{ "schema": "semiagora.vacuum-gas-public-manifest.v1", "version": "2026-08-28-v108", "experimentId": "SA-EQP-VAC-GAS-009", "generatedAt": "2026-08-28T00:00:00.000Z", "publicDelivery": { "mode": "metadata-manifest-plus-csv-rows", "rowsEmbedded": false, "rowArtifact": "vacuum-gas-delivery-state-v108.csv", "rowArtifactSha256": "E8883986F9BE71F0F6584044748A8847D666A84AB0065BA8E834A5BEF2F3B2E5", "canonicalValidationArtifact": "vacuum-gas-delivery-state-web-v1.json", "canonicalValidationArtifactSha256": "B4374D52E8F0CCCC401436B5E3416164175CBB6BEEC2FEDA47F4EAD591858032", "note": "The public manifest omits the duplicate row array. The complete 10,368-row table remains in the CSV; the independently validated row-bearing JSON remains with canonical experiment evidence." }, "counts": { "rows": 10368, "physicalRows": 5184, "evidencePairs": 5184, "columns": 114, "sources": 14, "claimNodes": 11 }, "axes": [ { "id": "flow_regime", "count": 3, "values": [ "continuum_like", "transition_like", "molecular_like" ], "meaning": "Ordinal model-applicability context without pressure, Knudsen number, collision rate, or geometry." }, { "id": "gas_load_state", "count": 3, "values": [ "low", "mid", "high" ], "meaning": "Normalized admitted-source burden without gas identity, composition, flow, MFC setting, or recipe." }, { "id": "conductance_state", "count": 3, "values": [ "restricted", "nominal", "open" ], "meaning": "Ordinal chamber-to-foreline transport capacity without line size, valve position, geometry, or physical conductance." }, { "id": "pump_speed_state", "count": 3, "values": [ "low", "mid", "high" ], "meaning": "Normalized nominal pump-removal capability without pump type, speed curve, pressure range, or supplier." }, { "id": "chamber_volume_state", "count": 2, "values": [ "compact", "large" ], "meaning": "Normalized inventory capacity without physical volume or chamber geometry." }, { "id": "wall_source_state", "count": 2, "values": [ "low", "high" ], "meaning": "Normalized wall-release burden without material, history, coefficient, clean, bake, or maintenance instruction." }, { "id": "distribution_state", "count": 2, "values": [ "symmetric_like", "asymmetric_like" ], "meaning": "Normalized delivery-distribution context without gas-ring geometry, port map, CFD, or wafer profile." }, { "id": "transient_step", "count": 8, "values": [ "T00", "T01", "T02", "T03", "T04", "T05", "T06", "T07" ], "meaning": "Ordered replay state; not seconds, valve timing, pumpdown duration, purge time, or equipment sequence." }, { "id": "evidence_posture", "count": 2, "values": [ "teaching", "replacement_slot" ], "meaning": "Evidence metadata only; cannot change tokens, proxies, gates, seed, or physical state." } ], "rowOrder": [ "flow_regime", "gas_load_state", "conductance_state", "pump_speed_state", "chamber_volume_state", "wall_source_state", "distribution_state", "transient_step", "evidence_posture" ], "columns": [ "row_id", "experiment_id", "packet_version", "physical_key", "flow_regime", "gas_load_state", "conductance_state", "pump_speed_state", "chamber_volume_state", "wall_source_state", "distribution_state", "transient_step", "step_index", "step_norm", "admission_profile_proxy", "wall_release_profile_proxy", "conductance_proxy", "nominal_pump_speed_proxy", "effective_pumping_speed_proxy", "conductance_limitation_proxy", "transfer_rate_proxy", "removal_rate_proxy", "previous_chamber_inventory_tokens", "previous_foreline_inventory_tokens", "previous_system_inventory_tokens", "admitted_tokens", "wall_release_tokens", "foreline_return_tokens", "chamber_to_foreline_tokens", "pump_removed_tokens", "chamber_inventory_tokens", "foreline_inventory_tokens", "system_inventory_tokens", "chamber_ledger_residual_tokens", "foreline_ledger_residual_tokens", "system_ledger_residual_tokens", "chamber_pressure_proxy", "foreline_pressure_proxy", "residence_burden_proxy", "source_removal_gap_proxy", "inventory_accumulation_proxy", "distribution_uniformity_proxy", "delivery_stability_proxy", "conductance_limited_review", "foreline_accumulation_review", "wall_source_dominant_review", "inventory_accumulation_review", "settling_review", "distribution_review", "flow_model_review", "measurement_traceability_gate", "plasma_bridge_pressure_band", "plasma_bridge_residence_band", "plasma_bridge_delivery_band", "plasma_bridge_evidence_gate", "source_claim_nodes", "source_spine_version", "model_boundary", "evidence_requirement", "limitation", "operator_gate", "process_engineer_gate", "integration_gate", "yield_gate", "copied_source_numeric_value", "copied_source_equation", "copied_source_curve_or_table", "physical_pressure_value", "physical_flow_value", "physical_pump_speed_value", "physical_conductance_value", "physical_volume_value", "physical_time_value", "physical_temperature_value", "physical_mean_free_path_value", "physical_knudsen_number", "physical_collision_rate", "physical_leak_rate", "physical_outgassing_rate", "physical_residence_time", "physical_line_dimension", "physical_valve_position", "named_gas_recipe", "named_gas_composition", "gas_property_table", "pump_curve_row", "measured_pressure_row", "measured_flow_row", "calibration_row", "customer_chamber_geometry", "customer_process_data", "licensed_solver_output", "molflow_output", "cfd_output", "proprietary_equipment_model", "equipment_setpoint", "mfc_command", "valve_command", "pump_command", "gas_panel_action", "abatement_action", "maintenance_or_clean_instruction", "safety_procedure", "process_optimization_recommendation", "supplier_ranking", "qualification_claim", "signoff_claim", "physical_calibration_claim", "predictive_accuracy_claim", "production_fitness_claim", "named_tool_equivalence_claim", "live_server_run", "evidence_posture", "replacement_slot" ], "ranges": { "chamber_pressure_proxy": { "min": 0.343181818, "max": 1 }, "foreline_pressure_proxy": { "min": 0.139166667, "max": 1 }, "residence_burden_proxy": { "min": 0.266214411, "max": 1 }, "source_removal_gap_proxy": { "min": 0.004739336, "max": 0.602240896 }, "inventory_accumulation_proxy": { "min": 0.009433962, "max": 0.751748252 }, "distribution_uniformity_proxy": { "min": 0.618363843, "max": 0.918650881 }, "delivery_stability_proxy": { "min": 0.423, "max": 0.944534874 } }, "gateCounts": { "plasmaBridgeEvidence": { "handoff-blocked": 8848, "teaching-handoff-ready": 1520 }, "operator": { "review-wall-source": 2976, "bounded-state-ready": 4518, "review-settling": 1346, "review-foreline-accumulation": 1528 }, "processEngineer": { "review-conductance-limitation": 6528, "review-flow-model": 1344, "review-distribution": 1920, "bounded-comparison-ready": 576 }, "integration": { "plasma-handoff-blocked": 8848, "teaching-plasma-handoff-ready": 1520 }, "yield": { "review-inventory-accumulation": 4462, "bounded-risk-monitor": 5906 } }, "sourceSpine": { "schema": "semiagora.vacuum-gas-source-spine.v1", "version": "2026-08-28-vacuum-gas-v1", "experimentId": "SA-EQP-VAC-GAS-009", "generatedAt": "2026-08-28T00:00:00.000Z", "sources": [ { "id": "cern-vacuum-systems-2024", "label": "II.8 - Vacuum Systems", "publisher": "CERN Yellow Reports: School Proceedings", "url": "https://cds.cern.ch/record/2929324", "sourceType": "official-laboratory-open-training-monograph", "rightsStatus": "link-only; record declares CC BY 4.0 for the publication", "use": "Pressure, gas density, mean free path, throughput, conductance, pumping speed, effective pumping speed, outgassing, and instrumentation ownership vocabulary.", "numericUse": "none", "artifactUse": "none" }, { "id": "cern-vacuum-superconducting-devices", "label": "Vacuum Technology for Superconducting Devices", "publisher": "CERN Accelerator School", "url": "https://cds.cern.ch/record/1974068", "sourceType": "official-laboratory-school-paper", "rightsStatus": "link-only; CERN record and paper rights notices apply", "use": "Pump throughput, capture probability, nominal versus effective pumping speed, and conductance-limited system vocabulary.", "numericUse": "none", "artifactUse": "no table, coefficient, geometry, or worked example copied" }, { "id": "cern-vacuum-principles", "label": "Introduction to the Principles of Vacuum Physics", "publisher": "CERN Accelerator