constrained-like|yield-evidence-constrained-like|inspection-metrology-state-g", "metrology_family": "optical-defect-inspection-like", "wafer_context_mode": "blanket-film-context-like", "sensitivity_nuisance_state": "sensitivity-constrained-like", "sampling_uncertainty_state": "sampling-uncertainty-supported-like", "grr_traceability_state": "grr-traceability-constrained-like", "decision_handoff_state": "yield-evidence-constrained-like", "ordered_state": "inspection-metrology-state-g", "inspection_metrology_regime": "nuisance-separation-limited", "ordered_state_norm": 0.857142857, "measurement_selection_readiness_proxy": 0.487142857, "sensitivity_readiness_proxy": 0.547971429, "sampling_coverage_readiness_proxy": 0.815685714, "measurement_uncertainty_readiness_proxy": 0.658221143, "nuisance_separation_readiness_proxy": 0.569542857, "grr_readiness_proxy": 0.560342857, "traceability_readiness_proxy": 0.66498336, "nuisance_burden_proxy": 0.527975051, "method_disagreement_burden_proxy": 0.50009586, "uncertainty_burden_proxy": 0.516067678, "method_correlation_readiness_proxy": 0.61502371, "defect_discrimination_readiness_proxy": 0.64213326, "spatial_reconstruction_readiness_proxy": 0.606318738, "sampling_burden_proxy": 0.578626149, "grr_burden_proxy": 0.518114286, "model_limit_burden_proxy": 0.591542857, "inspection_review_readiness_proxy": 0.659844047, "yield_evidence_readiness_proxy": 0.636329694, "metrology_handoff_readiness_proxy": 0.64622986, "inspection_engineer_gate": "review-nuisance-separation", "process_engineer_gate": "review-nuisance-model", "metrology_engineer_gate": "inspection-metrology-handoff-blocked", "yield_gate": "review-defect-spatial-evidence", "downstream_uncertainty_priority_band": "defect-discrimination" }, { "physical_key": "optical-defect-inspection-like|patterned-wafer-context-like|sensitivity-constrained-like|sampling-uncertainty-supported-like|grr-traceability-constrained-like|yield-evidence-constrained-like|inspection-metrology-state-d", "metrology_family": "optical-defect-inspection-like", "wafer_context_mode": "patterned-wafer-context-like", "sensitivity_nuisance_state": "sensitivity-constrained-like", "sampling_uncertainty_state": "sampling-uncertainty-supported-like", "grr_traceability_state": "grr-traceability-constrained-like", "decision_handoff_state": "yield-evidence-constrained-like", "ordered_state": "inspection-metrology-state-d", "inspection_metrology_regime": "grr-traceability-limited", "ordered_state_norm": 0.428571429, "measurement_selection_readiness_proxy": 0.518971429, "sensitivity_readiness_proxy": 0.532573714, "sampling_coverage_readiness_proxy": 0.865457143, "measurement_uncertainty_readiness_proxy": 0.614046834, "nuisance_separation_readiness_proxy": 0.642171429, "grr_readiness_proxy": 0.574571429, "traceability_readiness_proxy": 0.601125983, "nuisance_burden_proxy": 0.467210998, "method_disagreement_burden_proxy": 0.460755352, "uncertainty_burden_proxy": 0.507792852, "method_correlation_readiness_proxy": 0.679029977, "defect_discrimination_readiness_proxy": 0.642212306, "spatial_reconstruction_readiness_proxy": 0.643973116, "sampling_burden_proxy": 0.568267695, "grr_burden_proxy": 0.465542857, "model_limit_burden_proxy": 0.539771429, "inspection_review_readiness_proxy": 0.65179754, "yield_evidence_readiness_proxy": 0.65860171, "metrology_handoff_readiness_proxy": 