{
  "schema": "semiagora.litho-etch-feedforward-control-replay.v1",
  "version": "2026-08-20-v78",
  "execution_mode": "precomputed_browser_csv_replay_only",
  "source_run": {
    "run_id": "20260820_221239",
    "evidence_path": "07_assets/factory_lab/daily/2026-08-20/20260820_221239/",
    "triage": "08_references/semiagora_simulation_atlas/DAILY_CONTENT_TRIAGE_2026-08-20_221239.md",
    "gap_scan": "08_references/semiagora_competitor_landscape/GLOBAL_SEMICONDUCTOR_PLATFORM_SCAN_v2_2026-08-20.md"
  },
  "counts": {
    "rows": 1296,
    "wafer_zones": 3,
    "litho_cd_bins": 3,
    "overlay_signatures": 4,
    "resist_states": 3,
    "feedforward_actions": 4,
    "focus_buckets": 3,
    "liveServerRuns": 0
  },
  "summary": {
    "release_gate_counts": {
      "block_release_claim": 964,
      "engineering_hold": 324,
      "measure_more": 8
    },
    "control_candidates": [],
    "highest_risk_rows": [
      {
        "case_id": "PCTRL-0008",
        "wafer_zone": "center",
        "post_litho_cd_bin": "narrow",
        "overlay_signature": "centered",
        "resist_state": "thin",
        "feedforward_action": "etch_bias_offset",
        "focus_bucket": "nominal_focus",
        "case_index": 8,
        "pre_etch_cd_nm_proxy": "24.20",
        "overlay_error_nm_proxy": "0.50",
        "etch_bias_nm_proxy": "5.30",
        "post_etch_cd_nm_proxy": "18.90",
        "gate_width_delta_nm_proxy": "-11.10",
        "drive_current_delta_pct_proxy": "18.23",
        "inverter_delay_delta_ps_proxy": "-13.46",
        "cd_sigma_nm_proxy": "1.77",
        "defect_risk_proxy": "0.950",
        "cpk_proxy": "0.120",
        "release_gate": "block_release_claim",
        "litho_action_hint": "hold_or_trim_less",
        "next_role_view": "engineer_view_adjust_model"
      },
      {
        "case_id": "PCTRL-0009",
        "wafer_zone": "center",
        "post_litho_cd_bin": "narrow",
        "overlay_signature": "centered",
        "resist_state": "thin",
        "feedforward_action": "etch_bias_offset",
        "focus_bucket": "high_focus",
        "case_index": 9,
        "pre_etch_cd_nm_proxy": "22.20",
        "overlay_error_nm_proxy": "0.50",
        "etch_bias_nm_proxy": "5.30",
        "post_etch_cd_nm_proxy": "16.90",
        "gate_width_delta_nm_proxy": "-13.10",
        "drive_current_delta_pct_proxy": "21.63",
        "inverter_delay_delta_ps_proxy": "-15.96",
        "cd_sigma_nm_proxy": "1.87",
        "defect_risk_proxy": "0.950",
        "cpk_proxy": "0.120",
        "release_gate": "block_release_claim",
        "litho_action_hint": "hold_or_trim_less",
        "next_role_view": "engineer_view_adjust_model"
      },
      {
        "case_id": "PCTRL-0039",
        "wafer_zone": "center",
        "post_litho_cd_bin": "narrow",
        "overlay_signature": "x_shift",
        "resist_state": "thin",
        "feedforward_action": "none",
        "focus_bucket": "high_focus",
        "case_index": 39,
        "pre_etch_cd_nm_proxy": "22.43",
        "overlay_error_nm_proxy": "4.50",
        "etch_bias_nm_proxy": "2.80",
        "post_etch_cd_nm_proxy": "19.63",
        "gate_width_delta_nm_proxy": "-10.37",
        "drive_current_delta_pct_proxy": "15.98",
        "inverter_delay_delta_ps_proxy": "-10.86",
        "cd_sigma_nm_proxy": "2.16",
        "defect_risk_proxy": "0.950",
        "cpk_proxy": "0.120",
        "release_gate": "block_release_claim",
        "litho_action_hint": "hold_or_trim_less",
        "next_role_view": "engineer_view_adjust_model"
      },
      {
        "case_id": "PCTRL-0042",
        "wafer_zone": "center",
        "post_litho_cd_bin": "narrow",
        "overlay_signature": "x_shift",
        "resist_state": "thin",
        "feedforward_action": "track_remeasure",
        "focus_bucket": "high_focus",
        "case_index": 42,
        "pre_etch_cd_nm_proxy": "22.43",
        "overlay_error_nm_proxy": "4.50",
        "etch_bias_nm_proxy": "2.10",
        "post_etch_cd_nm_proxy": "20.33",
        "gate_width_delta_nm_proxy": "-9.67",
        "drive_current_delta_pct_proxy": "14.79",
        "inverter_delay_delta_ps_proxy": "-9.99",
        "cd_sigma_nm_proxy": "1.77",
        "defect_risk_proxy": "0.950",
        "cpk_proxy": "0.120",
        "release_gate": "block_release_claim",
        "litho_action_hint": "hold_or_trim_less",
        "next_role_view": "engineer_view_adjust_model"
      },
      {
        "case_id": "PCTRL-0043",
        "wafer_zone": "center",
        "post_litho_cd_bin": "narrow",
        "overlay_signature": "x_shift",
        "resist_state": "thin",
        "feedforward_action": "etch_bias_offset",
        "focus_bucket": "low_focus",
        "case_index": 43,
        "pre_etch_cd_nm_proxy": "26.63",
        "overlay_error_nm_proxy": "4.50",
        "etch_bias_nm_proxy": "5.22",
        "post_etch_cd_nm_proxy": "21.41",
        "gate_width_delta_nm_proxy": "-8.59",
