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SIMULATION / SA-PROC-METRO-4PP-SHEETR-001

Four-point probe sheet resistance
4PP Sheet R

Replay a wafer-level sheet-resistance map and compute nonuniformity before treating a process split as electrically stable.

sectionExploresectionRun CardsectionExportsectionMethodssectionLimitssectionEvidence

EXPLORE

Start with the observable.

Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.

guided exploration
  • Scan the center, edge, and corner values before accepting the mean.
  • Compare half-range nonuniformity against the center-to-corner spread.
  • Use the map structure as a template for future measured sheet-resistance evidence kept offline.

RUN CARD

Conditions before conclusions.

The public page replays saved map data. It does not operate a probe station, accept wafer uploads, or release a process.

precomputed replay

Primary knobs

  • Grid: 5 x 5 saved teaching sites
  • Observable: sheet resistance in ohm/sq
  • Derived metric: half-range nonuniformity
  • Boundary: no probe-spacing or edge correction
outputs

Saved outputs

  • sheet-resistance map
  • mean, min, max, and center marker
  • center-to-corner spread
  • public metrology limitations

EXPORT

Download the public artifacts.

These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.

download

Dataset JSON

/data/process-four-point-probe-sheet-resistance-web-v1.json

Open file ->
download

Model script

/data/process_metrology_models.py

Open file ->
download

Metrology model card

/data/process-metrology-model-card.md

Open file ->

METHODS

How the number was made.

Methods are written for citation discipline: the extraction rule matters as much as the plotted value.

method

Treat each grid site as a saved sheet-resistance measurement point.

Keep this method attached when reusing the figure or metric.

method

Compute the map mean across all teaching sites.

Keep this method attached when reusing the figure or metric.

method

Compute half-range nonuniformity from max, min, and mean sheet resistance.

Keep this method attached when reusing the figure or metric.

method

Read spatial variation before making any material or implant conclusion.

Keep this method attached when reusing the figure or metric.

LIMITS

What this page does not claim.

The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.

non-claim

No probe-spacing correction, edge correction, contact force, temperature coefficient, film-thickness correction, or tool calibration is included.

Carry this boundary into any derivative note, paper draft, or slide.

non-claim

No qualified metrology, facility procedure, wafer acceptance, process recipe, or production uniformity claim is implied.

Carry this boundary into any derivative note, paper draft, or slide.

non-claim

Real review requires raw logs, uncertainty, calibration status, wafer coordinates, and material context.

Carry this boundary into any derivative note, paper draft, or slide.

non-claim

This replay is not evidence of a SemiAgora-processed wafer.

Carry this boundary into any derivative note, paper draft, or slide.

EVIDENCE

Trace the claim back to artifacts.

The evidence route remains the catalog-level browser; this page is the simulation-level reading card.

evidence note

The dataset preserves the full 25-site teaching map and summary statistics.

SA-PROC-METRO-4PP-SHEETR-001

evidence note

The model script recomputes mean and half-range nonuniformity.

SA-PROC-METRO-4PP-SHEETR-001

evidence note

NIST sheet-resistance mapping sources anchor the metrology vocabulary.

SA-PROC-METRO-4PP-SHEETR-001

Public execution boundary

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