48384deterministic rowsUNKNOWNInspect metric contract
7deposition familiesUNKNOWNInspect metric contract
0physical recipe valuesUNKNOWNInspect metric contract
SIMULATION / SA-INT-DEPOSITION-044
Deposition process evidence atlas
Compare seven deposition families without collapsing their mechanisms or evidence boundaries.
Move across PVD, CVD and PECVD, ALD and PEALD, LPCVD and furnace chains, epitaxy, selective deposition, and electrochemical gap-fill using one bounded review surface. Each family preserves its own controls, normalized proxies, exact ledgers, source spine, role gates, and replacement-evidence questions.
EXPLORE
Start with the observable.
Use this page when the simulation is the primary artifact. The linked lesson explains the concept; the linked lab keeps the visual replay surface available.
- Select one of seven deposition families before loading row data; the first view exposes only bounded metadata, row counts, source posture, rights boundary, and export contracts.
- Hold seven categorical controls fixed, then compare eight ordered evidence states without treating the state index as time, thickness, cycles, charge, thermal history, or recipe progression.
- Switch among each family's operator, engineering, integration, and yield views to expose which observations, models, interfaces, genealogy, denominators, and uncertainty records remain accountable.
- Compare six normalized teaching proxies and three exact integer ledgers inside each family while keeping transport, reaction, surface, growth, strain, selectivity, and gap-fill mechanisms separate.
- Use the source spines and replacement slots to plan owned physical models, measurements, equipment traces, material context, validation, and human review before any operational decision.
BROWSER DEPOSITION EVIDENCE ATLAS
Choose the deposition family before loading the evidence rows.
Compact metadata is present at first paint. The browser fetches one validated gzip CSV transport only after this explicit selection, verifies the restored canonical bytes, and discards them when the family changes.
selected packet
Physical-vapor deposition transport evidence
How do transport scattering, angular flux, target erosion, resputtering, wafer motion, feature access, and film-stability evidence move together?
- Rows
- 6,912
- Physical states
- 3,456
- Sources
- 17 open / 3 gated
- Browser transfer
- One gzip CSV on request
0.45 MB gzip / 9.5 MB verified raw / row JSON remains private
No row data has been loaded.
Review the selected packet boundary, then load exactly one validated family gzip CSV. The browser verifies the restored canonical bytes; changing families discards the loaded rows, and raw CSV plus row-bearing JSON remain outside the website.
RUN CARD
Conditions before conclusions.
The browser filters one validated canonical CSV selected by the user after decompressing and verifying it. It does not solve a physical model, transfer source numbers, import measurements, infer causality, choose a precursor or material, recommend a recipe, operate equipment, qualify a process, or make a release decision.
Primary knobs
- deposition family: PVD, CVD and PECVD, ALD and PEALD, LPCVD and furnace, epitaxy, selective deposition, or ECD gap-fill
- seven family-specific categorical mechanism and evidence axes
- eight ordered teaching states
- family-specific operator, engineering, integration, or yield evidence gate
- teaching assumption or accountable replacement slot
Saved outputs
- six family-specific normalized readiness, control, or burden proxies
- family-specific regime, measurement traceability, role, and handoff gates
- three exact integer teaching ledgers per family
- compact manifest, metric contract, model card, source spine, and explicitly loaded deterministic gzip CSV transport
EXPORT
Download the public artifacts.
These exports are the supported public files for review. PDK files and restricted third-party material are not redistributed.
