{
  "schema": "semiagora.particle-monte-carlo-feature-topography-replay.v1",
  "version": "2026-08-27-v106",
  "experimentId": "SA-PROC-FEATURE-PMC-007",
  "title": "Particle Monte Carlo feature topography evidence map",
  "executionMode": "original_precomputed_browser_replay_only",
  "modelClass": "original deterministic stochastic 2D occupancy-grid teaching model",
  "comparedModes": [
    {
      "id": "directional-rie-etch",
      "label": "Directional RIE etch teaching mode"
    },
    {
      "id": "sputter-trench-deposition",
      "label": "Sputter trench deposition teaching mode"
    }
  ],
  "summary": {
    "rows": 6144,
    "configurations": 384,
    "physicalConfigurations": 192,
    "progressStates": 16,
    "sourceAnchors": 8,
    "sourceClaimNodes": 6,
    "zeroBoundaryFields": 26,
    "zeroBoundaryComparisons": 159744,
    "evidencePairComparisons": 3072,
    "sameSeedSamples": 12,
    "sameSeedPasses": 12,
    "alternateSeedSamples": 24,
    "alternateSeedDifferences": 24,
    "alternateSeedDifferenceFraction": 1,
    "conservationFailures": 0,
    "cutoffRows": 0,
    "pinchOffRows": 982,
    "bottomStarvationRows": 500,
    "undercutReviewRows": 1198,
    "uniqueGeometryHashes": 2870,
    "processModeCounts": {
      "directional-rie-etch": 3072,
      "sputter-trench-deposition": 3072
    },
    "decisionGateCounts": {
      "hold-owned-profile-evidence": 3072,
      "replacement-evidence-ready-synthetic": 1930,
      "review-pinch-off-or-bottom-starvation": 563,
      "review-undercut": 579
    }
  },
  "controls": {
    "progressStates": [
      {
        "id": "p00",
        "index": 0,
        "batchCount": 0,
        "normalizedProgress": 0
      },
      {
        "id": "p01",
        "index": 1,
        "batchCount": 1,
        "normalizedProgress": 0.066666667
      },
      {
        "id": "p02",
        "index": 2,
        "batchCount": 2,
        "normalizedProgress": 0.133333333
      },
      {
        "id": "p03",
        "index": 3,
        "batchCount": 3,
        "normalizedProgress": 0.2
      },
      {
        "id": "p04",
        "index": 4,
        "batchCount": 4,
        "normalizedProgress": 0.266666667
      },
      {
        "id": "p05",
        "index": 5,
        "batchCount": 5,
        "normalizedProgress": 0.333333333
      },
      {
        "id": "p06",
        "index": 6,
        "batchCount": 6,
        "normalizedProgress": 0.4
      },
      {
        "id": "p07",
        "index": 7,
        "batchCount": 7,
        "normalizedProgress": 0.466666667
      },
      {
        "id": "p08",
        "index": 8,
        "batchCount": 8,
        "normalizedProgress": 0.533333333
      },
      {
        "id": "p09",
        "index": 9,
        "batchCount": 9,
        "normalizedProgress": 0.6
      },
      {
        "id": "p10",
        "index": 10,
        "batchCount": 10,
        "normalizedProgress": 0.666666667
      },
      {
        "id": "p11",
        "index": 11,
        "batchCount": 11,
        "normalizedProgress": 0.733333333
      },
      {
        "id": "p12",
        "index": 12,
        "batchCount": 12,
        "normalizedProgress": 0.8
      },
      {
        "id": "p13",
        "index": 13,
        "batchCount": 13,
        "normalizedProgress": 0.866666667
      },
      {
        "id": "p14",
        "index": 14,
        "batchCount": 14,
        "normalizedProgress": 0.933333333
      },
      {
        "id": "p15",
        "index": 15,
        "batchCount": 15,
        "normalizedProgress": 1
      }
    ],
    "processModes": [
      {
        "id": "directional-rie-etch",
        "label": "Directional RIE etch teaching mode",
