# PVD Transport and Uniformity Model Card

## Identity

- Experiment: SA-PROC-DEP-PVD-012
- Version: 2026-08-29-pvd-v1
- Mode: original dimensionless precomputed replay only
- Public state: packet only; exact Sites v109 remains unchanged

## Intended Use

This packet helps learners and reviewers separate target erosion state, target-to-wafer scattering, angular arrival, spatial averaging, feature access, resputter, redeposition, continuity, wafer uniformity, and film-stress evidence. It supports bounded comparisons and measurement planning across blanket-metallization-like, barrier-seed-like, feature-liner-like, and package-UBM-like teaching contexts.

## Model

The replay is a complete Cartesian product of eight declared axes. Twenty normalized outputs are produced with original SemiAgora equations. Three integer teaching-token ledgers partition source paths, surface fates, and wafer allocation with exact arithmetic closure. Ordered states P00-P07 are not time or target life.

Coefficients are original teaching choices. They are not copied, fitted, calibrated, reverse engineered, or inferred from any source, measurement, customer, chamber, tool, geometry, recipe, publication, or vendor page.

## Evidence Posture

Every physical teaching key appears twice: teaching_assumption and replacement_slot. Evidence posture changes only two metadata fields. It cannot alter any proxy, token, regime, role gate, bridge label, or physical key.

All rows require measurement-owned replacement evidence before engineering use. A teaching-deposition-handoff-ready label remains normalized metadata and never authorizes a physical condition, recipe, geometry, equipment action, qualification, disposition, or signoff.

## Source Boundary

The source catalog is link-only. No source body, equation, coefficient, figure, table, code, geometry, operating value, result, or numeric datum enters the packet.

## SIMTRA Boundary

Ghent University's SiMTRA pages are transport-model references only. No executable, manual body, configuration, chamber model, interaction potential, trajectory, output, or registered-download content is copied or run.

## ViennaPS Boundary

ViennaPS documentation is a feature-scale framework reference only. Current GPL materials remain isolated. No source code, example, dependency, geometry, parameter, binary, screenshot, or solver output is copied or executed.

## Not A Physical Solver

This is not a physical magnetron, plasma, gas-transport, sputter-yield, target-life, film-growth, stress, step-coverage, or chamber-uniformity solver. It does not calculate pressure, flow, gas identity, power, voltage, current, magnetic field, energy, angular distribution, flux, rate, thickness, stress, curvature, sheet resistance, roughness, composition, target wear, geometry, profile, or uncertainty.

## Prohibited Use

- Do not use the packet to set or optimize equipment.
- Do not infer a recipe, target-change point, maintenance instruction, safety action, endpoint, or wafer disposition.
- Do not rank suppliers, tools, targets, gases, materials, or processes.
- Do not claim calibration, physical accuracy, reliability, qualification, production fitness, or signoff.
- Do not edit 09_website/, reserve a Sites version, save, deploy, or change access from this packet work unit.

## Replacement Evidence

Engineering use requires the accountable evidence list in pvd-state-contract-v1.json, including owned chamber and target state, calibrated operating traces, target-to-wafer and feature geometry, flux evidence, thickness and wafer maps, cross sections, continuity and electrical evidence, stress and curvature, materials characterization, uncertainty, model residuals, and independent review.

## Independent Verification

The verifier must not import the generator or shared equation helpers. It independently reconstructs all rows, equations, regimes, gates, bridges, ledgers, prohibited zeros, CSV/JSON identity, repeatability, and hashes over the full dataset.

Passing proves deterministic contract conformance only.