{
  "schema": "semiagora.github-seed-simulation.v1",
  "execution_mode": "precomputed-only",
  "experiment_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
  "slug": "o2-o3-surface-treatment-ald-nucleation",
  "title": "O2 plasma and O3 ozone surface activation for ALD nucleation",
  "model_boundary": "normalized surface-state replay, no tool setting or chemistry recipe",
  "public_boundary": [
    "No live server solver execution.",
    "No PDK or compact-model ingestion.",
    "No process recipe, equipment operation, qualification signoff, upload, account, payment, comment, newsletter signup, or submission workflow.",
    "Third-party GitHub tools remain source links unless separately reviewed."
  ],
  "headline_metric": {
    "name": "lowest_nucleation_delay_cycles",
    "value": 1.1808,
    "case": {
      "treatment": "O2_plasma",
      "normalized_dose": 4,
      "substrate_class": "SiO2_like"
    }
  },
  "rows": [
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 0.5,
      "substrate_class": "SiO2_like",
      "surface_activation_proxy": 0.43915,
      "ald_nucleation_delay_cycles": 4.4868,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 0.5,
      "substrate_class": "metal_like",
      "surface_activation_proxy": 0.35695,
      "ald_nucleation_delay_cycles": 5.1444,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 0.5,
      "substrate_class": "polymer_like",
      "surface_activation_proxy": 0.26426,
      "ald_nucleation_delay_cycles": 5.886,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 1,
      "substrate_class": "SiO2_like",
      "surface_activation_proxy": 0.66977,
      "ald_nucleation_delay_cycles": 2.6418,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 1,
      "substrate_class": "metal_like",
      "surface_activation_proxy": 0.54291,
      "ald_nucleation_delay_cycles": 3.6567,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 1,
      "substrate_class": "polymer_like",
      "surface_activation_proxy": 0.39505,
      "ald_nucleation_delay_cycles": 4.8396,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 2,
      "substrate_class": "SiO2_like",
      "surface_activation_proxy": 0.84284,
      "ald_nucleation_delay_cycles": 1.2573,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 2,
      "substrate_class": "metal_like",
      "surface_activation_proxy": 0.67853,
      "ald_nucleation_delay_cycles": 2.5718,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 2,
      "substrate_class": "polymer_like",
      "surface_activation_proxy": 0.47222,
      "ald_nucleation_delay_cycles": 4.2223,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 4,
      "substrate_class": "SiO2_like",
      "surface_activation_proxy": 0.8524,
      "ald_nucleation_delay_cycles": 1.1808,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 4,
      "substrate_class": "metal_like",
      "surface_activation_proxy": 0.67377,
      "ald_nucleation_delay_cycles": 2.6098,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O2_plasma",
      "normalized_dose": 4,
      "substrate_class": "polymer_like",
      "surface_activation_proxy": 0.41114,
      "ald_nucleation_delay_cycles": 4.7109,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 0.5,
      "substrate_class": "SiO2_like",
      "surface_activation_proxy": 0.36372,
      "ald_nucleation_delay_cycles": 5.0903,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 0.5,
      "substrate_class": "metal_like",
      "surface_activation_proxy": 0.2951,
      "ald_nucleation_delay_cycles": 5.6392,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 0.5,
      "substrate_class": "polymer_like",
      "surface_activation_proxy": 0.22648,
      "ald_nucleation_delay_cycles": 6.1882,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 1,
      "substrate_class": "SiO2_like",
      "surface_activation_proxy": 0.58211,
      "ald_nucleation_delay_cycles": 3.3431,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 1,
      "substrate_class": "metal_like",
      "surface_activation_proxy": 0.47103,
      "ald_nucleation_delay_cycles": 4.2318,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 1,
      "substrate_class": "polymer_like",
      "surface_activation_proxy": 0.35995,
      "ald_nucleation_delay_cycles": 5.1204,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 2,
      "substrate_class": "SiO2_like",
      "surface_activation_proxy": 0.78339,
      "ald_nucleation_delay_cycles": 1.7329,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 2,
      "substrate_class": "metal_like",
      "surface_activation_proxy": 0.62978,
      "ald_nucleation_delay_cycles": 2.9617,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 2,
      "substrate_class": "polymer_like",
      "surface_activation_proxy": 0.47617,
      "ald_nucleation_delay_cycles": 4.1906,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 4,
      "substrate_class": "SiO2_like",
      "surface_activation_proxy": 0.83851,
      "ald_nucleation_delay_cycles": 1.2919,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 4,
      "substrate_class": "metal_like",
      "surface_activation_proxy": 0.66238,
      "ald_nucleation_delay_cycles": 2.701,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    },
    {
      "simulation_id": "SA-SEED-PROC-SURFACE-O2-O3-001",
      "domain": "process",
      "treatment": "O3_ozone",
      "normalized_dose": 4,
      "substrate_class": "polymer_like",
      "surface_activation_proxy": 0.48624,
      "ald_nucleation_delay_cycles": 4.11,
      "teaching_point": "Surface treatment changes nucleation, but more exposure is not always better."
    }
  ],
  "methods": [
    "Activation proxy increases with normalized treatment dose and substrate compatibility.",
    "A damage penalty keeps exposure from becoming a one-way improvement knob.",
    "ALD nucleation delay is derived from the remaining unactivated surface fraction."
  ],
  "limitations": [
    "No plasma power, pressure, gas flow, UV lamp dose, ozone concentration, chemistry recipe, or equipment setting.",
    "No facility workflow, material compatibility approval, or production ALD recipe is provided.",
    "Measured contact angle, XPS, ellipsometry, QCM, or nucleation data are required before calibrated claims."
  ],
  "evidence": [
    "Seed sweep JSON records treatment, dose, substrate, activation, and nucleation-delay rows.",
    "CSV export preserves the O2/O3 comparison table.",
    "Existing surface-treatment pages provide source anchors for O2 plasma and UV/O3 vocabulary."
  ],
  "sources": [
    {
      "label": "SemiAgora GitHub seed sweep",
      "url": "https://github.com/CMU-SAFARI/ramulator2",
      "note": "Public-source expedition anchor; process cards remain original normalized teaching models with no recipe settings."
    },
    {
      "label": "DEVSIM",
      "url": "https://github.com/devsim/devsim",
      "note": "Open device/TCAD reference used as a future solver-back upgrade candidate, not executed by this process card."
    }
  ],
  "source_seed_run": "07_assets/factory_lab/experiments/GITHUB_OPEN_SOURCE_SEED_SWEEP_2026-08-14/"
}