28800deterministic rowsUNKNOWNInspect metric contract
4evidence familiesUNKNOWNInspect metric contract
0physical operating valuesUNKNOWNInspect metric contract
SIMULATION / SA-INT-SENSOR-CONTROL-046
Sensor, metrology, and control evidence atlas
Separate signals, measurements, chamber state, and wafer-edge evidence before any control decision.
Move across endpoint sensors, inspection and metrology, chamber-state FDC, and edge, bevel, and backside evidence using one bounded review surface. Each family preserves its own controls, normalized proxies, exact ledgers, source spine, role gates, traceability boundary, and accountable replacement-evidence questions.
EXPLORE
Start with the observable.
Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.
- Select one of four evidence families before loading row data; the first view exposes only bounded metadata, row counts, source posture, rights boundary, and export contracts.
- Hold the family-specific categorical controls fixed, then compare eight ordered evidence states without treating the state index as time, run count, wafer radius, chamber age, process order, or control progression.
- Switch among each packet's actual equipment, process, inspection, metrology, FDC, maintenance, and yield views to expose which observations, calibrations, models, genealogy, uncertainty records, and approvals remain accountable.
- Compare six selected normalized teaching proxies and three exact integer ledgers inside each family while keeping signal interpretation, measurement-system evidence, chamber-state inference, and edge or backside inspection separate.
- Use the source spines and replacement slots to plan owned signals, measurands, calibrations, equipment traces, sampling, uncertainty, genealogy, validation, and human review before any equipment, maintenance, disposition, or yield decision.
BROWSER SENSOR + METROLOGY + CONTROL EVIDENCE ATLAS
Choose the evidence family before loading the validated rows.
Compact metadata is present at first paint. The browser fetches one validated gzip CSV transport only after this explicit selection, verifies the restored canonical bytes, and discards them when the family changes.
selected packet
Endpoint sensor and signal-interpretation evidence
Which signal-formation, drift, calibration, false-endpoint, fusion, metrology, and downstream-transition evidence still blocks a defensible endpoint-sensor handoff?
- Rows
- 6,912
- Physical states
- 3,456
- Sources
- 11 open / 9 gated
- Browser transfer
- One gzip CSV on request
0.49 MB gzip / 13.1 MB verified raw / row JSON remains private
No row data has been loaded.
Review the selected packet boundary, then load exactly one validated family gzip CSV. The browser verifies the restored canonical bytes; changing families discards the loaded rows, and raw CSV plus row-bearing JSON remain outside the website.
RUN CARD
Conditions before conclusions.
The browser filters one validated canonical CSV selected by the user after decompressing and verifying it. It does not solve a physical sensor or control model, transfer source numbers, import measurements, infer a fault or cause, recommend settings, operate equipment, trigger maintenance, accept material, or make a disposition or release decision.
Primary knobs
- evidence family: endpoint sensor, inspection and metrology, chamber-state FDC, or edge, bevel, and backside
- family-specific categorical signal, measurement, lifecycle, inspection, and evidence axes
- eight ordered non-time teaching states
- packet-specific equipment, process, inspection, metrology, FDC, maintenance, or yield gate
- teaching assumption or accountable replacement slot
Saved outputs
- six family-specific normalized readiness or burden proxies
- family-specific regime, evidence-traceability, role, and handoff gates
- three exact integer teaching ledgers per family
- compact manifest, metric contract, model card, source spine, and explicitly loaded deterministic gzip CSV transport
EXPORT
Download the public artifacts.
These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.
Endpoint sensor gzip CSV
/data/endpoint-sensor-state-v1.csv.gzip
Open file ->Endpoint sensor compact manifest
/data/endpoint-sensor-state-public-manifest-v1.json
Open file ->Inspection / metrology gzip CSV
/data/inspection-metrology-state-v1.csv.gzip
Open file ->Inspection / metrology compact manifest
/data/inspection-metrology-state-public-manifest-v1.json
Open file ->Chamber state / FDC gzip CSV
/data/chamber-state-fdc-state-v1.csv.gzip
Open file ->Chamber state / FDC compact manifest
/data/chamber-state-fdc-state-public-manifest-v1.json
Open file ->Edge / bevel / backside gzip CSV
/data/edge-bevel-backside-state-v1.csv.gzip
Open file ->Edge / bevel / backside compact manifest
/data/edge-bevel-backside-state-public-manifest-v1.json
Open file ->METHODS
How the number was made.
Methods are written for citation discipline: the extraction rule matters as much as the plotted value.
Endpoint sensor, chamber-state FDC, and edge, bevel, and backside each enumerate 6,912 rows over 3,456 physical configurations; inspection and metrology enumerates 8,064 rows over 4,032 physical configurations, for 28,800 deterministic rows and 14,400 evidence pairs.
Keep this method attached when reusing the figure or metric.
Each family keeps its own signal, measurement, lifecycle, inspection, and evidence controls, normalized equations, eight-state regime map, actual role gates, replacement-evidence bridge, and three exact integer teaching ledgers.
Keep this method attached when reusing the figure or metric.
Independent no-import verifiers passed 16/16 for every family, source-scope locks passed 37/37 for every family, and deterministic replay parity was exact for all sixteen regenerated packet artifacts.
