{
  "schema": "semiagora.plasma-etch-heteroscedastic-uq-replay.v1",
  "version": "2026-08-19-v76",
  "execution_mode": "precomputed_browser_csv_replay_only",
  "source_run": {
    "run_id": "20260819_135955",
    "triage": "08_references/semiagora_simulation_atlas/DAILY_CONTENT_TRIAGE_2026-08-19_135955.md"
  },
  "counts": {
    "rows": 243,
    "wafer_zones": 3,
    "pressure_classes": 3,
    "bias_classes": 3,
    "polymer_balance_classes": 3,
    "mask_openings": 3,
    "liveServerRuns": 0
  },
  "summary": {
    "label_counts": {
      "high_uncertainty": 68,
      "tradeoff": 124,
      "candidate_window": 51
    },
    "best_rows": [
      {
        "case_id": "EUQ-0033",
        "wafer_zone": "center",
        "pressure_class": "nominal",
        "bias_class": "low",
        "polymer_balance": "balanced",
        "mask_opening_nm": 64,
        "rate_proxy_nm_min": "92.00",
        "cd_loss_proxy_nm": "6.10",
        "selectivity_proxy": "2.410",
        "sigma_rate_nm_min": "2.60",
        "profile_taper_deg": "90.20",
        "objective_score": "0.924",
        "acquisition_priority": "confirm_window",
        "label": "candidate_window"
      },
      {
        "case_id": "EUQ-0045",
        "wafer_zone": "center",
        "pressure_class": "nominal",
        "bias_class": "nominal",
        "polymer_balance": "rich",
        "mask_opening_nm": 64,
        "rate_proxy_nm_min": "91.00",
        "cd_loss_proxy_nm": "5.70",
        "selectivity_proxy": "2.430",
        "sigma_rate_nm_min": "2.60",
        "profile_taper_deg": "90.90",
        "objective_score": "0.914",
        "acquisition_priority": "confirm_window",
        "label": "candidate_window"
      },
      {
        "case_id": "EUQ-0009",
        "wafer_zone": "center",
        "pressure_class": "low",
        "bias_class": "low",
        "polymer_balance": "rich",
        "mask_opening_nm": 64,
        "rate_proxy_nm_min": "92.00",
        "cd_loss_proxy_nm": "6.20",
        "selectivity_proxy": "2.410",
        "sigma_rate_nm_min": "3.10",
        "profile_taper_deg": "92.90",
        "objective_score": "0.910",
        "acquisition_priority": "confirm_window",
        "label": "candidate_window"
      },
      {
        "case_id": "EUQ-0069",
        "wafer_zone": "center",
        "pressure_class": "high",
        "bias_class": "nominal",
        "polymer_balance": "balanced",
        "mask_opening_nm": 64,
        "rate_proxy_nm_min": "93.00",
        "cd_loss_proxy_nm": "6.60",
        "selectivity_proxy": "2.370",
        "sigma_rate_nm_min": "2.60",
        "profile_taper_deg": "88.20",
        "objective_score": "0.908",
        "acquisition_priority": "confirm_window",
        "label": "candidate_window"
      },
      {
        "case_id": "EUQ-0041",
        "wafer_zone": "center",
        "pressure_class": "nominal",
        "bias_class": "nominal",
        "polymer_balance": "balanced",
        "mask_opening_nm": 48,
        "rate_proxy_nm_min": "93.00",
        "cd_loss_proxy_nm": "8.20",
        "selectivity_proxy": "2.250",
        "sigma_rate_nm_min": "2.60",
        "profile_taper_deg": "89.10",
        "objective_score": "0.895",
        "acquisition_priority": "confirm_window",
        "label": "candidate_window"
      },
      {
        "case_id": "EUQ-0081",
        "wafer_zone": "center",
        "pressure_class": "high",
        "bias_class": "high",
        "polymer_balance": "rich",
        "mask_opening_nm": 64,
        "rate_proxy_nm_min": "93.90",
        "cd_loss_proxy_nm": "7.60",
        "selectivity_proxy": "2.290",
        "sigma_rate_nm_min": "2.60",
        "profile_taper_deg": "88.90",
        "objective_score": "0.889",
        "acquisition_priority": "confirm_window",
        "label": "candidate_window"
      },
      {
        "case_id": "EUQ-0017",
        "wafer_zone": "center",
        "pressure_class": "low",
        "bias_class": "nominal",
        "polymer_balance": "rich",
        "mask_opening_nm": 48,
        "rate_proxy_nm_min": "93.00",
        "cd_loss_proxy_nm": "8.30",
        "selectivity_proxy": "2.250",
        "sigma_rate_nm_min": "3.10",
        "profile_taper_deg": "91.80",
        "objective_score": "0.882",
        "acquisition_priority": "confirm_window",
        "label": "candidate_window"
      },
      {
        "case_id": "EUQ-0057",
        "wafer_zone": "center",
        "pressure_class": "high",
        "bias_class": "low",
        "polymer_balance": "lean",
        "mask_opening_nm": 64,
        "rate_proxy_nm_min": "92.00",
        "cd_loss_proxy_nm": "7.80",
        "selectivity_proxy": "2.190",
        "sigma_rate_nm_min": "3.50",
        "profile_taper_deg": "88.10",
        "objective_score": "0.876",
        "acquisition_priority": "confirm_window",
        "label": "candidate_window"
      }
    ]
  },
  "public_boundary": [
    "Class labels are teaching factors, not tool setpoints or gas ratios.",
    "No process recipe, equipment-control instruction, chamber qualification, or fab recommendation is provided.",
    "The browser filters saved CSV rows only; no server-side solver runs.",
    "Rows are original synthetic teaching data, not copied paper data or measured fab data."
  ],
  "sources": [
    {
      "label": "Heteroscedastic plasma etch UQ paper metadata",
      "url": "https://arxiv.org/abs/2511.04990v1",
      "note": "Methodology anchor only. SemiAgora uses original synthetic teaching data and does not copy plots or datasets."
    },
    {
      "label": "SemiAgora daily triage",
      "url": "https://semiagora.com/research/reading-room",
      "note": "Public route for link-first study triage and publication boundaries."
    }
  ],
  "limitations": [
    "The model is a deterministic teaching replay over factor classes and proxy metrics.",
    "The objective score is an invented education metric that demonstrates uncertainty-aware decision framing.",
    "A real wafer split would require measured metrology, chamber context, process owner review, and safety controls not present here."
  ]
}