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SASemiAgoraSemiconductor knowledge & engineeringOpen run card

EQUIPMENT REPLAY LAB / SA-EQP-PLASMA-CCP-ICP-008

A plasma label is not yet a wafer-facing boundary condition.
Equipment / Process / Metrology

Bounded CCP and ICP reference archetypes keep source coupling, substrate bias, pressure regime, gas response, wall loss, matching, sheath burden, charged and neutral delivery, energy-angle breadth, radial state, feature-scale handoff, role gates, and replacement evidence separate.

Open simulationStudy lesson ->
packetSA-EQP-PLASMA-CCP-ICP-008runSimulation ObjectlearnEvidence SequencemethodMethodslimitsBoundaries

EVIDENCE SEQUENCE

What the learner should inspect first.

This surface connects the daily-scan source signal to an original SemiAgora simulation object without copying source text, code, figures, PDK files, or process recipes.

01

Begin with bounded CCP and ICP reference vocabularies. They organize questions about source and bias coupling without representing every architecture or any commercial chamber.

Open the run card to inspect the saved rows, methods, limits, and export files behind this step.

Inspect run card ->
02

Separate normalized source coupling and bulk support from sheath burden, ion delivery, neutral delivery, IEDF breadth, IADF spread, wall loss, attachment, and radial nonuniformity.

Open the run card to inspect the saved rows, methods, limits, and export files behind this step.

Inspect run card ->
03

Trace delivered-drive, charged-species, and neutral-species teaching tokens through three exact ledgers; ledger closure establishes bookkeeping consistency only.

Open the run card to inspect the saved rows, methods, limits, and export files behind this step.

Inspect run card ->
04

Read operator, process-engineer, integration, and yield gates as different evidence questions rather than one readiness score or process recommendation.

Open the run card to inspect the saved rows, methods, limits, and export files behind this step.

Inspect run card ->
05

End at the six normalized fields allowed to bridge into SA-PROC-FEATURE-PMC-007 and the owned diagnostics, metrology, chemistry, geometry, uncertainty, and review needed to replace them.

Open the run card to inspect the saved rows, methods, limits, and export files behind this step.

Inspect run card ->

METHODS

Precomputed model contract.

The goal is useful study scaffolding and paper-planning discipline, not calibrated production evidence.

method

Complete deterministic 16 x 2 x 3 x 2 x 2 x 2 x 2 x 2 x 2 sweep with evidence posture excluded from the physical key, seed, equations, ledgers, and physical gates.

The simulation object keeps the same statement beside downloadable JSON and CSV evidence.

method

Original dimensionless algebra separates source, bulk, sheath, charged, neutral, wall, attachment, matching, radial, energy-angle, and source-bias channels.

The simulation object keeps the same statement beside downloadable JSON and CSV evidence.

method

Three deterministic largest-remainder integer teaching-token ledgers close at exact zero in every row and remain independently replayable.

The simulation object keeps the same statement beside downloadable JSON and CSV evidence.

method

Fourteen official or primary link-only anchors and ten claim nodes supply terminology, provenance, rights, benchmark, metrology, and replacement-evidence questions only; no source number enters a generated row.

The simulation object keeps the same statement beside downloadable JSON and CSV evidence.

LIMITS

Useful, but deliberately bounded.

No account, upload, payment, comment, newsletter, live solver, facility workflow, or product-release surface is enabled.

non-claim

No physical pressure, flow, chemistry, power, voltage, current, frequency, density, temperature, energy, angle, length, time, rate, uniformity percentage, material coefficient, cross section, or measured plasma/wafer row.

Keep this boundary attached when reusing the card for lesson writing, figure planning, or research notes.

non-claim

No calibrated chamber model, PIC/MCC or Boltzmann result, proprietary solver output, equipment setpoint, matching-network action, maintenance instruction, recipe, optimization recommendation, qualification, or signoff.

Keep this boundary attached when reusing the card for lesson writing, figure planning, or research notes.

non-claim

The isolated eduPIC and PlasmaPy references supply no code, dependency, example, cross section, chemistry row, numeric output, calibration, or named-tool equivalence to the public implementation.

Keep this boundary attached when reusing the card for lesson writing, figure planning, or research notes.

SOURCE ANCHOR

Link-only public source spine.

SemiAgora uses the source as a signal and citation anchor, then writes original summaries and original toy data with explicit limitations.

NIST GEC reference-cell, plasma-distribution, benchmark, wall-loss, and process-metrology lineage

https://www.nist.gov/publications/gaseous-electronics-conference-radio-frequency-reference-cell-defined-parallel-plate

Open source ->