{ "schema": "semiagora.variability-metrology-uq.v1", "version": "2026-09-05-v136", "workUnitId": "SA-MET-VARIABILITY-UQ-068", "generatedDate": "2026-09-05", "evidenceClass": "illustrative-original-surrogate", "uncertaintyClasses": [ "ALEATORIC", "EPISTEMIC", "MEASUREMENT", "MODEL" ], "evaluationMethods": [ "TYPE_A", "TYPE_B" ], "taxonomyNote": "Evaluation method and uncertainty class are orthogonal fields.", "counts": { "cases": 8, "components": 32, "uncertaintyClasses": 4, "budgetFixtures": 8, "spectrumFixtures": 3, "apertureFixtures": 3, "samplingFixtures": 3, "hierarchyFixtures": 1, "refusalFixtures": 8, "acceptanceFixtures": 26 }, "cases": [ { "id": "ler-bandwidth", "title": "LER/LWR extraction bandwidth", "domain": "Patterning", "question": "Which uncertainty component changes the interpretation before this result can support a next measurement or simulation?", "quantity": "edge-position residual", "unit": "nm", "grain": "detrended edge-trace segment", "denominator": "per 256 nm 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"https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=932010", "role": "roughness terminology and spectral context", "rights": "link-only" }, { "id": "nist-dimensional-pattern-metrology", "label": "NIST: Dimensional Metrology for Nanoscale Patterns", "url": "https://www.nist.gov/programs-projects/dimensional-metrology-nanoscale-patterns", "role": "measurement context", "rights": "link-only" }, { "id": "nist-nested-variation", "label": "NIST/SEMATECH: nested variation", "url": "https://www.itl.nist.gov/div898/handbook/pri/section5/pri55.htm", "role": "hierarchical design context", "rights": "link-only" }, { "id": "nist-variance-components", "label": "NIST/SEMATECH: variance components", "url": "https://www.itl.nist.gov/div898/handbook/prc/section4/prc44.htm", "role": "variance-component terminology", "rights": "link-only" }, { "id": "nist-standard-deviation-confidence", "label": "NIST/SEMATECH: confidence interval for standard deviation", "url": "https://www.itl.nist.gov/div898/handbook/prc/section2/prc231.htm", "role": "finite-sample uncertainty context", "rights": "link-only" }, { "id": "nist-tn1297-reporting", "label": "NIST TN 1297: Reporting Uncertainty", "url": "https://www.nist.gov/pml/nist-technical-note-1297/nist-tn-1297-7-reporting-uncertainty", "role": "uncertainty reporting boundary", "rights": "link-only" }, { "id": "bipm-vim-precision", "label": "BIPM VIM: measurement precision", "url": "https://jcgm.bipm.org/vim/en/2.15.html", "role": "repeatability and reproducibility vocabulary", "rights": "link-only" }, { "id": "bipm-jcgm-publications", "label": "BIPM JCGM publications", "url": "https://www.bipm.org/en/committees/jc/jcgm/publications", "role": "GUM and VIM publication context", "rights": "link-only" }, { "id": "nist-gauge-rr", "label": "NIST/SEMATECH: Gauge R&R overview", "url": "https://www.itl.nist.gov/div898/handbook/mpc/section4/mpc4.htm", "role": "measurement-system decomposition", "rights": "link-only" }, { "id": "nist-gauge-uncertainty", "label": "NIST/SEMATECH: uncertainty from a gauge study", "url": "https://www.itl.nist.gov/div898/handbook/mpc/section4/mpc46.htm", "role": "gauge-study uncertainty boundary", "rights": "link-only" }, { "id": "nist-vmet-uncertainty", "label": "NIST: metrology and process-control measurement uncertainty", "url": "https://www.nist.gov/publications/metrology-and-process-control-dealing-measurement-uncertainty", "role": "decision-risk context", "rights": "link-only" }, { "id": "nist-hybrid-bonding", "label": "NIST: hybrid-bonding-ready nanoscale mechanical characterization", "url": "https://www.nist.gov/news-events/news/2026/01/nanoscale-mechanical-characterization-hybrid-bonding-ready-structures", "role": "hybrid-bonding metrology signal", "rights": "link-only" }, { "id": "semiagora-v127", "label": "SemiAgora V127 LER/LWR variability chain", "url": "/simulations/ler-lwr-variability-chain", "role": "public synthetic roughness input", "rights": "public SemiAgora route" }, { "id": "semiagora-v128", "label": "SemiAgora V128 SRAM variation coverage", "url": "/simulations/sram-variation-corner-coverage", "role": "public synthetic hierarchy input", "rights": "public SemiAgora route" } ], "interactionContract": { "views": [ "budget", "spectrum", "hierarchy", "cases", "method" ], "defaultView": "budget", "localControls": true, "deterministicExports": [ "JSON", "CSV" ], "minimumViewportWidthPx": 320, "reducedMotion": true }, "privacy": { "bundledAtBuildTime": true, "initialNetworkReads": 0, "externalFetches": 0, "networkWrites": 0, "storageWrites": 0, "accounts": false, "uploads": false, "cookies": false }, "limitations": [ "All values are original deterministic teaching fixtures, not fab, wafer, device, bonding, or production measurements.", "The Lorentzian PSD, sinc-squared aperture response, finite-sample approximation, and component budgets are explicit teaching models, not universal physical laws.", "Type A and Type B are evaluation methods and do not replace the aleatoric, epistemic, measurement, or model classification.", "Values from different quantities, units, grains, denominators, or evidence classes are not numerically ranked.", "No process recipe, acceptance threshold, qualification, disposition, signoff, or production action is produced." ] }