0.11 nm/cycleSaturated scaleUNKNOWNInspect metric contract
11.0 nm100-cycle thicknessUNKNOWNInspect metric contract
2 sFirst saturated pulseUNKNOWNInspect metric contract
SIMULATION / SA-PROC-CVD-ALD-GPC-001
ALD growth-per-cycle saturation
ALD GPC
Replay dose saturation, 100-cycle thickness arithmetic, temperature-window framing, and aspect-ratio conformality warnings.
EXPLORE
Start with the observable.
Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.
- Sweep precursor pulse time until growth-per-cycle saturates.
- Compare the ideal temperature window against incomplete-reaction and decomposition warnings.
- Use the aspect-ratio table to see why ALD is conformal but not magically transport-free.
RUN CARD
Conditions before conclusions.
The public page replays saved ALD teaching data. It does not run reactor recipes, precursor dosing, or film qualification.
Primary knobs
- Precursor pulse: 0.05 s to 4 s
- Nominal saturated GPC: 0.11 nm/cycle
- Cycle count: 100
- Aspect ratio: 1, 5, and 20
Saved outputs
- GPC versus pulse time
- thickness after 100 cycles
- temperature-window interpretation
- top/middle/bottom conformality table
EXPORT
Download the public artifacts.
These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.
Dataset JSON
/data/process-ald-growth-window-web-v1.json
Open file ->Model script
/data/process_thin_film_models.py
Open file ->Process model card
/data/process-thin-film-model-card.md
Open file ->METHODS
How the number was made.
Methods are written for citation discipline: the extraction rule matters as much as the plotted value.
Use theta = 1 - exp(-dose / tau) as the self-limiting surface saturation replay.
Keep this method attached when reusing the figure or metric.
Multiply GPC by cycle count to keep thickness arithmetic explicit.
Keep this method attached when reusing the figure or metric.
Separate dose saturation from temperature-window interpretation.
Keep this method attached when reusing the figure or metric.
List high-aspect-ratio conformality as a transport warning rather than a guaranteed coverage claim.
Keep this method attached when reusing the figure or metric.
LIMITS
What this page does not claim.
The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.
No precursor identity, pressure, purge time, sticking coefficient, byproduct transport, plasma enhancement, nucleation delay, or impurity incorporation is modeled.
Carry this boundary into any derivative note, paper draft, or slide.
No dielectric constant, density, leakage, breakdown, stress, roughness, or reliability claim is made.
Carry this boundary into any derivative note, paper draft, or slide.
The 0.11 nm/cycle scale is an educational arithmetic anchor, not a SemiAgora recipe.
Carry this boundary into any derivative note, paper draft, or slide.
Real ALD qualification requires facility-approved process windows and film metrology.
Carry this boundary into any derivative note, paper draft, or slide.
EVIDENCE
Trace the claim back to artifacts.
The evidence route remains the catalog-level browser; this page is the simulation-level reading card.
The dataset preserves pulse-time, temperature, and aspect-ratio tables with explicit limitations.
SA-PROC-CVD-ALD-GPC-001
The model card links the ALD replay to public review and publication records.
SA-PROC-CVD-ALD-GPC-001
The page keeps self-limiting growth separate from reactor-specific recipe claims.
SA-PROC-CVD-ALD-GPC-001
Source spine
These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.
George 2010 ALD overviewReview source for ALD as sequential, self-limiting surface reactions and conformal film control.Puurunen 2005 ALD surface chemistryPeer-reviewed source metadata and DOI for a TMA/H2O ALD surface-chemistry case study.NIST ALD publication recordPublic source for growth-per-cycle framing and thickness scaling with cycles.
Public execution boundary
No server-side live ngspice execution, uploads, accounts, payments, comments, newsletter signup, or job/event submissions are active on this page.