{
  "schema": "semiagora.process-surface-treatment.v1",
  "experiment_id": "SA-PROC-SURF-O3-OZONE-001",
  "title": "O3 ozone and UV-ozone surface clean replay",
  "execution_mode": "precomputed-only",
  "engine": "SemiAgora surface-treatment kinetics model",
  "model_boundary": "Educational ozone/UV-O3 organic-removal and activation replay; not an ozone process recipe, wafer qualification, or measured SemiAgora process.",
  "observables": [
    "water contact angle",
    "organic residue proxy",
    "hydroxylation proxy",
    "oxide growth proxy"
  ],
  "cases": [
    {
      "id": "dry-uv-o3",
      "intent": "UV/O3 dry clean and activation replay",
      "normalized_oxidant_strength": 1.0,
      "time_min": [
        0,
        1,
        3,
        5,
        10,
        15,
        20,
        30
      ],
      "water_contact_angle_deg": [
        72.0,
        58.29,
        39.29,
        27.76,
        15.09,
        11.46,
        10.42,
        10.03
      ],
      "organic_residue_proxy_percent": [
        100.0,
        80.3,
        51.7,
        33.3,
        11.1,
        3.7,
        1.2,
        0.1
      ],
      "hydroxylation_proxy_percent": [
        0.0,
        18.1,
        45.1,
        63.2,
        86.5,
        95.0,
        98.2,
        99.8
      ],
      "oxide_growth_proxy_nm": [
        0.0,
        0.048,
        0.126,
        0.189,
        0.306,
        0.396,
        0.477,
        0.63
      ]
    },
    {
      "id": "di-o3-water",
      "intent": "ozonated-water organic removal teaching replay",
      "normalized_oxidant_strength": 0.7,
      "time_min": [
        0,
        1,
        3,
        5,
        10,
        15,
        20,
        30
      ],
      "water_contact_angle_deg": [
        72.0,
        63.33,
        49.94,
        40.51,
        27.38,
        21.91,
        19.63,
        18.28
      ],
      "organic_residue_proxy_percent": [
        100.0,
        85.7,
        63.0,
        46.3,
        21.4,
        9.9,
        4.6,
        1.0
      ],
      "hydroxylation_proxy_percent": [
        0.0,
        13.1,
        34.3,
        50.3,
        75.3,
        87.8,
        93.9,
        98.5
      ],
      "oxide_growth_proxy_nm": [
        0.0,
        0.034,
        0.093,
        0.143,
        0.241,
        0.315,
        0.379,
        0.492
      ]
    }
  ],
  "derived_metrics": {
    "dry_uv_o3_contact_angle_15_min_deg": 11.46,
    "dry_uv_o3_organic_removal_15_min_percent": 96.3,
    "dry_uv_o3_oxide_proxy_15_min_nm": 0.396,
    "di_o3_water_contact_angle_15_min_deg": 21.91
  },
  "verification": {
    "cases": 2,
    "contact_angle_decreases_with_time": true,
    "organic_residue_decreases_with_time": true,
    "oxide_proxy_increases_with_time": true
  },
  "sources": [
    {
      "label": "UIUC MRL UV/Ozone Cleaner",
      "url": "https://mrl.illinois.edu/facilities/equipment/uvozone-cleaner",
      "note": "Public cleanroom equipment page describing UV/O3 organic-contaminant removal, hydrophilicity, and deposition-prep use."
    },
    {
      "label": "Samco UV ozone surface treatment",
      "url": "https://www.samcointl.com/processes/surface-treatment/uv-ozone/",
      "note": "Public industry page for UV/O3 surface treatment and organic-contaminant removal vocabulary."
    },
    {
      "label": "Harrick Plasma surface chemistry modification",
      "url": "https://harrickplasma.com/surface-chemistry/",
      "note": "Public application note for plasma-driven surface chemistry, wettability, hydroxylation, and air recovery boundaries."
    }
  ],
  "limitations": [
    "No UV intensity distribution, ozone concentration, humidity, substrate temperature, dissolved ozone transport, or material-specific oxidation rate is modeled.",
    "The ozone-strength labels are normalized teaching axes and must not be copied into equipment settings.",
    "The oxide-growth values are proxies for caution, not measured film thickness.",
    "Real use requires material compatibility, contamination metrology, safety approval, and tool-specific training."
  ]
}