{ "schema": "semiagora.pvd-transport-public-manifest.v1", "version": "2026-08-29-packet-v1", "packetVersion": "2026-08-29-pvd-v1", "experimentId": "SA-PROC-DEP-PVD-012", "generatedAt": "2026-08-29T00:00:00+09:00", "status": "packet-only-not-deployed", "counts": { "rows": 6912, "physicalRows": 3456, "evidencePairs": 3456, "columns": 189, "normalizedProxyEquations": 20, "exactIntegerLedgers": 3, "prohibitedZeroFields": 112, "sources": 20, "claimNodes": 16 }, "axes": [ { "id": "application_family", "count": 4, "values": [ "blanket_metallization_like", "barrier_seed_like", "feature_liner_like", "package_ubm_like" ], "meaning": "Teaching application archetype without customer, node, named material stack, film thickness, tool, recipe, or qualified process." }, { "id": "transport_scattering_state", "count": 3, "values": [ "line_of_sight_like", "transitional_like", "scattered_like" ], "meaning": "Ordinal target-to-wafer collision context without gas identity, pressure, mean free path, cross section, chamber geometry, or transport coefficient." }, { "id": "angular_flux_state", "count": 3, "values": [ "directional_like", "mixed_like", "broad_like" ], "meaning": "Normalized arrival-direction context without angle, distribution, energy, trajectory, collimator geometry, or measured flux." }, { "id": "target_erosion_state", "count": 3, "values": [ "fresh_like", "evolved_like", "localized_like" ], "meaning": "Ordinal source-evolution context without target material, racetrack profile, wear depth, lifetime, magnetic field, power, or maintenance state." }, { "id": "resputter_state", "count": 2, "values": [ "lower_like", "higher_like" ], "meaning": "Normalized surface-removal context without ion identity, energy, bias, sputter yield, sticking coefficient, surface composition, or rate." }, { "id": "wafer_motion_state", "count": 2, "values": [ "static_like", "averaging_like" ], "meaning": "Ordinal spatial-averaging context without stage path, rotation rate, dwell, wafer position, equipment action, or uniformity claim." }, { "id": "ordered_state", "count": 8, "values": [ "P00", "P01", "P02", "P03", "P04", "P05", "P06", "P07" ], "meaning": "Ordered teaching replay state; not time, duration, recipe step, target age, chamber sequence, endpoint, or equipment state." }, { "id": "evidence_posture", "count": 2, "values": [ "teaching_assumption", "replacement_slot" ], "meaning": "Evidence metadata only; it cannot change physical keys, coefficients, tokens, proxies, regimes, gates, labels, or serialization." } ], "ranges": { "ordered_state_norm": { "min": 0, "max": 1 }, "scattering_burden_proxy": { "min": 0.1476, "max": 0.82 }, "arrival_directionality_proxy": { "min": 0.1479888, "max": 0.762233549 }, "erosion_localization_proxy": { "min": 0.13658112, "max": 0.81344 }, "source_flux_stability_proxy": { "min": 0.4020672, "max": 1 }, "wafer_averaging_proxy": { "min": 0.2024, "max": 0.82 }, "incident_flux_proxy": { "min": 0.280911017, "max": 0.737348695 }, "sidewall_access_proxy": { "min": 0.256239686, "max": 0.783889401 }, "bottom_access_proxy": { "min": 0.125489667, "max": 0.649457029 }, "overhang_burden_proxy": { "min": 0.031175127, "max": 0.680085512 }, "resputter_burden_proxy": { "min": 0.146362731, "max": 0.618132527 }, "redeposition_burden_proxy": { "min": 0.133665333, "max": 0.701509827 }, "center_edge_uniformity_proxy": { "min": 0.299465984, "max": 1 }, "azimuthal_uniformity_proxy": { "min": 0.242548352, "max": 0.994020685 }, "step_coverage_proxy": { "min": 0.13591364, "max": 0.563504987 }, "continuity_margin_proxy": { "min": 0.065300501, "max": 0.560601173 }, "compressive_stress_burden_proxy": { "min": 0.121406712, "max": 0.539625564 }, "tensile_stress_burden_proxy": { "min": 0.187664199, "max": 0.555004152 }, "stress_balance_proxy": { "min": 0.608148575, "max": 0.999875471 }, "film_stability_proxy": { "min": 0.338638612, "max": 0.886083185 } }, "distributions": { "depositionRegime": { "bounded-deposition": 702, "coverage-limited": 2678, "erosion-localized": 1104, "stress-imbalanced": 50, "transport-scattered": 1344, "pinch-off-risk": 700, "directionality-limited": 288, "resputter-dominant": 46 }, "operatorGate": { "bounded-trace-ready": 3824, "review-resputter": 64, "review-wafer-averaging": 720, "review-target-erosion": 2304 }, "processEngineerGate": { "bounded-comparison-ready": 786, "review-step-coverage": 4004, "review-film-stability": 142, "review-transport": 1968, "review-stress": 12 }, "integrationGate": { "teaching-deposition-handoff-ready": 104, "deposition-handoff-blocked": 6808 }, "yieldGate": { "bounded-film-monitor": 74, "review-continuity": 4490, "review-uniformity": 1416, "review-stress": 186, "review-overhang": 746 }, "vacTransport": { "direct-like": 1248, "collision-mixed-like": 3360, "scattered-like": 2304 }, "plasmaSource": { "stable-like": 4608, "transitional-like": 2016, "erosion-sensitive-like": 288 }, "particleSurfaceFate": { "retained-like": 44, "mixed-like": 4940, "resputter-weighted": 576, "redeposition-weighted": 1352 }, "metrologyPriority": { "thickness-and-continuity": 1698, "cross-section": 3720, "uniformity-map": 1416, "stress-curvature": 78 } }, "representativeStates": [ { "physical_key": "blanket_metallization_like|scattered_like|mixed_like|fresh_like|lower_like|static_like|P01", "application_family": "blanket_metallization_like", "transport_scattering_state": "scattered_like", "angular_flux_state": "mixed_like", "target_erosion_state": "fresh_like", "resputter_state": "lower_like", "wafer_motion_state": "static_like", "ordered_state": "P01", "deposition_regime": "transport-scattered", "incident_flux_proxy": 0.434265864, "bottom_access_proxy": 0.351796288, "sidewall_access_proxy": 0.677936209, "step_coverage_proxy": 0.511665178, "continuity_margin_proxy": 0.3919717, "center_edge_uniformity_proxy": 0.77948021, "azimuthal_uniformity_proxy": 0.729380533, "stress_balance_proxy": 0.83707681, "film_stability_proxy": 0.72474195, "operator_gate": "bounded-trace-ready", "process_engineer_gate": "review-transport", "integration_gate": "deposition-handoff-blocked", "yield_gate": "review-continuity", "downstream_metrology_priority_band": "thickness-and-continuity" }, { "physical_key": "feature_liner_like|line_of_sight_like|mixed_like|fresh_like|lower_like|static_like|P02", "application_family": "feature_liner_like", "transport_scattering_state": "line_of_sight_like", "angular_flux_state": "mixed_like", "target_erosion_state": "fresh_like", "resputter_state": "lower_like", "wafer_motion_state": "static_like", "ordered_state": "P02", "deposition_regime": "directionality-limited", "incident_flux_proxy": 0.571638124, "bottom_access_proxy": 0.277381923, "sidewall_access_proxy": 0.359065703, "step_coverage_proxy": 0.222276437, "continuity_margin_proxy": 0.201115091, "center_edge_uniformity_proxy": 0.871234319, "azimuthal_uniformity_proxy": 0.709041553, "stress_balance_proxy": 0.998424907, "film_stability_proxy": 0.74562959, "operator_gate": "bounded-trace-ready", "process_engineer_gate": "review-transport", "integration_gate": "deposition-handoff-blocked", "yield_gate": "review-overhang", "downstream_metrology_priority_band": "cross-section" }, { "physical_key": "blanket_metallization_like|line_of_sight_like|directional_like|localized_like|lower_like|static_like|P00", "application_family": "blanket_metallization_like", "transport_scattering_state": "line_of_sight_like", "angular_flux_state": "directional_like", "target_erosion_state": "localized_like", "resputter_state": "lower_like", "wafer_motion_state": "static_like", "ordered_state": "P00", "deposition_regime": "erosion-localized", "incident_flux_proxy": 