School", "url": "https://cds.cern.ch/record/582156", "sourceType": "official-laboratory-school-paper", "rightsStatus": "link-only", "use": "Kinetic-theory, pressure, density, mean-free-path, conductance, temperature, and gas-flow scope.", "numericUse": "none", "artifactUse": "none" }, { "id": "cern-molflow-paper", "label": "Introduction to the Latest Version of the Test-particle Monte Carlo Code Molflow+", "publisher": "CERN Document Server / IPAC", "url": "https://cds.cern.ch/record/1967008", "sourceType": "primary-open-software-method-paper", "rightsStatus": "link-only; record declares CC BY for the publication", "use": "Test-particle Monte Carlo, molecular-flow geometry, source-to-pump trajectories, conductance, pressure-profile, and time-dependent model boundaries.", "numericUse": "none", "artifactUse": "no source code, geometry, equation, screenshot, tutorial result, or output copied" }, { "id": "cern-molflow-2023-note", "label": "Molflow+ Software for Molecular Flow Simulations", "publisher": "CERN Physics Beyond Colliders", "url": "https://cds.cern.ch/record/2865274", "sourceType": "official-laboratory-technical-note", "rightsStatus": "link-only; CERN record rights apply", "use": "Molecular-flow applicability, neglected intermolecular collisions, event-driven wall interactions, and linear superposition boundary.", "numericUse": "none", "artifactUse": "no geometry, source term, trajectory, result, or figure copied" }, { "id": "nist-pressure-vacuum-measurements", "label": "Pressure and Vacuum Measurements", "publisher": "National Institute of Standards and Technology", "url": "https://www.nist.gov/system/files/documents/calibrations/pmc-2.pdf", "sourceType": "official-government-measurement-guide", "rightsStatus": "link-only; NIST and embedded-material notices apply", "use": "Static expansion, dynamic expansion, conductance-limited flow, gauge interaction, and uncertainty ownership vocabulary.", "numericUse": "none", "artifactUse": "no equation, diagram, table, procedure, or calibration value copied" }, { "id": "nist-pressure-vacuum-calibrations", "label": "Pressure/Vacuum Calibrations", "publisher": "National Institute of Standards and Technology", "url": "https://www.nist.gov/programs-projects/pressurevacuum-calibrations", "sourceType": "official-government-program-page", "rightsStatus": "link-only", "use": "Traceability, calibration range ownership, primary and transfer standards, and time-dependent pressure measurement scope.", "numericUse": "none", "artifactUse": "none" }, { "id": "nist-gas-flow-standards", "label": "Gas Flow Standards and Their Uncertainty", "publisher": "National Institute of Standards and Technology", "url": "https://www.nist.gov/publications/gas-flow-standards-and-their-uncertainty", "sourceType": "primary-government-publication-record", "rightsStatus": "link-only; journal and NIST rights notices apply", "use": "Flow-standard families, uncertainty budgets, calibration ownership, and measurement-method boundaries.", "numericUse": "none", "artifactUse": "no paper body, uncertainty table, hardware example, or value copied" }, { "id": "nist-pinhole-conductance", "label": "Precise Conductance Measurements of a Pinhole Orifice Using a Constant-pressure Flowmeter", "publisher": "National Institute of Standards and Technology", "url": "https://www.nist.gov/publications/precise-conductance-measurements-pinhole-orifice-using-constant-pressure-flowmeter", "sourceType": "primary-government-publication-record", "rightsStatus": "link-only", "use": "Measured conductance, gas dependence, pressure dependence, and uncertainty ownership.", "numericUse": "none", "artifactUse": "no gas result, pressure point, apparatus detail, curve, or coefficient copied" }, { "id": "nist-vacuum-gauge-calibration", "label": "Recommended Practice for Calibrating Vacuum Gauges of the Ionization Type", "publisher": "National Institute of Standards and Technology", "url": "https://www.nist.gov/publications/recommended-practice-calibrating-vacuum-gauges-ionization-type", "sourceType": "official-government-recommended-practice-record", "rightsStatus": "link-only; journal