0.646043814, "inspection_engineer_gate": "review-grr-traceability", "process_engineer_gate": "review-grr-model", "metrology_engineer_gate": "inspection-metrology-handoff-blocked", "yield_gate": "review-inspection-metrology", "downstream_uncertainty_priority_band": "sensitivity" }, { "physical_key": "optical-defect-inspection-like|patterned-wafer-context-like|nuisance-exposed-like|sampling-coverage-constrained-like|grr-traceability-constrained-like|yield-evidence-supported-like|inspection-metrology-state-g", "metrology_family": "optical-defect-inspection-like", "wafer_context_mode": "patterned-wafer-context-like", "sensitivity_nuisance_state": "nuisance-exposed-like", "sampling_uncertainty_state": "sampling-coverage-constrained-like", "grr_traceability_state": "grr-traceability-constrained-like", "decision_handoff_state": "yield-evidence-supported-like", "ordered_state": "inspection-metrology-state-g", "inspection_metrology_regime": "yield-evidence-readiness-limited", "ordered_state_norm": 0.857142857, "measurement_selection_readiness_proxy": 0.642342857, "sensitivity_readiness_proxy": 0.600115429, "sampling_coverage_readiness_proxy": 0.572085714, "measurement_uncertainty_readiness_proxy": 0.650743703, "nuisance_separation_readiness_proxy": 0.692742857, "grr_readiness_proxy": 0.597142857, "traceability_readiness_proxy": 0.692561574, "nuisance_burden_proxy": 0.448136991, "method_disagreement_burden_proxy": 0.379422696, "uncertainty_burden_proxy": 0.499809577, "method_correlation_readiness_proxy": 0.722978755, "defect_discrimination_readiness_proxy": 0.686747141, "spatial_reconstruction_readiness_proxy": 0.726488792, "sampling_burden_proxy": 0.580352698, "grr_burden_proxy": 0.502114286, "model_limit_burden_proxy": 0.609942857, "inspection_review_readiness_proxy": 0.720800757, "yield_evidence_readiness_proxy": 0.697998268, "metrology_handoff_readiness_proxy": 0.695189897, "inspection_engineer_gate": "review-yield-evidence", "process_engineer_gate": "review-yield-evidence-model", "metrology_engineer_gate": "inspection-metrology-handoff-blocked", "yield_gate": "bounded-teaching-review", "downstream_uncertainty_priority_band": "model-limit" }, { "physical_key": "optical-defect-inspection-like|patterned-wafer-context-like|sensitivity-constrained-like|sampling-uncertainty-supported-like|grr-traceability-constrained-like|yield-evidence-supported-like|inspection-metrology-state-a", "metrology_family": "optical-defect-inspection-like", "wafer_context_mode": "patterned-wafer-context-like", "sensitivity_nuisance_state": "sensitivity-constrained-like", "sampling_uncertainty_state": "sampling-uncertainty-supported-like", "grr_traceability_state": "grr-traceability-constrained-like", "decision_handoff_state": "yield-evidence-supported-like", "ordered_state": "inspection-metrology-state-a", "inspection_metrology_regime": "bounded-inspection-metrology-review", "ordered_state_norm": 0, "measurement_selection_readiness_proxy": 0.5176, "sensitivity_readiness_proxy": 0.532272, "sampling_coverage_readiness_proxy": 0.8226, "measurement_uncertainty_readiness_proxy": 0.58671728, "nuisance_separation_readiness_proxy": 0.7596, "grr_readiness_proxy": 0.664, "traceability_readiness_proxy": 0.562346547, "nuisance_burden_proxy": 0.30843889, "method_disagreement_burden_proxy": 0.332529941, "uncertainty_burden_proxy": 0.478636405, "method_correlation_readiness_proxy": 0.801628889, "defect_discrimination_readiness_proxy": 0.678350411, "spatial_reconstruction_readiness_proxy": 0.781474667, "sampling_burden_proxy": 0.530261869, "grr_burden_proxy": 0.49, "model_limit_burden_proxy": 0.4152, "inspection_review_readiness_proxy": 0.68193724, "yield_evidence_readiness_proxy": 0.727913425, "metrology_handoff_readiness_proxy": 0.683456173, "inspection_engineer_gate": "review-measurement-system", "process_engineer_gate": "bounded-comparison-ready", "metrology_engineer_gate": "inspection-metrology-handoff-blocked", "yield_gate": "review-traceability", "downstream_uncertainty_priority_band": "sensitivity" } ], "sourceSummary": { "sources": 20, "claimNodes": 16, "linkStatus": "pass", "reachable": 17, "accessGated": 3, "hardFailures": 0, "networkErrors": 