0.666994796, "bottom_access_proxy": 0.649457029, "sidewall_access_proxy": 0.339157697, "step_coverage_proxy": 0.491479495, "continuity_margin_proxy": 0.517922691, "center_edge_uniformity_proxy": 0.559437228, "azimuthal_uniformity_proxy": 0.474428995, "stress_balance_proxy": 0.924492912, "film_stability_proxy": 0.626128278, "operator_gate": "review-target-erosion", "process_engineer_gate": "bounded-comparison-ready", "integration_gate": "deposition-handoff-blocked", "yield_gate": "review-uniformity", "downstream_metrology_priority_band": "uniformity-map" }, { "physical_key": "barrier_seed_like|line_of_sight_like|directional_like|fresh_like|lower_like|static_like|P00", "application_family": "barrier_seed_like", "transport_scattering_state": "line_of_sight_like", "angular_flux_state": "directional_like", "target_erosion_state": "fresh_like", "resputter_state": "lower_like", "wafer_motion_state": "static_like", "ordered_state": "P00", "deposition_regime": "pinch-off-risk", "incident_flux_proxy": 0.726015536, "bottom_access_proxy": 0.455709036, "sidewall_access_proxy": 0.279272467, "step_coverage_proxy": 0.27297867, "continuity_margin_proxy": 0.30861367, "center_edge_uniformity_proxy": 0.885375431, "azimuthal_uniformity_proxy": 0.752102126, "stress_balance_proxy": 0.913733388, "film_stability_proxy": 0.772070773, "operator_gate": "bounded-trace-ready", "process_engineer_gate": "review-step-coverage", "integration_gate": "deposition-handoff-blocked", "yield_gate": "review-overhang", "downstream_metrology_priority_band": "cross-section" }, { "physical_key": "package_ubm_like|line_of_sight_like|directional_like|fresh_like|higher_like|static_like|P03", "application_family": "package_ubm_like", "transport_scattering_state": "line_of_sight_like", "angular_flux_state": "directional_like", "target_erosion_state": "fresh_like", "resputter_state": "higher_like", "wafer_motion_state": "static_like", "ordered_state": "P03", "deposition_regime": "resputter-dominant", "incident_flux_proxy": 0.690252127, "bottom_access_proxy": 0.530704483, "sidewall_access_proxy": 0.320877452, "step_coverage_proxy": 0.447004734, "continuity_margin_proxy": 0.445627456, "center_edge_uniformity_proxy": 0.861903346, "azimuthal_uniformity_proxy": 0.685585574, "stress_balance_proxy": 0.768561434, "film_stability_proxy": 0.729730941, "operator_gate": "bounded-trace-ready", "process_engineer_gate": "review-step-coverage", "integration_gate": "deposition-handoff-blocked", "yield_gate": "review-continuity", "downstream_metrology_priority_band": "cross-section" }, { "physical_key": "blanket_metallization_like|scattered_like|directional_like|fresh_like|lower_like|static_like|P07", "application_family": "blanket_metallization_like", "transport_scattering_state": "scattered_like", "angular_flux_state": "directional_like", "target_erosion_state": "fresh_like", "resputter_state": "lower_like", "wafer_motion_state": "static_like", "ordered_state": "P07", "deposition_regime": "stress-imbalanced", "incident_flux_proxy": 0.439295126, "bottom_access_proxy": 0.33906448, "sidewall_access_proxy": 0.574645728, "step_coverage_proxy": 0.446724674, "continuity_margin_proxy": 0.339561237, "center_edge_uniformity_proxy": 0.716201216, "azimuthal_uniformity_proxy": 0.597573248, "stress_balance_proxy": 0.771968162, "film_stability_proxy": 0.63761686, "operator_gate": "bounded-trace-ready", "process_engineer_gate": "review-step-coverage", "integration_gate": "deposition-handoff-blocked", "yield_gate": "review-continuity", "downstream_metrology_priority_band": "cross-section" }, { "physical_key": "blanket_metallization_like|line_of_sight_like|directional_like|evolved_like|lower_like|static_like|P07", "application_family": "blanket_metallization_like", "transport_scattering_state": "line_of_sight_like", "angular_flux_state": "directional_like", "target_erosion_state": "evolved_like", "resputter_state": "lower_like", "wafer_motion_state": "static_like", "ordered_state": "P07", "deposition_regime": "coverage-limited", "incident_flux_proxy": 