{ "schema": "semiagora.particle-monte-carlo-feature-topography-metric-contract.v1", "version": "2026-08-27-v106", "experimentId": "SA-PROC-FEATURE-PMC-007", "executionMode": "original_precomputed_browser_replay_only", "roundDigits": 9, "sweep": { "rows": 6144, "configurations": 384, "physicalConfigurations": 192, "progressStates": 16, "axes": { "progress_state": 16, "process_mode": 2, "trench_aspect_ratio_state": 3, "source_angular_state": 2, "incident_species_state": 2, "surface_interaction_state": 2, "reflection_reemission_state": 2, "secondary_transport_state": 2, "evidence_posture": 2 }, "rowOrder": [ "process_mode", "trench_aspect_ratio_state", "source_angular_state", "incident_species_state", "surface_interaction_state", "reflection_reemission_state", "secondary_transport_state", "evidence_posture", "progress_state" ], "fastestChangingAxis": "progress_state", "sampling": "Complete 16 x 2 x 3 x 2 x 2 x 2 x 2 x 2 x 2 Cartesian product in declared array order. Physics is simulated once for each of 192 physical configurations, then paired across two evidence postures without changing geometry, seed, or transport outputs." }, "geometry": { "representation": "Two-dimensional row-major integer occupancy grid with open vacuum cells and four solid material states.", "widthCells": 40, "heightCells": 34, "surfaceRow": 8, "maskTopRow": 4, "maskThicknessCells": 4, "nominalFeatureDepthCells": 12, "materialCodes": { "vacuum": 0, "substrate": 1, "hardMask": 2, "primaryDeposit": 3, "secondaryRedeposit": 4 }, "etchInitialState": "Rows at and below surfaceRow are substrate. Hard-mask cells occupy maskTopRow through surfaceRow minus one outside the centered opening. The opening width is set by the aspect-ratio state.", "depositionInitialState": "Rows at and below surfaceRow are substrate, then a centered rectangular cavity from surfaceRow through surfaceRow plus nominalFeatureDepthCells minus one is cleared to vacuum.", "boundaryConditions": "Top, left, right, and bottom are open escape boundaries. The grid is not periodic. Hard-mask cells cannot be removed.", "profileEncoding": "Row-major run-length encoding as materialCode x runLength tokens separated by semicolons, plus SHA-256 of the uncompressed row-major material-code string.", "limitations": "The grid has no sub-cell curvature, continuous level set, mesh, surface diffusion, chemistry coverage field, electric field, chamber solution, energy distribution, physical unit, or calibrated material property." }, "randomContract": { "algorithm": "xorshift32", "baseSeed": 2779096485, "seedInput": "experimentId|physical_configuration_key|baseSeed", "seedHash": "32-bit FNV-1a over UTF-8 bytes with Math.imul, followed by one nonzero guard value.", "uniformMapping": "Unsigned xorshift32 state divided by 4294967296.", "evidencePairing": "evidence_posture is excluded from the physical configuration key and therefore cannot alter any transport or geometry output.", "repeatabilityGate": "Every same-seed replay must be byte-identical at every progress state. Alternate-seed final geometry must differ for at least 80 percent of sampled nonzero-progress physical configurations while all conservation ledgers still close." }, "axisDefinitions": { "progressStates": [ { "id": "p00", "index": 0, "batchCount": 0, "normalizedProgress": 0.0 }, { "id": "p01", "index": 1, "batchCount": 1, "normalizedProgress": 0.066666667 }, { "id": "p02", "index": 2, "batchCount": 2, "normalizedProgress": 0.133333333 }, { "id": "p03", "index": 3, "batchCount": 3, "normalizedProgress": 0.2 }, { "id": "p04", "index": 4, "batchCount": 4, "normalizedProgress": 0.266666667 }, { "id": "p05", "index": 5, "batchCount": 5, "normalizedProgress": 0.333333333 }, { "id": "p06", "index": 6, "batchCount": 6, "normalizedProgress": 0.4 }, { "id": "p07", "index": 7, "batchCount": 7, "normalizedProgress": 0.466666667 }, { "id": "p08", "index": 8, "batchCount": 8, "normalizedProgress": 0.533333333 }, { "id": "p09", "index": 9, "batchCount": 9, "normalizedProgress": 0.6 }, { "id": "p10", "index": 10, "batchCount": 10, "normalizedProgress": 0.666666667 }, { "id": "p11", "index": 11, "batchCount": 11, "normalizedProgress": 0.733333333 }, { "id": "p12", "index": 12, "batchCount": 12, "normalizedProgress": 0.8 }, { "id": "p13", "index": 13, "batchCount": 13, "normalizedProgress": 0.866666667 }, { "id": "p14", "index": 14, "batchCount": 14, "normalizedProgress": 0.933333333 }, { "id": "p15", "index": 15, "batchCount": 15, "normalizedProgress": 1.0 } ], "processModes": [ { "id": "directional-rie-etch", "label": "Directional RIE etch teaching mode", "neutralPrimaryCarriesMaterial": 0, "ionPrimaryCarriesMaterial": 0 }, { "id": "sputter-trench-deposition", "label": "Sputter trench deposition teaching mode", "neutralPrimaryCarriesMaterial": 1, "ionPrimaryCarriesMaterial": 0 } ], "trenchAspectRatioStates": [ { "id": "ar-1", "nominalAspectRatio": 1.0, "openingWidthCells": 12 }, { "id": "ar-2", "nominalAspectRatio": 2.0, "openingWidthCells": 6 }, { "id": "ar-4", "nominalAspectRatio": 4.0, "openingWidthCells": 3 } ], "sourceAngularStates": [ { "id": "angular-collimated", "directionSet": [ { "dx": -1, "dy": 5, "weight": 1 }, { "dx": 0, "dy": 5, "weight": 6 }, { "dx": 1, "dy": 5, "weight": 1 } ] }, { "id": "angular-spread", "directionSet": [ { "dx": -2, "dy": 4, "weight": 1 }, { "dx": -1, "dy": 4, "weight": 2 }, { "dx": 0, "dy": 4, "weight": 2 }, { "dx": 1, "dy": 4, "weight": 2 }, { "dx": 2, "dy": 4, "weight": 1 } ] } ], "incidentSpeciesStates": [ { "id": "species-ion-rich", "ionWeight": 6, "neutralWeight": 2 }, { "id": "species-neutral-rich", "ionWeight": 2, "neutralWeight": 6 } ], "surfaceInteractionStates": [ { "id": "surface-reactive-high", "reactionScale": 1.0, "primaryDepositionStick": 0.78, "secondaryRedepositionStick": 0.68 }, { "id": "surface-reactive-low", "reactionScale": 0.62, "primaryDepositionStick": 0.42, "secondaryRedepositionStick": 0.38 } ], "reflectionReemissionStates": [ { "id": "reflection-damped", "nonReactionReflectProbability": 0.18, "diffuseFraction": 0.25, "maxBounces": 1 }, { "id": "reflection-reemission-active", "nonReactionReflectProbability": 0.62, "diffuseFraction": 0.75, "maxBounces": 3 } ], "secondaryTransportStates": [ { "id": "secondary-suppressed", "spawnProbabilityPerIonRemoval": 0.12 }, { "id": "secondary-enabled", "spawnProbabilityPerIonRemoval": 0.55 } ], "evidencePostures": [ { "id": "assumption-only", "scoreBonus": 0, "replacementSlot": 0 }, { "id": "owned-profile-slot-ready", "scoreBonus": 10, "replacementSlot": 1 } ] }, "transportConstants": { "primaryParticlesPerBatch": 48, "rayStepCells": 0.25, "maxRaySteps": 520, "launchMarginCells": 3, "ionEtchBase": 0.35, "ionEtchAlignmentGain": 0.55, "neutralEtchBase": 0.3, "neutralEtchGrazingGain": 0.25, "primaryDepositBase": 0.55, "primaryDepositAlignmentGain": 0.45, "ionResputterScale": 0.32, "ionResputterBase": 0.35, "ionResputterAlignmentGain": 0.65, "secondaryStickBase": 0.65, "secondaryStickAlignmentGain": 0.35, "probabilityCap": 0.95, "bottomStarvationProgressFloor": 0.4, "bottomStarvationFluxThreshold": 0.08, "lateralUndercutReviewCells": 2, "readinessScoreBase": 10, "readinessConservationBonus": 15, "readinessRepeatabilityBonus": 10, "readinessSourceRightsBonus": 5, "readinessScoreCap": 50 }, "particleStateContract": { "primarySpecies": [ "ion", "neutral" ], "secondarySpecies": [ "sputtered-fragment" ], "entityFields": [ "origin", "species", "x", "y", "dx", "dy", "bounce_count", "carries_material_cell" ], "terminationStates": [ "boundary_escape", "surface_nonstick_escape", "chemical_etch", "ion_sputter", "primary_deposition_stick", "secondary_redeposition_stick", "absorbed_no_geometry_change", "step_cutoff" ], "entityLedger": "entities_created = primary_particles_launched + secondary_entities_created = all eight termination-state counts.", "removedMaterialLedger": "removed_cells = volatile_chemical_removals + immediate_sputter_outflow_cells + secondary_entities_created.", "secondaryMaterialLedger": "secondary_entities_created = secondary_redeposited_cells + secondary_material_outflow_cells.", "gridMassLedger": "final_solid_cells = initial_solid_cells + primary_deposited_cells + secondary_redeposited_cells - removed_cells." }, "interactionEquations": [ "normal_alignment = clamp(-(dx * normal_x + dy * normal_y) / (abs(dx) + abs(dy)), 0, 1)", "rie_ion_remove_probability = min(probability_cap, reaction_scale * (ion_etch_base + ion_etch_alignment_gain * normal_alignment))", "rie_neutral_remove_probability = min(probability_cap, reaction_scale * (neutral_etch_base + neutral_etch_grazing_gain * (1 - normal_alignment)))", "pvd_neutral_stick_probability = min(probability_cap, primary_deposition_stick * (primary_deposit_base + primary_deposit_alignment_gain * normal_alignment))", "pvd_ion_resputter_probability = min(probability_cap, reaction_scale * ion_resputter_scale * (ion_resputter_base + ion_resputter_alignment_gain * normal_alignment))", "secondary_redeposit_probability = min(probability_cap, secondary_redeposition_stick * (secondary_stick_base + secondary_stick_alignment_gain * normal_alignment))" ], "metricDefinitions": { "normalized_progress": "Batch index divided by 15; not time, dose, fluence, throughput, or process duration.", "etch_mean_depth_cells": "Mean first-solid displacement below the initial exposed surface across the original opening; a grid count, not a physical depth.", "deposition_fill_fraction_proxy": "Fraction of initially open cavity cells that are solid at the current state; not density, volume fraction, film thickness, or void metrology.", "bottom_flux_fraction_proxy": "Cumulative bottom-zone collisions divided by all classified surface collisions.", "sidewall_flux_fraction_proxy": "Cumulative sidewall-zone collisions divided by all classified surface collisions.", "lateral_undercut_cells": "Maximum contiguous void extension beyond the original opening below the initial surface, measured in grid cells.", "sidewall_roughness_proxy": "Coefficient of variation of first-solid depths across opening columns, guarded at zero mean.", "accessible_void_fraction_proxy": "Flood-fill-accessible cavity void cells divided by initial cavity cells.", "profile_advance_proxy": "Etch mean-depth fraction of nominal feature depth for RIE or deposition fill fraction for PVD.", "redeposition_fraction_proxy": "Secondary redeposition cells divided by secondary entities created, guarded at zero.", "escape_fraction_proxy": "Boundary, surface-nonstick, and cutoff terminations divided by all entity terminations.", "geometry_sha256": "Hash of the exact integer occupancy grid at one progress state.", "evidence_readiness_score": "Bounded evidence-planning score capped at 50; not accuracy, confidence, technology readiness, production fitness, or signoff." }, "decisionGates": [ "invalid-conservation", "hold-owned-profile-evidence", "review-pinch-off-or-bottom-starvation", "review-undercut", "replacement-evidence-ready-synthetic", "teaching-baseline-only" ], "zeroBoundaryFields": [ "external_numeric_values", "copied_source_results", "copied_profile_points", "copied_source_equations", "physical_length_values", "physical_time_values", "physical_flux_values", "physical_energy_values", "physical_angle_values", "calibrated_sticking_coefficients", "calibrated_sputter_yields", "chamber_pressure_values", "gas_flow_values", "source_power_values", "wafer_bias_values", "measured_profile_rows", "sem_tem_image_pixels", "viennaps_output_rows", "sentaurus_topography_runs", "named_tool_equivalence_claims", "vendor_model_outputs", "equipment_control_actions", "recipe_recommendations", "lot_disposition_actions", "process_signoff_actions", "live_server_runs" ], "replacementEvidenceRequired": [ "owned initial and final profile geometry with coordinate and segmentation lineage", "owned particle or flux distribution evidence with species and uncertainty", "owned material-specific sticking, reaction, reflection, sputter, and redeposition evidence", "versioned grid-convergence, particle-count-convergence, and alternate-seed studies", "owned chamber-state and wafer-location context", "owned CD, depth, sidewall, film, void, and roughness metrology with Gauge R&R", "independent process, integration, metrology, yield, safety, and rights review" ], "interpretation": "This packet is an original deterministic stochastic teaching model. It compares mechanisms only within its own dimensionless occupancy-grid contract. It is not ViennaPS, Sentaurus Topography, a chamber model, a calibrated profile predictor, a process recipe, or replacement evidence." }