rights apply", "use": "Gauge comparison, SI traceability, uncertainty budgets, and reporting requirements.", "numericUse": "none", "artifactUse": "no procedure, apparatus, formula, or uncertainty value copied" }, { "id": "nist-primary-vacuum-standard", "label": "NIST Demonstrates a New Primary Standard for Measuring Ultralow Pressures", "publisher": "National Institute of Standards and Technology", "url": "https://www.nist.gov/news-events/news/2023/08/nist-demonstrates-new-primary-standard-measuring-ultralow-pressures", "sourceType": "official-government-research-summary", "rightsStatus": "link-only", "use": "Dynamic-expansion source-removal balance and independent pressure-standard comparison vocabulary.", "numericUse": "none", "artifactUse": "none" }, { "id": "nasa-vacuum-technology-sp105", "label": "Vacuum Technology and Space Simulation (NASA SP-105)", "publisher": "NASA Technical Reports Server", "url": "https://ntrs.nasa.gov/citations/19660026839", "sourceType": "official-government-technical-monograph", "rightsStatus": "link-only; U.S. government work and NTRS record notices apply", "use": "Distinguishing conductance between two points from pumping speed at a point, plus gas loading, outgassing, and directional-effect vocabulary.", "numericUse": "none", "artifactUse": "no equation, table, conversion factor, design rule, or operating procedure copied" }, { "id": "nasa-low-dead-volume-inlet", "label": "Low-Dead-Volume Inlet for Vacuum Chamber", "publisher": "NASA Technical Reports Server", "url": "https://ntrs.nasa.gov/citations/20100019611", "sourceType": "official-government-technical-brief-record", "rightsStatus": "link-only; NTRS marks public distribution/public use", "use": "Dead volume, conductance limit, delayed response, and inlet transient vocabulary.", "numericUse": "none", "artifactUse": "no hardware dimension, design, drawing, or implementation instruction copied" }, { "id": "nasa-transient-molecular-transfer", "label": "Transient Molecular Transfer During Vacuum Testing", "publisher": "NASA Technical Reports Server", "url": "https://ntrs.nasa.gov/citations/20110015297", "sourceType": "official-government-workshop-record", "rightsStatus": "link-only; NTRS public distribution notice applies", "use": "Transient release, migration, redeposition, and measurement ownership vocabulary for wall-source limitations.", "numericUse": "none", "artifactUse": "no measurement, material result, figure, or procedure copied" } ], "claimNodes": [ { "node_id": "vacuum-throughput-inventory", "topic": "Gas admission, wall release, stored inventory, transfer, and removal must be kept as distinct terms in a bounded balance.", "source_ids": [ "cern-vacuum-systems-2024", "cern-vacuum-superconducting-devices", "nasa-vacuum-technology-sp105" ], "boundary": "The packet uses exact integer teaching-token ledgers, not physical throughput, leak, outgassing, or pressure values." }, { "node_id": "vacuum-conductance-versus-speed", "topic": "Conductance is a restriction between locations, while pumping speed is defined at a location; both constrain effective removal seen by a chamber.", "source_ids": [ "cern-vacuum-systems-2024", "cern-vacuum-superconducting-devices", "nasa-vacuum-technology-sp105" ], "boundary": "Normalized series-limitation proxies do not size a line, valve, or pump and do not reproduce a source equation." }, { "node_id": "vacuum-flow-regime", "topic": "Continuum-like, transition-like, and molecular-like conditions require different physical models and cannot be treated as one universal flow law.", "source_ids": [ "cern-vacuum-principles", "cern-vacuum-systems-2024", "cern-molflow-2023-note" ], "boundary": "The three regimes are ordinal labels with no Knudsen number, pressure, geometry, collision model, or transition criterion." }, { "node_id": "vacuum-molflow-boundary", "topic": "Test-particle Monte Carlo is appropriate to declared molecular-flow problems where intermolecular collisions are neglected and geometry/wall/pump boundaries are supplied.", "source_ids": [ "cern-molflow-paper", "cern-molflow-2023-note" ], "boundary": "The