64 nm/minBest rateUNKNOWNInspect metric contract
56 nm/minCenter pointUNKNOWNInspect metric contract
-110 MPaClosest stressUNKNOWNInspect metric contract
SIMULATION / SA-PROC-METRO-DOE-RSM-001
DOE response surface
DOE / RSM
Replay a two-factor process grid so deposition rate, film stress, center points, and curvature warnings travel together.
EXPLORE
Start with the observable.
Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.
- Compare the center point against edge-of-window process conditions.
- Look for response tradeoffs between deposition rate and film stress.
- Use the grid as a planning card before measured DOE runs are collected.
RUN CARD
Conditions before conclusions.
The public page replays saved DOE data. It does not optimize recipes, operate equipment, or submit process runs.
Primary knobs
- Power: 150 W, 200 W, and 250 W
- Pressure: 3 mTorr, 5 mTorr, and 7 mTorr
- Responses: deposition rate and film stress
- Warning: high-pressure curvature in the teaching response
Saved outputs
- rate response matrix
- stress response matrix
- best-rate condition
- center-point and curvature notes
EXPORT
Download the public artifacts.
These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.
Dataset JSON
/data/process-doe-response-surface-web-v1.json
Open file ->Model script
/data/process_metrology_models.py
Open file ->Metrology model card
/data/process-metrology-model-card.md
Open file ->METHODS
How the number was made.
Methods are written for citation discipline: the extraction rule matters as much as the plotted value.
Treat the 3 x 3 factor grid as a saved screening-and-response-surface teaching replay.
Keep this method attached when reusing the figure or metric.
Identify the maximum deposition-rate response while keeping film stress visible.
Keep this method attached when reusing the figure or metric.
Use the center point as an anchor before reading edge-of-window results.
Keep this method attached when reusing the figure or metric.
Flag curvature when increasing pressure stops improving the rate at high power.
Keep this method attached when reusing the figure or metric.
LIMITS
What this page does not claim.
The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.
No chamber physics, gas chemistry, target erosion, substrate temperature, film composition, stress metrology calibration, or replicate analysis is included.
Carry this boundary into any derivative note, paper draft, or slide.
No optimized recipe, qualified metrology, facility setting, manufacturing release, or production process-window claim is implied.
Carry this boundary into any derivative note, paper draft, or slide.
Real DOE evidence requires randomized runs, repeats, residual analysis, uncertainty, tool history, and rights-clean measured responses.
Carry this boundary into any derivative note, paper draft, or slide.
This replay is a planning aid and must not be used to run equipment.
Carry this boundary into any derivative note, paper draft, or slide.
EVIDENCE
Trace the claim back to artifacts.
The evidence route remains the catalog-level browser; this page is the simulation-level reading card.
The dataset preserves factors, response matrices, best-rate case, center point, and curvature warning.
SA-PROC-METRO-DOE-RSM-001
The model card keeps DOE planning separate from facility process execution.
SA-PROC-METRO-DOE-RSM-001
NIST/SEMATECH DOE sources anchor design-selection and response-surface vocabulary.
SA-PROC-METRO-DOE-RSM-001
Source spine
These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.
Public execution boundary
No server-side live ngspice execution, uploads, accounts, payments, comments, newsletter signup, or job/event submissions are active on this page.