320 casesRowsUNKNOWNInspect metric contract
0 cyclesBest nucleation delayUNKNOWNInspect metric contract
CSV filterInteraction modeUNKNOWNInspect metric contract
SIMULATION / SA-PROC-INT-ALD-SURFACE-001
O2/O3 surface treatment to ALD nucleation interactive lab
O2/O3 ALD Interactive
Filter treatment, dose, temperature, and ALD cycles to inspect nucleation delay, thickness, uniformity, capacitance, and leakage-risk teaching proxies.
EXPLORE
Start with the observable.
Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.
- Compare O2 plasma and ozone-style pretreatments before reading the ALD cycle count as a film result.
- Watch nucleation delay, nonuniformity, capacitance proxy, and leakage-risk proxy move together.
- Use the page to teach why surface preparation changes downstream dielectric evidence without publishing a recipe.
BROWSER INTERACTIVE LAB
Filter the saved CSV. Inspect matching replay rows.
No server solver is running here. The browser filters a precomputed table and redraws the plot locally.
Loading replay rowsReading the saved CSV in this browser.
film thickness nmcap density proxyleakage risk proxy
Each metric is normalized independently for shape inspection. Vertical positions do not compare magnitude across metrics.
n/afilm thickness nm
n/acap density proxy
n/aleakage risk proxy
Change one or more controls to find a saved row. No unrelated CSV value is substituted.
| treatment | surface dose s | substrate temp c | ald cycles | nucleation delay cycles | film thickness nm | cap density proxy | leakage risk proxy |
|---|---|---|---|---|---|---|---|
| Loading saved replay rows... | |||||||
RUN CARD
Conditions before conclusions.
The browser filters the saved CSV and redraws local plots. It does not run a live server solver, ALD tool workflow, process recipe, or calibrated dielectric model.
Primary knobs
- Treatment
- surface dose seconds
- substrate temperature
- ALD cycles
Saved outputs
- reactive-site proxy
- nucleation delay
- growth per cycle
- film thickness
- capacitance proxy
- leakage-risk proxy
EXPORT
Download the public artifacts.
These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.
Interactive CSV
/data/interactive-ald-surface-chain-resampling-v1.csv
Open file ->Interactive seed catalog
/data/interactive-lab-seed-catalog-v1.json
Open file ->Process view matrix
/data/process-module-view-matrix-v1.json
Open file ->METHODS
How the number was made.
Methods are written for citation discipline: the extraction rule matters as much as the plotted value.
Surface treatment is represented as a bounded reactive-site and damage proxy, not a real plasma or ozone process.
Keep this method attached when reusing the figure or metric.
Nucleation delay is derived from the reactive-site proxy and converted into active ALD cycles.
Keep this method attached when reusing the figure or metric.
Capacitance and leakage-risk proxies are computed from thickness, k-proxy, and interface-risk terms for teaching tradeoffs.
Keep this method attached when reusing the figure or metric.
LIMITS
What this page does not claim.
The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.
Browser-side filtering and nearest-row replay only; no live server solver is active.
Carry this boundary into any derivative note, paper draft, or slide.
Teaching proxy data only; not a process recipe, calibrated device model, or product qualification result.
Carry this boundary into any derivative note, paper draft, or slide.
No equipment-control workflow, PDK ingestion, private process data, upload, account, payment, comment, newsletter, or job/event workflow is enabled.
Carry this boundary into any derivative note, paper draft, or slide.
EVIDENCE
Trace the claim back to artifacts.
The evidence route remains the catalog-level browser; this page is the simulation-level reading card.
The CSV preserves every treatment, dose, temperature, cycle, and proxy value used by the browser lab.
SA-PROC-INT-ALD-SURFACE-001
The seed catalog stores allowed interaction mode, source links, and blocked public capabilities.
SA-PROC-INT-ALD-SURFACE-001
The source spine anchors vocabulary without copying article bodies or turning the page into an operation guide.
SA-PROC-INT-ALD-SURFACE-001
Source spine
These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.
NIST CHIPS Metrology ProgramMeasurement and fit-for-purpose metrology framing for evidence boundaries.NIST metrology and process control uncertaintyPublic page anchoring uncertainty vocabulary for process-control decisions.TSMC DTCO introductionDesign/process co-optimization vocabulary for integration view.imec STCO overviewSystem-to-technology requirement framing for integration view.
Public execution boundary
No server-side live ngspice execution, uploads, accounts, payments, comments, newsletter signup, or job/event submissions are active on this page.