# SemiAgora Wet Clean and Surface Preparation Model Card

Version: 2026-08-12-v55

## Scope

This pack provides public-safe, precomputed teaching replays for wet clean contamination removal, native oxide state, HMDS adhesion readiness, and clean-sequence evidence planning.

## Included Simulations

- `process-wet-clean-contamination-removal-web-v1.json`
- `process-dilute-hf-native-oxide-window-web-v1.json`
- `process-hmds-adhesion-prime-web-v1.json`
- `process-clean-sequence-queue-web-v1.json`

## Model Boundary

The datasets use normalized conceptual proxies. They do not publish process recipes, chemical concentrations, bath times, tool setpoints, facility procedures, safety instructions, equipment routes, endpoint controls, or qualified process windows.

## Intended Use

- Teach why organics, particles, metals, oxide state, surface energy, and queue time must be separated.
- Help paper readers ask what evidence is attached to a surface-preparation claim.
- Provide a public source spine for lesson pages and simulation objects.

## Required Evidence Before Real Process Use

- Facility-approved procedure and safety review.
- Material-stack compatibility review.
- Rights-clean particle, metal, oxide, contact-angle, adhesion, or electrical metrology.
- Queue-time and storage-condition notes.
- Uncertainty, sample count, and non-claim statements.

## Public Sources

- Stanford SNF Pre-Diffusion Clean: https://snfguide.stanford.edu/taxonomy/term/712/all/feed?order=field_equipment_name&sort=desc
- Stanford SNF Standard Clean 1: https://snfguide.stanford.edu/guide/chemicals/acids/standard-clean-1
- Stanford SNF HMDS: https://snfguide.stanford.edu/guide/chemicals/primers/hmds
- NIST wet chemical cleaning publication: https://www.nist.gov/publications/wet-chemical-cleaning-plasma-oxide-grown-heated-001-inp-surfaces