PVD gzip CSV
/data/pvd-transport-state-v1.csv.gzip
Open file ->PVD compact manifest
/data/pvd-transport-state-public-manifest-v1.json
Open file ->CVD / PECVD gzip CSV
/data/cvd-regime-state-v1.csv.gzip
Open file ->CVD / PECVD compact manifest
/data/cvd-regime-state-public-manifest-v1.json
Open file ->ALD / PEALD gzip CSV
/data/ald-cycle-state-v1.csv.gzip
Open file ->ALD / PEALD compact manifest
/data/ald-cycle-state-public-manifest-v1.json
Open file ->LPCVD / furnace gzip CSV
/data/lpcvd-furnace-state-v1.csv.gzip
Open file ->LPCVD / furnace compact manifest
/data/lpcvd-furnace-state-public-manifest-v1.json
Open file ->Epitaxy gzip CSV
/data/epitaxy-chain-state-v1.csv.gzip
Open file ->Epitaxy compact manifest
/data/epitaxy-chain-state-public-manifest-v1.json
Open file ->Selective deposition gzip CSV
/data/selective-deposition-state-v1.csv.gzip
Open file ->Selective deposition compact manifest
/data/selective-deposition-state-public-manifest-v1.json
Open file ->ECD / gap-fill gzip CSV
/data/ecd-gapfill-state-v1.csv.gzip
Open file ->ECD / gap-fill compact manifest
/data/ecd-gapfill-state-public-manifest-v1.json
Open file ->METHODS
How the number was made.
Methods are written for citation discipline: the extraction rule matters as much as the plotted value.
Seven independently completed packets each enumerate 6,912 rows over 3,456 physical configurations and paired evidence postures, for 48,384 deterministic rows and 24,192 evidence pairs.
Keep this method attached when reusing the figure or metric.
Each family keeps its own mechanism-context controls, normalized equations, eight-state regime map, four role gates, replacement-evidence bridge, and three exact integer teaching ledgers.
Keep this method attached when reusing the figure or metric.
Independent no-import verifiers passed 16/16 for every family, source-scope locks passed 37/37 for every family, and deterministic replay parity was exact for all twenty-eight regenerated artifacts.
Keep this method attached when reusing the figure or metric.
One hundred forty link-only official or primary-source metadata anchors and one hundred twelve bounded claim nodes define terminology, rights, evidence ownership, and replacement questions without supplying generated numbers.
Keep this method attached when reusing the figure or metric.
The transport contract publishes seven deterministic gzip CSV transports plus twenty-eight compact-manifest, metric-contract, model-card, and source-spine artifacts while retaining raw canonical CSV and seven row-bearing JSON artifacts with canonical evidence only.
Keep this method attached when reusing the figure or metric.
LIMITS
What this page does not claim.
The MVP is useful because the limits are visible. These statements prevent a teaching simulation from being cited as silicon evidence.
All states, regimes, proxies, gates, and priority cues are original categorical or dimensionless teaching constructs, not physical deposition, transport, reaction, nucleation, growth, film, interface, gap-fill, equipment, metrology, reliability, or yield predictions.
Carry this boundary into any derivative note, paper draft, or slide.
The twenty-one exact integer ledgers establish deterministic bookkeeping consistency only. They do not establish physical causality, calibration, material compatibility, uncertainty, model transfer, traceability, qualification, safety, or production fitness.
Carry this boundary into any derivative note, paper draft, or slide.
No source body, source number, equation, coefficient, chemistry, geometry, material property, process condition, recipe, equipment setting, measurement row, model parameter, result, specification, or named-tool output enters the generated data.
Carry this boundary into any derivative note, paper draft, or slide.
No equipment-control instruction is provided. The browser loads one selected-family deterministic gzip CSV only after explicit user action and verifies the restored canonical bytes. It cannot choose a precursor or material, recommend a process window, operate equipment, release material, sign off integration, dispose a wafer, claim yield, or publish automatically.
Carry this boundary into any derivative note, paper draft, or slide.
EVIDENCE
Trace the claim back to artifacts.
The evidence route remains the catalog-level browser; this page is the simulation-level reading card.
Input audit passed 117/117 across seven packet-complete families, 48,384 rows, 24,192 physical configurations, 140 sources, 112 claim nodes, and thirty-five approved public assets.
SA-INT-DEPOSITION-044
All seven independent packet verifiers passed 16/16 and all seven source-scope locks passed 37/37; the preintegration verifier passed thirteen hashes and seven semantic gates.
