Cleanroom particle budget replay
Compare traffic, air-change proxy, mini-environment, recovery, and excursion-risk vocabulary without creating a cleanroom operation workflow.
0.14 / 0.76 / 0.42
Open simulation ->EQUIPMENT REPLAY LAB / SA-EQP-001
Cleanroom, vacuum, tool state.
Read the support cards.
This lab collects four precomputed equipment/facilities simulations for paper-first review: particle budget, pumpdown envelope, RAM-style tool state, and utilities load vocabulary.
RUN ONE QUESTION
Pick the support condition first.
Every card keeps condition, output, method, source, and limitation attached. The point is evidence discipline, not operating a fab or tool.
Vacuum pumpdown envelope
Replay volume, effective speed, leak-floor, and target-pressure vocabulary for vacuum tools without pump selection or operation guidance.
56.6 s / 5.47x / 760 Torr
Open simulation ->Tool availability and queue state
Read RAM, utilization, downtime, and queue-pressure vocabulary without creating dispatch, PM, or production workflow logic.
86.31% / 12 h / 0.222
Open simulation ->Facility utilities load budget
Compare cleanroom air, vacuum/exhaust, UPW/cooling, precision support, and abatement load lanes without facility design or operation guidance.
106 MWh / 135 MWh / 26.1%
Open simulation ->MODEL BOUNDARY
Useful facilities vocabulary needs an even brighter boundary.
The public replay is for teaching, figures, and early paper planning. It is not a facility workflow, tool-control surface, maintenance system, EHS procedure, recipe workflow, dispatch system, or signoff artifact.
Browse saved datasets
Open particle, vacuum, RAM, and utility data with assumptions visible.
Download model cards
Use the public source notes and limitations when making slides, drafts, or teaching figures.
No facility workflow
No account, upload, tool command, endpoint setting, interlock setting, gas or chemical handling, emergency procedure, PM instruction, production dispatch, recipe, or signoff action is present.