6144deterministic rowsUNKNOWNInspect metric contract
192physical configurationsUNKNOWNInspect metric contract
0physical process valuesUNKNOWNInspect metric contract
SIMULATION / SA-PROC-FEATURE-PMC-007
Particle Monte Carlo feature topography evidence map
See transport become profile, one batch at a time.
Compare directional RIE etch and sputter trench deposition across aspect ratio, incident angle, species mix, surface interaction, reflection, secondary transport, progress, conservation, profile risk, and owned replacement-evidence gates without importing a physical recipe or named-tool result.
EXPLORE
Start with the observable.
Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.
- Hold the physical state fixed and move the progress slider through all 16 saved batches; watch the exact 40 by 34 material grid evolve without a browser-side solver.
- Switch between directional RIE and sputter deposition while retaining aspect ratio and transport states; compare etch depth and anisotropy with fill, bottom coverage, accessible void, and pinch-off risk.
- Change collimated versus spread incidence, ion-rich versus neutral-rich species, and high versus low surface interaction; read bottom, sidewall, and top interaction fractions together.
- Enable reflection and secondary transport to inspect re-emission, sputter outflow, redeposition, undercut, roughness, and profile-access consequences.
- Use operator, process-engineer, integration, and yield views to separate observable state, mechanism assumptions, module consequences, metrology needs, and replacement evidence.
BROWSER PARTICLE MONTE CARLO TOPOGRAPHY LAB
Transport becomes geometry. Conservation stays visible.
The canvas renders one saved occupancy grid at a time. It does not launch particles, solve a chamber, calculate physical units, run ViennaPS or Sentaurus, or create process settings.
Process mode
LoadingConservation reviewNo pinch-off flagPhysical inputs remain zero
saved material grid
Loading / Loading
loadingVacuumSubstrateHard maskPrimary depositSecondary redeposit
Each cell is an integer material state. The visible stair steps are the declared grid, not sub-cell curvature or a continuous level-set surface.
Operator view
Observe the saved state before acting.
Track progress, interaction zones, escapes, deposition or removal, and conservation. The replay does not translate these states into chamber settings.
Replacement evidence: Replacement needs owned tool state, wafer context, endpoint or profile observation, maintenance state, and an accountable run record.
exact ledgers
- Entities
- - created / - terminated
- Grid mass
- - actual / - expected
- Removed material
- - cells / error -
- Secondary material
- - entities / error -
owned evidence still neededLoading
| Progress | Normalized | Bottom fraction | Sidewall fraction | Profile advance | Solid cells | Gate |
|---|
RUN CARD
Conditions before conclusions.
The browser filters and renders saved rows. It does not launch particles, solve a chamber, calculate physical flux, evaluate a recipe, operate equipment, execute ViennaPS or Sentaurus, or replace profile metrology.
Primary knobs
- directional RIE etch or sputter trench-deposition teaching mode
- 16 saved progress states and nominal aspect-ratio states 1, 2, and 4
- collimated or spread source direction and ion-rich or neutral-rich incident population
- high or low surface interaction, damped or active reflection/re-emission, and suppressed or enabled secondary transport
- assumption-only or owned-profile-slot-ready evidence posture
Saved outputs
- exact row-major material grid, profile signature, geometry hash, and material legend
- bottom, sidewall, and top interaction fractions plus reflection, removal, deposition, redeposition, and escape ledgers
- etch depth, anisotropy, undercut, roughness, fill fraction, bottom/sidewall coverage, accessible void, pinch-off, contradiction, and readiness gates
- particle-entity, removed-material, secondary-material, interaction-zone, and grid-mass conservation checks
EXPORT
Download the public artifacts.
These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.
Particle Monte Carlo topography CSV
/data/particle-monte-carlo-feature-topography-v106.csv
Open file ->Web evidence manifest (JSON)
/data/particle-monte-carlo-feature-topography-web-v1.json
Open file ->Model card
/data/particle-monte-carlo-feature-topography-model-card-v1.md
Open file ->Metric contract
/data/particle-monte-carlo-feature-topography-metric-contract-v1.json
Open file ->Source spine
/data/particle-monte-carlo-feature-topography-source-spine-v1.json
Open file ->METHODS
How the number was made.
