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SASemiAgoraSemiconductor knowledge & engineeringOpen run card

PROCESS REPLAY LAB / SA-PROC-FEATURE-PMC-007

A flux response is not yet a feature profile.
Process / Equipment / Metrology

Directional RIE and sputter deposition connect incident particle state, surface interaction, reflection, secondary transport, exact material conservation, evolving geometry, metrology, integration consequences, and owned replacement evidence.

Open simulationStudy lesson ->
packetSA-PROC-FEATURE-PMC-007runSimulation ObjectlearnEvidence SequencemethodMethodslimitsBoundaries

EVIDENCE SEQUENCE

What the learner should inspect first.

This surface connects the daily-scan source signal to an original SemiAgora simulation object without copying source text, code, figures, PDK files, or process recipes.

01

Start at the chamber-to-wafer boundary: this packet accepts only declared normalized source direction and species states, not a plasma, vapor, pressure, flow, power, bias, or energy solution.

Open the run card to inspect the saved rows, methods, limits, and export files behind this step.

Inspect run card ->
02

Follow one particle entity to escape, reaction, sputter removal, deposition, redeposition, or absorption; keep particle and material ledgers separate.

Open the run card to inspect the saved rows, methods, limits, and export files behind this step.

Inspect run card ->
03

Move through all 16 saved progress states and inspect the exact 40 by 34 occupancy grid instead of inferring profile evolution from a static response table.

Open the run card to inspect the saved rows, methods, limits, and export files behind this step.

Inspect run card ->
04

Compare directional RIE depth, anisotropy, undercut, and roughness with sputter fill, bottom/sidewall coverage, accessible void, and pinch-off review.

Open the run card to inspect the saved rows, methods, limits, and export files behind this step.

Inspect run card ->
05

End with operator, process-engineer, integration, and yield views plus the owned profile, flux, material, metrology, convergence, uncertainty, and review evidence needed to replace the proxy.

Open the run card to inspect the saved rows, methods, limits, and export files behind this step.

Inspect run card ->

METHODS

Precomputed model contract.

The goal is useful study scaffolding and paper-planning discipline, not calibrated production evidence.

method

Complete deterministic 16 x 2 x 3 x 2 x 2 x 2 x 2 x 2 x 2 evidence sweep, paired into 192 physical configurations by excluding evidence posture from the physical key.

The simulation object keeps the same statement beside downloadable JSON and CSV evidence.

method

Original seeded xorshift32 particle transport evolves a 40 by 34 integer material grid through declared direction, interaction, reflection, re-emission, sputter, deposition, and secondary-redeposition states.

The simulation object keeps the same statement beside downloadable JSON and CSV evidence.

method

Exact entity, removed-material, secondary-material, interaction-zone, and grid-mass ledgers remain attached to every saved geometry state.

The simulation object keeps the same statement beside downloadable JSON and CSV evidence.

method

Eight official or primary links and six claim-map nodes provide terminology, provenance, rights, comparison, and replacement-evidence questions only; they provide no generated coefficient or row.

The simulation object keeps the same statement beside downloadable JSON and CSV evidence.

LIMITS

Useful, but deliberately bounded.

No account, upload, payment, comment, newsletter, live solver, facility workflow, or product-release surface is enabled.

non-claim

No physical length, time, flux, energy, angle, pressure, flow, source power, wafer bias, material coefficient, sticking probability, sputter yield, measured profile, or SEM/TEM pixel.

Keep this boundary attached when reusing the card for lesson writing, figure planning, or research notes.

non-claim

No chamber solve, plasma model, continuous level set, sub-cell curvature, surface-diffusion field, chemistry-coverage field, equipment control, process recipe, lot disposition, qualification, or signoff.

Keep this boundary attached when reusing the card for lesson writing, figure planning, or research notes.

non-claim

The isolated ViennaPS run stays outside the public implementation and supplies no code, geometry, flux, coefficient, result, calibration, parity, or named-tool equivalence claim.

Keep this boundary attached when reusing the card for lesson writing, figure planning, or research notes.

SOURCE ANCHOR

Link-only public source spine.

SemiAgora uses the source as a signal and citation anchor, then writes original summaries and original toy data with explicit limitations.

Official ViennaPS/TU Wien feature-scale lineage plus commercial terminology boundary

https://viennatools.github.io/ViennaPS/

Open source ->