1.18 cyclesLowest nucleation delayUNKNOWNInspect metric contract
O2 plasma / dose 4 / SiO2-likeBest caseUNKNOWNInspect metric contract
24 casesSweep rowsUNKNOWNInspect metric contract
SIMULATION / SA-SEED-PROC-SURFACE-O2-O3-001
O2 plasma and O3 ozone surface activation for ALD nucleation
O2/O3 ALD
Replay treatment type, normalized dose, substrate class, activation proxy, and ALD nucleation-delay cycles for surface-prep intuition.
EXPLORE
Start with the observable.
Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.
- Compare O2 plasma and O3 ozone as surface-state treatments before picking a deposition story.
- Read activation proxy and nucleation delay together so more exposure is not automatically better.
- Use substrate class as a reminder that compatibility belongs in the method card.
RUN CARD
Conditions before conclusions.
This page replays saved O2/O3 surface-treatment data and does not run a plasma tool, UV-ozone cleaner, ALD reactor, or recipe workflow.
Primary knobs
- Treatment
- Normalized dose
- Substrate class
Saved outputs
- Surface activation proxy
- ALD nucleation-delay cycles
- Best-case row
EXPORT
Download the public artifacts.
These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.
Dataset JSON
/data/o2-o3-surface-treatment-ald-nucleation-web-v1.json
Open file ->Seed sweep summary CSV
/data/github-open-source-seed-sweep-summary.csv
Open file ->Seed model script
/data/github_open_source_seed_sims.py
Open file ->Seed model card
/data/github-open-source-seed-sims-model-card.md
Open file ->METHODS
How the number was made.
Methods are written for citation discipline: the extraction rule matters as much as the plotted value.
Activation proxy increases with normalized treatment dose and substrate compatibility.
Keep this method attached when reusing the figure or metric.
A damage penalty keeps exposure from becoming a one-way improvement knob.
Keep this method attached when reusing the figure or metric.
ALD nucleation delay is derived from the remaining unactivated surface fraction.
Keep this method attached when reusing the figure or metric.
LIMITS
What this page does not claim.
The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.
No plasma power, pressure, gas flow, UV lamp dose, ozone concentration, chemistry recipe, or equipment setting.
Carry this boundary into any derivative note, paper draft, or slide.
No facility workflow, material compatibility approval, or production ALD recipe is provided.
Carry this boundary into any derivative note, paper draft, or slide.
Measured contact angle, XPS, ellipsometry, QCM, or nucleation data are required before calibrated claims.
Carry this boundary into any derivative note, paper draft, or slide.
EVIDENCE
Trace the claim back to artifacts.
The evidence route remains the catalog-level browser; this page is the simulation-level reading card.
Seed sweep JSON records treatment, dose, substrate, activation, and nucleation-delay rows.
SA-SEED-PROC-SURFACE-O2-O3-001
CSV export preserves the O2/O3 comparison table.
SA-SEED-PROC-SURFACE-O2-O3-001
Existing surface-treatment pages provide source anchors for O2 plasma and UV/O3 vocabulary.
SA-SEED-PROC-SURFACE-O2-O3-001
Source spine
These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.
Public execution boundary
No server-side live ngspice execution, uploads, accounts, payments, comments, newsletter signup, or job/event submissions are active on this page.