3.600 nmDefault pooled LER (3 sigma)UNKNOWNInspect metric contract
4.105 nmDefault LWR (3 sigma)UNKNOWNInspect metric contract
256 deterministic pointsSamplesUNKNOWNInspect metric contract
SIMULATION / SA-PROC-LER-LWR-VARIABILITY-059
LER/LWR to SRAM variability chain
LER/LWR Variability
Two edges can move together, apart, or independently. Inspect how that relationship changes linewidth and local-CD variation before any bounded device or SRAM teaching proxy.
EXPLORE
Start with the observable.
Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.
- Hold edge roughness constant and move left-right correlation from +1 through 0 to -1.
- Compare the locked conditional LWR/LER relation with the exact width-variance identity.
- Change correlation length and local-CD aperture, then inspect the bounded device, delay, SNM, and write sensitivity ratios.
BROWSER-LOCAL ROUGHNESS LAB / V127
Two edges can move together, apart, or independently.
Seeded synthetic traces make correlation visible before a bounded process-to-SRAM sensitivity bridge.
Current tab onlyillustrative-original-surrogateNo fab data, storage, upload, solver service, or network writeLWR is not universally 2 x LER. Extraction bandwidth and Measured replacement slots remain explicit.
Pooled LER / 3 sigma3.600 nm
LWR / 3 sigma4.105 nm
Local-CD / 3 sigma3.697 nm
Realized correlation0.35
EDGE POSITION
Same LER, different width response
Left and right traces are detrended separately. The gap between them is linewidth.
RUN CARD
Conditions before conclusions.
The browser generates a seeded synthetic AR(1) teaching trace in the current tab. It does not load fab data, fit a process, recommend a recipe, predict yield, or provide signoff.
Primary knobs
- Seed and nominal CD
- edge sigma and left-right correlation
- correlation length and measurement length
- local-CD aperture
Saved outputs
- paired edge and local-CD traces
- LER, LWR, and extraction bandwidth
- 16-bin local-CD histogram
- bounded normalized bridge summaries
- deterministic JSON and CSV
EXPORT
Download the public artifacts.
These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.
V127 public model contract
/data/semiagora-ler-lwr-variability-v1.json
Open file ->METHODS
How the number was made.
Methods are written for citation discipline: the extraction rule matters as much as the plotted value.
Each edge is linearly detrended and normalized with the descriptive sample standard deviation using an N-1 divisor.
Keep this method attached when reusing the figure or metric.
A Gram-Schmidt companion constructs exact requested cross-correlation before edge sigma is applied.
Keep this method attached when reusing the figure or metric.
Local CD is a circular odd-point boxcar average; the wrap is a synthetic boundary, not a physical wafer edge.
Keep this method attached when reusing the figure or metric.
LIMITS
What this page does not claim.
The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.
All traces and distributions are deterministic synthetic teaching outputs, not fab, wafer, resist, mask, etch, device, circuit, or production data.
Carry this boundary into any derivative note, paper draft, or slide.
The AR(1) process is a convenient stationary correlation model, not a universal physical PSD or stochastic lithography model.
Carry this boundary into any derivative note, paper draft, or slide.
The reported descriptive 3-sigma values depend on the locked detrend, N-1 divisor, measurement length, sampling pitch, aperture, circular boundary, and absence of measurement-noise correction.
Carry this boundary into any derivative note, paper draft, or slide.
The requested correlation length is a synthesis input, not a fitted or uncertainty-qualified metrology result.
Carry this boundary into any derivative note, paper draft, or slide.
The equal-variance LER/LWR relation is conditional; unequal edge variance, different conventions, filtering, and real metrology can change the relation.
Carry this boundary into any derivative note, paper draft, or slide.
The DIBL, Vt, drive-current, inverter-delay, SNM, and write-margin values are original normalized proxies with arbitrary visible coefficients and no calibration.
Carry this boundary into any derivative note, paper draft, or slide.
The product cannot establish physical causality, statistical representativeness, measurement uncertainty, model validity, process capability, recipe transfer, yield, signoff, or production readiness.
Carry this boundary into any derivative note, paper draft, or slide.
Researcher-facing businesses remain deferred to a separately verified V200 contract.
Carry this boundary into any derivative note, paper draft, or slide.
EVIDENCE
Trace the claim back to artifacts.
The evidence route remains the catalog-level browser; this page is the simulation-level reading card.
The LER/LWR relation is conditional on equal edge variance and this exact extraction convention.
SA-PROC-LER-LWR-VARIABILITY-059
Every bridge coefficient and clamp is visible; none is calibrated to a technology or SRAM architecture.
SA-PROC-LER-LWR-VARIABILITY-059
Four measured-replacement slots state what is required before a physical or production claim.
SA-PROC-LER-LWR-VARIABILITY-059
Source spine
These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.
Issues in Line Edge and Linewidth Roughness Metrologydefinition and limitation onlyLine Edge and Linewidth Roughnessmetric vocabulary and extraction-bandwidth rationaleDimensional Metrology for Nanoscale Patternsmetrology contextImpact of Line Edge Roughness on ReRAM Uniformity and Scalingcorrelation identity context; no ReRAM result is transferred to CMOS SRAMLine-Edge Roughness from Extreme Ultraviolet Lithography to Fin-Field-Effect-Transistor: Computational Studybridge-boundary context onlyRoughness and local CD to margin causal chaininternal public continuity
Public execution boundary
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