Keep this method attached when reusing the figure or metric.
Eighty link-only official or primary-source metadata anchors and sixty-four bounded claim nodes define terminology, rights, evidence ownership, and replacement questions without supplying generated numbers.
Keep this method attached when reusing the figure or metric.
The transport contract publishes four deterministic gzip CSV transports plus sixteen compact-manifest, metric-contract, model-card, and source-spine artifacts while retaining raw canonical CSV and four row-bearing JSON artifacts with canonical evidence only.
Keep this method attached when reusing the figure or metric.
LIMITS
What this page does not claim.
The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.
All states, regimes, proxies, gates, and priority cues are original categorical or dimensionless teaching constructs, not physical endpoint, inspection, metrology, chamber, FDC, maintenance, edge, bevel, backside, equipment, process-control, reliability, or yield predictions.
Carry this boundary into any derivative note, paper draft, or slide.
The twelve exact integer ledgers establish deterministic bookkeeping consistency only. They do not establish causality, calibration, traceability, transferability, uncertainty, qualification, safety, maintenance need, or production fitness.
Carry this boundary into any derivative note, paper draft, or slide.
No source body, source number, equation, coefficient, material property, process condition, equipment setting, measurement row, model parameter, result, specification, threshold, control limit, or named-tool output enters the generated data.
Carry this boundary into any derivative note, paper draft, or slide.
The browser loads one selected-family deterministic gzip CSV only after explicit user action and verifies the restored canonical bytes. It cannot recommend settings, operate equipment, trigger maintenance, accept material, dispose a wafer, diagnose a fault, claim yield, or publish automatically.
Carry this boundary into any derivative note, paper draft, or slide.
EVIDENCE
Trace the claim back to artifacts.
The evidence route remains the catalog-level browser; this page is the simulation-level reading card.
Input audit passed 69/69 across four packet-complete families, 28,800 rows, 14,400 physical configurations, 80 sources, 64 claim nodes, and twenty approved public assets.
SA-INT-SENSOR-CONTROL-046
All four independent packet verifiers passed 16/16 and all four source-scope locks passed 37/37; the preintegration verifier passed thirteen hashes and seven semantic gates.
SA-INT-SENSOR-CONTROL-046
Source reachability closed at 59 reachable and 21 access-gated records, with zero recorded hard or network failures in the packet audits.
SA-INT-SENSOR-CONTROL-046
The browser excludes 260,216,331 bytes of row-bearing JSON and 57,030,827 raw CSV bytes, then fetches one selected-family gzip transport only after explicit action; no all-family CSV preload is permitted.
SA-INT-SENSOR-CONTROL-046
Every family public manifest is compact and row-free, every gzip transport restores to the exact canonical byte count and SHA-256, every other copied public artifact matches its canonical SHA-256, and all raw CSV and private row JSON names remain absent from public data.
SA-INT-SENSOR-CONTROL-046
Source spine
These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.
Endpoint sensor / EV-140C Optical Emission Spectroscopy Etching End-point MonitorOES signal collection, endpoint and chamber-condition monitoring, spectral-trend, noise-immunity, and equipment-boundary vocabulary categories. Rights: link-only; publisher notices and terms apply.Endpoint sensor / LEM Series camera endpoint monitor based on real-time laser interferometryInterferometric etch/deposition monitoring, reflected-light path, fringe, interface, thickness/depth, endpoint, and optical-access vocabulary categories. Rights: link-only; publisher notices and terms apply.Inspection / metrology / Wafer defect inspection systems: optical and electron-beam methodsBright-field, dark-field, electron-beam, voltage-contrast, inspection-throughput, defect-review, and method-selection vocabulary categories. Rights: link-only; publisher notices and terms apply.Inspection / metrology / Measuring accuracy: diffraction-based optical measurement and e-beam inspectionOverlay, focus, optical target, diffraction, e-beam inspection, after-etch metrology, and feedback-boundary vocabulary categories. Rights: link-only; publisher notices and terms apply.Chamber state / FDC / Virtual sensor innovation for higher productivityFleet matching, multivariate tool-sensor analysis, chamber troubleshooting, predictive-chart, virtual-metrology, drift, and preventive-maintenance vocabulary categories. Rights: link-only; publisher notices, access controls, and terms apply.Chamber state / FDC / New Industry Benchmark Set for Etch ProductivityConsumable aging, chamber opening, cleaning, requalification, preventive maintenance, replacement, and uptime vocabulary categories. Rights: link-only; publisher notices, access controls, and terms apply.Edge / bevel / backside / Coronus Product Family: Plasma Bevel Etch and DepositionBevel etch, bevel deposition, residue, film, edge protection, particle migration, edge exclusion, and yield-handoff vocabulary categories. Rights: link-only; publisher notices, access controls, and terms apply.Edge / bevel / backside / Lam Research Introduces Coronus DX Bevel Deposition SolutionBevel deposition, two-sided edge protection, centering, integrated metrology, repeatability, and downstream defect-prevention vocabulary categories. Rights: link-only; publisher notices, access controls, and terms apply.
Public execution boundary
No server-side live ngspice execution, uploads, accounts, payments, comments, newsletter signup, or job/event submissions are active on this page.