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SIMULATION / SA-PROC-THERM-RTA-ACTIVATION-001

RTA activation and diffusion tradeoff
RTA Tradeoff

Replay normalized rapid-thermal-anneal budgets to compare dopant activation, diffusion broadening, and sheet-resistance proxy.

sectionExploresectionRun CardsectionExportsectionMethodssectionLimitssectionEvidence

EXPLORE

Start with the observable.

Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.

guided exploration
  • Compare low-exposure, spike RTA, and longer-soak teaching profiles.
  • Read activated fraction together with diffusion length before choosing a winner.
  • Use the sheet-resistance proxy as a discussion aid, not a qualified electrical result.
Open visual lab ->Open lesson ->

RUN CARD

Conditions before conclusions.

The public page replays saved thermal-processing data. It does not submit a furnace or RTA program, operate equipment, or expose recipe settings.

precomputed replay

Primary knobs

  • Teaching profiles: low exposure, spike RTA, longer soak
  • Activation budget: normalized Arrhenius seconds at 1000 C
  • Diffusion budget: separate higher-barrier Arrhenius proxy
  • Outputs: activation percent, diffusion length, junction-depth proxy, sheet-R proxy
outputs

Saved outputs

  • activation and inactive fraction
  • diffusion length and junction-depth proxy
  • sheet-resistance proxy
  • public non-recipe boundary

EXPORT

Download the public artifacts.

These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.

download

Dataset JSON

/data/process-rta-activation-diffusion-web-v1.json

Open file ->
download

Model script

/data/process_thermal_processing_models.py

Open file ->
download

Thermal model card

/data/process-thermal-processing-model-card.md

Open file ->

METHODS

How the number was made.

Methods are written for citation discipline: the extraction rule matters as much as the plotted value.

method

Compute separate normalized activation and diffusion budgets from simplified time-temperature profiles.

Keep this method attached when reusing the figure or metric.

method

Convert activation budget into an activated-fraction teaching proxy.

Keep this method attached when reusing the figure or metric.

method

Convert diffusion budget into a diffusion-length and junction-depth teaching proxy.

Keep this method attached when reusing the figure or metric.

method

Keep sheet resistance, activation, and diffusion visible together so the tradeoff is not hidden.

Keep this method attached when reusing the figure or metric.

LIMITS

What this page does not claim.

The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.

non-claim

No furnace recipe, RTA ramp program, gas ambient, wafer handling, endpoint, pyrometry calibration, or tool-control instruction is included.

Carry this boundary into any derivative note, paper draft, or slide.

non-claim

The time-temperature profiles are synthetic teaching inputs and must not be copied into equipment settings.

Carry this boundary into any derivative note, paper draft, or slide.

non-claim

No dopant species, point-defect clustering, dose dependence, SIMS fit, Hall data, or qualified sheet-resistance metrology is modeled.

Carry this boundary into any derivative note, paper draft, or slide.

non-claim

Real activation evidence requires calibrated anneal history, chemical profile, active-carrier measurement, and material-stack review.

Carry this boundary into any derivative note, paper draft, or slide.

EVIDENCE

Trace the claim back to artifacts.

The evidence route remains the catalog-level browser; this page is the simulation-level reading card.

evidence note

The dataset preserves three teaching profiles and their activation/diffusion budgets.

SA-PROC-THERM-RTA-ACTIVATION-001

evidence note

Verification checks activation and diffusion increase with thermal budget.

SA-PROC-THERM-RTA-ACTIVATION-001

evidence note

The model card states public boundaries and source links.

SA-PROC-THERM-RTA-ACTIVATION-001

Source spine

These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.

MIT OCW 6.152J ion implantation lecturePublic lecture-note page anchoring diffusion, ion implantation, projected range, and implantation damage vocabulary.MIT OCW 6.774 front-end processingPublic course page covering oxidation, diffusion, ion implantation, epitaxy, and front-end process physics.Optimal control of rapid thermal annealingOpen PDF discussing RTA, ultrashallow junctions, TED, sheet-resistance tradeoffs, and temperature trajectory control.COMSOL Rapid Thermal Annealing modelPublic model page describing RTA as dopant activation and metal-contact interfacial reaction with transient heat transfer.

Public execution boundary

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