{
  "schema": "semiagora.process-simulation.v1",
  "experiment_id": "SA-PROC-CLEAN-HMDS-ADHESION-001",
  "title": "HMDS adhesion-prime readiness",
  "execution_mode": "precomputed-only",
  "model_boundary": "Educational HMDS adhesion readiness replay using normalized surface-state proxies; not a lithography track recipe or measured wafer result.",
  "limitations": [
    "No recipe, concentration, bath timing, tool sequence, facility procedure, or endpoint-control instruction is included.",
    "No wafer-release, contamination-control, metrology qualification, safety approval, or qualified process-window claim is made.",
    "All curves are educational teaching proxies and must be replaced by facility-approved measurements before process decisions.",
    "Material compatibility, pattern sensitivity, queue time, and safety review must be handled by qualified local procedures."
  ],
  "sources": [
    {
      "label": "Stanford SNF Pre-Diffusion Clean",
      "url": "https://snfguide.stanford.edu/taxonomy/term/712/all/feed?order=field_equipment_name&sort=desc",
      "note": "Public SNF guide page describing SC1, SC2, and optional HF dip roles for organics, particles, metals, and native oxide context."
    },
    {
      "label": "Stanford SNF Standard Clean 1",
      "url": "https://snfguide.stanford.edu/guide/chemicals/acids/standard-clean-1",
      "note": "Public SNF chemical page anchoring SC1 as a particle and surface-preparation clean before growth furnaces."
    },
    {
      "label": "Stanford SNF HMDS",
      "url": "https://snfguide.stanford.edu/guide/chemicals/primers/hmds",
      "note": "Public SNF guide page describing HMDS as a photoresist adhesion promoter."
    },
    {
      "label": "NIST wet chemical cleaning publication",
      "url": "https://www.nist.gov/publications/wet-chemical-cleaning-plasma-oxide-grown-heated-001-inp-surfaces",
      "note": "Public NIST publication page anchoring wet cleaning as surface preparation before epitaxy, metal/dielectric deposition, and diffusion."
    }
  ],
  "axes": [
    "surface-state case"
  ],
  "cases": [
    {
      "label": "humid_no_prime",
      "moisture_index": 1.0,
      "contact_angle_proxy_deg": 32,
      "adhesion_score": 0.32,
      "defect_risk": 0.42
    },
    {
      "label": "dehydrate_only",
      "moisture_index": 0.35,
      "contact_angle_proxy_deg": 52,
      "adhesion_score": 0.58,
      "defect_risk": 0.25
    },
    {
      "label": "balanced_hmds_prime",
      "moisture_index": 0.12,
      "contact_angle_proxy_deg": 76,
      "adhesion_score": 0.91,
      "defect_risk": 0.08
    },
    {
      "label": "overprime_or_delay_risk",
      "moisture_index": 0.18,
      "contact_angle_proxy_deg": 88,
      "adhesion_score": 0.74,
      "defect_risk": 0.26
    }
  ],
  "derived_metrics": {
    "best_adhesion_case": "balanced_hmds_prime",
    "balanced_adhesion_score": 0.91,
    "overprime_risk_delta": 0.18
  },
  "verification": {
    "case_count": 4,
    "best_adhesion_case_is_balanced": true,
    "moisture_lower_after_dehydrate": true,
    "hydrophobicity_increases_with_prime": true,
    "risk_increases_for_overprime": true
  }
}