packet neither runs Molflow+ nor claims equivalence to its geometry, trajectories, pressure profiles, or validation." }, { "node_id": "vacuum-transient-response", "topic": "Chamber volume, inlet dead volume, conductance, wall release, and effective pumping can produce distinct transient and settling behavior.", "source_ids": [ "cern-molflow-paper", "nasa-low-dead-volume-inlet", "nasa-transient-molecular-transfer" ], "boundary": "Replay steps are ordered states, not seconds, response-time specifications, purge timing, or operating instructions." }, { "node_id": "vacuum-wall-source", "topic": "Wall release and migration can remain important gas-source terms and must not be silently merged with commanded admission.", "source_ids": [ "cern-vacuum-systems-2024", "nasa-vacuum-technology-sp105", "nasa-transient-molecular-transfer" ], "boundary": "No material, desorption law, sticking coefficient, cleaning condition, bake condition, contamination result, or maintenance action is modeled." }, { "node_id": "vacuum-gas-flow-metrology", "topic": "Gas-flow claims require a declared standard, calibration chain, uncertainty budget, and range appropriate to the measurement method.", "source_ids": [ "nist-gas-flow-standards", "nist-pressure-vacuum-calibrations" ], "boundary": "Normalized admitted tokens are not a flow calibration, mass-flow-controller characterization, or uncertainty result." }, { "node_id": "vacuum-pressure-metrology", "topic": "Pressure traces require gauge-model ownership, calibration, traceability, location, gas response, uncertainty, and interaction review.", "source_ids": [ "nist-pressure-vacuum-measurements", "nist-vacuum-gauge-calibration", "nist-primary-vacuum-standard" ], "boundary": "The chamber-pressure proxy is neither a gauge reading nor a calibrated pressure estimate." }, { "node_id": "vacuum-conductance-measurement", "topic": "Conductance depends on the declared gas-flow regime, geometry, gas, pressure context, and measurement uncertainty.", "source_ids": [ "nist-pinhole-conductance", "cern-vacuum-systems-2024", "cern-vacuum-principles" ], "boundary": "The conductance-state axis is ordinal and carries no measured coefficient or geometry." }, { "node_id": "vacuum-downstream-handoff", "topic": "A vacuum/gas replay may hand bounded pressure-, residence-, stability-, and delivery-state labels to a separate chamber-state model only through an explicit evidence gate.", "source_ids": [ "nist-pressure-vacuum-measurements", "nist-gas-flow-standards", "cern-molflow-paper" ], "boundary": "No automatic recipe, plasma condition, deposition or etch prediction, facilities action, or qualification decision is allowed." }, { "node_id": "vacuum-replacement-evidence", "topic": "Operational replacement requires owned geometry, pump and conductance data, gas properties, wall-source history, calibrated pressure/flow traces, uncertainty, and independent review.", "source_ids": [ "nist-pressure-vacuum-calibrations", "nist-gas-flow-standards", "nist-vacuum-gauge-calibration", "cern-vacuum-systems-2024" ], "boundary": "An evidence-posture label creates a replacement slot only; it never upgrades the generated teaching data." } ], "hardBoundary": "No source body, figure, table, equation, coefficient, geometry, pump curve, conductance value, flow value, pressure value, gas identity, chamber design, procedure, calibration row, measured trace, source code, Monte Carlo trajectory, named-tool output, vendor result, or equipment action enters the generated SemiAgora packet." }, "bridgeContract": { "targetExperimentId": "SA-EQP-PLASMA-CCP-ICP-008", "allowedFields": [ "plasma_bridge_pressure_band", "plasma_bridge_residence_band", "plasma_bridge_delivery_band", "plasma_bridge_evidence_gate" ], "physicalUnitsAllowed": false, "automaticRecipeHandoffAllowed": false, "automaticEquipmentActionAllowed": false }, "requiredSections": [ "Explore", "Run Card", "Export", "Methods", "Limits", "Evidence" ], "limitation": "Original dimensionless teaching data only; no physical vacuum, gas-delivery, equipment-control, calibration, recipe, or named-tool claim." }