19584deterministic rowsUNKNOWNInspect metric contract
3evidence familiesUNKNOWNInspect metric contract
0physical operating valuesUNKNOWNInspect metric contract
SIMULATION / SA-INT-FACTORY-FACILITIES-047
Factory, facilities, and sustainability evidence atlas
Map route state, utilities, abatement, and resource accounting before any factory decision.
Move across cluster-tool routing, facility and abatement, and equipment-sustainability evidence using one bounded review surface. Each family preserves its own controls, normalized proxies, exact ledgers, source spine, role gates, traceability boundary, accounting boundary, and accountable replacement-evidence questions.
EXPLORE
Start with the observable.
Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.
- Select one of three evidence families before loading row data; the first view exposes only bounded metadata, row counts, source posture, rights boundary, and export contracts.
- Hold the family-specific categorical controls fixed, then compare eight ordered evidence states without treating the state index as time, event order, queue duration, equipment history, meter sequence, or control progression.
- Switch among each packet's actual equipment, automation, scheduling, facilities, EHS, integration, emissions, utilities, and assurance views to expose which observations, measurements, genealogy, accounting boundaries, uncertainty records, and approvals remain accountable.
- Compare six selected normalized teaching proxies and three exact integer ledgers inside each family while keeping route state, facility and exhaust context, resource metering, operating-state attribution, emissions, and allocation boundaries separate.
- Use the source spines and replacement slots to plan owned route records, equipment identity, facility measurements, utility meters, abatement evidence, operating-state events, allocation rules, inventories, uncertainty, validation, and human review before any factory or sustainability decision.
BROWSER FACTORY + FACILITIES + SUSTAINABILITY EVIDENCE ATLAS
Choose the evidence family before loading the validated rows.
Compact metadata is present at first paint. The browser fetches one validated gzip CSV transport only after this explicit selection, verifies the restored canonical bytes, and discards them when the family changes.
selected packet
Cluster-tool routing and operating-state evidence
Which routing topology, chamber matching, queue-time, residency, carryover, substrate tracking, and factory-handoff evidence still blocks a defensible cluster-tool review?
- Rows
- 6,912
- Physical states
- 3,456
- Sources
- 19 open / 1 gated
- Browser transfer
- One gzip CSV on request
0.48 MB gzip / 12.8 MB verified raw / row JSON remains private
No row data has been loaded.
Review the selected packet and accounting boundary, then load exactly one validated family gzip CSV. The browser verifies the restored canonical bytes; changing families discards the loaded rows, and raw CSV plus row-bearing JSON remain outside the website.
RUN CARD
Conditions before conclusions.
The browser filters one validated canonical CSV selected by the user after decompressing and verifying it. It does not solve factory, facility, abatement, resource, emissions, or accounting physics; transfer source numbers; import measurements; infer compliance; recommend settings; operate equipment; certify an inventory; accept material; or make a disposition or release decision.
Primary knobs
- evidence family: cluster routing, facility and abatement, or equipment sustainability
- family-specific categorical route, facility, operating-state, metering, emissions, allocation, and evidence axes
- eight ordered non-time teaching states
- packet-specific equipment, automation, scheduling, facilities, EHS, integration, utilities, emissions, or assurance gate
- teaching assumption or accountable replacement slot
Saved outputs
- six family-specific normalized readiness or burden proxies
- family-specific regime, evidence-traceability, role, and handoff gates
- three exact integer teaching ledgers per family
- compact manifest, metric contract, model card, source spine, and explicitly loaded deterministic gzip CSV transport
EXPORT
Download the public artifacts.
These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.
Cluster routing gzip CSV
/data/cluster-tool-routing-state-v1.csv.gzip
Open file ->Cluster routing compact manifest
/data/cluster-tool-routing-state-public-manifest-v1.json
Open file ->Facility / abatement gzip CSV
/data/facility-abatement-state-v1.csv.gzip
Open file ->Facility / abatement compact manifest
/data/facility-abatement-state-public-manifest-v1.json
Open file ->Sustainability / metering gzip CSV
/data/equipment-sustainability-state-v1.csv.gzip
Open file ->Sustainability / metering compact manifest
/data/equipment-sustainability-state-public-manifest-v1.json
Open file ->METHODS
How the number was made.
Methods are written for citation discipline: the extraction rule matters as much as the plotted value.
Cluster-tool routing and facility/abatement each enumerate 6,912 rows over 3,456 physical configurations; equipment sustainability enumerates 5,760 rows over 2,880 physical configurations, for 19,584 deterministic rows and 9,792 evidence pairs.
Keep this method attached when reusing the figure or metric.
Each family keeps its own routing, facility, operating-state, metering, emissions, allocation, and evidence controls; normalized equations; eight-state regime map; actual role gates; replacement-evidence bridge; and three exact integer teaching ledgers.
Keep this method attached when reusing the figure or metric.
Independent no-import verifiers passed 16/16 for every family, source-scope locks passed 37/37 for every family, and deterministic replay parity was exact for all twelve regenerated packet artifacts.
Keep this method attached when reusing the figure or metric.
Sixty link-only official or primary-source metadata anchors and forty-eight bounded claim nodes define terminology, rights, evidence ownership, accounting boundaries, and replacement questions without supplying generated numbers.
Keep this method attached when reusing the figure or metric.
The transport contract publishes three deterministic gzip CSV transports plus twelve compact-manifest, metric-contract, model-card, and source-spine artifacts while retaining raw canonical CSV and three row-bearing JSON artifacts with canonical evidence only.
Keep this method attached when reusing the figure or metric.
LIMITS
What this page does not claim.
The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.
All states, regimes, proxies, gates, and priority cues are original categorical or dimensionless teaching constructs, not factory schedules, utility values, facility capacities, abatement performance, emissions inventories, equipment utilization records, compliance findings, or production predictions.
Carry this boundary into any derivative note, paper draft, or slide.
The nine exact integer ledgers establish deterministic bookkeeping consistency only. They do not establish causality, calibration, allocation validity, mass or energy balance completeness, traceability, uncertainty, qualification, safety, compliance, or production fitness.
Carry this boundary into any derivative note, paper draft, or slide.
No source body, source number, equation, coefficient, material property, process condition, equipment setting, meter reading, emission factor, inventory row, model parameter, result, specification, threshold, control limit, or named-tool output enters the generated data.
Carry this boundary into any derivative note, paper draft, or slide.
The browser loads one selected-family deterministic gzip CSV only after explicit user action and verifies the restored canonical bytes. It cannot dispatch work, command or operate equipment, size facilities, set abatement, certify an inventory, claim compliance, accept material, dispose a wafer, or publish automatically.
Carry this boundary into any derivative note, paper draft, or slide.
EVIDENCE
Trace the claim back to artifacts.
The evidence route remains the catalog-level browser; this page is the simulation-level reading card.
Input audit passed 53/53 across three packet-complete families, 19,584 rows, 9,792 physical configurations, 60 sources, 48 claim nodes, and fifteen bounded candidate public assets.
SA-INT-FACTORY-FACILITIES-047
All three independent packet verifiers passed 16/16 and all three source-scope locks passed 37/37; the preintegration verifier passed thirteen hashes and seven semantic gates.
SA-INT-FACTORY-FACILITIES-047
Source reachability closed at 44 reachable and 16 access-gated records, with zero recorded hard or network failures in the packet audits.
SA-INT-FACTORY-FACILITIES-047
The browser excludes 180,771,310 bytes of row-bearing JSON and 39,333,178 raw CSV bytes, then fetches one selected-family gzip transport only after explicit action; no all-family CSV preload is permitted.
SA-INT-FACTORY-FACILITIES-047
Every family public manifest is compact and row-free, every gzip transport restores to the exact canonical byte count and SHA-256, every other copied public artifact matches its canonical SHA-256, and all raw CSV and private row JSON names remain absent from public data.
SA-INT-FACTORY-FACILITIES-047
Source spine
These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.
Cluster routing / SEMI E30: Generic Model for Communications and Control of Manufacturing EquipmentEquipment behavior, communications, state, event, alarm, command, and host-interface vocabulary categories. Rights: link-only; publisher notices, access controls, and terms apply.Cluster routing / SEMI E40: Specification for Processing ManagementDiscrete process-job, material-processing, module, concurrent-group, and cluster-tool process-management vocabulary categories. Rights: link-only; publisher notices, access controls, and terms apply.Facility / abatement / SEMI S2: Environmental, Health, and Safety Guideline for Semiconductor Manufacturing EquipmentEquipment-level EHS, hazard review, documentation, and facility-interface vocabulary categories. Rights: link-only; publisher notices, access controls, and terms apply.Facility / abatement / SEMI S6: Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing EquipmentEquipment exhaust ventilation, performance review, facility connection, energy, and assessment vocabulary categories. Rights: link-only; publisher notices, access controls, and terms apply.Sustainability / metering / SEMI S23 - Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing EquipmentCategory-level provenance for equipment energy, utility, material, and operating-mode conservation boundaries. Rights: link-only.Sustainability / metering / SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability and Maintainability (RAM) and UtilizationCategory-level provenance for equipment state, availability, maintenance, and utilization boundaries. Rights: link-only.
Public execution boundary
No server-side live ngspice execution, uploads, accounts, payments, comments, newsletter signup, or job/event submissions are active on this page.