        "drive_current_delta_pct_proxy": "12.96",
        "inverter_delay_delta_ps_proxy": "-8.64",
        "cd_sigma_nm_proxy": "2.17",
        "defect_risk_proxy": "0.950",
        "cpk_proxy": "0.120",
        "release_gate": "block_release_claim",
        "litho_action_hint": "hold_or_trim_less",
        "next_role_view": "engineer_view_adjust_model"
      },
      {
        "case_id": "PCTRL-0044",
        "wafer_zone": "center",
        "post_litho_cd_bin": "narrow",
        "overlay_signature": "x_shift",
        "resist_state": "thin",
        "feedforward_action": "etch_bias_offset",
        "focus_bucket": "nominal_focus",
        "case_index": 44,
        "pre_etch_cd_nm_proxy": "24.43",
        "overlay_error_nm_proxy": "4.50",
        "etch_bias_nm_proxy": "5.30",
        "post_etch_cd_nm_proxy": "19.13",
        "gate_width_delta_nm_proxy": "-10.87",
        "drive_current_delta_pct_proxy": "16.83",
        "inverter_delay_delta_ps_proxy": "-11.49",
        "cd_sigma_nm_proxy": "2.06",
        "defect_risk_proxy": "0.950",
        "cpk_proxy": "0.120",
        "release_gate": "block_release_claim",
        "litho_action_hint": "hold_or_trim_less",
        "next_role_view": "engineer_view_adjust_model"
      },
      {
        "case_id": "PCTRL-0045",
        "wafer_zone": "center",
        "post_litho_cd_bin": "narrow",
        "overlay_signature": "x_shift",
        "resist_state": "thin",
        "feedforward_action": "etch_bias_offset",
        "focus_bucket": "high_focus",
        "case_index": 45,
        "pre_etch_cd_nm_proxy": "22.43",
        "overlay_error_nm_proxy": "4.50",
        "etch_bias_nm_proxy": "5.30",
        "post_etch_cd_nm_proxy": "17.13",
        "gate_width_delta_nm_proxy": "-12.87",
        "drive_current_delta_pct_proxy": "20.23",
        "inverter_delay_delta_ps_proxy": "-13.99",
        "cd_sigma_nm_proxy": "2.16",
        "defect_risk_proxy": "0.950",
        "cpk_proxy": "0.120",
        "release_gate": "block_release_claim",
        "litho_action_hint": "hold_or_trim_less",
        "next_role_view": "engineer_view_adjust_model"
      },
      {
        "case_id": "PCTRL-0057",
        "wafer_zone": "center",
        "post_litho_cd_bin": "narrow",
        "overlay_signature": "x_shift",
        "resist_state": "nominal",
        "feedforward_action": "etch_bias_offset",
        "focus_bucket": "high_focus",
        "case_index": 57,
        "pre_etch_cd_nm_proxy": "23.93",
        "overlay_error_nm_proxy": "4.50",
        "etch_bias_nm_proxy": "4.10",
        "post_etch_cd_nm_proxy": "19.83",
        "gate_width_delta_nm_proxy": "-10.17",
        "drive_current_delta_pct_proxy": "15.86",
        "inverter_delay_delta_ps_proxy": "-10.70",
        "cd_sigma_nm_proxy": "2.11",
        "defect_risk_proxy": "0.950",
        "cpk_proxy": "0.120",
        "release_gate": "block_release_claim",
        "litho_action_hint": "hold_or_trim_less",
        "next_role_view": "engineer_view_adjust_model"
      },
      {
        "case_id": "PCTRL-0075",
        "wafer_zone": "center",
        "post_litho_cd_bin": "narrow",
        "overlay_signature": "y_shift",
        "resist_state": "thin",
        "feedforward_action": "none",
        "focus_bucket": "high_focus",
        "case_index": 75,
        "pre_etch_cd_nm_proxy": "22.40",
        "overlay_error_nm_proxy": "4.00",
        "etch_bias_nm_proxy": "2.80",
        "post_etch_cd_nm_proxy": "19.60",
        "gate_width_delta_nm_proxy": "-10.40",
        "drive_current_delta_pct_proxy": "16.17",
        "inverter_delay_delta_ps_proxy": "-11.12",
        "cd_sigma_nm_proxy": "2.11",
        "defect_risk_proxy": "0.950",
        "cpk_proxy": "0.120",
        "release_gate": "block_release_claim",
        "litho_action_hint": "hold_or_trim_less",
        "next_role_view": "engineer_view_adjust_model"
      },
      {
        "case_id": "PCTRL-0078",
        "wafer_zone": "center",
        "post_litho_cd_bin": "narrow",
        "overlay_signature": "y_shift",
        "resist_state": "thin",
        "feedforward_action": "track_remeasure",
        "focus_bucket": "high_focus",
        "case_index": 78,
        "pre_etch_cd_nm_proxy": "22.40",
        "overlay_error_nm_proxy": "4.00",
        "etch_bias_nm_proxy": "2.10",
        "post_etch_cd_nm_proxy": "20.30",
        "gate_width_delta_nm_proxy": "-9.70",
        "drive_current_delta_pct_proxy": "14.98",
        "inverter_delay_delta_ps_proxy": "-10.24",
        "cd_sigma_nm_proxy": "1.73",
        "defect_risk_proxy": "0.950",
        "cpk_proxy": "0.120",
        "release_gate": "block_release_claim",
        "litho_action_hint": "hold_or_trim_less",
        "next_role_view": "engineer_view_adjust_model"
      }
    ]
  },
  "role_views": [
    {
      "role": "operator",
      "focus": "Check lot record, focus/exposure state, overlay signature, resist state, inspection hold point, and handoff completeness."