        "neutralPrimaryCarriesMaterial": 0,
        "ionPrimaryCarriesMaterial": 0
      },
      {
        "id": "sputter-trench-deposition",
        "label": "Sputter trench deposition teaching mode",
        "neutralPrimaryCarriesMaterial": 1,
        "ionPrimaryCarriesMaterial": 0
      }
    ],
    "trenchAspectRatioStates": [
      {
        "id": "ar-1",
        "nominalAspectRatio": 1,
        "openingWidthCells": 12
      },
      {
        "id": "ar-2",
        "nominalAspectRatio": 2,
        "openingWidthCells": 6
      },
      {
        "id": "ar-4",
        "nominalAspectRatio": 4,
        "openingWidthCells": 3
      }
    ],
    "sourceAngularStates": [
      {
        "id": "angular-collimated"
      },
      {
        "id": "angular-spread"
      }
    ],
    "incidentSpeciesStates": [
      {
        "id": "species-ion-rich",
        "ionWeight": 6,
        "neutralWeight": 2
      },
      {
        "id": "species-neutral-rich",
        "ionWeight": 2,
        "neutralWeight": 6
      }
    ],
    "surfaceInteractionStates": [
      {
        "id": "surface-reactive-high",
        "reactionScale": 1,
        "primaryDepositionStick": 0.78,
        "secondaryRedepositionStick": 0.68
      },
      {
        "id": "surface-reactive-low",
        "reactionScale": 0.62,
        "primaryDepositionStick": 0.42,
        "secondaryRedepositionStick": 0.38
      }
    ],
    "reflectionReemissionStates": [
      {
        "id": "reflection-damped",
        "nonReactionReflectProbability": 0.18,
        "diffuseFraction": 0.25,
        "maxBounces": 1
      },
      {
        "id": "reflection-reemission-active",
        "nonReactionReflectProbability": 0.62,
        "diffuseFraction": 0.75,
        "maxBounces": 3
      }
    ],
    "secondaryTransportStates": [
      {
        "id": "secondary-suppressed",
        "spawnProbabilityPerIonRemoval": 0.12
      },
      {
        "id": "secondary-enabled",
        "spawnProbabilityPerIonRemoval": 0.55
      }
    ],
    "evidencePostures": [
      {
        "id": "assumption-only",
        "scoreBonus": 0,
        "replacementSlot": 0
      },
      {
        "id": "owned-profile-slot-ready",
        "scoreBonus": 10,
        "replacementSlot": 1
      }
    ]
  },
  "geometry": {
    "widthCells": 40,
    "heightCells": 34,
    "surfaceRow": 8,
    "nominalFeatureDepthCells": 12,
    "materialCodes": {
      "vacuum": 0,
      "substrate": 1,
      "hardMask": 2,
      "primaryDeposit": 3,
      "secondaryRedeposit": 4
    },
    "representation": "Two-dimensional row-major integer occupancy grid with open vacuum cells and four solid material states."
  },
  "limitations": "The grid has no sub-cell curvature, continuous level set, mesh, surface diffusion, chemistry coverage field, electric field, chamber solution, energy distribution, physical unit, or calibrated material property.",
  "sourceSpineFile": "particle-monte-carlo-feature-topography-source-spine-v1.json",
  "metricContractFile": "particle-monte-carlo-feature-topography-metric-contract-v1.json",
  "delivery": {
    "mode": "metadata-manifest-plus-csv-rows",
    "rowsEmbedded": false,
    "rowArtifact": "particle-monte-carlo-feature-topography-v106.csv",
    "rowArtifactSha256": "AC29C3EB950271F3792847DCE00F13C5FF37CE8DB52066908C540F75DE3B557D",
    "validationPacketSha256": "30538133DA8128FECBDBB37696D46B7AC26B3418A5CB76CD55793530A7DFB558",
    "note": "The public JSON omits the duplicate row array. The complete 6,144-row, 132-field public table remains in the CSV; the independently validated row-bearing JSON is retained with the canonical experiment evidence."
  }
}