Methods are written for citation discipline: the extraction rule matters as much as the plotted value.
Complete deterministic 16 x 2 x 3 x 2 x 2 x 2 x 2 x 2 x 2 Cartesian evidence sweep, paired into 192 physical configurations with evidence posture excluded from the physical key.
Keep this method attached when reusing the figure or metric.
A seeded xorshift32 transport model evolves an original integer occupancy grid through declared discrete directions, surface interactions, reflection, re-emission, sputter removal, primary deposition, and secondary redeposition.
Keep this method attached when reusing the figure or metric.
Four exact ledgers close particle entities, removed material, secondary material, and grid mass; an additional zone ledger closes top, sidewall, and bottom interactions.
Keep this method attached when reusing the figure or metric.
Eight link-only sources and six claim-map nodes define terminology, provenance, rights, comparison, and replacement-evidence questions without providing any generated number.
Keep this method attached when reusing the figure or metric.
LIMITS
What this page does not claim.
The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.
The 40 by 34 occupancy grid has no sub-cell curvature, continuous level set, mesh, electric field, chamber plasma, atomistic surface model, or calibrated material property.
Carry this boundary into any derivative note, paper draft, or slide.
Every direction, probability, interaction state, and threshold is an original normalized teaching assumption; no source value, vendor coefficient, process condition, or measured profile is used.
Carry this boundary into any derivative note, paper draft, or slide.
The isolated ViennaPS run proves only that one pinned official example executed locally. It supplies no public code, geometry, flux, coefficient, parity result, or named-tool equivalence.
Carry this boundary into any derivative note, paper draft, or slide.
The replay is not a process recipe, equipment-control instruction, lot-disposition method, qualification result, or process signoff.
Carry this boundary into any derivative note, paper draft, or slide.
EVIDENCE
Trace the claim back to artifacts.
The evidence route remains the catalog-level browser; this page is the simulation-level reading card.
6144 rows across 384 evidence configurations, 192 physical configurations, and 16 progress states.
SA-PROC-FEATURE-PMC-007
Independent verification passed 17/17 with 1622016 recomputed fields, 12288 geometry comparisons, and 43008 conservation comparisons.
SA-PROC-FEATURE-PMC-007
12/12 same-seed replays matched; all 24 alternate-seed samples changed geometry while conservation remained closed.
SA-PROC-FEATURE-PMC-007
26 prohibited claim and operational fields remain zero across 159744 checks; live server runs remain zero.
SA-PROC-FEATURE-PMC-007
Source spine
These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.
ViennaPS documentationScope anchor for 2D/3D surface evolution, Monte Carlo ray tracing, C++/Python interfaces, dependencies, supported platforms, and the versioned license boundary. Rights: link-only; ViennaPS 4.3.0 and later are GPL-3.0ViennaPS tutorialsMechanism-scope anchor for particle-based trench deposition, multi-particle etching, ion/neutral fluxes, sticking, angular distributions, masking, and profile evolution. Rights: link-only; associated implementation is GPL-3.0 for current versionsViennaPS custom models documentationTerminology anchor separating particle transport, surface reaction, velocity mapping, and interface evolution. Rights: link-only; associated implementation is GPL-3.0 for current versionsViennaPS v4.6.2 repository releaseVersion and source-provenance anchor for the optional isolated comparison run. Rights: GPL-3.0; local isolated execution only pending a deliberate distribution decisionViennaPS 4.6.2 Python packageWheel availability, version, platform, and attested source-commit provenance for the optional D-drive reproduction. Rights: GPL-3.0 package; local isolated virtual environment onlyProcess Simulation and Virtual FabMultiscale boundary anchor separating atomistic inputs, feature-scale transport and interface evolution, and chamber/equipment-scale flux distributions. Rights: link-onlyProcess simulation framework dissertation summaryConceptual source for level-set geometry, top-down Monte Carlo particle transport, and the separation of transport from process-model state. Rights: link-onlySentaurus TopographyCommercial scope benchmark for topography-modifying process simulation only. Rights: link-only commercial capability and terminology benchmark
Public execution boundary
No server-side live ngspice execution, uploads, accounts, payments, comments, newsletter signup, or job/event submissions are active on this page.