0, "sourceBodiesStored": false, "sourceNumericUse": "none" }, "currentPublicBaseline": { "version": "v109", "versionId": "appgprj_6a6f4d3affc0819189d99a8f29062540~appgver_005d791cd0f881919fe28dce4fc90e8f", "deploymentId": "appgdep_6a91677cd40081919caf523a472130f6", "sourceCommit": "c3888cc26eb434d9ca88e76889f781194044db4a", "changedByThisPacket": false, "publicVersionReserved": "none", "releaseDecision": "hold" }, "publicDelivery": { "mode": "metadata-manifest-plus-csv-rows", "rowsEmbedded": false, "rowArtifact": "inspection-metrology-state-v1.csv", "rowArtifactSha256": "7222233B7AA0CF751DB6EEAA60F55CC04B7442B224A86DD7DD16F69BF69287EE", "canonicalRowBearingArtifact": "inspection-metrology-state-web-v1.json", "canonicalRowBearingArtifactSha256": "90026121D39FABAFF0249A4DB4D1BF7A88B7696DB968E113FC81E67F2D7A22D2", "independentValidationArtifact": "validation-report-v1.json", "independentValidationArtifactSha256": "C3DB6EAE27DD4FB070FC6C7080B8610DD74D6C068CFE647CFD12D7EE4B7CD77C", "sourceSpineArtifact": "inspection-metrology-source-spine-v1.json", "sourceSpineArtifactSha256": "79EC1A598E301CB8509C8CAF7DAC1776468555C7C18A4E1BC49CDA784C1190E3", "publicHoldArtifact": "public-hold-verification-v1.json", "publicHoldArtifactSha256": "62E4378665FD01E8C17DFA6E45C9F01514844B4A0A746488BD27E522D111980A" }, "contracts": { "state": { "file": "inspection-metrology-state-contract-v1.json", "sha256": "C68ACED9936CA6F0E02DCB60084E8FCE15BE7D6A5ECE8F5CA2379837FBF325AA" }, "metrics": { "file": "inspection-metrology-metric-contract-v1.json", "sha256": "EB47EA4D24739FAED468EAE1C0F09B783E7A5F949C73BD0F1C1D15BD6AF91B8F" }, "verifier": { "file": "independent-verifier-contract-v1.json", "sha256": "F6DF53930B0BD781506DC2E46271A185F0694AEC8A530A0F17FF9077AA14F5FF" }, "sourceCatalog": { "file": "source_catalog_v1.json", "sha256": "EE111A9D9B799652F2B9D65B5C2C9E41EC2D2694068664F02026960B34BCF4A4" }, "claimMap": { "file": "source_claim_map_v1.json", "sha256": "2ABED6946F1C291A781680E94437780A0FDE9FEF757C6B85A69B94866C33B908" } }, "inspectionMetrologyRegimes": [ "method-selection-limited", "sensitivity-limited", "sampling-coverage-limited", "measurement-uncertainty-limited", "nuisance-separation-limited", "grr-traceability-limited", "yield-evidence-readiness-limited", "bounded-inspection-metrology-review" ], "requiredPhenomena": [ "optical-electron-beam-and-measurand-family-separation", "patterned-wafer-and-blanket-film-context-separation", "sensitivity-contrast-and-nuisance-separation", "spatial-sampling-representativeness-and-reconstruction", "measurement-uncertainty-and-method-correlation", "gauge-rr-bias-linearity-stability-resolution-and-traceability-separation", "cd-overlay-film-stress-and-topography-evidence-handoff", "yield-decision-model-limit-and-owned-evidence-boundary" ], "upstreamBridges": [ { "sourceExperimentId": "SA-EQP-ENDPOINT-SENSOR-029", "allowedFields": [ "downstream_inspection_sensor_readiness_band", "downstream_measurement_traceability_band", "downstream_sampling_priority_band", "downstream_endpoint_disagreement_priority_band", "downstream_uncertainty_priority_band", "downstream_inspection_evidence_gate", "downstream_metrology_evidence_gate", "teaching_endpoint_sensor_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-LITHO-SCANNER-TRACK-024", "allowedFields": [ "downstream_rie_mask_readiness_band", "downstream_rie_pattern_uniformity_band", "downstream_pattern_continuity_band", "downstream_stochastic_defect_priority_band", "downstream_overlay_uniformity_band", "downstream_inspection_priority_band", "downstream_inspection_evidence_gate", "teaching_scanner_track_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-DEP-CVD-PECVD-013", "allowedFields": [ "downstream_thickness_uniformity_band", "downstream_conformality_band", "downstream_stress_damage_priority_band", "downstream_metrology_priority_band", "downstream_film_evidence_gate", "teaching_cvd_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-CMP-028", "allowedFields": [ "downstream_endpoint_sensor_readiness_band", "downstream_endpoint_signal_separation_band", "downstream_endpoint_drift_priority_band", "downstream_false_endpoint_priority_band", "downstream_metrology_priority_band", "downstream_endpoint_evidence_gate", "downstream_metrology_evidence_gate", "teaching_cmp_handoff_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false } ], "downstreamBridge": { "targetExperimentId": "SA-EQP-CHAMBER-STATE-FDC-031", "allowedFields": [ "downstream_fdc_measurement_readiness_band", "downstream_measurement_traceability_band", "downstream_sampling_priority_band", "downstream_nuisance_priority_band", "downstream_uncertainty_priority_band", "downstream_fdc_evidence_gate", "downstream_yield_evidence_gate", "teaching_metrology_handoff_gate" ], "physicalUnitsAllowed": false, "automaticRecipeHandoffAllowed": false, "automaticSamplingPlanHandoffAllowed": false, "automaticEquipmentActionAllowed": false, "automaticDispositionAllowed": false }, "replacementEvidenceRequirements": [ "accountable run, lot, wafer, process, inspection, metrology, integration, yield, calibration, specification, and disposition ownership", "revisioned optical, electron-beam, dimensional, overlay, film, stress, topography, acquisition, synchronization, analysis, and sampling configuration", "owned product, material-stack, process-route, target, pattern, film, surface, chamber, maintenance, and queue histories", "owned optical illumination, collection, wavelength, polarization, detector, background, contrast, nuisance, and calibration evidence", "owned electron-beam source, energy, current, dwell, scan, detector, charging, contamination, interaction-volume, and damage evidence", "owned CD measurand, target, edge definition, spatial extent, SEM, AFM, scatterometry, model, reference, and uncertainty evidence", "owned overlay target, layer context, mark asymmetry, charging, tool-induced shift, sampling, reference, and uncertainty evidence", "owned film thickness, composition, density, roughness, XRR, ellipsometry, reflectometry, reference-material, and model evidence", "owned stress, curvature, film thickness, substrate properties, sign convention, spatial response, model, and uncertainty evidence", "owned topography, step height, roughness, scan size, probe state, environment, bandwidth, calibration, and uncertainty evidence", "owned defect truth, sensitivity, escape, false-call, nuisance, morphology, coordinate, review, and classification evidence", "owned spatial population, candidate sites, wafer map, sample count, representativeness, reconstruction, and validation evidence", "owned repeatability, reproducibility, bias, linearity, stability, resolution, tool matching, calibration, traceability, and uncertainty evidence", "owned cross-method measurand alignment, sample state, spatial extent, model assumptions, reference chain, correlation, and disagreement evidence", "owned upstream endpoint-sensor, lithography, deposition, and CMP categorical handoff plus downstream FDC and yield review evidence", "documented confirmation that no normalized label is used as a tool choice, method setting, threshold, calibration, sampling reduction, control limit, acceptance criterion, disposition, or production decision" ], "requiredSections": [ "Explore", "Run Card", "Export", "Methods", "Limits", "Evidence" ], "limitation": "Original dimensionless inspection-metrology teaching replay only. No physical wavelength, beam condition, defect size, CD, overlay, film property, stress, curvature, topography, sample count, uncertainty value, Gauge R&R result, calibration result, traceability claim, yield value, equipment action, recipe, qualification, disposition, or production fitness is computed or implied." }