    },
    {
      "role": "engineer",
      "focus": "Separate pre-etch CD bias, etch bias, post-etch CD, sigma, Cpk proxy, and delay proxy before proposing another split."
    },
    {
      "role": "integration",
      "focus": "Ask how lithography and etch jointly move gate width, contact/via landing, parasitic burden, and downstream circuit timing."
    },
    {
      "role": "yield",
      "focus": "Treat Cpk and defect-risk labels as evidence-fitness gates, not as product release decisions."
    }
  ],
  "public_boundary": [
    "All numeric values are original teaching proxies, not measured wafer, chamber, scanner, or product data.",
    "No process recipe, gas ratio, scanner setting, etch setting, equipment-control instruction, interlock procedure, or rework procedure is provided.",
    "No SEMulator3D project, commercial tool setup, article body, screenshot, figure, or vendor claim is copied.",
    "The browser filters saved CSV rows only; no server-side solver, TCAD, SPICE, OpenROAD, or process simulator runs.",
    "No foundry, fab, product, qualification, yield, or signoff claim is made."
  ],
  "methods": [
    "Generate a 1296-row synthetic teaching grid over wafer zone, lithography CD bin, overlay signature, resist state, feedforward action, and focus bucket.",
    "Compute pre-etch CD, overlay error, etch bias, post-etch CD, gate-width delta, drive-current delta, inverter-delay delta, CD sigma, defect-risk proxy, Cpk proxy, release gate, and next role view.",
    "Use public source anchors only for vocabulary and motivation; all visible rows and labels are original SemiAgora teaching proxies."
  ],
  "limitations": [
    "Feedforward action labels are educational categories, not manufacturing instructions or tool setpoints.",
    "Cpk and defect-risk labels are invented evidence-fitness proxies and cannot be used as process-control, yield, product, or shipment decisions.",
    "A real deployment would require owned metrology data, tool state, process-owner review, sampling plans, uncertainty budgets, and safety/quality governance.",
    "No live server solver, uploaded wafer data, equipment-control workflow, process recipe, or release workflow is active on the public page."
  ],
  "sources": [
    {
      "label": "Feedforward control for semiconductor manufacturing",
      "url": "https://semiengineering.com/dont-scrap-it-save-it-feedforward-control-for-modern-semiconductor-manufacturing/",
      "note": "Topic signal only; SemiAgora does not copy article body, sponsored framing, figures, SEMulator3D setup, or vendor claims."
    },
    {
      "label": "ASML measuring accuracy",
      "url": "https://www.asml.com/en/technology/lithography-principles/measuring-accuracy",
      "note": "Public metrology vocabulary anchor for overlay, alignment, and measurement discipline."
    },
    {
      "label": "ASML lithography technology",
      "url": "https://www.asml.com/en/technology",
      "note": "Public lithography system vocabulary anchor; no tool operation or recipe instruction is reproduced."
    },
    {
      "label": "NIST CHIPS Metrology Program",
      "url": "https://www.nist.gov/chips/research-development-programs/metrology-program",
      "note": "Official metrology program anchor for fit-for-purpose measurement and standards framing."
    },
    {
      "label": "NIST metrology and process-control uncertainty",
      "url": "https://www.nist.gov/publications/metrology-and-process-control-dealing-measurement-uncertainty",
      "note": "Official/public uncertainty source anchor already used by SemiAgora process role views."
    },
    {
      "label": "SemiAgora global platform scan v2",
      "url": "https://semiagora.com/research/reading-room",
      "note": "Public reading-room route for link-first daily study; internal v2 gap matrix selects this as the next chain lab."
    }
  ]
}