# Surface Treatment Process Model Card

SemiAgora surface-treatment simulations are educational replays. They teach
how surface preparation changes observable quantities such as contact angle,
organic-residue proxy, hydroxylation proxy, hydrophobic recovery, and
oxide-growth caution before thin-film deposition, bonding, lithography, or
surface analysis.

## Included Simulations

- `SA-PROC-SURF-O2-PLASMA-001`: O2 plasma activation, contact-angle reduction,
  residue removal proxy, ion-exposure warning, and air-recovery replay.
- `SA-PROC-SURF-O3-OZONE-001`: O3 / UV-ozone surface clean, organic-residue
  proxy, hydrophilicity, hydroxylation proxy, and oxide-growth caution replay.
- `process_surface_treatment_models.py`: compact reference script for the
  public teaching calculations.

## Public Boundary

These files do not contain qualified recipes, tool settings, chamber histories,
gas flows, plasma powers, ozone concentrations, endpoint procedures, process
windows, facility instructions, or production metrology. They should not be
used to process wafers, qualify bonding, release wafers, tune tools, or claim a
measured SemiAgora process.

## Source Spine

- Harrick Plasma surface chemistry modification: https://harrickplasma.com/surface-chemistry/
- UIUC MRL UV/Ozone Cleaner: https://mrl.illinois.edu/facilities/equipment/uvozone-cleaner
- UNC CHANL oxygen plasma system: https://chanl.unc.edu/instrument/oxygen-plasma-system/
- Samco UV ozone surface treatment: https://www.samcointl.com/processes/surface-treatment/uv-ozone/

## Recommended Next Data

Useful future additions are rights-clean contact-angle measurements before and
after treatment, XPS or FTIR summaries for surface chemistry, ellipsometry or
oxide-thickness checks when oxidation matters, adhesion or nucleation metrics
for subsequent films, aging/recovery measurements after air exposure, and
clear material-compatibility notes. Recipe details can stay private while the
evidence contract improves.