{
  "schema": "semiagora.plasma-ccp-icp-chamber-state-packet.v1",
  "version": "2026-08-27-v107",
  "experimentId": "SA-EQP-PLASMA-CCP-ICP-008",
  "executionMode": "original_dimensionless_precomputed_browser_replay_only",
  "generatedAt": "2026-08-27T19:30:00+09:00",
  "counts": {
    "rows": 6144,
    "physicalConfigurations": 3072,
    "evidencePairs": 3072,
    "columns": 131,
    "ccpRows": 3072,
    "icpRows": 3072
  },
  "axes": {
    "drive_step": 16,
    "coupling_architecture": 2,
    "pressure_regime": 3,
    "substrate_bias_state": 2,
    "gas_response_state": 2,
    "wall_loss_state": 2,
    "match_state": 2,
    "radial_zone": 2,
    "evidence_posture": 2
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  "roleGateCounts": {
    "operator": {
      "under-sustained-discharge": 4912,
      "bounded-state-ready": 512,
      "review-wall-loss": 448,
      "review-match-sensitivity": 272
    },
    "processEngineer": {
      "review-source-bias-entanglement": 3072,
      "bounded-comparison-ready": 896,
      "review-iadf": 384,
      "review-iedf": 1792
    },
    "integration": {
      "feature-handoff-blocked": 5460,
      "teaching-feature-handoff-ready": 684
    },
    "yield": {
      "bounded-risk-monitor": 768,
      "review-edge-nonuniformity": 4608,
      "review-attachment-loss": 768
    },
    "evidence": {
      "teaching-assumption-only": 3072,
      "replacement-evidence-required": 3072
    }
  },
  "ranges": {
    "sourceCoupling": {
      "minimum": 0.039062822,
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    "plasmaDensity": {
      "minimum": 0.00689123,
      "maximum": 0.572150029,
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    "sheathBurden": {
      "minimum": 0.15953729,
      "maximum": 0.88016351,
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    "ionFlux": {
      "minimum": 0.003002499,
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    "neutralFlux": {
      "minimum": 0.192410117,
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    },
    "iedfWidth": {
      "minimum": 0.1804,
      "maximum": 0.6584,
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    },
    "iadfSpread": {
      "minimum": 0.186,
      "maximum": 0.684,
      "mean": 0.435
    },
    "radialNonuniformity": {
      "minimum": 0.0944,
      "maximum": 0.69529344,
      "mean": 0.4145646
    }
  },
  "zeroBoundaryFields": [
    "copied_source_numeric_value",
    "copied_source_equation",
    "copied_source_curve_or_table",
    "physical_pressure_value",
    "physical_flow_value",
    "physical_power_value",
    "physical_voltage_value",
    "physical_current_value",
    "physical_frequency_value",
    "physical_density_value",
    "physical_temperature_value",
    "physical_energy_value",
    "physical_angle_value",
    "physical_length_value",
    "physical_time_value",
    "physical_rate_value",
    "physical_uniformity_percent",
    "physical_material_coefficient",
    "named_gas_recipe",
    "reaction_cross_section_set",
    "measured_plasma_row",
    "measured_wafer_row",
    "benchmark_output_row",
    "licensed_solver_output",
    "proprietary_chamber_model",
    "equipment_setpoint",
    "equipment_control_action",
    "matching_network_action",
    "maintenance_or_clean_instruction",
    "process_optimization_recommendation",
    "supplier_ranking",
    "customer_wafer_data",
    "qualification_claim",
    "signoff_claim",
    "physical_calibration_claim",
    "predictive_accuracy_claim",
    "production_fitness_claim",
    "named_tool_equivalence_claim",
    "live_server_run"
  ],
  "bridgeContract": {
    "targetExperimentId": "SA-PROC-FEATURE-PMC-007",
    "allowedFields": [
      "feature_bridge_ion_fraction_norm",
      "feature_bridge_neutral_fraction_norm",
      "feature_bridge_energy_band",
      "feature_bridge_angular_spread",
      "feature_bridge_radial_factor",
      "feature_bridge_evidence_gate"
    ],
    "physicalUnitsAllowed": false,
    "profilePredictionClaimAllowed": false,
    "automaticRecipeHandoffAllowed": false
  },
  "boundaries": {
    "physicalCalibration": false,
    "physicalUnits": false,
    "externalSolverOutput": false,
    "crossSectionData": false,
    "chemistryData": false,
    "recipeOrControl": false,
    "namedToolEquivalence": false
  },
  "delivery": {
    "mode": "metadata-manifest-plus-csv-rows",
    "rowsEmbedded": false,
    "rowArtifact": "plasma-ccp-icp-chamber-state-v107.csv",
    "rowArtifactSha256": "A689C62D29CD6EA0EB4473C1968B254EF65B04FE80D42B03812A5247CB2D53D6",
    "validationPacketSha256": "7F7276475F1CCFDBDA7AF5EBB3F4AB2C095DC5BB5D17F69A880881843403C0CF",
    "note": "The public JSON omits the duplicate row array. The complete 6,144-row, 131-field public table remains in the CSV; the independently validated row-bearing JSON remains with the canonical experiment evidence."
  }
}