Start with module context, sample plan, data age, sensor health, metrology fraction, and model family.
Open the run card to inspect the saved rows, methods, limits, and export files behind this step.
Inspect run card ->METROLOGY REPLAY LAB / SA-VMET-SMALLDATA-001
Sparse metrology needs a trust gate.
Metrology / Yield
Virtual metrology is useful only when uncertainty, drift, sensor health, sample coverage, guardband, and the next physical measurement are visible. This packet turns that judgment into a browser CSV replay.
EVIDENCE SEQUENCE
What the learner should inspect first.
This surface connects the daily-scan source signal to an original SemiAgora simulation object without copying source text, code, figures, PDK files, or process recipes.
Compare prediction error, uncertainty, guardband, Cpk proxy, escape risk, false-hold risk, and sampling cost together.
Open the run card to inspect the saved rows, methods, limits, and export files behind this step.
Inspect run card ->Use the decision gate to decide whether to monitor, sample more, hold for review, or release only with an explicit boundary.
Open the run card to inspect the saved rows, methods, limits, and export files behind this step.
Inspect run card ->METHODS
Precomputed model contract.
The goal is useful study scaffolding and paper-planning discipline, not calibrated production evidence.
Original synthetic virtual-metrology and sampling table based on official public NIST/IRDS vocabulary.
The simulation object keeps the same statement beside downloadable JSON and CSV evidence.
No wafer data, model-training service, APC workflow, article text, source dataset, or production release rule is copied.
The simulation object keeps the same statement beside downloadable JSON and CSV evidence.
The browser filters saved CSV rows and exposes the model card with no-live-training boundaries.
The simulation object keeps the same statement beside downloadable JSON and CSV evidence.
LIMITS
Useful, but deliberately bounded.
No account, upload, payment, comment, newsletter, live solver, facility workflow, or product-release surface is enabled.
No calibrated VM model, physical wafer metrology, tool log, process recipe, APC action, lot release, or quality disposition.
Keep this boundary attached when reusing the card for lesson writing, figure planning, or research notes.
Cpk, uncertainty, escape-risk, false-hold, and cost values are teaching proxies, not manufacturing limits.
Keep this boundary attached when reusing the card for lesson writing, figure planning, or research notes.
Real work needs owned sensor streams, matched physical metrology, drift monitoring, uncertainty validation, and process-owner review.
Keep this boundary attached when reusing the card for lesson writing, figure planning, or research notes.
SOURCE ANCHOR
Link-only public source spine.
SemiAgora uses the source as a signal and citation anchor, then writes original summaries and original toy data with explicit limitations.
NIST virtual metrology dynamic sampling
https://www.nist.gov/publications/comparative-study-semiconductor-virtual-metrology-methods-and-novel-algorithmic
Open source ->