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SIMULATION / SA-PROC-METRO-SPC-CAPABILITY-001

SPC and process capability
SPC / Cpk

Replay a CD sample set and compute Cp/Cpk so process spread, centering, and out-of-spec count stay distinct.

sectionExploresectionRun CardsectionExportsectionMethodssectionLimitssectionEvidence

EXPLORE

Start with the observable.

Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.

guided exploration
  • Compare the sample mean to the 100 nm target before reading Cp or Cpk.
  • Separate spread, centering, and out-of-spec count.
  • Use the card as a paper-review checklist for control charts and measurement-system context.

RUN CARD

Conditions before conclusions.

The public page replays saved SPC data. It does not run a factory dashboard, trigger alarms, or release wafers.

precomputed replay

Primary knobs

  • Sample count: 25 CD points
  • Target: 100 nm
  • Spec limits: 96 nm and 104 nm
  • Capability equations: Cp and Cpk from sample standard deviation
outputs

Saved outputs

  • sample list
  • mean and standard deviation
  • Cp and Cpk
  • out-of-spec count and public SPC limitations

EXPORT

Download the public artifacts.

These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.

download

Dataset JSON

/data/process-spc-capability-web-v1.json

Open file ->
download

Model script

/data/process_metrology_models.py

Open file ->
download

Metrology model card

/data/process-metrology-model-card.md

Open file ->

METHODS

How the number was made.

Methods are written for citation discipline: the extraction rule matters as much as the plotted value.

method

Compute sample mean and sample standard deviation from the saved CD list.

Keep this method attached when reusing the figure or metric.

method

Compute Cp as specification width divided by six sample standard deviations.

Keep this method attached when reusing the figure or metric.

method

Compute Cpk as the smaller centered capability against the high and low specification limits.

Keep this method attached when reusing the figure or metric.

method

Report out-of-spec count separately from capability so excursions and spread are not confused.

Keep this method attached when reusing the figure or metric.

LIMITS

What this page does not claim.

The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.

non-claim

No subgrouping, Western Electric rules, gauge R&R, autocorrelation, non-normality, drift correction, or production SPC alarm handling is included.

Carry this boundary into any derivative note, paper draft, or slide.

non-claim

No qualified metrology, manufacturing release, facility dashboard, wafer acceptance, or process-control claim is implied.

Carry this boundary into any derivative note, paper draft, or slide.

non-claim

Real SPC evidence requires sampling plan, measurement-system analysis, time order, control limits, operator/tool context, and rights-clean data.

Carry this boundary into any derivative note, paper draft, or slide.

non-claim

This replay is not a process recipe, release gate, or statistical guarantee.

Carry this boundary into any derivative note, paper draft, or slide.

EVIDENCE

Trace the claim back to artifacts.

The evidence route remains the catalog-level browser; this page is the simulation-level reading card.

evidence note

The dataset preserves the sample list, spec limits, Cp/Cpk, and out-of-spec count.

SA-PROC-METRO-SPC-CAPABILITY-001

evidence note

The model script recomputes capability from the saved values.

SA-PROC-METRO-SPC-CAPABILITY-001

evidence note

NIST/SEMATECH statistics sources anchor the process-monitoring and capability vocabulary.

SA-PROC-METRO-SPC-CAPABILITY-001

Source spine

These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.

Public execution boundary

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