SA-INT-DEPOSITION-044
Source reachability closed at 98 reachable and 42 access-gated records, with zero recorded hard or network failures in the packet audits.
SA-INT-DEPOSITION-044
The browser excludes 404,373,755 bytes of row-bearing JSON and 80,090,082 raw CSV bytes, then fetches one selected-family gzip transport only after explicit action; no all-family CSV preload is permitted.
SA-INT-DEPOSITION-044
Every family public manifest is compact and row-free, every gzip transport restores to the exact canonical byte count and SHA-256, every other copied public artifact matches its canonical SHA-256, and all raw CSV and private row JSON names remain absent from public data.
SA-INT-DEPOSITION-044
Source spine
These links anchor the public teaching model. They do not convert the replay into a qualified process recipe or signoff result.
PVD / UCRL-JC-128289 magnetron sputter deposition and thickness uniformity studyTarget erosion, substrate motion, spatial deposition, and thickness-uniformity evidence ownership. Rights: link-only; U.S. government and publication notices apply.PVD / LLNL-JRNL-819053 target wear and magnetron sputter deposition studyTarget erosion-state and source-evolution evidence ownership. Rights: link-only; U.S. government and journal notices apply.CVD / PECVD / Apparatus for characterizing gas-phase chemical precursor delivery for thin-film depositionPrecursor-delivery, delivered-flux, source-container, and delivery-evidence ownership. Rights: link-only; NIST and journal notices apply.CVD / PECVD / Gas flow standards and their uncertaintyFlow calibration, traceability, and uncertainty ownership. Rights: link-only; NIST notices apply.ALD / PEALD / Plasma science for semiconductor manufacturing reportThermal ALD, plasma-assisted ALD, sequential half-cycle, purge, and throughput evidence ownership. Rights: link-only; U.S. government and report notices apply.ALD / PEALD / Atomic layer deposition and atomic layer etching general principlesSelf-limited surface-reaction, thermal activation, PEALD, and conformality evidence ownership. Rights: link-only; repository and journal notices apply.LPCVD / furnace / General Relationship for the Thermal Oxidation of SiliconThermal-oxidation transport, interface-reaction, and thickness-evolution evidence categories. Rights: link-only; DOI resolver and publisher notices apply.LPCVD / furnace / Silicon Oxidation Studies: Some Aspects of the Initial Oxidation RegimeInitial oxidation and thin-growth-regime evidence ownership. Rights: link-only; DOI resolver and publisher notices apply.Epitaxy / A Stagnant Layer Model for the Epitaxial Growth of Silicon from Silane in a Horizontal ReactorSilicon epitaxy transport and reactor-loading evidence categories. Rights: link-only; DOI resolver and publisher notices apply.Epitaxy / Process Steps for High Quality Si-Based Epitaxial Growth at Low Temperature via RPCVDSilicon and SiGe interface-preparation and loading evidence categories. Rights: link-only; DOI resolver and publisher notices apply.Selective deposition / Reaction Mechanism of Area-Selective Atomic Layer Deposition for Al2O3 NanopatternsSAM blocking, precursor interaction, and unintended nucleation evidence categories. Rights: link-only; DOI resolver and publisher notices apply.Selective deposition / Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type CycleSmall-molecule inhibitor, chemoselective adsorption, and inhibitor-redose cycle evidence categories. Rights: link-only; DOI resolver and publisher notices apply.ECD / gap-fill / Damascene copper electroplating for chip interconnectionsDamascene copper electroplating, feature-fill, void or seam, and planarization context categories. Rights: link-only; DOI resolver and publisher notices apply.ECD / gap-fill / Superconformal Electrodeposition of Copper in 500-90 nm FeaturesFeature-scale superconformal copper fill and profile-evolution evidence categories. Rights: link-only; DOI resolver and publisher notices apply.
Public execution boundary
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