62.057Best continuity scoreUNKNOWNInspect metric contract
AR 0.5 / pressure proxy 10Best caseUNKNOWNInspect metric contract
15 casesSweep rowsUNKNOWNInspect metric contract
SIMULATION / SA-PROC-008-SPUTTER-PVD-STEP-001
Sputter/PVD step coverage and continuity
PVD Step Coverage
Replay feature aspect ratio and scattering proxy to see why PVD coverage is not just blanket thickness.
EXPLORE
Start with the observable.
Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.
- Compare blanket thickness with bottom and sidewall coverage before trusting a film.
- Use aspect ratio as the first warning that line-of-sight deposition may fail inside features.
- Treat scattering as a qualitative knob, not a pressure recipe.
RUN CARD
Conditions before conclusions.
This page replays saved PVD surrogate data and does not run a chamber, equipment model, or recipe workflow.
Primary knobs
- Feature aspect ratio
- Pressure/scattering proxy
- Continuity score rule
Saved outputs
- Bottom coverage
- Sidewall coverage
- Overhang risk
- Continuity score
EXPORT
Download the public artifacts.
These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.
Dataset JSON
/data/sputter-pvd-step-coverage-web-v1.json
Open file ->Dataset CSV
/data/sputter-pvd-step-coverage-v64.csv
Open file ->v64 deep simulation summary CSV
/data/v64-deep-simulations-summary.csv
Open file ->v64 deep model script
/data/v64_deep_semiconductor_sims.mjs
Open file ->v64 deep model card
/data/v64-deep-simulations-model-card.md
Open file ->METHODS
How the number was made.
Methods are written for citation discipline: the extraction rule matters as much as the plotted value.
Bottom coverage decays with feature aspect ratio and is slightly moderated by scattering proxy.
Keep this method attached when reusing the figure or metric.
Sidewall coverage increases with scattering but loses ground as aspect ratio grows.
Keep this method attached when reusing the figure or metric.
Continuity score combines bottom/sidewall coverage with an overhang-risk penalty.
Keep this method attached when reusing the figure or metric.
LIMITS
What this page does not claim.
The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.
No target material, wafer rotation, pressure, power, collimation, ionization, or chamber recipe is represented.
Carry this boundary into any derivative note, paper draft, or slide.
No production step coverage, reliability, or integration recommendation is made.
Carry this boundary into any derivative note, paper draft, or slide.
Use cross-section metrology, sheet resistance, TEM/SEM, and process ownership before calibrated claims.
Carry this boundary into any derivative note, paper draft, or slide.
EVIDENCE
Trace the claim back to artifacts.
The evidence route remains the catalog-level browser; this page is the simulation-level reading card.
v64 deep results store every aspect-ratio, scattering, coverage, and continuity row.
SA-PROC-008-SPUTTER-PVD-STEP-001
CSV export preserves the step-coverage table.
SA-PROC-008-SPUTTER-PVD-STEP-001
The existing thin-film lesson keeps this card inside deposition learning rather than equipment operation.
SA-PROC-008-SPUTTER-PVD-STEP-001
Source spine
These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.
Public execution boundary
No server-side live ngspice execution, uploads, accounts, payments, comments, newsletter signup, or job/event submissions are active on this page.