0.611928661, "bottom_access_proxy": 0.519675751, "sidewall_access_proxy": 0.339615701, "step_coverage_proxy": 0.41980403, "continuity_margin_proxy": 0.42911057, "center_edge_uniformity_proxy": 0.636056576, "azimuthal_uniformity_proxy": 0.431155328, "stress_balance_proxy": 0.952081984, "film_stability_proxy": 0.617008291, "operator_gate": "review-wafer-averaging", "process_engineer_gate": "review-step-coverage", "integration_gate": "deposition-handoff-blocked", "yield_gate": "review-uniformity", "downstream_metrology_priority_band": "uniformity-map" }, { "physical_key": "blanket_metallization_like|line_of_sight_like|directional_like|fresh_like|lower_like|static_like|P00", "application_family": "blanket_metallization_like", "transport_scattering_state": "line_of_sight_like", "angular_flux_state": "directional_like", "target_erosion_state": "fresh_like", "resputter_state": "lower_like", "wafer_motion_state": "static_like", "ordered_state": "P00", "deposition_regime": "bounded-deposition", "incident_flux_proxy": 0.725855331, "bottom_access_proxy": 0.649457029, "sidewall_access_proxy": 0.339157697, "step_coverage_proxy": 0.491837517, "continuity_margin_proxy": 0.546480136, "center_edge_uniformity_proxy": 0.884490708, "azimuthal_uniformity_proxy": 0.751348413, "stress_balance_proxy": 0.902136854, "film_stability_proxy": 0.812760723, "operator_gate": "bounded-trace-ready", "process_engineer_gate": "bounded-comparison-ready", "integration_gate": "teaching-deposition-handoff-ready", "yield_gate": "bounded-film-monitor", "downstream_metrology_priority_band": "thickness-and-continuity" } ], "sourceSummary": { "sources": 20, "claimNodes": 16, "linkStatus": "pass", "reachable": 17, "accessGated": 3, "hardFailures": 0, "networkErrors": 0, "sourceBodiesStored": false, "sourceNumericUse": "none" }, "currentPublicBaseline": { "version": "v109", "versionId": "appgprj_6a6f4d3affc0819189d99a8f29062540~appgver_005d791cd0f881919fe28dce4fc90e8f", "deploymentId": "appgdep_6a91677cd40081919caf523a472130f6", "sourceCommit": "c3888cc26eb434d9ca88e76889f781194044db4a", "changedByThisPacket": false, "publicVersionReserved": "none", "releaseDecision": "hold" }, "publicDelivery": { "mode": "metadata-manifest-plus-csv-rows", "rowsEmbedded": false, "rowArtifact": "pvd-transport-state-v1.csv", "rowArtifactSha256": "B3F63755988E8A25BC63D000A5400F30A8D523FFAA9ABE5C60D4A739EB58F065", "canonicalRowBearingArtifact": "pvd-transport-state-web-v1.json", "canonicalRowBearingArtifactSha256": "4B08AF9B8030ABEB52D1252BCAE8E94CF075DF9FA2F367517626B7C983F16387", "independentValidationArtifact": "validation-report-v1.json", "independentValidationArtifactSha256": "EA651DF743B7C4A7CE9E97CD00FA5174197703C38179B766159E554779D099D8", "sourceSpineArtifact": "pvd-source-spine-v1.json", "sourceSpineArtifactSha256": "07182105DEAD1BFD09A04D8BD30D5BA624DB580AEFDEB5D335EFBF894C12C3B6" }, "contracts": { "state": { "file": "pvd-state-contract-v1.json", "sha256": "FE476A99D441F5840D6B13FF444CE051730AF61708B8A49469DC9C45265DE567" }, "metrics": { "file": "pvd-metric-contract-v1.json", "sha256": "0E980B85D849EE8749EBB32508F0548D103306653D5E712E1A730C59792FE448" }, "verifier": { "file": "independent-verifier-contract-v1.json", "sha256": "629625943FB87F634293E24C52722D72BEC4819038967F49B33D0AB45D83D754" }, "sourceCatalog": { "file": "source_catalog_v1.json", "sha256": "CDC695597EFFBD49B01DF01ECB91E9874E372DFD1C0707C1F89606B3FA81D27C" }, "claimMap": { "file": "source_claim_map_v1.json", "sha256": "48305184D3E0CE78C20607F6E1D4E7290B222390AD85F85059FF11F86D673CB9" } }, "depositionRegimes": [ "transport-scattered", "directionality-limited", "erosion-localized", "pinch-off-risk", "resputter-dominant", "stress-imbalanced", "coverage-limited", "bounded-deposition" ], "requiredPhenomena": [ "target-erosion-state", "angular-flux", "gas-scattering", "shadowing", "resputter", "step-coverage", "film-stress-proxy" ], "upstreamBridges": [ { "sourceExperimentId": "SA-EQP-VAC-GAS-009", "allowedFields": [ "upstream_vac_transport_band", "upstream_vac_scattering_band", "upstream_vac_evidence_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-EQP-PLASMA-CCP-ICP-008", "allowedFields": [ "upstream_plasma_source_band", "upstream_plasma_resputter_band", "upstream_plasma_evidence_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false }, { "sourceExperimentId": "SA-PROC-FEATURE-PMC-007", "allowedFields": [ "upstream_pmc_incidence_band", "upstream_pmc_surface_fate_band", "upstream_pmc_evidence_gate" ], "physicalUnitsAllowed": false, "automaticStateImportAllowed": false } ], "downstreamBridge": { "targetExperimentId": "SA-MET-INSPECTION-030", "allowedFields": [ "downstream_thickness_uniformity_band", "downstream_step_coverage_band", "downstream_stress_priority_band", "downstream_metrology_priority_band", "downstream_film_evidence_gate", "teaching_deposition_handoff_gate" ], "physicalUnitsAllowed": false, "automaticRecipeHandoffAllowed": false, "automaticGeometryHandoffAllowed": false, "automaticEquipmentActionAllowed": false, "automaticDispositionAllowed": false }, "replacementEvidenceRequirements": [ "accountable run identifier, wafer ownership, review owner, and disposition owner", "revisioned chamber, source, shield, collimator if present, and wafer-stage configuration", "owned target identity, backing, geometry, bonding state, erosion map, use history, and change history", "base-vacuum, residual-gas, leak-check, pump, throttle, and chamber-history evidence with uncertainty", "owned process-gas identity, composition, flow, pressure, and transient evidence with uncertainty", "power, voltage, current, waveform, match, and arc-event evidence with calibration and uncertainty", "magnetic-field, source-state, cooling, and target-surface evidence with traceability", "wafer position, orientation, motion, rotation, temperature, and backside-contact evidence", "calibrated incident energy, angular distribution, flux, and ion-neutral fraction evidence or validated equivalents", "revisioned chamber, target-to-wafer, shield, feature, and pattern-density geometry", "deposition rate, thickness, center-edge, azimuthal, wafer-to-wafer, and chamber-to-chamber maps", "top, middle, bottom, and sidewall cross-section measurements with uncertainty and sampling locations", "continuity, sheet-resistance, contact-resistance, adhesion, and interface evidence where applicable", "resputter, redeposition, overhang, pinch-off, void, seam, and open-defect evidence with definitions and detection limits", "film-stress and wafer-curvature evidence with film thickness, substrate properties, uncertainty, and sign convention", "roughness, density, composition, texture, phase, grain, impurity, and interface evidence appropriate to the claim", "within-wafer, wafer-to-wafer, lot-to-lot, target-life, maintenance-cycle, and tool-matching variation evidence", "measurement-system analysis, calibration records, uncertainty budget, sampling plan, and gauge capability", "model version, source assumptions, geometry, parameters, deterministic posture, sensitivity, residuals, and applicability limits", "independent model-to-measurement review, rights review, limitations review, and accountable approval" ], "requiredSections": [ "Explore", "Run Card", "Export", "Methods", "Limits", "Evidence" ], "limitation": "Original dimensionless teaching replay only; no physical value, recipe, equipment action, calibration, qualification, reliability, or production claim." }