{
  "schema": "semiagora.process-simulation.v1",
  "experiment_id": "SA-PROC-METRO-DOE-RSM-001",
  "title": "DOE response-surface replay",
  "execution_mode": "precomputed-only",
  "model_boundary": "Educational design-of-experiments replay. It teaches factor grids, response tradeoffs, and center-point discipline; it is not a recipe optimization, process release, or manufacturing-control result.",
  "lesson_route": "/learn/process-metrology",
  "simulation_route": "/simulations/process-doe-response-surface",
  "measurement_context": {
    "process_family": "deposition teaching window",
    "factor_a": "power_w",
    "factor_b": "pressure_mtorr",
    "responses": ["deposition_rate_nm_min", "film_stress_mpa"]
  },
  "power_w": [150, 200, 250],
  "pressure_mtorr": [3, 5, 7],
  "deposition_rate_nm_min_matrix": [
    [35, 42, 44],
    [48, 56, 55],
    [58, 64, 61]
  ],
  "film_stress_mpa_matrix": [
    [-180, -145, -130],
    [-160, -120, -118],
    [-150, -110, -128]
  ],
  "derived_metrics": {
    "best_rate_power_w": 250,
    "best_rate_pressure_mtorr": 5,
    "best_rate_nm_min": 64,
    "center_point_rate_nm_min": 56,
    "center_point_stress_mpa": -120,
    "high_pressure_curvature_warning": true,
    "stress_closest_to_zero_mpa": -110
  },
  "methods": [
    "Treat the 3 x 3 factor grid as a saved screening-and-response-surface teaching replay.",
    "Identify the maximum deposition-rate response while keeping film stress visible.",
    "Use the center point as an anchor before reading edge-of-window results.",
    "Flag curvature when increasing pressure stops improving the rate at high power."
  ],
  "limitations": [
    "No chamber physics, gas chemistry, target erosion, substrate temperature, film composition, stress metrology calibration, or replicate analysis is included.",
    "No optimized recipe, qualified metrology, facility setting, manufacturing release, or production process-window claim is implied.",
    "Real DOE evidence requires randomized runs, repeats, residual analysis, uncertainty, tool history, and rights-clean measured responses.",
    "This replay is a planning aid and must not be used to run equipment."
  ],
  "sources": [
    {
      "label": "NIST/SEMATECH experimental design selection",
      "url": "https://www.itl.nist.gov/div898/handbook/pri/section3/pri33.htm",
      "note": "Public NIST/SEMATECH handbook page describing design objectives and response-surface model use."
    }
  ]
}