{ "schema": "semiagora.deep-simulation.v1", "execution_mode": "precomputed-only", "experiment_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "slug": "sputter-pvd-step-coverage", "title": "Sputter/PVD step coverage and continuity", "model_boundary": "normalized geometry and scattering model, no chamber recipe", "public_boundary": [ "No live server solver execution.", "No process recipe, tool setting, chamber condition, equipment operation, qualification signoff, upload, account, payment, comment, newsletter signup, or submission workflow.", "Third-party tools and source pages remain source links unless separately reviewed." ], "headline_metric": { "name": "best_continuity_score", "value": 62.057, "case": { "feature_aspect_ratio": 0.5, "pressure_proxy_mtorr": 10 } }, "rows": [ { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 0.5, "pressure_proxy_mtorr": 2, "bottom_coverage_pct": 71.87, "sidewall_coverage_pct": 36.85, "overhang_risk": 0.165, "continuity_score": 55.795, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 0.5, "pressure_proxy_mtorr": 6, "bottom_coverage_pct": 77.52, "sidewall_coverage_pct": 44.05, "overhang_risk": 0.225, "continuity_score": 59.128, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 0.5, "pressure_proxy_mtorr": 10, "bottom_coverage_pct": 83.17, "sidewall_coverage_pct": 51.25, "overhang_risk": 0.285, "continuity_score": 62.057, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 1, "pressure_proxy_mtorr": 2, "bottom_coverage_pct": 60.63, "sidewall_coverage_pct": 35.1, "overhang_risk": 0.22, "continuity_score": 46.564, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 1, "pressure_proxy_mtorr": 6, "bottom_coverage_pct": 65.4, "sidewall_coverage_pct": 42.3, "overhang_risk": 0.28, "continuity_score": 49.466, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 1, "pressure_proxy_mtorr": 10, "bottom_coverage_pct": 70.17, "sidewall_coverage_pct": 49.5, "overhang_risk": 0.34, "continuity_score": 52.005, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 2, "pressure_proxy_mtorr": 2, "bottom_coverage_pct": 43.16, "sidewall_coverage_pct": 31.6, "overhang_risk": 0.33, "continuity_score": 32.487, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 2, "pressure_proxy_mtorr": 6, "bottom_coverage_pct": 46.55, "sidewall_coverage_pct": 38.8, "overhang_risk": 0.39, "continuity_score": 34.739, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 2, "pressure_proxy_mtorr": 10, "bottom_coverage_pct": 49.94, "sidewall_coverage_pct": 46, "overhang_risk": 0.45, "continuity_score": 36.692, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 3, "pressure_proxy_mtorr": 2, "bottom_coverage_pct": 30.72, "sidewall_coverage_pct": 28.1, "overhang_risk": 0.44, "continuity_score": 22.689, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 3, "pressure_proxy_mtorr": 6, "bottom_coverage_pct": 33.13, "sidewall_coverage_pct": 35.3, "overhang_risk": 0.5, "continuity_score": 24.493, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 3, "pressure_proxy_mtorr": 10, "bottom_coverage_pct": 35.55, "sidewall_coverage_pct": 42.5, "overhang_risk": 0.56, "continuity_score": 26.042, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 5, "pressure_proxy_mtorr": 2, "bottom_coverage_pct": 15.56, "sidewall_coverage_pct": 21.1, "overhang_risk": 0.66, "continuity_score": 10.972, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 5, "pressure_proxy_mtorr": 6, "bottom_coverage_pct": 16.79, "sidewall_coverage_pct": 28.3, "overhang_risk": 0.72, "continuity_score": 12.225, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." }, { "simulation_id": "SA-PROC-008-SPUTTER-PVD-STEP-001", "domain": "process", "feature_aspect_ratio": 5, "pressure_proxy_mtorr": 10, "bottom_coverage_pct": 18.01, "sidewall_coverage_pct": 35.5, "overhang_risk": 0.78, "continuity_score": 13.279, "teaching_point": "Line-of-sight deposition struggles as aspect ratio rises; scattering helps sidewalls but does not create a recipe." } ], "methods": [ "Bottom coverage decays with feature aspect ratio and is slightly moderated by scattering proxy.", "Sidewall coverage increases with scattering but loses ground as aspect ratio grows.", "Continuity score combines bottom/sidewall coverage with an overhang-risk penalty." ], "limitations": [ "No target material, wafer rotation, pressure, power, collimation, ionization, or chamber recipe is represented.", "No production step coverage, reliability, or integration recommendation is made.", "Use cross-section metrology, sheet resistance, TEM/SEM, and process ownership before calibrated claims." ], "evidence": [ "v64 deep results store every aspect-ratio, scattering, coverage, and continuity row.", "CSV export preserves the step-coverage table.", "The existing thin-film lesson keeps this card inside deposition learning rather than equipment operation." ], "sources": [ { "label": "DEVSIM", "url": "https://github.com/devsim/devsim", "note": "Open device/TCAD reference for future solver upgrades; not executed by these process cards." }, { "label": "OpenROAD Flow Scripts", "url": "https://github.com/The-OpenROAD-Project/OpenROAD-flow-scripts", "note": "Open EDA artifact-flow reference for future timing and layout evidence cards." } ], "source_seed_run": "07_assets/factory_lab/experiments/DEEP_SEMICONDUCTOR_V64_2026-08-14/" }