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LAB / SA-PROC-LER-LWR-VARIABILITY-059

LER/LWR variability lab
edge correlation to local CD

Change one assumption at a time. The generated traces stay in this browser tab and retain the metric convention, extraction band, coefficients, and non-claim boundary.

BROWSER-LOCAL ROUGHNESS LAB / V127

Two edges can move together, apart, or independently.

Seeded synthetic traces make correlation visible before a bounded process-to-SRAM sensitivity bridge.

Current tab onlyillustrative-original-surrogateNo fab data, storage, upload, solver service, or network writeLWR is not universally 2 x LER. Extraction bandwidth and Measured replacement slots remain explicit.
Pooled LER / 3 sigma3.600 nm
LWR / 3 sigma4.105 nm
Local-CD / 3 sigma3.697 nm
Realized correlation0.35
EDGE POSITION

Same LER, different width response

Left and right traces are detrended separately. The gap between them is linewidth.

Left edgeRight edge256 samples / 1.004 nm pitch
Raw widthLocal CD9-point circular aperture