{
  "schema": "semiagora.interactive-lab-seeds.v1",
  "dateKst": "2026-08-15",
  "status": "public_website_v70_browser_interactive",
  "boundary": [
    "Browser-side resampling and filtering only.",
    "No live server solver.",
    "No equipment-control workflow.",
    "No process recipe, foundry claim, PDK claim, silicon calibration, product qualification, or yield signoff."
  ],
  "sources": [
    {
      "label": "OpenROAD Flow Scripts tutorial",
      "url": "https://openroad-flow-scripts.readthedocs.io/en/latest/tutorials/FlowTutorial.html",
      "use": "Workflow vocabulary for future RTL-to-GDS educational lab; not used as measured QoR data."
    },
    {
      "label": "OpenLane GitHub",
      "url": "https://github.com/The-OpenROAD-Project/openlane",
      "use": "Open-source flow component vocabulary and future reproduction path; no code copied."
    },
    {
      "label": "NIST CHIPS Metrology Program",
      "url": "https://www.nist.gov/chips/research-development-programs/metrology-program",
      "use": "Metrology and fit-for-purpose measurement framing."
    },
    {
      "label": "NIST metrology and process control uncertainty paper page",
      "url": "https://www.nist.gov/publications/metrology-and-process-control-dealing-measurement-uncertainty",
      "use": "Measurement-uncertainty and manufacturing-risk framing."
    },
    {
      "label": "TSMC DTCO introduction",
      "url": "https://www.tsmc.com/english/news-events/blog-article-20220615",
      "use": "Design/process co-optimization vocabulary for integration view."
    },
    {
      "label": "imec STCO overview",
      "url": "https://www.imec-int.com/en/articles/unlocking-system-scaling-bottlenecks-system-technology-co-optimization",
      "use": "System-to-technology requirement framing for integration view."
    },
    {
      "label": "arXiv plasma etch heteroscedastic GP UQ",
      "url": "https://arxiv.org/abs/2511.04990",
      "use": "Future etch UQ lab direction; no paper text copied."
    },
    {
      "label": "arXiv DTCO process-induced variability compact model",
      "url": "https://arxiv.org/abs/2109.00849",
      "use": "Future process-variation-to-circuit-metric chain direction; no paper text copied."
    }
  ],
  "labs": [
    {
      "id": "SA-PROC-INT-ALD-SURFACE-001",
      "title": "O2/O3 surface treatment to ALD nucleation and capacitor proxy",
      "csv": "ald_surface_chain_resampling.csv",
      "browser_mode": "CSV filter plus nearest-neighbor resampling",
      "primary_knobs": [
        "treatment",
        "surface_dose_s",
        "substrate_temp_c",
        "ald_cycles"
      ],
      "outputs": [
        "nucleation_delay_cycles",
        "film_thickness_nm",
        "nonuniformity_pct",
        "cap_density_proxy",
        "leakage_risk_proxy"
      ]
    },
    {
      "id": "SA-PROC-INT-ANNEAL-DEVICE-CIRCUIT-001",
      "title": "Anneal activation and diffusion to Rs/Vt/FO4 proxy",
      "csv": "anneal_device_circuit_chain.csv",
      "browser_mode": "CSV filter plus heatmap slices",
      "primary_knobs": [
        "anneal_method",
        "peak_temp_c",
        "time_s",
        "implant_dose_norm"
      ],
      "outputs": [
        "activation_fraction_proxy",
        "diffusion_length_nm_proxy",
        "sheet_resistance_proxy",
        "vt_shift_mv_proxy",
        "fo4_delay_ps_proxy"
      ]
    },
    {
      "id": "SA-PROC-INT-ETCH-CD-DEVICE-001",
      "title": "Etch chemistry and CD bias to DIBL/delay proxy",
      "csv": "etch_cd_device_delay_chain.csv",
      "browser_mode": "CSV filter plus tradeoff scatter",
      "primary_knobs": [
        "chemistry",
        "pressure_mtorr",
        "rf_power_w",
        "overetch_pct"
      ],
      "outputs": [
        "etch_rate_nm_min_proxy",
        "cd_bias_nm_proxy",
        "ler_nm_proxy",
        "dibl_mv_per_v_proxy",
        "inverter_delay_ps_proxy"
      ]
    },
    {
      "id": "SA-EDA-OPENROAD-QOR-001",
      "title": "OpenROAD starter QoR resampling surrogate",
      "csv": "openroad_qor_resampling_surrogate.csv",
      "browser_mode": "CSV filter before real reproducible OpenROAD flow",
      "primary_knobs": [
        "design",
        "utilization_pct",
        "clock_ns",
        "buffer_strategy"
      ],
      "outputs": [
        "wns_ns_proxy",
        "congestion_proxy",
        "route_violation_proxy",
        "leakage_power_mw_proxy",
        "dynamic_power_mw_proxy"
      ]
    }
  ],
  "publicRouteTargets": [
    "/simulations/o2-o3-ald-nucleation-interactive",
    "/simulations/anneal-device-circuit-chain-interactive",
    "/simulations/etch-cd-device-delay-chain-interactive",
    "/simulations/openroad-starter-qor-resampling"
  ]
}