{
  "schema": "semiagora.process-simulation.v1",
  "experiment_id": "SA-PROC-CLEAN-SEQUENCE-QUEUE-001",
  "title": "Clean sequence decision queue",
  "execution_mode": "precomputed-only",
  "model_boundary": "Educational clean-sequence queue map for evidence planning; not a wet-bench flow, tool route, or facility-approved traveler.",
  "limitations": [
    "No recipe, concentration, bath timing, tool sequence, facility procedure, or endpoint-control instruction is included.",
    "No wafer-release, contamination-control, metrology qualification, safety approval, or qualified process-window claim is made.",
    "All curves are educational teaching proxies and must be replaced by facility-approved measurements before process decisions.",
    "Material compatibility, pattern sensitivity, queue time, and safety review must be handled by qualified local procedures."
  ],
  "sources": [
    {
      "label": "Stanford SNF Pre-Diffusion Clean",
      "url": "https://snfguide.stanford.edu/taxonomy/term/712/all/feed?order=field_equipment_name&sort=desc",
      "note": "Public SNF guide page describing SC1, SC2, and optional HF dip roles for organics, particles, metals, and native oxide context."
    },
    {
      "label": "Stanford SNF Standard Clean 1",
      "url": "https://snfguide.stanford.edu/guide/chemicals/acids/standard-clean-1",
      "note": "Public SNF chemical page anchoring SC1 as a particle and surface-preparation clean before growth furnaces."
    },
    {
      "label": "Stanford SNF HMDS",
      "url": "https://snfguide.stanford.edu/guide/chemicals/primers/hmds",
      "note": "Public SNF guide page describing HMDS as a photoresist adhesion promoter."
    },
    {
      "label": "NIST wet chemical cleaning publication",
      "url": "https://www.nist.gov/publications/wet-chemical-cleaning-plasma-oxide-grown-heated-001-inp-surfaces",
      "note": "Public NIST publication page anchoring wet cleaning as surface preparation before epitaxy, metal/dielectric deposition, and diffusion."
    }
  ],
  "axes": [
    "downstream intent"
  ],
  "cases": [
    {
      "downstream_intent": "oxidation_or_diffusion_preclean",
      "surface_target": "hydrophilic controlled oxide",
      "evidence_need": [
        "particle trend",
        "metal contamination proxy",
        "native oxide state",
        "furnace compatibility review"
      ],
      "risk_flags": [
        "metal carryover",
        "particle redeposition",
        "facility qualification gap"
      ],
      "sequence_fit_score": 0.82
    },
    {
      "downstream_intent": "deposition_preclean",
      "surface_target": "low residue and known oxide condition",
      "evidence_need": [
        "organic residue proxy",
        "particle trend",
        "watermark check",
        "film nucleation note"
      ],
      "risk_flags": [
        "residue-driven nucleation shift",
        "queue-time drift",
        "material compatibility gap"
      ],
      "sequence_fit_score": 0.78
    },
    {
      "downstream_intent": "lithography_hmds",
      "surface_target": "dry hydrophobic adhesion-ready surface",
      "evidence_need": [
        "dehydration state",
        "contact-angle proxy",
        "adhesion score",
        "delay-to-coat note"
      ],
      "risk_flags": [
        "moisture return",
        "overprime risk",
        "resist compatibility gap"
      ],
      "sequence_fit_score": 0.88
    },
    {
      "downstream_intent": "contact_or_surface_sensitive",
      "surface_target": "controlled native oxide or hydrogen-terminated state",
      "evidence_need": [
        "native oxide proxy",
        "contact resistance proxy",
        "queue-time risk",
        "metrology boundary"
      ],
      "risk_flags": [
        "reoxidation",
        "surface damage",
        "unqualified contact claim"
      ],
      "sequence_fit_score": 0.73
    }
  ],
  "derived_metrics": {
    "case_count": 4,
    "total_evidence_needs": 16,
    "average_sequence_fit_score": 0.802
  },
  "verification": {
    "case_count": 4,
    "all_cases_have_evidence_need": true,
    "all_cases_have_risk_flags": true,
    "scores_are_public_planning_proxies": true
  }
}