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SIMULATION / SA-SEED-PROC-ANNEAL-ACTIVATION-001

Anneal activation versus dopant diffusion
Anneal Tradeoff

Replay temperature and time to compare activation fraction, diffusion length, and a junction tradeoff score without exposing anneal recipes.

sectionExploresectionRun CardsectionExportsectionMethodssectionLimitssectionEvidence

EXPLORE

Start with the observable.

Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.

guided exploration
  • Read activation and diffusion together so annealing is not treated as only a repair step.
  • Use the score sign to see how quickly diffusion can dominate a naive activation win.
  • Compare this generic card with the existing RTA and thermal-budget pages.

RUN CARD

Conditions before conclusions.

This page replays saved anneal data and does not run a furnace, RTA, implant, or recipe workflow.

precomputed educational sweep

Primary knobs

  • Temperature
  • Time
  • Activation and diffusion constants
outputs

Saved outputs

  • Activation fraction
  • Diffusion length
  • Junction tradeoff score

EXPORT

Download the public artifacts.

These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.

download

Dataset JSON

/data/anneal-activation-diffusion-web-v1.json

Open file ->
download

Seed sweep summary CSV

/data/github-open-source-seed-sweep-summary.csv

Open file ->
download

Seed model script

/data/github_open_source_seed_sims.py

Open file ->
download

Seed model card

/data/github-open-source-seed-sims-model-card.md

Open file ->

METHODS

How the number was made.

Methods are written for citation discipline: the extraction rule matters as much as the plotted value.

method

Activation uses an Arrhenius-style rate proxy and a one-minus-exponential time response.

Keep this method attached when reusing the figure or metric.

method

Diffusion length uses a square-root time law with a temperature-scaled diffusivity proxy.

Keep this method attached when reusing the figure or metric.

method

Tradeoff score subtracts a diffusion penalty from activation fraction.

Keep this method attached when reusing the figure or metric.

LIMITS

What this page does not claim.

The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.

non-claim

No dopant species, implant dose, point-defect clustering, SIMS, Hall, leakage, or sheet-resistance calibration.

Carry this boundary into any derivative note, paper draft, or slide.

non-claim

No furnace, spike, millisecond anneal, equipment recipe, or facility setting is represented.

Carry this boundary into any derivative note, paper draft, or slide.

non-claim

Metrology and process ownership are required before any process integration claim.

Carry this boundary into any derivative note, paper draft, or slide.

EVIDENCE

Trace the claim back to artifacts.

The evidence route remains the catalog-level browser; this page is the simulation-level reading card.

evidence note

Seed sweep JSON records temperature, time, activation, diffusion, and score rows.

SA-SEED-PROC-ANNEAL-ACTIVATION-001

evidence note

CSV export preserves the anneal tradeoff table.

SA-SEED-PROC-ANNEAL-ACTIVATION-001

evidence note

Existing thermal-processing pages provide the richer RTA and contact-window source spine.

SA-SEED-PROC-ANNEAL-ACTIVATION-001

Public execution boundary

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