O2 plasma surface activation
Replay contact-angle reduction, residue removal proxy, ion-exposure warning, and air recovery after oxygen plasma activation.
8.43 deg / 96.3% / 46.19 deg
Open simulation ->PROCESS REPLAY LAB / SA-PROC-004
Surface treatment.
Check the interface.
This lab collects two precomputed surface-treatment simulations for paper-first review: O2 plasma activation and O3 / UV-ozone cleaning.
RUN ONE QUESTION
Pick the surface claim first.
Every card keeps a condition, output, method, source, and limitation attached. The point is evidence discipline, not facility operation.
O3 ozone and UV-ozone surface clean
Replay ozone and UV-O3 organic removal, hydrophilicity, hydroxylation proxy, and oxide-growth caution before deposition.
11.46 deg / 96.3% / 0.396 nm
Open simulation ->O2 plasma and O3 ozone surface activation for ALD nucleation
Replay treatment type, normalized dose, substrate class, activation proxy, and ALD nucleation-delay cycles for surface-prep intuition.
1.18 cycles / O2 plasma / dose 4 / SiO2-like / 24 cases
Open simulation ->O2/O3 surface treatment to ALD nucleation interactive lab
Filter treatment, dose, temperature, and ALD cycles to inspect nucleation delay, thickness, uniformity, capacitance, and leakage-risk teaching proxies.
320 cases / 0 cycles / CSV filter
Open simulation ->MODEL BOUNDARY
A surface card is not a tool recipe.
The public replay is for teaching, figures, and early paper planning. It is not a recipe, tool instruction, wafer qualification, safety procedure, or signoff result.
Browse saved datasets
Open O2 plasma and O3 ozone replays with contact angle, residue proxy, activation, recovery, and oxide caution visible.
Download model cards
Use the public source notes and limitations when making slides, drafts, or teaching figures.
No recipe workflow
No process upload, tool account, facility credential, live execution, endpoint control, or certified process result is present.