11.46 deg15 min contact angleUNKNOWNInspect metric contract
96.3%15 min organic removal proxyUNKNOWNInspect metric contract
0.396 nm15 min oxide proxyUNKNOWNInspect metric contract
SIMULATION / SA-PROC-SURF-O3-OZONE-001
O3 ozone and UV-ozone surface clean
O3 / UV-Ozone
Replay ozone and UV-O3 organic removal, hydrophilicity, hydroxylation proxy, and oxide-growth caution before deposition.
EXPLORE
Start with the observable.
Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.
- Compare dry UV/O3 and DI-O3 water teaching cases.
- Read residue removal together with oxide-growth caution.
- Use the surface-clean card before ALD, bonding, or adhesion claims.
RUN CARD
Conditions before conclusions.
The public page replays saved ozone teaching data. It does not operate ozone equipment or expose process settings.
Primary knobs
- Treatment time: 0-30 min teaching samples
- Normalized oxidant strength: dry UV/O3 and DI-O3 water
- Outputs: contact angle, residue proxy, hydroxylation proxy, oxide-growth proxy
- Boundary: surface preparation, not process qualification
Saved outputs
- contact-angle curve
- organic residue proxy
- hydroxylation proxy
- oxide-growth proxy
EXPORT
Download the public artifacts.
These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.
Dataset JSON
/data/process-o3-ozone-surface-clean-web-v1.json
Open file ->Model script
/data/process_surface_treatment_models.py
Open file ->Surface-treatment model card
/data/process-surface-treatment-model-card.md
Open file ->METHODS
How the number was made.
Methods are written for citation discipline: the extraction rule matters as much as the plotted value.
Use first-order teaching curves to connect normalized ozone exposure with residue removal.
Keep this method attached when reusing the figure or metric.
Track hydrophilicity and hydroxylation separately from oxide-growth caution.
Keep this method attached when reusing the figure or metric.
Compare dry UV/O3 and DI-O3 water as surface-preparation modes, not recipes.
Keep this method attached when reusing the figure or metric.
LIMITS
What this page does not claim.
The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.
No UV intensity distribution, ozone concentration, humidity, substrate temperature, dissolved ozone transport, facility recipe, or qualified metrology is modeled.
Carry this boundary into any derivative note, paper draft, or slide.
Normalized oxidant strength is a teaching axis and must not be copied into equipment settings.
Carry this boundary into any derivative note, paper draft, or slide.
Oxide-growth values are caution proxies, not measured film thickness.
Carry this boundary into any derivative note, paper draft, or slide.
Real use requires material compatibility, contamination metrology, safety approval, and tool-specific training.
Carry this boundary into any derivative note, paper draft, or slide.
EVIDENCE
Trace the claim back to artifacts.
The evidence route remains the catalog-level browser; this page is the simulation-level reading card.
The dataset preserves dry UV/O3 and DI-O3 water teaching cases.
SA-PROC-SURF-O3-OZONE-001
Verification checks monotonic contact-angle reduction, residue removal, and oxide-proxy increase.
SA-PROC-SURF-O3-OZONE-001
The model card states public boundaries and source links.
SA-PROC-SURF-O3-OZONE-001
Source spine
These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.
UIUC MRL UV/Ozone CleanerPublic UV/O3 cleaner page for organic removal, hydrophilicity, deposition prep, and O2 plasma comparison.Samco UV ozone cleaningPublic UV/O3 surface-treatment vocabulary for organic-contaminant removal.Harrick Plasma surface chemistrySurface chemistry and hydroxylation context used to separate activation from recipe claims.
Public execution boundary
No server-side live ngspice execution, uploads, accounts, payments, comments, newsletter signup, or job/event submissions are active on this page.